• Title/Summary/Keyword: SiInZnO

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Effect of Zirconium Dioxide in BaO-ZnO-B2O3-SiO2 system on Optical Properties of Color Conversion Glasses

  • Jeong, HyeonJin;Jeon, Dae-Woo;Kim, Jin-Ho;Lee, Young Jin;Lee, MiJai;Hwang, Jonghee;Lee, Jungsoo;Yang, Yunsung;Youk, Sookyung;Park, Tae-Ho;Shin, Dongwook
    • Journal of the Korean Ceramic Society
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    • v.53 no.2
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    • pp.258-262
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    • 2016
  • The effect of zirconium dioxide ($ZrO_2$) on the properties of color conversion glasses was examined in the $BaO-ZnO-B_2O_3-SiO_2$ system. The difference in refractive index between glass and phosphor affect the optical properties of the color conversion glass because of light scattering. Reducing the difference in refractive index is a method to improve the luminous efficacy of color conversion glasses. As a reference, a type of glass that contains 25 mol% of each component was used. To increase the refractive index of the glass samples, the BaO content was increased from 25 to 40 mol%, and $ZrO_2$ was added at levels of 1, 3, and 5 mol%. Color conversion glasses were prepared by sintering a mixture of glass and 5 wt% $YAG:Ce^{3+}$ phosphor. As a result, the refractive index of the glass was found to be dependent on the BaO and $ZrO_2$ contents in the BaO-ZnO-$B_2O_3-SiO_2$ system. As the BaO and $ZrO_2$ contents were increased, the luminous efficacy of the color conversion glass was improved because the refractive index difference between the glass and the $YAG:Ce^{3+}$ phosphor decreased.

Electrical and Optical Properties of the IZTO Thin Film Deposited on PET Substrates with SiO2 Buffer Layer (SiO2 버퍼층을 갖는 PET 기판위에 증착한 IZTO 박막의 전기적 및 광학적 특성)

  • Park, Jong-Chan;Joung, Yang-Hee;Kang, Seong-Jun
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.21 no.3
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    • pp.578-584
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    • 2017
  • $SiO_2$ buffer layer (100 nm) has been deposited on PET substrate by electron beam evaporation. And then, IZTO (In-Zn-Sn-O) thin film has been deposited on $SiO_2$/PET substrate with different RF power of 30 to 60 W, working pressure, 1 to 7 mTorr, by RF magnetron sputtering. Structural, electrical and optical properties of IZTO thin film have been analyzed with various RF powers and working pressures. IZTO thin film deposited on the process condition of 50 W and 3 mTorr exhibited the best characteristics, where figure of merit was $4.53{\times}10^{-3}{\Omega}^{-1}$, resistivity, $4.42{\times}10^{-4}{\Omega}-cm$, sheet resistance, $27.63{\Omega}/sq.$, average transmittance (400-800 nm), 81.24%. As a result of AFM, all the IZTO thin film has no defects such as pinhole and crack, and RMS surface roughness was 1.147 nm. Due to these characteristics, IZTO thin film deposited on $SiO_2$/PET structure was found to be a very compatible material that can be applied to the next generation flexible display device.

Temperature Dependence of SiInZnO Thin Film Transistor Fabricated by Solution Process

  • Lee, Sang Yeol;Kang, Taehyun;Han, Sang Min;Lee, Young Seon;Choi, Jun Young
    • Transactions on Electrical and Electronic Materials
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    • v.16 no.1
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    • pp.46-48
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    • 2015
  • Thin film transistor (TFT) with silicon indium zinc oxide (SIZO) was fabricated by solution process, and the effect of annealling temperature on the electrical performance has been explored. The performance of SIZO TFT exhibited saturation mobility of $1.37cm^2$/Vs, a threshold voltage of -7.2 V, and an on-off ratio of $1.1{\times}10^5$.

Investigation on Electrical Property of Amorphous Oxide SiZnSnO Semiconducting Thin Films (비정질 산화물 SiZnSnO 반도체 박막의 전기적 특성 분석)

  • Byun, Jae Min;Lee, Sang Yeol
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.32 no.4
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    • pp.272-275
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    • 2019
  • We investigated the electrical characteristics of amorphous silicon-zinc-tin-oxide (a-SZTO) thin films deposited by RF-magnetron sputtering at room temperature depending on the deposition time. We fabricated a thin film transistor (TFT) with a bottom gate structure and various channel thicknesses. With increasing channel thickness, the threshold voltage shifted negatively from -0.44 V to -2.18 V, the on current ($I_{on}$) and field effect mobility (${\mu}_{FE}$) increased because of increasing carrier concentration. The a-SZTO film was fabricated and analyzed in terms of the contact resistance and channel resistance. In this study, the transmission line method (TLM) was adopted and investigated. With increasing channel thickness, the contact resistance and sheet resistance both decreased.

ZnO Nanowires and P3HT Polymer Composite TFT Device (ZnO 나노선과 P3HT 폴리머를 이용한 유/무기 복합체 TFT 소자)

  • Moon, Kyeong-Ju;Choi, Ji-Hyuk;Kar, Jyoti Prakash;Myoung, Jae-Min
    • Korean Journal of Materials Research
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    • v.19 no.1
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    • pp.33-36
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    • 2009
  • Inorganic-organic composite thin-film-transistors (TFTs) of ZnO nanowire/Poly(3-hexylthiophene) (P3HT) were investigated by changing the nanowire densities inside the composites. Crystalline ZnO nanowires were synthesized via an aqueous solution method at a low temperature, and the nanowire densities inside the composites were controlled by changing the ultrasonifiaction time. The channel layers were prepared with composites by spin-coating at 2000 rpm, which was followed by annealing in a vacuum at $100^{\circ}C$ for 10 hours. Au/inorganic-organic composite layer/$SiO_2$ structures were fabricated and the mobility, $I_{on}/I_{off}$ ratio, and threshold voltage were then measured to analyze the electrical characteristics of the channel layer. Compared with a P3HT TFT, the electrical properties of TFT were found to be improved after increasing the nanowire density inside the composites. The mobility of the P3HT TFT was approximately $10^{-4}cm^2/V{\cdot}s$. However, the mobility of the ZnO nanowire/P3HT composite TFT was increased by two orders compared to that of the P3HT TFT. In terms of the $I_{on}/I_{off}$ ratio, the composite device showed a two-fold increase compared to that of the P3HT TFT.

Effects of Ta addition in Co-sputtering Process for Ta-doped Indium Tin Oxide Thin Film Transistors

  • Park, Si-Nae;Son, Dae-Ho;Kim, Dae-Hwan;Gang, Jin-Gyu
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.334-334
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    • 2012
  • Transparent oxide semiconductors have recently attracted much attention as channel layer materials due to advantageous electrical and optical characteristics such as high mobility, high stability, and good transparency. In addition, transparent oxide semiconductor can be fabricated at low temperature with a low production cost and it permits highly uniform devices such as large area displays. A variety of thin film transistors (TFTs) have been studied including ZnO, InZnO, and InGaZnO as the channel layer. Recently, there are many studies for substitution of Ga in InGaZnO TFTs due to their problem, such as stability of devices. In this work, new quaternary compound materials, tantalum-indium-tin oxide (TaInSnO) thin films were fabricated by using co-sputtering and used for the active channel layer in thin film transistors (TFTs). We deposited TaInSnO films in a mixed gas (O2+Ar) atmosphere by co-sputtering from Ta and ITO targets, respectively. The electric characteristics of TaInSnO TFTs and thin films were investigated according to the RF power applied to the $Ta_2O_5$ target. The addition of Ta elements could suppress the formation of oxygen vacancies because of the stronger oxidation tendency of Ta relative to that of In or Sn. Therefore the free carrier density decreased with increasing RF power of $Ta_2O_5$ in TaInSnO thin film. The optimized characteristics of TaInSnO TFT showed an on/off current ratio of $1.4{\times}108$, a threshold voltage of 2.91 V, a field-effect mobility of 2.37 cm2/Vs, and a subthreshold swing of 0.48 V/dec.

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Simple Route to High-performance and Solution-processed ZnO Thin Film Transistors Using Alkali Metal Doping

  • Kim, Yeon-Sang;Park, Si-Yun;Kim, Gyeong-Jun;Im, Geon-Hui
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.187-187
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    • 2012
  • Solution-processed metal-alloy oxides such as indium zinc oxide (IZO), indium gallium zinc oxide (IGZO) has been extensively researched due to their high electron mobility, environmental stability, optical transparency, and solution-processibility. In spite of their excellent material properties, however, there remains a challenging problem for utilizing IZO or IGZO in electronic devices: the supply shortage of indium (In). The cost of indium is high, what is more, indium is becoming more expensive and scarce and thus strategically important. Therefore, developing an alternative route to improve carrier mobility of solution-processable ZnO is critical and essential. Here, we introduce a simple route to achieve high-performance and low-temperature solution-processed ZnO thin film transistors (TFTs) by employing alkali-metal doping such as Li, Na, K or Rb. Li-doped ZnO TFTs exhibited excellent device performance with a field-effect mobility of $7.3cm^2{\cdot}V-1{\cdot}s-1$ and an on/off current ratio of more than 107. Also, in case of higher drain voltage operation (VD=60V), the field effect mobility increased up to $11.45cm^2{\cdot}V-1{\cdot}s-1$. These all alkali metal doped ZnO TFTs were fabricated at maximum process temperature as low as $300^{\circ}C$. Moreover, low-voltage operating ZnO TFTs was fabricated with the ion gel gate dielectrics. The ultra high capacitance of the ion gel gate dielectrics allowed high on-current operation at low voltage. These devices also showed excellent operational stability.

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Zn-Sn-O비정질 산화물 반도체 박막의 Ga 첨가 영향

  • Kim, Hye-Ri;Song, Pung-Geun;Kim, Dong-Ho
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2011.05a
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    • pp.61.2-61.2
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    • 2011
  • 넓은 밴드갭을 가지고 있어 가시광에서 투명하며 높은 이동도를 가진 산화물 반도체는 기존의 Si 기반 TFT 소자를 대체할 차세대 디스플레이의 핵심 소재기술로 관심이 높아지고 있다. 그러나 대표적인 산화물 반도체인 In-Ga-Zn-O (IGZO)에 포함된 인듐의 수요 증가에 따른 가격 급등 문제로 이를 대체할 수 있는 새로운 산화물 반도체 재료에 대한 연구의 필요성이 대두되고 있다. 이에 비교적 저가의 물질로 구성된 Zn-Sn-O계 산화물 소재에 대한 연구가 진행된 바 있으나, 높은 수준의 캐리어 농도를 가지고 있어 TFT 채널용 반도체소재로 적용되기 위해서는 이를 $10^{17}\;cm^{-3}$ 이하로 조절할 수 있는 기술개발이 요구된다. 본 연구는 마그네트론 스퍼터링법을 이용하여 증착된 Ga-Zn-Sn-O (GZTO) 박막의 갈륨 첨가에 따른 특성변화를 조사하였다. GZO ($Ga_2O_3$ 5wt%)와 $SnO_2$ 타켓의 인가 파워를 고정한 상태에서 $Ga_2O_3$ 타켓의 인가 파워를 0~100W로 조절하여 박막 내 Ga 함량을 증가시켰다. 제조된 모든 GZTO 박막은 Ga함량에 관계없이 비정질 구조를 가지며 가시광 영역에서 약 78%의 우수한 투과율을 나타낸다. Ga 함량에 따라 박막의 구조적, 광학적 특성은 크게 변하지 않지만 전기적 특성은 뚜렷한 변화를 나타냈다. $Ga_2O_3$ 파워가 증가할수록 박막 내 캐리어 농도와 이동도의 감소로 비저항이 크게 증가하는데 특히 캐리어 농도는 $Ga_2O_3$ 파워가 0에서 100W로 증가할 때 $2{\times}10^{18}$에서 $8{\times}10^{14}\;cm^{-3}$으로 감소하였다. 이는 Ga-O의 화학적 결합 에너지가 다른 원소들(Zn 또는 In)에 비해 커서 박막 내 산소공공의 감소가 야기되었기 때문이다. 이러한 전기물성의 변화를 이해하기 위해 XPS 분석을 수행하였다. 제조된 GZTO 박막은 $Ga_2O_3$ 파워가 증가함에 따라 O 1s peak에서 산소공공과 관련된 530.8 eV peak의 intensity가 감소한다. 따라서 Ga을 첨가에 따른 캐리어 농도의 감소는 산소공공의 발생억제로 기인한 것으로 판단되며, 본 연구결과는 ZTO계 비정질 산화물 반도체의 활용가능성을 제시하였다.

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Selective Surface Oxidation of 590MPa TRIP Steel and Its Effect on Hot-Dip Galvanizability (590 MPa TRIP강의 선택적 표면산화 거동과 표면 산화막이 도금특성에 미치는 영향)

  • Kim, Seong-Hwan;Im, Jun-Mo;Huh, Joo-Youl;Lee, Suk-Kyu;Park, Rho-Bum;Kim, Jong-Sang
    • Korean Journal of Metals and Materials
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    • v.49 no.4
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    • pp.281-290
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    • 2011
  • In order to gain better understanding of the selective surface oxidation and its influence on the galvanizability of a transformation-induced plasticity (TRIP) assisted steel containing 1.5 wt.% Si and 1.6 wt.% Mn, a model experiment has been carried out by depositing Si and Mn (each with a nominal thickness of 10 nm) in either monolayers or bilayers on a low-alloy interstitial-free (IF) steel sheet. After intercritical annealing at $800^{\circ}C$ in a $N_2$ ambient with a dew point of $-40^{\circ}C$, the surface scale formed on 590 MPa TRIP steel exhibited a microstructure similar to that of the scale formed on the Mn/Si bilayer-coated IF steel, consisting of $Mn_{2}SiO_{4}$ particles embedded in an amorphous $SiO_{2}$ film. The present study results indicated that, during the intercritical annealing process of 590 MPa TRIP steel, surface segregation of Si occurs first to form an amorphous $SiO_{2}$ film, which in turn accelerates the out-diffusion of Mn to form more stable Mn-Si oxide particles on the steel surface. During hot-dip galvanizing, particulate $Fe_{3}O_{4}$, MnO, and Si-Mn oxides were reduced more readily by Al in a Zn bath than the amorphous $SiO_{2}$ film. Therefore, in order to improve the galvanizability of 590 TRIP steel, it is most desirable to minimize the surface segregation of Si during the intercritical annealing process.

Effect of Heat Treatment on Microstructure and Mechanical Properties of Al-Zn-Mg-Cu-Si Sintered Alloys with and Without High-energy Ball Milling (Al-Zn-Mg-Cu-Si 소결합금의 미세조직과 기계적 특성에 미치는 열처리의 영향)

  • Junho Lee;Seonghyun Park;Sang-Hwa Lee;Seung Bae Son;Seok-Jae Lee;Jae-Gil Jung
    • Journal of Powder Materials
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    • v.30 no.6
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    • pp.470-477
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    • 2023
  • The effects of annealing on the microstructure and mechanical properties of Al-Zn-Mg-Cu-Si alloys fabricated by high-energy ball milling (HEBM) and spark plasma sintering (SPS) were investigated. The HEBM-free sintered alloy primarily contained Mg2Si, Q-AlCuMgSi, and Si phases. Meanwhile, the HEBM-sintered alloy contains Mg-free Si and θ-Al2Cu phases due to the formation of MgO, which causes Mg depletion in the Al matrix. Annealing without and with HEBM at 500℃ causes partial dissolution and coarsening of the Q-AlCuMgSi and Mg2Si phases in the alloy and dissolution of the θ-Al2Cu phase in the alloy, respectively. In both alloys, a thermally stable α-AlFeSi phase was formed after long-term heat treatment. The grain size of the sintered alloys with and without HEBM increased from 0.5 to 1.0 ㎛ and from 2.9 to 6.3 ㎛, respectively. The hardness of the sintered alloy increases after annealing for 1 h but decreases significantly after 24 h of annealing. Extending the annealing time to 168 h improved the hardness of the alloy without HEBM but had little effect on the alloy with HEBM. The relationship between the microstructural factors and the hardness of the sintered and annealed alloys is discussed.