• Title/Summary/Keyword: Si-O bond

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Study on Surface Analysis of TEOS Film by Change of Slurry Temperature in CMP Process (CMP 공정중 TEOS 막의 슬러리 온도 변화에 따른 표면 분석 연구)

  • Ko, Pil-Ju;Kim, Nam-Hoon;Seo, Yong-Jin;Lee, Woo-Sun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.07a
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    • pp.645-646
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    • 2005
  • The increasing hydroxyl ($OH^-$) groups diffused into the TEOS and then weakened reactants such as H-C-O-Si bonds on the surface of TEOS film were actively generated with the increase of slurry temperature. These soft reactants on the surface of TEOS film could be removed easily by mechanical parts of CMP.

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The Effect of Surface Roughness on SiC by Wet Chemical Etching (SiC 표면 거칠기에 미치는 습식식각의 영향)

  • Kim, Jae-Kwan;Jo, Young-Je;Han, Seung-Cheol;Lee, Hae-Yong;Lee, Ji-Myon
    • Korean Journal of Metals and Materials
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    • v.47 no.11
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    • pp.748-753
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    • 2009
  • The surface morphology and the surface roughness of n-type SiC induced by wet-treatment using 45% KOH and buffered oxide etchant (BOE-1HF : $6H_2O$) were investigated by atomic force microscopy (AFM). While Si-face of SiC could be etched by alkali solutions such as KOH, acidic solutions such as BOE were hardly able to etch SiC. When the rough SiC samples were used, the surface roughness of etched sample was decreased after wet-treatment regardless of etchant, due to the planarization the of surface by widening of scratches formed by mechanical polishing. It was observed that the initial etching was affected by the energetically unstable sites, such as dangling bond and steps. However, when a relatively smooth sample was used, the surface roughness was rapidly increased after treatment at $180^{\circ}C$ for 1 hr and at room temperature for 4 hr by using KOH solution, resulting from the nano-sized structures such as pores and bumps. This indicates that porous SiC surface can be achieved by using purely chemical treatment.

Bonding Behavior of Bioglass Coated Alumina (알루미나에 생체유리의 코팅시 결합의 특성)

  • 김정구;김철영
    • Journal of the Korean Ceramic Society
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    • v.27 no.7
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    • pp.925-933
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    • 1990
  • The possible use of bioglass,, which is one of the surface active biomaterials, as implants materials has drawn great attention due to their ability to bond to human living tissue. In the present work, the investigation was carried out to find the bonding phenomena between alumina substrate and bioglass(45S5) or fluorine-containing bioglass(45S5$.$4F), and the properties of coated bioglass. The stable bonding between alumina and bioglass was formed when heat-treated at 1150$^{\circ}C$ for 120 minutes or at 1250$^{\circ}C$ for 30 minutes for the 45S5, and at 1150$^{\circ}C$ for 30 minutes for the 45S5$.$4F. When bioglass coated alumina was heat-treated, great amount of Al was diffused into bioglass from alumina substrate. More Al was diffused into fluorine-containing bioglass than into bioglass without fluorine. At early stage of heat-tretment, the diffused alumina content was increased with the square root of time and it was also increased with the thickness of coating layer and heat-treatment temperatures. The alumina content became constant after its saturation for longer heat-treatment time. Coated bioglasses were crystallized to Na2O$.$CaO$.$3SiO2 when heat-treated at lower temperature, and to CaO$.$SiO2 at higher temperature.

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Dense Polycrystalline SiC Fiber Derived from Aluminum-doped Polycarbosilane by One-Pot Synthesis (One-Pot 합성공정으로 만든 Aluminum이 doping된 폴리카보실란으로부터 제조된 치밀한 결정화 탄화규소 섬유)

  • Shin, Dong-Geun;Kong, Eun-Bae;Riu, Doh-Hyung;Kim, Young-Hee;Park, Hong-Sik;Kim, Hyoun-Ee
    • Journal of the Korean Ceramic Society
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    • v.44 no.7
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    • pp.393-402
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    • 2007
  • Polyaluminocarbosilane was synthesized by direct reaction of polydimethylsilane with aluminum(III)-acetylacetonate in the presence of zeolite catalyst. A fraction of higher molecular weight polycarbosilane was formed due to the binding of aluminium acetylacetonate radicals with the polycarbosilane backbone. Small amount of Si-O-Si bond was observed in the as-prepared polyaluminocarbosilane as the result. Polyaluminocarbosilane fiber was obtained through a melt spinning and was pyrolyzed and sintered into SiC fiber from $1200{\sim}2000^{\circ}C$ under a controlled atmosphere. The nucleation and growth of ${\beta}-SiC$ grains between $1400{\sim}1600^{\circ}C$ are accompanied with nano pores formation and residual carbon generation. Above $1800^{\circ}C$, SiC fiber could be sintered to give a fully crystallized ${\beta}-SiC$ with some ${\alpha}-SiC$.

Studies on the Oxidative Addition Reactions of 1-Bromosilatranes to $SnBr_2$ (1-브로모실라트란의 $SnBr_2$ 에 대한 산화성 첨가반응 연구)

  • Kim, Myeong Un;Eo, Dong Seon;Sin, Ho Cheol;Kim, Jin Gwon;Do, Young Gyu
    • Journal of the Korean Chemical Society
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    • v.38 no.3
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    • pp.241-245
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    • 1994
  • The oxidative addition reaction has been employed to synthesize heteropolynuclear compounds containing Si-M bonding interaction between the silicon atom of silatrane, pentacoordinate silicon derivative with transannular Si-N dative bond, and the main group element. The reaction of $SnBr_2 with 1-bromosilatrane(1a) in acetonitrile gives the mixture of yellow(2a) and white(2b) solids which were isolated and charaterized by ^1H-NMR, ^{29}Si-NMR, ^{119}Sn-NMR and Mass spectroscopy. The yellow compound was characterized as 1-tribromotinsilatrane which had Si-Sn bonding interaction. The reaction of SnBr2 with 1-bromo-3,7,10-trimethylsilatrane(1b) in methanol gives the Sn(Ⅳ) complex, N[CH_2CH(CH_3)O]_3SiSnBr_3(CH_3OH)_2(3),$ which was characterized by various means.

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The Effect of Low-Temperature Carbon Encapsulation on Si Nanoparticles for Lithium Rechargeable Batteries

  • Jung, Jaepyeong;Song, Kyeongse;Kang, Yong-Mook
    • Bulletin of the Korean Chemical Society
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    • v.34 no.7
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    • pp.2162-2166
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    • 2013
  • The tailored surface modification of electrode materials is crucial to realize the wanted electronic and electrochemical properties. In this regard, a dexterous carbon encapsulation technique can be one of the most essential preparation methods for the electrode materials for lithium rechargeable batteries. For this purpose, DL-malic acid ($C_4H_6O_5$) was here used as the carbon source enabling an amorphous carbon layer to be formed on the surface of Si nanoparticles at enough low temperature to maintain their own physical or chemical properties. Various structural characterizations proved that the bulk structure of Si doesn't undergo any discernible change except for the evolution of C-C bond attributed to the formed carbon layer on the surface of Si. The improved electrochemical performance of the carbon-encapsulated Si compared to Si can be attributed to the enhanced electrical conductivity by the surface carbon layer as well as its role as a buffering agent to absorb the volume expansion of Si during lithiation and delithiation.

Structure and Electric Properties of $(Ba_{1-x}Pb_x)TiO_3$ Ceramics ($(Ba_{1-x}Pb_x)TiO_3$ 세라믹의 구조와 전기적 특성)

  • Kim, Si-Joong;Kim, Keon;Park, Hyu-Bum;Ahn, Byeung-Joon
    • Journal of the Korean Ceramic Society
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    • v.29 no.4
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    • pp.259-264
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    • 1992
  • The crystal structures and the bonding characteristics in $(Ba_xPb_{1-x})TiO_3$ have been investigated by X-ray diffraction analysis and infrared spectrophotometry. As $Ba^{2+}$ ion in $BaTiO_3$ were substituted by $Pb^{2+}$ ion, the structures were changed to orthorhombic from tetragonal, and also the covalent character in Ti-O bond increased, and then the dielectric constants decreased gradually. In the mixed oxide containing $Pb^{2+}$ ion more than 50%, the change-transfer energy of titanium ion increased.

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Sliding Wear Behavior of Plasma Sprayed Zirconia Coatingagainst Silicon Carbide Ceramic Ball

  • Le Thuong Hien;Chae Young-Hun;Kim Seock Sam;Kim Bupmin;Yoon Sang-bo
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2004.11a
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    • pp.66-74
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    • 2004
  • The sliding wear behavior of $ZrO_2-22wt\%MgO\;(MZ)\;and\;ZrO_2-8wt\%Y_2O_3\;(YZ)$ deposited on a casting aluminum alloy with bond layer (NiCrCoAlY) by plasma spray against an SiC ball was investigated under dry test conditions at room temperature. At all load conditions, the wear mechanisms of the MZ and the YZ coatings were almost the same. The wear mechanisms involved the forming of a smooth film by material transferred on the sliding surface and pullout. The wear rate of the MZ coating was less than that of the YZ coating. With an increase normal load the wear rate of the studied coatings increased. The SEM was used to examine the sliding surfaces and elucidate likely wear mechanisms. The EDX analysis of the worn surface indicated that material transfer was occurred from the SiC ball to the disk. It was suggested that the material transfer played an important role in the wear performance.

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Studies on the Optimum Surface Treatment Conditions and the Interfacial Bond Strength of Glass fiber/Nylon 6 Composites (유리섬유/Nylon 6 복합재료의 표면처리 최적조건과 개별결합력에 관한 연구)

  • 나성기;박종신
    • Proceedings of the Korean Fiber Society Conference
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    • 1997.04a
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    • pp.26-31
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    • 1997
  • 유리섬유/nylon 6 복합재료의 계면결합강도를 증가시키기 위하여 r-APS(r-Aminopropyltriethoxysilane)로 유리섬유의 표면을 처리 하였다. 이때 표면처리의 최적 조건을 찾기위해서 처리후 기기분석과 계면결합강도 측정 등을 하였다. 농도, pH, 처리시간, 온도를 변화시키면서 표면처리를 한 후 흡착량을 살펴본 결과 처리 농도에 의해서는 흡착량이 단조증가하였으며 처리시간에 따라서는 5분정도에서, 처리온도에 의해서는 30C 부근에서 최대 흡착량을 보였다. 또한 pH에 따른 흡착량은 silane의 고유 pH인 10.5부근에서 최대치를 나타냈다. FR-IR 분석에 의하면 NH2의 NH3 bending mode가 1607cm-1, 1575cm-1에서 나타났으며 SiOH의 SiO band는 960cm-1에서 나타났다. XPS를 통해서는 N ls와 Si 2p의 존재를 확인할 수 있었다. 표면처리된 유리섬유와 matrix인 nylon 6를 이용해 단섬유내장시편을 만들어 fragmentation test를 한 결과 계면결합강도는 약 5분의 처리시간과 1%(wt%)의 농도에서 최대값을 보였다.

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Surface modifiers on the waterglass aerogels prepared by ambient drying process (상압건조 물유리 에어로젤에 대한 표면개질제의 영향)

  • Kim, Tae-Jung;Nahm, Sahn;Oh, Young-Jei
    • Journal of Sensor Science and Technology
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    • v.15 no.3
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    • pp.173-178
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    • 2006
  • Silica aerogel with ultra low density and high porosity has been focused on versatile application due to its fascinating properties. Ambient drying process of waterglass, in this study was researched to fabricate a crack-free monolith body in the point view of cost effective way. Wet gel was obtained by removing of $Na^{+}$ ions in waterglass, which contains 8 wt% of $SiO_{2}$. Xylene, which has a low vapor pressure, was used as a solution substitutor to prevent the formation a cracks during drying. Various surface modifiers like as hexamethyldisilazane (HMDSZ), trimethylchlorosilane (TMCS), methyltriethoxylsilane (MTES), methyltrimethoxysilane (MTMS) and phenyltriethoxysilane (PTES) were used in order to improve hydrophobicity of the waterglass Silica aerogel. Some physical properties of the surface modified aerogels were investigated by FT-IR, TGA, BET and SEM. Hydrophobicity and hydrophilicity of Silica aerogel is attributed to the Si-OH bond and the non-polar C-H bond groups on the surface of aerogel. Crack-free waterglass aerogel with >90 % of porosity, 17 nm of pore size and <0.15 $g/cm^{3}$ of density was prepared. HMDSZ and TMCS are effective as a surface modifier