Dry Etching of Pt/RuO$_{2}$ for Pb(Zr,Ti)O$_{3}$ by High Density Plasma
(고밀도 플라즈마를 이용한 PZT용 Pt/RuO$_{2}$ 이중박막의 식각)
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- Journal of the Institute of Electronics Engineers of Korea SD
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- v.37 no.3
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- pp.1-5
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- 2000