• Title/Summary/Keyword: SiC/SiC Ceramics

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Substrate tempperature dependence of crystalline Y2O3 films grown by Ionized Cluster Beam Deposition

  • Cho, M.H.;Whangbo, S.W.;Seo, J.G.;Choi, S.C.;Cho, S.J.;Whang, C.N.
    • Proceedings of the Korean Vacuum Society Conference
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    • 1998.02a
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    • pp.87-89
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    • 1998
  • The Y2O3 films on Si(111) was grown by ionized cluster beam depposition (ICBD) in ultrahigh-vacuum (UHV). The acceleration voltage and oxygen ppartial ppressure were fixed at 5 kV and 2$\times$10-5 Torr resppectively. The substrate tempperature was varied from 10$0^{\circ}C$ to $600^{\circ}C$ in order to find the deppendence of crystallinity of Y2O3 films on the substrate tempperature. The crystallinity of the films with the substrate tempperature studied using x-ray diffraction (XRD) and Rutherford backscattering sppectroscoppy (RES). Surface crystallinity and surface morpphology of the films were also investigated using the reflection high-energy electron diffraction (RHEED) and atomic force microscoppe (AFM) resppectively. The films grown at the substrate tempperature below 50$0^{\circ}C$showed the ppoly-crystalline structure of oxygen deficiency. On the contrary the single-crystalline structure was obtained at the substrate tempperature over 50$0^{\circ}C$ and the stochimetry was gradually matched as increasing the substrate tempperature. The surface morpphology showed the increase of the surface roughness as the substrate tempperature was increased upp to 50$0^{\circ}C$ The crystallinity of the film was not good and the minimum channeling yield $\chi$min was measured at 0.91 The stochiometric and high crystallinine film (surface $\chi$min=0.25) was obtained as the substrate tempperature increased upp to 60 $0^{\circ}C$ which indicate the tempperature was sufficient to migrate the depposited atom.

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Effect of Impurity Addition on the Microwave Dielectric Properties of $(Ba_{0.93}Sr_{0.07}O)-0.5Sm_2O_3-4.5TiO_2$ Ceramics ($(Ba_{0.93}Sr_{0.07}O)-0.5Sm_2O_3-4.5TiO_2$계 세라믹스의 불순물 첨가에 따른 마이크로파 유전특성)

  • Kim, Tae-Joong;Jang, Jae-Hoon;Lee, Hee-Young
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.07b
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    • pp.1148-1151
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    • 2002
  • Dielectric ceramics with nominal composition of $(Ba_{0.93}Sr_{0.07}O)-0.5Sm_2O_3-4.5TiO_2$ was prepared using the conventional mixed oxide process-derived powder. Effect of $SiO_2$, $MnO_2$ and $Al_2O_3$ impurity addition on the microwave properties was examined in some detail. Measured relative permittivity $(\varepsilon_r)$ values were in the range of 53 to 59 and showed little dependence on impurity addition. In contrast, quality factor $(Q{\cdot}f)$ and temperature coefficient of resonant frequency $(\tau_f)$ values were greatly influenced by the type and the amount of impurities. It was found that 0.1~0.2wt% addition of $Al_2O_3$ was most effective for improving the properties, where ${\varepsilon}_r$, $Q{\cdot}f$ and $\tau_f$ values were 57.7, 10000, and +7ppm/$^{\circ}C$, respectively.

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Structural and Dielectric Properties of $(1-x)Pb(Fe_{1/2}Nb_{1/2})O_3-xPbTiO_3$ Prepared by Precalcination Method (전하소법으로 합성한 $(1-x)Pb(Fe_{1/2}Nb_{1/2})O_3-xPbTiO_3$의 구조와 유전성질에 대한 연구)

  • Hong, Young-Sik;Park, Hyu-Bum;Kim, Jeong;Kim, Keon;Kim, Si-Joong
    • Journal of the Korean Ceramic Society
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    • v.30 no.11
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    • pp.891-896
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    • 1993
  • Pb(Fe1/2Nb1/2)O3 and (1-x)Pb(Fe1/2Nb1/2)O3-xPbTiO3 ceramics were prepared by the precalcination method. Their structural and dielectric properties were investigated. The amount of perovsikte phase was increased by the precalcination and the dielectric properties of ceramics were improved. Additions of PbTiO3 were found to increase the tetragonality (c/a) of crystal lattice and Tc. In the middle region of (1-x)Pb(Fe1/2Nb1/2)O3-xPbTiO3, duffuse phase transitions (DPT) were observed.

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Nano-Composite Solder Technology for the Improvement of Solder Joint Properties (무연솔더 접합부 특성향상을 위한 나노복합솔더 기술)

  • Ki, Won-Myoung;Lee, Young-Kyu;Lee, Chang-Woo;Yoo, Se-Hoon
    • Journal of the Microelectronics and Packaging Society
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    • v.18 no.3
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    • pp.9-17
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    • 2011
  • Nano-composite solders have been studied to improve the properties of Pb-free solder joints. The nanoparticles in the composite solders were carbon nanotubes(CNTs), metals (Ag, Ni, Cr, etc.), ceramics (SiC, $ZrO_2$, $TiB_2$, etc.). To fabricate the nano-composite solders, mechanical mixing methods and in-situ fabrication method has been used for well-dispersed nano phase. The characteristic properties of the nano-composite solders were high creep resistance, low undercooling, low IMC growth rate and fine microstructures. More researches on the nano-composite solders are required to improve the processibility and the reliability of the nano-composite solder joints.

Thin Film Adhesion and Cutting Performance in Diamond-Coated Carbide Tools

  • Jong Hee Kim;Dae Young Jung;Hee Kap Oh
    • The Korean Journal of Ceramics
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    • v.3 no.2
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    • pp.105-109
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    • 1997
  • The effects of surface conditions of the C-2 cemented carbide substrate on the adhesion of diamond film were investigated. The substrates were pretreated for different times with Murakami's reagent and then the acid solution of an H2SO4-H2O2. The adhesion strength was estimated by a peeling area around the Rockwell-A indentation. The cutting performance of the diamond-coated tools was evaluated by measuring flank wears in dry turning of Al-17% Si alloy. The morphology of deposited diamond crystallites was dominated by (111) and (220) surfaces with a cubooctahedral shape. The diamond film quality was hardly affected by the surface conditions of the substrate. The variation of tool life with longer substrate etching times resulted from a compromies between the increase of film adhesion at the interface and the decrease of toughness at the substrate surface. The coated tools were mainly deteriorated by chipping and flaking of the diamond film form a lock of adhesion strength, differently from the wear phenomena of PCD tools.

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Properties of Multilayer Glass-Ceramic Dielectrics (다층 글라스세라믹 유전체의 결정화특성에 관한 연구)

  • 이헌수;손명모;박희찬
    • Journal of the Korean Ceramic Society
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    • v.31 no.9
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    • pp.981-988
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    • 1994
  • Crystallizable glasses with precipitation of celsian were prepared for the purpose of insulating dielectric layers for the devices such as integrated circuit substrates. Crystallization behavior of these glasses were studied by DTA, SEM, XRD analysis and by the measurement of dielectric properties. The base composition of the glass-ceramic consists in weight percent of 30% SiO2, 10% Al2O3, 26% BaO, 10% CaO, 10% ZnO, 8%TiO2 and 6% B2O3. 2-6 wt% Y2O3 were selected as the nucleating agent to promote monoclinic celsian formation. As a result, in barium-rich glasses containing 4~6wt% Y2O3 , monoclinic celsian was developed as major crystalline phase in the temperature range of 850~90$0^{\circ}C$. Also, the dielectric constant and quality factor of these glass-ceramics were about 9 and more than 1000, respectively.

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Measurement of Defects with Scanning Acoustic Microscope and Acoustic Emission (초음파 현미경 및 AE에 의한 결함 측정)

  • Choi, Man-Yong;Park, Ik-Gun;Han, Eung-Kyo
    • Journal of the Korean Society for Precision Engineering
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    • v.8 no.4
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    • pp.118-125
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    • 1991
  • Acoustic microscopy has attracted much interest recently as potential nondestructive evaluation technique for detecting and sizing defects of surface and sub-surface. Also acoustic emission testing method has been developed for detecting microcracks which is more than 30${\mu}m$ in length quantitatively on ceramics. In the present paper, acoustic emission during the four point bending test in hot-pressed sintered $Si_3N_4$ specimen which was stressed by thermal shock, has been measured by high sensitive sensing system. The surface and sub-surface cracks were detected by scanning acoustic micrscope of 800 MHz and conventional ultrasonic testing in C-scope image. The purpose was to investigate the location and size of cracks by SAM and AE technique, whose experimental data demonstrate good for detecting microcracks.

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Optical, Mechanical and Tribological Properties of $Y_2O_3$ $Er_2O_3$ and $Nd_2O_3$ Doped Polycrystalline Silicon Nitride Ceramics

  • Joshi, Bhupendra;Lee, Su-Wan
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2010.05a
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    • pp.51.1-51.1
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    • 2010
  • $Y_2O_3$ $Er_2O_3$ and $Nd_2O_3$ doped polycrystalline silicon nitride were prepared by hot pressed sintering at $1850^{\circ}C$ and their optical transmittance were investigated in visible and in infrared region. Mechanical and tribological properties were also investigated. Grain growth in silicon nitride was reduced with addition of $Y_2O_3$ and $Nd_2O_3$. 1 wt.% of each rare earth metal were sintered with 3 wt.% MgO, 9wt.% AlN and 87 wt.% of ${\alpha}-Si_3N_4$. Adding these rare earth metal oxides shows good mechanical properties as high strength and toughness and also shows low friction coefficient.

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초음파 현미경 및 AE에 의한 결함 측정

  • 최만용;박익근;한응교
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1991.04a
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    • pp.127-133
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    • 1991
  • Acoustic microscopy has attracted much intrest recently as potential mondestructive evalution technique for detecting and sizing defects of surface and sub-surface. Also acoustic emission testing method has been developed for detecting microcracks which is more than 30 umm in length quintitatively on ceramics material. In the present paper, acoustic emission during the four point bending test in hot-pressed sintered Si$\_$3/N$\_$4/ specimen which was stressed bythermal shock has been measured by high sensitive sensing system. The surface and sub-surface cracks were detected by scanning acoustic microscope of 800 MHz and conventional ultrasonic testing in C-scope image. The purpose was to investigate the location and size of cracks by SAM and AE technique, whose experimental datas demontrates good agreement for detecting microcracks.

Fractal Analysis of the Surface in Thin Film Capacitors

  • Hong, Kyung-Jin;Min, Yong-Ki;Cho, Jae-Cheol
    • KIEE International Transactions on Electrophysics and Applications
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    • v.11C no.2
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    • pp.18-22
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    • 2001
  • The thin films of high permitivity in ferroelectric materials using a capacitor are applied to DRAMs and FRAMs. (Ba, Sr)TiO$_3$ thin as ferroelectric materials were prepared by the sol-gel method and made by spin-coating on the Pt/Sio$_2$/Si substrate at 4,000 [rpm] for 10 seconds. The structural characteristics of the surface were analyzed by fractal dimension. The thickness of BST ceramics thin films was about 260∼280 [nm]. The property of the leakage current was stable with 10-9∼10-11[A] when the applied voltage was 0∼3[V]. BST thin films ha low leakage current properties when fractal dimension was low and a coating area was high.