• 한국전기전자재료학회논문지
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• 제16권1호
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• pp.65-69
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• 2003

ZnO-Si-ZnO multi-layer thin films have been deposited by pulsed laser deposition (PLD). And then, the films have been annealed at 300$^{\circ}C$ in oxygen ambient pressure. Peak positions of ultraviolet (UV) and visible region were changed by addition of Si layer. Mobility of the films was improved slightly than ZnO thin film without Si layer. The structural property changed by inserting intermediate Si layer in ZnO thin film. The optical properties and structural properties of ZnO-Si-ZnO multi-layer thin films were characterized by PL(Photoluminescence) and XRB(X-ray diffraction) method, respectively. Electrical properties were measured by van der Pauw Hall measurements

• 반도체디스플레이기술학회지
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• 제11권2호
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• pp.13-16
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• 2012

Zinc oxide (ZnO) films were deposited by an RF magnetron sputtering system with the RF power of 200W and 300W and flow rate of oxygen gases of 20 and 30 sccm, in order to research the growth of ZnO on carbon doped silicon oxide (SiOC) thin film. The reflectance of SiOC film on Si film deposited by the sputtering decreased with increasing the oxygen flow rate in the range of long wavelength. In comparison between ZnO/Si and ZnO/SiOC/Si thin film, the reflectance of ZnO/SiOC/Si film was inversed that of ZnO/Si film in the rage of 200~1000 nm. The transmittance of ZnO film increased with increasing the oxygen gas flow rate because of the transition from conduction band to oxygen interstitial band due to the oxygen interstitial (Oi) sites. The low reflectance and the high transmittance of ZnO film was suitable properties to use for the front electrode in the display or solar cell.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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• pp.1057-1059
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• 2002

ZnO-Si-ZnO multi-layer thin films have been deposited by pulsed laser deposition (PLD). And then, the films have been annealed at $300^{\circ}C$ in oxygen ambient pressure. Electrical properties of the films were improved slightly than ZnO thin film without Si layer. Also, the optical and structural properties changed by Si layer in ZnO thin film. The optical and structural properties of Si-doped ZnO thin films were characterized by PL(Photoluminescence) and XRD(X-ray diffraction method) respectively. Electrical properties were measured by van der Pauw Hall measurements.

• 한국전기전자재료학회논문지
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• 제25권2호
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• pp.91-95
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• 2012

ZnO thin films were deposited on p-type 4H-SiC substrate by pulsed laser deposition. ZnO nanowires were formed on p-type 4H-SiC substrate by furnace. Ti/Au electrodes were deposited on ZnO thin film/SiC and ZnO nanowire/SiC structures, respectively. Structural and crystallographical properties of the fabricated ZnO thin film/SiC and ZnO nanowire/SiC structures were investigated by field emission scanning electron microscope and X-ray diffraction. In this work, resistance and sensitivity of ZnO thin film/SiC gas sensor and ZnO nanowire/SiC gas sensor were measured at $300^{\circ}C$ with various CO gas concentrations (0%, 90%, 70%, and 50%). Resistance of gas sensor decreases at CO gas atmosphere. Sensitivity of ZnO nanowire/SiC gas sensor is twice as big as sensitivity of ZnO thin film/SiC gas sensor.

• 한국진공학회지
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• 제20권5호
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• pp.381-386
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• 2011

실리콘(silicon) 기판위에 전기화학증착법(electrochemical deposition)을 이용하여 성장된 ZnO (zinc oxide) 나노로드 표면에 $SiO_2$ (silicon dioxide)를 전자빔증발법(e-beam evaporation)을 이용하여 증착하였으며, 이는 자연적으로 경사입사(oblique angle) 증착이 이루어져 $SiO_2$ 나노로드가 자발 형성되어, ZnO/$SiO_2$ 가지형 나노계층구조형태가 제작될 수 있음을 확인하였다. 실험을 위해서 $SiO_2$ 증착률을 0.5 nm/s로 고정하고 $SiO_2$ 증착시간을 변화시켰으며, 각각 나노구조의 형태와 광학적 특성을 분석하였다. 실리콘 기판위에 전기화학증착법으로 성장된 ZnO 나노로드는 수직으로 정렬된 1차원의 나노구조의 기하학적 형태를 갖고 있어, 입사되는 빛의 파장이 300 nm에서 535 nm인 영역에서 10% 미만의 반사방지(antireflection) 특성을 보였으며, $SiO_2$ 증착시간이 100 s일 때의 ZnO/$SiO_2$ 가지형 나노계층구조에서는 점차적 변화를 갖는 유효 굴절률 분포로 인해 개선된 반사 방지 특성을 확인하였다. 이러한 반사방지 특성과 branch 계층형태의 나노구조형태는 광전소자 및 태양광 소자 응용에 있어서 유용한 소재로 사용될 수 있다.

• Bulletin of the Korean Chemical Society
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• 제33권11호
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• pp.3767-3771
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• 2012

In this study, we investigate the potential use of $TiO_2@SiO_2$ and $ZnO@SiO_2$ core/shell nanoparticles (NPs) as effective UV shielding agent. In the typical synthesis, $SiO_2$ was coated over different types of $TiO_2$ (anatase and rutile) and ZnO by sol-gel method. The synthesized $TiO_2@SiO_2$ and $ZnO@SiO_2$ NPs were characterized by UV-Vis, XRD, SEM and TEM. The UV-vis absorbance and transmittance spectra of core@shell NPs showed an efficient blocking effect in the UV region and more than 90% transmittance in the visible region. XRD and SAED studies confirmed the formation of amorphous $SiO_2$ coated over the $TiO_2$ and ZnO NPs. The FESEM and TEM images shows that coating of $SiO_2$ over the surface of anatase, rutile $TiO_2$ and ZnO NPs resulted in the increase in particle size by ~30 nm. In order to study the UV light shielding capability of the samples, photocatalytic degradation of methylene blue dye on $TiO_2@SiO_2$ and $ZnO@SiO_2$ NPs was performed. Photocatalytic activity for both types of $TiO_2$ NPs was partially suppressed. In comparison, the photocatalytic activity of ZnO almost vanished after the $SiO_2$ coating.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제51권9호
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• pp.417-422
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• 2002

ZnO thin films were deposited on various substrates, such as Si-(111), SiO$_2$(5000 $\AA$ by thermal CVD)/Si-(100), and SiO$_2$(2000 $\AA$ by RF sputtering)/Si-(100). The (002)-orientation, surface morphology and roughness, and electrical resistivity of deposited films were measured and compared in terms of substrate. Surface acoustic wave(SAW) filters with a multilayered configuration of IDT/ZnO/SiO$_2$/Si were also fabricated and the IDT was obtained using a lift-off method. From the frequency-response characteristics of fabricated devices, the insertion loss and side-lobe rejection were estimated. The experimental results showed that the (002)-oriented growth nature of ZnO films, which played a crucial role of determining the characteristic of SAW device, was strong1y dependent upon the SiO$_2$buffer.

• 대한화학회지
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• 제61권4호
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• pp.179-184
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• 2017

본 논문은 $ZnO/SiO_2$를 나노 복합체(nano-compositions : NCs) 크기로 상온에서 화학적 방법으로 합성하였다. ZnO는 초음파 합성법으로 제조를 하였으며, $SiO_2$는 침전 방법을 이용하여 제조 하였다. $ZnO/SiO_2$의 구조적인 특성을 파악하기 위해 X-선회절 분석기(XRD), 주사전자현미경(FE-SEM), 푸리에 변환 적외선 스펙트럼(FT-IR)를 이용하여 $ZnO/SiO_2$가 형성되는 것을 확인 할 수 있었다. 광촉매적 특성을 판단하기 위해 $SiO_2$의 농도별로 제조된 $ZnO/SiO_2$를 Rhodamine-B 시약을 이용하여 광촉매 특성을 평가하였다. 그 결과 $SiO_2$의 농도가 증가할수록 광촉매 특성이 증가하는 것을 확인하였다. 그리고 $ZnO/SiO_2$를 가지고 항균성 실험을 진행하였다. 실험에 사용된 균(cell)은 대장균(E. coli)과 황색포도상구균(S. aureus)이다. 표면의 $SiO_2$층에 따른 항균 성실험을 진행한 결과 $SiO_2$ 층이 증가 할수록 항균 효과가 증가하는 것을 확인 할 수 있다.

• Korean Chemical Engineering Research
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• 제56권4호
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• pp.585-591
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• 2018

미세액적 유동반응기 공정에서 제조된 나노구조 $SiO_2:Zn$ 원환형 입자의 특성을 밴드갭 에너지와 표면 반응성의 관점에서 고찰하였다. $SiO_2:Zn$ 원환형 입자를 단일 공정에서 연속적이며 합리적인 생산 효율로 첨가제인 THAM (tris(hydroxymethyl)-aminomethane)과 도핑되는 $Zn^{2+}$ 이온의 농도 변화에 따라 성공적으로 제조할 수 있었다. 그리고 $Zn^{2+}$ 이온의 도핑은 $Si^{4+}$ 이온의 conduction band 보다 에너지 레벨이 낮은 $Zn^{2+}$ 이온의 acceptor level을 형성함으로써 $SiO_2:Zn$ 원환형 입자의 밴드갭 에너지를 줄일 수 있었다. 또한, 입자의 원환형 구조는 $SiO_2:Zn$ 입자의 밴드갭 에너지를 감소시키는데 기여하였다. 따라서 $Zn^{2+}$ 이온이 도핑된 $SiO_2:Zn$ 원환형 입자는 표면에 SiO-H의 형성과 산소 결함의 생성으로 표면 반응성을 증대시킬 것으로 사료되었다.

• 한국전기전자재료학회논문지
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• 제22권5호
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• pp.415-418
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• 2009

$Zn_{2}SiO_{4}$:Mn green phosphors doped with Mg for PDP were synthesized by solid state reaction method. $Zn_{2}SiO_{4}$:Mn, Mg phosphors with increasing Mg concentration were changed from Rhombohedral to Orthorhombic structure. Photoluminescence intensity of $Zn_{2}SiO_{4}$:Mn phosphors doped with Mg 0.5 mol was definitely higher than that of Mg non-doped sample. The enhanced luminescence with doping Mg in the $Zn_{2}SiO_{4}$:Mn phosphors was interpreted by the increase of energy transfer from host to Mn ions with substitution Mg for Zn in the $Zn_{2}SiO_{4}$:Mn host.