• Title/Summary/Keyword: SiC Paper

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Effect of First-Stage Growth Manipulation and Polarity of SiC Substrates on AlN Epilayers Grown Using Plasma-Assisted Molecular Beam Epitaxy

  • Le, Duy Duc;Kim, Dong Yeob;Hong, Soon-Ku
    • Korean Journal of Materials Research
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    • v.24 no.5
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    • pp.266-270
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    • 2014
  • Aluminum nitride(AlN) films were grown on the C-face and on the Si-face of (0001) silicon carbide(SiC) substrates using plasma-assisted molecular-beam epitaxy(PA-MBE). This study was focused on first-stage growth manipulation prior to the start of AlN growth. Al pre-exposure, N-plasma pre-exposure, and simultaneous exposure(Al and N-plasma) procedures were used in the investigation. In addition, substrate polarity and, first-stage growth manipulation strongly affected the growth and properties of the AlN films. Al pre-exposure on the C-face and on the Si-face of SiC substrates prior to initiation of the AlN growth resulted in the formation of hexagonal hillocks on the surface. However, crack formation was observed on the C-face of SiC substrates without Al pre-exposure. X-ray rocking-curve measurements revealed that the AlN epilayers grown on the Si-face of the SiC showed relatively lower tilt and twist mosaic than did the epilayers grown on the C-face of the SiC. The results from the investigations reported in this paper indicate that the growth conditions on the Si-face of the SiC without Al pre-exposure was highly preferred to obtain the overall high-quality AlN epilayers formed using PA-MBE.

Local Oxidation of 4H-SiC using an Atomic Force Microscopy (원자현미경을 이용한 탄화규소 (SiC)의 국소산화)

  • Jo, Yeong-Deuk;Bahng, Wook;Kim, Sang-Cheol;Kim, Nam-Kyun;Koo, Sang-Mo
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.22 no.8
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    • pp.632-636
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    • 2009
  • The local oxidation using an atomic force microscopy (AFM) is useful for Si-based fabrication of nanoscale structures and devices. SiC is a wide band-gap material that has advantages such as high-power, high-temperature and high-frequency in applications, and among several SiC polytypes, 4H-SiC is the most attractive polytype due to the high electron mobility. However, the AFM local oxidation of 4H-SiC for fabrication is still difficult, mainly due to the physical hardness and chemical inactivity of SiC. In this paper, we investigated the local oxidation of 4H-SiC surface using an AFM. We fabricated oxide patterns using a contact mode AFM with a Pt/Ir-coated Si tip (N-type, 0.01-0.025 ${\Omega}cm$) at room temperature, and the relative humidity ranged from 40 to 50 %. The height of the fabricated oxide pattern (1-3 nm) on SiC is similar to that of typically obtained on Si ($10^{15}^{\sim}10^{17}$ $cm^{-3}$). We perform the 2-D simulation to further analyze the electric field between the tip and the surface. We demonstrated that a specific electric field (4 ${\times}$ $10^7\;V/m$) and a doping concentration ($^{\sim}10^{17}$ $cm^{-3}$) is sufficient to switch on/off the growth of the local oxide on SiC.

Synthesis of β-SiC Powder using a Recycled Graphite Block as a Source (그라파이트 블록을 원료로써 재활용한 β-SiC 분말 합성)

  • Nguyen, Minh Dat;Bang, Jung Won;Kim, Soo-Ryoung;Kim, Younghee;Jung, Eunjin;Hwang, Kyu Hong;Kwon, Woo-Teck
    • Resources Recycling
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    • v.26 no.1
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    • pp.16-21
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    • 2017
  • This paper relates to the synthesis of a source powder for SiC crystal growth. ${\beta}-SiC$ powders are synthesized at high temperatures (>$1400^{\circ}C$) by a reaction between silicon powder and carbon powder. The reaction is carried out in a graphite crucible operating in a vacuum ambient (or Ar gas) over a period of time sufficient to cause the Si+C mixture to react and form poly-crystalline SiC powder. End-product characterizations are pursued with X-ray diffraction analysis, SEM/EDS, particle size analyzer and ICP-OES. The purity of the end-product was analyzed with the Korean Standard KS L 1612.

Effect of Fiber Dispersion on Mechanical Strength of SiCf/SiC Composites (강화 섬유의 분산도가 SiCf/SiC 복합소재의 기계적 강도에 미치는 영향)

  • Ji Beom Choi;Soo-Hyun Kim;Seulhee Lee;In-Sub Han;Hyung-Joon Bang;Seyoung Kim;Young-Hoon Seong
    • Composites Research
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    • v.36 no.3
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    • pp.180-185
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    • 2023
  • This paper investigates the impact of fiber dispersion on the internal structure and mechanical strength of SiCf/SiC composites manufactured using spread SiC fibers. The fiber volume ratio of the specimen to which spread SiC fiber was applied decreased by 9%p compared to the non-spread specimen, and the resin slurry impregnated between the fibers more smoothly, resulting in minimal matrix porosity. In order to compare the fiber dispersion of each specimen, a method was proposed to quantify and evaluate the separation distance between fibers in composite materials. The results showed that the distance between fibers in the spread specimen increased by 2.23 ㎛ compared to the non-spread specimen, with a significant 42.6% increase in the distance between fiber surfaces. Furthermore, the 3pt bending test demonstrated a 49.3% higher flexural strength in the spread specimen, accompanied by a more uniform deviation in test data. These findings highlight the significant influence of SiC fiber dispersion on achieving uniform densification of the SiCf/SiC matrix and increasing mechanical strength.

Effect of In Situ YAG on Properties of the Pressureless-Sintered SiC-$ZrB_2$ Electroconductive (상압소결(常壓燒結)한 SiC-$ZrB_2$ 도전성(導電性) 복합체(複合體)의 특성(特性)에 미치는 In Situ YAG의 영향(影響))

  • Shin, Yong-Deok;Ju, Jin-Young;Ko, Tae-Hun;Lee, Jung-Hoon
    • Proceedings of the KIEE Conference
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    • 2008.07a
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    • pp.1230-1231
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    • 2008
  • The effect of content of $Al_2O_3+Y_2O_3$ sintering additives on the densification behavior, mechanical and electrical properties of the pressureless-sintered $SiC-ZrB_2$ electroconductive ceramic composites was investigated. The $SiC-ZrB_2$ electroconductive ceramic composites were pressureless-sintered for 2 hours at 1,700[$^{\circ}C$] temperatures with an addition of $Al_2O_3+Y_2O_3$(6:4 mixture of $Al_2O_3$ and $Y_2O_3$) as a sintering aid in the range of 8${\sim}$20[wt%]. Phase analysis of $SiC-ZrB_2$ composites by XRD revealed mostly of ${\alpha}$-SiC(6H), $ZrB_2$ and In Situ YAG($Al_5Y_3O_{12}$). The relative density, flexural strength, Young's modulus and vicker's hardness showed the highest value of 89.01[%], 81.58[Mpa], 31.437[GPa] and 1.34[GPa] for $SiC-ZrB_2$ composites added with 16[wt%] $Al_2O_3+Y_2O_3$ additives at room temperature respectively. Abnormal grain growth takes place during phase transformation from ${\beta}$-SiC into ${\alpha}$-SiC was correlated with In Situ YAG phase by reaction between $Al_2O_3$ and $Y_2O_3$ additive during sintering. Compositional design and optimization of processing parameters are key factors for controlling and improving the properties of SiC-based electroconductive ceramic composites. In this paper, it is convinced that ${\beta}$-SiC based electroconductive ceramic composites for heaters or ignitors can be manufactured by pressureless sintering.

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Properites of Inorganic Hybrid Silica Materials according to the XRD patterns (XRD 패턴에 따른 유무기복합 화합물의 특성)

  • 오데레사;고유신;김경식
    • Proceedings of the IEEK Conference
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    • 2003.07b
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    • pp.995-998
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    • 2003
  • This paper reports the correlation between dielectric constant and degree of amorphism of the hybrid type Si-O-C thin films. Si-O-C thin films were deposited by high density plasma chemical vapor deposition using bistrimethyl- silylmethane(BTMSM, $H_{9}$C$_3$-Si-C $H_2$-Si-C$_3$ $H_{9}$) and oxygen precursors with various flow rate ratio. As-deposited film and annealed films at 40$0^{\circ}C$ were analyzed by XRD. The Si-O-C thin films were amorphous from XRD patterns. For quantitative analysis, the diffraction pattern of the samples was transformed to radial distribution function by Fourier analysis, and then compared with each other. The degree of amorphism of annealed films was higher than that of as-deposited ones. The dielectric constant varied in accordance with flow rate ratio of precursors. The lowest dielectric constant was obtained from the as-deposited film which has the highest degree of amorphism after annealing.

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Weibull Statistical Analysis on Mechanical Properties in ZrO2 with SiC Additive (SiC 첨가한 ZrO2의 기계적 특성에 대한 와이블 통계 해석)

  • Nam, Ki Woo;Kim, Seon Jin;Kim, Dae Sik
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.39 no.9
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    • pp.901-907
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    • 2015
  • The Vickers hardness test is a common method used to characterize the hardness of ceramic materials. However, the hardness is not a deterministic value, but is a random variable. The objective of this paper is to investigate the statistical properties of the bending strength and a set of Vickers hardness values in single $ZrO_2$ and composite $ZrO_2/SiC$ with a SiC additive. In this work, we compare the characteristic value and variation with the results based on Weibull statistical analysis. The probability distributions of the bending strength and Vickers hardness agreed relatively well with the Weibull distribution. We evaluate the scale parameter and shape parameter in asreceived $ZrO_2$ and $ZrO_2/SiC$ composite ceramics, as well as in their heat treated ceramics.

An evaluation on in-pile behaviors of SiCf/SiC cladding under normal and accident conditions with updated FROBA-ATF code

  • Chen, Ping;Qiu, Bowen;Li, Yuanming;Wu, Yingwei;Hui, Yongbo;Deng, Yangbin;Zhang, Kun
    • Nuclear Engineering and Technology
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    • v.53 no.4
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    • pp.1236-1249
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    • 2021
  • Although there are still controversial opinions and uncertainty on application of SiCf/SiC composite cladding as next-generation cladding material for its great oxidation resistance in high temperature steam environment and other outstanding advantages, it cannot deny that SiCf/SiC cladding is a potential accident tolerant fuel (ATF) cladding with high research priority and still in the engineering design stage for now. However, considering its disadvantages, such as low irradiated thermal conductivity, ductility that barely not exist, further evaluations of its in-pile behaviors are still necessary. Based on the self-developed code we recently updated, relevant thermohydraulic and mechanical models in FROBA-ATF were applied to simulate the cladding behaviors under normal and accident conditions in this paper. Even through steady-state performance analysis revealed that this kind of cladding material could greatly reduce the oxidation thickness, the thermal performance of UO2-SiC was poor due to its low inpile thermal conductivity and creep rate. Besides, the risk of failure exists when reactor power decreased. With geometry optimization and dopant addition in pellets, the steady-state performance of UO2-SiC was enhanced and the failure risk was reduced. The thermal and mechanical performance of the improved UO2-SiC was further evaluated under Loss of coolant accident (LOCA) and Reactivity Initiated Accident (RIA) conditions. Transient results showed that the optimized ATF had better thermal performance, lower cladding hoop stress, and could provide more coping time under accident conditions.

Fabrication of a Au/Ni/Ti/3C-SiC Schottky Diode and its Characteristics for High-voltages (고내압용 Au/Ni/Ti/3C-SiC 쇼트키 다이오드의 제작과 그 특성)

  • Shim, Jae-Cheol;Chung, Gwiy-Sang
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.24 no.4
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    • pp.261-265
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    • 2011
  • This paper describes the fabrication and characteristics of a Au/Ni/Ti/3C-SiC Schottky diode with field plate (FP) edge termination. The Schottky contacts were annealed for 30 min at temperatures ranging from 0 to $800^{\circ}C$. At annealing temperature of $600^{\circ}C$, it showed an inhomogeneous Schottky barrier and had the best electrical characteristics. However, the annealing of $800^{\circ}C$ replaced it with ohmic behaviors because of the formation of many different types of nickel silicides. The fabricated Schottky diode had a breakdown voltage of 200 V, Schottky barrier height of 1.19 eV and worked normally even at $200^{\circ}C$.

Effect of Compositional Parameters on the Characteristics of C-SiC-$B_4C$ Composites

  • Aggarwal, R.K.;Bhatia, G.B.;Saha, M.;Mishra, A.
    • Carbon letters
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    • v.5 no.4
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    • pp.164-169
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    • 2004
  • Carbon-ceramic composites refer to a special class of carbon based materials which cover the main drawbacks of carbon, particularly its proneness to air oxidation, while essentially retaining its outstanding properties. In the present paper, the authors report the results of a systematic study made towards the development of C-SiC-$B_4C$ composites, which involves the effects of compositional parameters, namely, carbon-to-ceramic and ceramic-to-ceramic ratios, on the oxidation behaviour as well as other characteristics of these composites. The C-SiC-$B_4C$ composites, heat-treated to $1400^{\circ}C$, have shown that their oxidation behaviour at temperatures of 800~$1200^{\circ}C$ depends jointly on the total ceramic content and the SiC : $B_4C$ ratio. Good compositions of C-SiC-$B_4C$ composites exhibiting zero weight loss in air at temperatures of 800~$1200^{\circ}C$ for periods of 4~9 h, have been identified. Composites with these compositions undergo a weight gain or a maximum weight loss of less than 3% during the establishment of a protective layer at the surface of carbon in a period of 1~6 h. Significant improvement in the strength of C-SiC-$B_4C$ composites has been observed which increases with an increase in the total ceramic content and also with an increase in the SiC : $B_4C$ ratio.

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