• Proceedings of the Korean Ceranic Society Conference
• /
• 2002.10a
• /
• pp.23.1-23
• /
• 2002

• Proceedings of the Korean Ceranic Society Conference
• /
• 2003.10a
• /
• pp.215.1-215
• /
• 2003

• Journal of the Korean Ceramic Society
• /
• v.37 no.1
• /
• pp.96-101
• /
• 2000

Comparative studies on microstructure, and mechanical and anti-oxidation properties between TiN and Ti-Si-N films were performed. The Ti-Si-N films were deposited on high-speed steel and silicon wafer substrates by plasma-assisted chemcial vapor deposition(PACVD) technique. The Si addition to TiN film caused to change the microstructure such as grain size refinement, randomly multi-oriented microstructure, and nano-sized codeposition of silicon nitride in the TiN matrix. The Ti-Si-N film, contains Si content of ∼7 at.%, showed the micro-hardness value of ∼3400 HK, which was higher than the pure TiN film whose hardness was ∼1500HK. The Ti-Si(7 at.%)-N film also showed much improved anti-oxidation properties compared with those of the pure TiN film. These properties were also related to the microstructure of Ti-Si(7 at.%)-N film was formed and retarded further oxidation of the nitridelayer. These properties were also related to the microstructure of Ti-Si(7 at.%)-N film which was characterized by nano-sized precipitates of silicon nitride phase in the TiN matrix and randomly oriented grains.

• Journal of the Korean Ceramic Society
• /
• v.36 no.2
• /
• pp.178-185
• /
• 1999

For the process control of silicon nitride gelcasting, the composition effect of acryamide system on the viscosity of slip and mechanical property of gelcast green body were investigated. The slip was prepared by ball milling of silicon nitride suspension prepared with acrylamide monomer and polyelectrolyte dispersant after premixing them by attritor. The slip mixed with initiator was vacuum deaired and cast into molds, and then polymerized. The consolidated green body was obtained by drying the gelated slip. The viscosity measument and the diametral compression test was done to evaluate the rheological behaviro of slip and mechanical property of gelcast body, respectively. Experimental results showed that the high solid loading of silicon nitride slip was obtained up to 46 vol% with a low viscosity. The mechanical property of gelcast body mainly increased with increasing the concentration of monomer. The gelcast body was machinable above the ∼3 MPa of tensile strength. The relative density of pressured-sintered body was 98.5% at 1760$^{\circ}C$, 3 h.

• The Korean Journal of Ceramics
• /
• v.4 no.3
• /
• pp.222-226
• /
• 1998

$Cu_3N$ film deposited on silicon oxide substrate by r.f. reactive sputtering technique. Synthesis and properties of copper nitride film were investigated for its possible application to Cu metallization as adhesive interlayer between copper and $SiO_2. Cu_3N$ film was synthesized at the substrate temperature ranging from $100^{\circ}C$ to $200^{\circ}C$ and at nitrogen gas ratio above $X_{N2}=0.4. Cu_3N, CuN_x$, and FGM-structured $Cu/CuN_x$ films prepared in this work passed Scotch-tape test and showed improved adhesion property to silicon oxide substrate compared with Cu film. Electrical resistivity of copper nitride film had a dependency on its lattice constant and was ranged from 10-7 to 10-1 $\Omega$cm. Copper nitride film was, however, unstable when it was annealed at the temperature above $400^{\circ}C$.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 1992.10a
• /
• pp.136-144
• /
• 1992

Recently, Silicon Nitrde ceramic is regarded as the representative engineering ceramic with the excellent mechanical properties and many functions for mechanical components and parts among various kinds of ceramics in the mechanical industry. But, during the manufacturing of engineering ceramics, there is many volumetric shrinkage coupled with a distortion of the parts which is produced. Due to the requirement for high accuracy of size, form, and surface finish of the components, machining is needed surely. Nowdays, grinding with a resin bond type diamond wheels has been generally applied to machining of the engineering ceramics in the whole world because that it can be conveniently proceeded for workers to dress of tool and made with high reliability in producing factories among many bond type super-abrasive wheels yet. It is important task for attaining prescribed mechanical components with high reliability to observe the grinding mechanism of ceramics as like generation of cracks and chipping of material during process. Because they considerably effects on the strength characteristic of machined mechanical components. In this study, various surface grinding experiments using resin bond type diamond wheels are carried out for Silicon Nitride ceramic. Grinding mechanism of ceramics is observed experimentally and the relationship with various conditions is also attained. Form this experimental study, some useful machining data and information to determine proper machining condition for grinding of Silicon Nitride ceramic is obtained.

• Ceramist
• /
• v.9 no.6
• /
• pp.7-11
• /
• 2006

The status of structural ceramics in Japan is presented. Use of ceramics for structural components had been limited due to their brittleness, and the successful application was wear resistant parts such as thread guides and ceramic cutting tools up to around 1980. Since then, considerable work has been done for applying ceramics to mechanical parts, and automotive components made of silicon nitride were developed and commercialized in 1980s. Unfortunately, the application of silicon nitride to automotive engines is not so popular in these days. Instead, a variety of structural ceramics such as alumina, silicon carbide and zirconia have recently extended the market, and the expanded application includes vacuum process parts for manufacturing semiconductor and liquid crystal devices, refractory tubes for casting aluminum alloy, and dies for optical lens forming. In addition, cordierite honeycombs and diesel particulate filters are widely used in automobiles. In the present review, the recent application of structural ceramics to automobiles and industries in Japan is summarized.

• Journal of the Korean Ceramic Society
• /
• v.48 no.5
• /
• pp.384-389
• /
• 2011

Gas pressure sintering (GPS) of reaction bonded silicon nitride (RBSN) was performed using $Lu_2O_3-SiO_2$ additive and the properties were compared with those of specimens prepared using high purity $Si_3N_4$ powder. The relative density of RBSN and compacted $Si_3N_4$ powder were 68.9 and 47.1%, and total linear shrinkage after sintering at $1900^{\circ}C$ were 14.8 and 42.9%, respectively. High nitrogen partial pressure (5MPa) was required during sintering at $1900^{\circ}C$ in order to prevent the decomposition of the nitride and to promote the formation of SiC. The relative density and 4-point bending strength of RBSN and $Si_3N_4$ powder compact were 97.7%, 954MPa and 98.2%, 792MPa, respectively, after sintering at $1900^{\circ}C$. The sintered RBSN also showed high fracture toughness of 9.2MPam$^{1/2}$.

• Journal of the Korean Ceramic Society
• /
• v.25 no.4
• /
• pp.380-384
• /
• 1988

This investigation includes nitridation phenomena of silicon powder compacts in air. Nitridation reaction condition has been provided with using silicon nitride bed and active carbon additive. Reaction products are Oxynitride, $\alpha$-Si3N4, and $\beta$-Si3N4, Oxynitride(Si2N2O) phase in formed at outer surface layer ofsilicon powder compacts. $\alpha$-Si3N4, and $\beta$-Si3N4 are formed at inner region of powder compacts. Microstructural observation indicates that nitridation mechanism in this work is the same as conventional nitridation mechanism nitrogen gas.

• Journal of the Korean Ceramic Society
• /
• v.36 no.2
• /
• pp.220-224
• /
• 1999

For the process control of silicon nitride gelcasting, the effect of MeOH on the apparent gel induction time of slip, drying rate, and mechanical property of gelcast body were investigated. The apparent gel induction time showed maximum at 10~20 vol% MeOH and the drying rate of gelcast body increased in the ranged of 25~40%. The gelcast body was still machinable in the 40% of MeOH, though the mechanical property and relative density slightly decreased with increasing the amount of MeOH.