• Title/Summary/Keyword: Si doped InO

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Preparation and Characterization of Proton Conductive Phosphosilicate Membranes Based on Inorganic-Organic Hybrid Materials

  • Huang, Sheng-Jian;Lee, Hoi-Kwan;Kang, Won-Ho
    • Bulletin of the Korean Chemical Society
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    • v.26 no.2
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    • pp.241-247
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    • 2005
  • A series of proton conductive inorganic-organic hybrid membranes doped with phosphoric acid ($H_3PO_4$) and/or triethylphosphate (PO(OEt)$_3$) have been prepared by sol-gel process with 3-glycidoxypropyltrimethoxysilane (GPTMS), 3-aminopropyltriethoxysilane (APTES) and tetraethoxysilane (TEOS) as precursors. High proton conductivity of 3.0 ${\times}$ $10^{-3}$ S/cm with composition of 50TEOS-30GPTMS-20APTES-50$H_3PO_4$ was obtained at 120 ${^{\circ}C}$ under 50% relative humidity. Thermal stability of membrane was significantly enhanced by the presence of SiO$_2$ framework up to 250 ${^{\circ}C}$. XRD revealed that the gels are amorphous. IR spectra showed a good complexation of $H_3PO_4$ in the matrix. The conductivity under 75% relative humidity was significantly improved by addition of APTES due to the increase in concentration of defected site in hybrid matrix. The effect of PO(OEt)$_3$, humidifying time, and heat-treatment were also investigated. PO(OEt)$_3$ had no improvement on conductivity and conductivity increased with humidifying time, however, decreased with heating temperature.

Crystallization Behavior and Electrical Properties of IZTO Thin Films Fabricated by Ion-Beam Sputtering (이온빔 스퍼터링으로 증착한 IZTO 박막의 결정화 거동과 전기적 특성 분석)

  • Park, Ji Woon;Bak, Yang Gyu;Lee, Hee Young
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.34 no.2
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    • pp.99-104
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    • 2021
  • Ion-beam sputtering (IBS) was used to deposit semiconducting IZTO (indium zinc tin oxide) thin films onto heavily-doped Si substrates using a sintered ceramic target with the nominal composition In0.4Zn0.5Sn0.1O1.5, which could work as a channel layer for oxide TFT (oxide thin film transistor) devices. The crystallization behavior and electrical properties were examined for the films in terms of deposition parameters, i.e. target tilt angle and substrate temperature during deposition. The thickness uniformity of the films were examined using a stylus profilometer. The observed difference in electrical properties was not related to the degree of crystallization but to the deposition temperature which affected charge carrier concentration (n), electrical resistivity (ρ), sheet resistance (Rs), and Hall mobility (μH) values of the films.

마그네트론 스퍼터링법을 이용하여 증착한 Sn doped IZO 박막의 열전 특성

  • Byeon, Ja-Yeong;Song, Pung-Geun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.253-253
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    • 2016
  • 최근 세계적으로 대체 에너지는 중요한 이슈가 되고 있으며 그 중 열전 재료는 유망한 에너지 기술로서 주목 받고 있다. 특히 고 직접화 전자 소자의 발열 문제를 해결하기 위해, 소형화와 정밀 온도 제어가 가능한 박막형 열전 소자에 연구가 주목 받고 있다. 박막형 열전소자 중 산화물 반도체계에 대한 연구가 활발히 진행되고 있으며, 이러한 산화물 반도체계 중 In2O3는 BiTe, PbTe 등의 기존의 재료에 비해 독성이 낮을 뿐만 아니라 내 산화성 및 고온에서 열적 안정성이 우수하여 고온에서 적용 불가능한 금속계 열전 재료의 한계를 극복 할 수 있다는 장점을 가진다. 우수한 성능 가장 낮은 캐리어 밀도를 가지기 때문에 의 열전 재료는 높은 전기 전도도 및 제백 계수 그리고 낮은 열전도도 특성을 가져야만 한다. IZO:Sn(Zn 10 wt.%, Sn 800 ppm) 박막의 경우, 높은 전기 전도성을 가지면서 비정질 구조를 가진다. 이와 같이 비정질 구조를 가지는 박막 열전 재료는 격자에 의한 열 전도도가 낮기 때문에 결정질 구조에 비해 전체 열 전도도 값이 낮을 것으로 기대된다. 따라서 높은 전기 전도도를 가지면서 동시에 낮은 열 전도도를 가지게 되어 우수한 열전 특성을 가질 것이라 예상된다. 이러한 특성을 바탕으로 본 연구에서는 비정질 구조를 갖는 Zn와 미량의 Sn을 동시에 첨가한 In2O3박막의 전기적 특성및 열전 특성을 관찰하고자 한다. 본 연구에서는 magnetron sputtering법으로 IZO:Sn(Zn 10 wt.%, Sn 800 ppm) 타깃을 이용하여 기판 가열없이 DC Power 70 W, 작업 압력 0.7 Pa으로 SiO2 기판 위에 $400{\pm}20nm$ 두께의 박막을 증착하였다. 이러한 공정으로 만들어진 박막은 대기 중 후 열처리를 각각의 200, 300, 400, 500, $600^{\circ}C$ 온도에서 진행하였다. 박막의 미세 구조는 XRD를 통해 관찰하였다. 그리고 박막의 전기적 특성은 Hall effect measurement을 통해 측정하였고, 열전 특성은 Seebeck 상수의 측정을 통하여 평가하였다. XRD 확인 결과 RT에서 증착한 박막과 후 열처리 200, 300, 400, $500^{\circ}C$ 결과 비정질 구조를 보였고, 후열처리 $600^{\circ}C$에서는 결정의 회절 피크를 보였다. 전기적 특성의 경우, 후 열처리 온도가 증가함에 따라 전기 전도도는 감소한다. 이는 공기중의 산소가 박막에 침투하여 oxygen vacancy를 막아 캐리어 밀도가 감소한것에 기인 된 것으로 판단된다. 열전 특성의 경우 제백상수는 후 열처리 $600^{\circ}C$에서 가장 높은 제백상수를 나타낸다. 제백 상수는 수식에 따라 캐리어 밀도의 -2/3승에 비례하게 된다. 수식에 따라 후 열처리 $600^{\circ}C$에서 가장 낮은 캐리어 밀도를 가지기 때문에 가장 높은 제백 상수를 가지게 된다. 열전 성능 척도인 Power factor는 제백 상수의 제곱과 전기전도도의 곱으로 나타내는데, 후 열처리 $200^{\circ}C$에서 가장 높은 Power factor를 보인다. 이는 캐리어 밀도 감소에 따라 전기 전도도는 감소하였지만 이로 인해 제백상수는 증가하였고, 또한 캐리어 밀도 감소에 따라 이온화 불순물 산란의 감소에 의해 이동도의 증가에 의한 것으로 판단된다. 박막의 경우 기판의 영향으로 인해 열 전도도 측정이 어려워 열전 성능 지수(ZT)를 계산을 할 수 없지만, 마그네트론 스퍼터링법으로 증착한 IZO:Sn 박막은 비정질 구조를 가지므로 격자진동에 의한 열 전도도가 낮아 전체 열 전도도가 결정질에 비해 낮을 것이며 이는 높은 열전 성능 지수를 가질 것으로 예상된다.

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Progress in $MgB_2$ Superconductor Wires and Tapes

  • Kim, Jung-Ho;Kumakura, Hiroaki;Rindflesich, Matthew;Dou, Shi Xue;Hwang, Soo-Min;Joo, Jin-Ho
    • Progress in Superconductivity
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    • v.12 no.2
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    • pp.75-81
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    • 2011
  • We report on the progress that has been made in developing $MgB_2$ superconducting wires and tapes for commercialization and research efforts. A number of techniques have been developed to overcome the obstacle posed by the poor critical current density ($J_c$) of pristine $MgB_2$. Chemical doping has proved to be the effective way to modify and enhance the superconducting properties, such as the $J_c$ and the irreversibility field ($B_{irr}$). More than 100 different types of dopants have been investigated over the past 8 years. Among these, the most effective dopants have been identified to be SiC and malic acid ($C_4H_6O_5$). The best results, viz. a $B_{irr}$ of 22 T and $J_c$ of $30,000\;A{\cdot}cm^{-2}$ at 4.2 K and 10 T, were reported for malic acid doped $MgB_2$ wires, which matched the benchmark performance of commercial low temperature superconductor wires. In this work, we discuss the progress made in $MgB_2$ conductors over the past few years at the University of Wollongong, Hyper Tech Research, Inc., and Ohio State University.

Silicon Electro-optic Orbital Angular Momentum Sign Modulator for Photonic Integrated Circuit (광 집적회로용 실리콘 기반 궤도 각운동량 부호 변환기)

  • Lee, In-Joon;Kim, Sang-In
    • The Journal of the Korea institute of electronic communication sciences
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    • v.15 no.4
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    • pp.659-664
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    • 2020
  • In this paper, we propose a silicon-based electro-optic (EO) modulator which can modulate a sign of a topological charge number l of |l|=1 orbital angular momentum (OAM) mode. The proposed EO modulator consists of position-dependent doped Si waveguide core and undoped SiO2, cladding, which enables control of the effective index and propagation loss of two OAM constitutive eigenmodes. The modulator functions as OAM mode maintaining waveguide at -0.33V and as topological charge sign inverter at 10V. The output OAM mode purity is calculated through electric field distribution, showing high purity of |l|>0.92 in both cases.

A Search for Red Phosphors Using Genetic Algorithm and Combinatorial Chemistry (유전알고리즘과 조합화학을 이용한 형광체 개발)

  • 이재문;유정곤;박덕현;손기선
    • Journal of the Korean Ceramic Society
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    • v.40 no.12
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    • pp.1170-1176
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    • 2003
  • We developed an evolutionary optimization process involving a genetic algorithm and combinatorial chemistry (combi-chem), which was tailored exclusively for tile development of LED phosphors with a high luminescent efficiency, when excited by soft ultra violet irradiation. The ultimate goal of our study was to develop oxide red phosphors, which are suitable for three-band white Light Emitting Diodes (LED). To accomplish this, a computational evolutionary optimization process was adopted to screen a Eu$^{3+}$-doped alkali earth borosilicate system. The genetic algorithm is a well-known, very efficient heuristic optimization method and combi-chem is also a powerful tool for use in an actual experimental optimization process. Therefore the combination of a genetic algorithm and combi-chem would enhance the searching efficiency when applied to phosphor screening. Vertical simulations and an actual synthesis were carried out and promising red phosphors for three-band white LED applications, such as Eu$_{0.14}$Mg$_{0.18}$Ca$_{0.07}$Ba$_{0.12}$B$_{0.17}$Si$_{0.32}$O$_{\delta}$, were obtained.

Ellipsometric study of Mn-doped $Bi_4Ti_3O_{12}$ thin films

  • Yoon, Jae-Jin;Ghong, Tae-Ho;Jung, Yong-Woo;Kim, Young-Dong;Seong, Tae-Geun;Kang, Lee-Seung;Nahm, Sahn
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.173-173
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    • 2010
  • $Bi_4Ti_3O_{12}$ ($B_4T_3$) is a unique ferroelectric material that has a relatively high dielectric constant, high Curie temperature, high breakdown strength, and large spontaneous polarization. As a result this material has been widely studied for many applications, including nonvolatile ferroelectric random memories, microelectronic mechanical systems, and nonlinear-optical devices. Several reports have appeared on the use of Mn dopants to improve the electrical properties of $B_4T_3$ thin films. Mn ions have frequently been used for this purpose in thin films and multilayer capacitors in situations where intrinsic oxygen vacancies are the major defects. However, no systematic study of the optical properties of $B_4T_3$ films has appeared to date. Here, we report optical data for these films, determined by spectroscopic ellipsometry (SE). We also report the effects of thermal annealing and Mn doping on the optical properties. The SE data were analyzed using a multilayer model that is consistent with the original sample structure, specifically surface roughness/$B_4T_3$ film/Pt/Ti/$SiO_2$/c-Si). The data are well described by the Tauc-Lorentz dispersion function, which can therefore be used to model the optical properties of these materials. Parameters for reconstructing the dielectric functions of these films are also reported. The SE data show that thermal annealing crystallizes $B_4T_3$ films, as confirmed by the appearance of $B_4T_3$ peaks in X-ray diffraction patterns. The bandgap of $B_4T_3$ red-shifts with increasing Mn concentration. We interpret this as evidence of the existence deep levels generated by the Mn transition-metal d states. These results will be useful in a number of contexts, including more detailed studies of the optical properties of these materials for engineering high-speed devices.

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Optimization of Electrochemical Etching Parameters in Porous Silicon Layer Transfer Process for Thin Film Solar Cell (초박형 태양전지 제작에 Porous Silicon Layer Transfer기술 적용을 위한 전기화학적 실리콘 에칭 조건 최적화에 관한 연구)

  • Lee, Ju-Young;Koo, Yeon-Soo;Lee, Jae-Ho
    • Journal of the Microelectronics and Packaging Society
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    • v.18 no.1
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    • pp.23-27
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    • 2011
  • Fabrication of porous silicon(PS) double layer by electrochemical etching is the first step in process of ultrathin solar cell using PS layer transfer process. The porosity of the porous silicon layer can be controlled by regulating the formation parameters such as current density and HF concentration. PS layer is fabricated by electrochemical etching in a chemical mixture of HF and ethanol. For electrochemical etching, highly boron doped (100) oriented monocrystalline Si substrates was used. Ths resistivity of silicon is $0.01-0.02\;{\Omega}{\cdot}cm$. The solution composition for electrochemical etching was HF (40%) : $C_2H_5OH$(99 %) : $H_2O$ = 1 : 1 : 2 (by volume). In order to fabricate porous silicon double layer, current density was switched. By switching current density from low to high level, a high-porosity layer was fabricated beneath a low-porosity layer. Etching time affects only the depth of porous silicon layer.

Physical Characterization of GaAs/$\textrm{Al}_{x}\textrm{Ga}_{1-x}\textrm{As}$/GaAs Heterostructures by Deep Level transient Spectroscopy (DLTS 방법에 의한 GaAs/$\textrm{Al}_{x}\textrm{Ga}_{1-x}\textrm{As}$/GaAs 이종구조의 물성분석에 관한 연구)

  • Lee, Won-Seop;Choe, Gwang-Su
    • Korean Journal of Materials Research
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    • v.9 no.5
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    • pp.460-466
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    • 1999
  • The deep level electron traps in AP-MOCVD GaAs/undoped Al\ulcornerGa\ulcornerAs/n-type GaAs heterostructures have been investigated by means of Deep Level Transient Spectroscopy DLTS). In terms of the experimental procedure, GaAs/undoped Al\ulcornerGa\ulcornerAs/n-type GaAs heterostructures were deposited on 2" undoped semi-insulating GaAs wafers by the AP-MOCVD method at $650^{\circ}C$ with TMGa, AsH3, TMAl, and SiH4 gases. The n-type GaAs conduction layers were doped with Si to the target concentration of about 2$\times$10\ulcornercm\ulcorner. The Al content was targeted to x=0.5 and the thicknesses of Al\ulcornerGa\ulcornerAs layers were targeted from 0 to 40 nm. In order to investigate the electrical characteristics, an array of Schottky diodes was built on the heterostructures by the lift-off process and Al thermal evaporation. Among the key results of this experiment, the deep level electron traps at 0.742~0.777 eV and 0.359~0.680 eV were observed in the heterostructures; however, only a 0.787 eV level was detected in n-type GaAs samples without the Al\ulcornerGa\ulcornerAs overlayer. It may be concluded that the 0.787 eV level is an EL2 level and that the 0.742~0.777 eV levels are related to EL2 and residual oxygen impurities which are usually found in MOCVD GaAs and Al\ulcornerGa\ulcornerAs materials grown at $630~660^{\circ}C$. The 0.359~0.680 eV levels may be due to the defects related with the al-O complex and residual Si impurities which are also usually known to exist in the MOCVD materials. Particularly, as the Si doping concentration in the n-type GaAs layer increased, the electron trap concentrations in the heterostructure materials and the magnitude of the C-V hysteresis in the Schottky diodes also increased, indicating that all are intimately related.ated.

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A study on the thermochromism of $V_{1-x}M_xO_2$thin film ($V_{1-x}M_xO_2$박막의 thermochromism에 대한 연구)

  • Lee, Si-U;Lee, Mun-Hui
    • Korean Journal of Materials Research
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    • v.4 no.6
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    • pp.715-722
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    • 1994
  • Thermochromic $Vo_{2}$ thin films for "smart windows" were prepared by electron beam evaporationmethod on a glass substrate and spectral transmittances were examined by spectrophotometer. Substratetemperature of $300^{\circ}C$ and annealing temperature of $400^{\circ}C$ were found to be effective to give athermochromism on $Vo_{2}$ thin film due to the crystallization of the thin film. Furthermore, annealing of$Vo_{2}$ thin film affected the spectral transmittance and reduced the transmittance significantly at wavelengthbelow 500nm.$V_{0.95}W_{0.05}O_{2}$ thin film doped by 5 atomic percent of W showed semiconductor-metal transition around 0$0^{\circ}V_{0.995}W_{0.005}O_{2}$thin film which contains 0.5 atomic percent Sn showed therrnochrornisrn when it was depositedat substrate temperature of $300^{\circ}C$ and annealed at $450^{\circ}C$ for 5 hours in argon gas. The transitiontemperature of the $V_{0.995}W_{0.005}O_{2}$ thin film was found to be about $25^{\circ}C$ and showed some hysterisis. and showed some hysterisis.

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