• Proceedings of the Membrane Society of Korea Conference
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• 2004.05b
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• pp.188-191
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• 2004

Carbon molecular sieve (CMS) membranes have superior gas permeation and separation performance compared with polymeric membranes$^{1.3}$ . Up to now, CMS membranes mostly have been mostly focused on the kinds of precursor and pyrolysis condition (pyrolysis temperature, heating rate, pyrolysis atmosphere).(omitted)

• Membrane Journal
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• v.20 no.4
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• pp.278-289
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• 2010

A series of composite membranes based on sulfonated poly(arylene ether sulfone) (SPAES) were prepared via addition of tetraethyl orthosilicate (TEOS) and solution casting method. The morphological structure, water uptake, proton conductivity of the resulting composite membranes were extensively investigated as function of the content of TEOS. By the sol-gel reaction, TEOS molecules were not completely converted to $SiO_2$ particles, but formed only oligomer-type. Also, EDS confirms that the resulting silicon dioxide was homogeneously distributed in the composite membranes. As the content of TEOS increased, the prepared membranes increased water uptake and proton conductivity at high temperature and low relative humidity condition. In particular, considerably high proton conductivity (0.015 S/cm) at $120^{\circ}C$ and 48%RH was demonstrated in the composite membrane containing 200% TEOS, which is 10 times greater than that of unmodified SPAES membrane. Also, the composite membranes were found to have enhanced thermal stability compared to the unmodified membrane.

• Journal of Korean Society on Water Environment
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• v.22 no.5
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• pp.865-870
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• 2006

The behavior and influence of EPS on membrane fouling by changing of hydraulic retention time was investigated, using lab. scale submerged membrane bio-reactor, which was operated with gravitational filtration and fed supernatant of primary sedimentation in waste water treatment plant as influent. The membrane was adopted micro-filter of polyethylene hollow fiber. EPS was analysed as polysaccharides and protein especially, into soluble and bound EPS separately. The concentration of soluble EPS was increased at short HRT, then membrane fouling was rapidly progressed and flux was depressed. The most of EPS clogged membrane pore were polysaccharides, while protein was important parameter affected on membrane fouling because of it's more accumulating in the more term operating.

• Membrane Journal
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• v.2 no.1
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• pp.21-32
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• 1992

Hydrogen-permselective silica membranes were synthesized within tim walls of porous Vycor tubes by chemical vapor depostion of $SiO_2$. Film deposition was carried out using $SiCl_4$ hydrolysis either in the oppm shag reactants or in the one-sided geometry. At temperatures above $600^{\circ}C$ the permeation rate of hydrogen thorough the silica films varied between 0.01 and $025cm^3(STP)/cm^2-min-atm$ depending on the reaction geometry and the $H_2 : N_2$ permeation ratio was about 1000. Permeation rates of both $H_2$ and $N_2$ increased with increasing temperature. The silica membranes produced by one-sided deposition have higher hydrogen permmeation rates than those produced by the opposing reactants geometry although the membranes formed in an opposing reactants geometry were relatively stable during the heat treatment or after exposure to ambient air. These membranes can be applied to high temperature gas separations or membrane reactors once the film deposition process is optimized to get high permeability as well as good stability.

• Membrane Journal
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• v.18 no.1
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• pp.103-107
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• 2008

Membrane process has been focused as an alternative separation process because not only it exhibits a high selectivity compared with a traditional distillation process, but also it is known to be an energy saving separation process. Inorganic membrane, especially zeolite membrane, has been studied since it can be operated in severe conditions compared to the organic membranes. Recently, new zeolite materials are tested as an inorganic membrane material to overcome disadvantages of existing zeolite membranes. Kalsilite can be used as an inorganic membrane material for gas separation and selective water separation from water/organic mixtures because it is expected to be hydrophilic resulted from Si/Al ratio of 1 like zeolite 4A and has a narrow pore size of 0.36 nm. In this study, kalsilite was synthesized by a new economical hydrothermal process using Si : Al : K : $H_2O$ mole ratio of 1 : 1 : 8 : 60. The synthesized kalsilite powder was confirmed by XRD and has a mean diameter of $2.73{\mu}m$. The vapor adsorption test showed the synthesized kalsilite is hydrophilic.

• Journal of the Korean Society for Nondestructive Testing
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• v.24 no.6
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• pp.573-580
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• 2004

The main goal of this study was to develop a micro-fabrication process for the capacitive micromachined ultrasonic transducer (cMUT). In order to achieve this goal, the former research results of the micro-electro-mechanical system (MEMS) process for the cMUT were analyzed. The membrane deposition, sacrificial layer deposition and etching were found to be a main process of fabricating the cMUT. The optimal conditions for those microfabrication were determined by the experiment. The thickness, uniformity, and residual stress of the $Si_3N_3$ deposition which forms the membrane of the cMUT were characterized after growing the $Si_3N_3$ on Si-wafer under various process conditions. As a sacrificial layer, the growth rate of the $SiO_2$ deposition was analyzed under several process conditions. The optimal etching conditions of the sacrificial layer were analyzed. The microfabrication process developed in this study will be used to fabricate the cMUT.

• Clean Technology
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• v.5 no.2
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• pp.25-35
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• 1999

Behavior of permeate flux decline was examined through the hollow fiber membrane in ultrafiltration system for Si colloidal solution. Flux decline with time was due to the growth of Si cake deposited on the membrane surface and the pore blocking by Si particles for the hollow fiber membrane. At the pseudo steady state of operation, the permeate flux of dead-end flow was 60 % to that of the cross flow. The ratio of permeate flux to the pure water flux, $J/J_w$, decreased with increasing the trans-membrane pressure, from 64.2 % for $0.5kg_f/cm^2$ to 45.7 % for $2.0kg_f/cm^2$. When the feed flow rate was 3 L/min, the pore blocking model was dominant at the initial period of filtration and was followed by the cake filtration model. And with increasing the feed flow rate from 1 L/min to 3 L/min, $R_c$ was $1.79{\times}10^{12}{\sim}2.34{\times}10^{12}m^{-1}$ which was the about 40 % decreased value to that of the 1 L/min while $R_p$ was not changed and was $1.71{\times}10^{12}m^{-1}$ approximately.

• Membrane Journal
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• v.17 no.3
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• pp.254-268
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• 2007

Sodium type faujasite(FAU) zeolite layers with diverse materials characteristics(Si/Al ratio, thickness, and structural discontinuity) were hydrothermally grown on a porous $\alpha-Al_2O_3$ tube, and then the $CO_2/N_2$ separation was evaluated at $30^{\circ}C$ for an equimolar mixture of $CO_2$ and $N_2$. Among hydrothermal conditions, $SiO_2$ content in hydrothermal solution seriously affected materials characteristics: with an increment in the $SiO_2$ content, Si/Al ratio, thickness, and structural discontinuity of grown FAU zeolite layer simultaneously increased. The present study reveals that structural discontinuity(intercrystalline voids due to an incomplete densification and cracks induced by GIS Na-P1 phase) is the most important variable affecting the $CO_2/N_2$ separation. Also, it was suggested that the $CO_2$ desorption in permeate side be the rate-determining(slowest) step in the overall $CO_2$ permeation.

• Membrane Journal
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• v.16 no.1
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• pp.25-30
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• 2006

The NaA zeolite membrane was synthesized on the surface of a porous ${\alpha}$-alumina support from the reaction solution composed of 1Si : 1Na : 4Na $6H_{2}O$. The pervaporation performance of the synthesized NaA zeolite membrane was investigated for the iso-propyl alcohol (IPA) aqueous solution according to the different feed concentration and the different operating temperature. The total flux decreases by increasing the feed IPA concentration and increases by increasing the temperature. The total flux was about $4.0{\times}10^3g/m^2\;hr\;at\;60^{\circ}C$ and 0.6 mole fraction of IPA and the separation factor was $1.8{\times}10^7\;at\;60^{\circ}C$ and 0.8 mole fraction of IPA. The separation performance of water through the NaA membrane was found to be superior to that obtainable with a distillation process just by comparison of the vapor-liquid equilibrium data.

• Journal of the Microelectronics and Packaging Society
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• v.7 no.2
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• pp.1-6
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• 2000

X-ray lithography mask with SiC membrane and Ta absorber patterns has been fabricated using ECR plasma CVD, d.c. magnetron sputtering, and ECR plasma etching. The stress of stoichiometric SiC film was adjusted by rapid thermal annealing under $N_2$, ambient. Adjusting the working pressure during sputtering process resulted in a near-zero residual stress, reasonable density, and smooth surface morphology of Ta film. Cl-based plasma showed a good etching characteristics of Ta, and two-step etching process was implemented to suppress microloading effect fur sub-quarter $\mu\textrm{m}$ patterning.