• Journal of Welding and Joining
• /
• v.32 no.3
• /
• pp.68-73
• /
• 2014

Among through silicon via (TSV) technologies, for replacing Cu filling method, the method of molten solder filling has been proposed to reduce filling cost and filling time. However, because Sn alloy which has a high coefficient of thermal expansion (CTE) than Cu, CTE mismatch between Si and molten solder induced higher thermal stress than Cu filling method. This thermal stress can deteriorate reliability of TSV by forming defects like void, crack and so on. Therefore, we fabricated SiC composite filling material which had a low CTE for reducing thermal stress in TSV. To add SiC nano particles to molten solder, ball-typed SiC clusters, which were formed with Sn powders and SiC nano particles by ball mill process, put into molten Sn and then, nano particle-dispersed SiC composite filling material was produced. In the case of 1 wt.% of SiC particle, the CTE showed a lowest value which was a $14.8ppm/^{\circ}C$ and this value was lower than CTE of Cu. Up to 1 wt.% of SiC particle, Young's modulus increased as wt.% of SiC particle increased. And also, we observed cross-sectioned TSV which was filled with 1 wt.% of SiC particle and we confirmed a possibility of SiC composite material as a TSV filling material.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.14 no.4
• /
• pp.1883-1889
• /
• 2013

Although Fe-Si based alloy has lower figure of merit than Si-Ge alloy applied for space probe, its low cost related to abundant raw material, rather simple processing, high temperature resistance and reliability up to $800^{\circ}C$ made it one of the most promising middle temperature thermoelectric generation materials. The effect of particle size and additive on the thermoelectric properties of p-$FeSi_2$ prepared by a RF inductive furnace was investigated. The electrical conductivity increased slightly with decreasing particle size and hence better grain-to-grain connectivity due to the increase of density. The Seebeck coefficient exhibited the maximum value at about 600~800K and decreased slightly with increasing particle size. This must be due to the amount of residual metallic phase ${\varepsilon}$-FeSi. $Fe_2O_3$ and/or $Fe_3O_4$-doped specimens showed the higher electrical conductivity and the lower Seebeck coefficient due to increase of the metallic phase and Si-vacancy. On the other hand, $SiO_2$-doped specimen showed the higher electrical conductivity and the higher Seebeck coefficients.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
• /
• 2002.10b
• /
• pp.237-239
• /
• 2002

The effect of particle sizes of the metal matrix composites containing 10 wt.%SiCp was investigated with using various tools. The results showed that tool life decreased considerably with increasing particle size and cutting speed. The wear resistance of TiC-coated tools was considerably higher than that of the other tools. It was observed that abrasive wear was the main responsible mechanism for wear of the tool thermal cracks were at high speed while a built-edge formation was also evident at lower speed.

• Journal of Korean Society for Atmospheric Environment
• /
• v.21 no.6
• /
• pp.639-647
• /
• 2005

A single particle analytical technique, named low-Z particle electron probe X-ray microanalysis (EPMA), was applied to characterize samples collected at a subway station and ambient samples in Seoul. According to their chemical composition, many distinctive particle types were identified. For samples collected at the subway station platform, the major chemical species are carbon-rich, organic, aluminosilicates (AlSi), AlSi/C, AlSi/$CaCO_{3},\;CaCO_{3},\;SiO_{2},\;and\;Fe_{2}O_{3}$. For outdoor samples, carbon-rich, organic, AlSi, $CaCO_{3},\;SiO_{2},\;NaNO_{3},\;(Na,Mg)NO_{3},\;Na(CO_{3},NO_{3},SO_{4}),\;and\;(NH_{4})_2SO_4$, are abundantly encountered. Samples collected at the subway station show very high contents of $Fe_{2}O_{3}$, both in coarse and fine fractions, which come from brake block, subway train wheel, electric contact materials, etc. It is demonstrated that the single-particle characterization using this low-Z particle EPMA technique provided detailed information on various types of chemical species in indoor and outdoor samples.

• Journal of Mechanical Science and Technology
• /
• v.14 no.8
• /
• pp.830-835
• /
• 2000

The thermodynamical estimation of the interfacial reaction and the impact properties of $Nb/MoSi_2$ laminate composites containing SiC, $NbSi_2$ or $ZrO_2$ particles are investigated. Laminate composites, which comprise alternating layers of $MoSi_2$ with the particle and Nb foil, were fabricated by the hot press process. It is clearly found out that the interfacial reaction of $Nb/MoSi_2$ can be controlled by the addition of $ZrO_2$ particle to the $MoSi_2$ phase. The addition of $ZrO_2$ particle increases both the impact value and the sintered density of Nb/McSij, The suppression of the interfacial reaction is caused by the formation of $ZrSiO_2$ in $MoSi_2-ZrO_2$ matrix mixture.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2001.11b
• /
• pp.121-125
• /
• 2001

We study the feasibility of synthesizing Si particles using PLA method. In the previous studies, it was possible to control the size of Si nanoparticles by the He gas pressure. In this study, we fabricated sub-micron size Si particles with various shapes such as conical, hexagonal, and ring by controlling not only the ambient gas pressure but also the laser energy density. Furthermore, we found that the conical Si particles were uniform-sized and had step shape when observed from FE-SEM and AFM. The conical Si particle has the same crystal structure as the bulk single crystalline Si by the analysis of the Raman scattering. It is shown that the relationship between the laser energy density and the He gas pressure inside the chamber affects the shape of the Si particle.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2001.11a
• /
• pp.121-125
• /
• 2001

We study the feasibility of synthesizing Si particles using PLA method. In the previous studies, it was possible to control the size of Si nanoparticles bythe He gas pressure. In this study, we fabricated sub-micron size Si particles with various shapes such as conical, hexagonal, and ring by controlling not only the ambient as pressure but also the laser energy density. Furthermore, we found that the conical Si particles were uniform-sized and had step shape when observed from FE-SEM and AFM. The conical Si particle has the same crystal structure as the bulk single crystalline Si by the analysis of the Raman scattering. It is shown that the relationship between the laser energy density and the He gas pressure inside the chamber affects the shape of the Si particle.

• Tribology and Lubricants
• /
• v.39 no.2
• /
• pp.72-75
• /
• 2023

Silicon carbide (SiC) is used as a substrate material for power semiconductors; however, SiC chemical mechanical polishing (CMP) requires considerable time owing to its chemical stability and high hardness. Therefore, researchers are attempting to increase the material removal rate (MRR) of SiC CMP using various methods. Mixed-abrasive CMP (MAS CMP) is one method of increasing the material removal efficiency of CMP by mixing two or more particles. The aim of this research is to study the mathematical modeling of the MRR of MAS CMP of SiC with SiO₂ and TiO₂ particles. With a total particle concentration of 32 wt, using 80-nm SiO₂ particles and 25-nm TiO₂ particles maximizes the MRR at 8 wt of the TiO₂ particle concentration. In the case of 5 nm TiO₂ particles, the MRR tends to increase with an increase in TiO₂ concentration. In the case of particle size 10-25 nm TiO₂, as the particle concentration increases, the MRR increases to a certain level and then decreases again. TiO₂ particles of 25 nm or more continuously decreased MRR as the particle concentration increased. In the model proposed in this study, the MRR of MAS CMP of SiC increases linearly with changes in pressure and relative speed, which shows the same result as the Preston's equation. These results can contribute to the future design of MAS; however, the model needs to be verified and improved in future experiments.

• Journal of Powder Materials
• /
• v.6 no.3
• /
• pp.215-223
• /
• 1999

The synthesis of $Ni_5Si_2,\;Ni_2Si$ and NiSi has been investigated by mechanical alloying (MA) of Ni-27.9at%Si, Ni-33.3at%Si and Ni-50.0at%Si powder mixtures. As-received and premilled elemental powders were subjected to MA. The as-received Ni powder was spherical and the mean particle size 48.8$\mu$m, whereas the premilled Ni powder was flaky and the mean particle diameter and thickness were found to be 125 and 5$\mu$m, respectively. The mean surface area of the premilled Mi powder particle was 3.5 times as large as that of the as-received Ni powder particle. The as-received Si powder was was 10.0$\mu$m. Self-propagating high-temperature synthesis (SHS) reaction, followed by a slow reaction (a solid state diffusion), was observed to produce each Ni silicide during MA of the as-received elemental powders. In other word , the reactants and product coexisted for a long period of MA of time. Only SHS reaction was, however, observed to produce each Ni silicide during MA of the premilled elemental powders, indicating that each Ni sillicide formed rather abruptly at a short period of MA time. The mechanisms and reaction rates for the formation of the Ni silicides appeared to be influenced by the elemental powder particle size and shape as well as the heat of formation of the products $(Ni_5Si_2$longrightarrow-43.1kJ/mol.at., $Ni_2Si$$\rightarrow$-47.6kJ/mol.at.).

• Journal of the Korean Crystal Growth and Crystal Technology
• /
• v.29 no.1
• /
• pp.12-18
• /
• 2019

The spherical $SiO_2$ powders were synthesized by the scaled-up ultrasonic pyrolysis (USP). The aqueous $SiO_2$ sol, which contained 20~30 nm $SiO_2$ particles, was used as a precursor for the scaled-up USP. The effects of the USP operating conditions and precursor conditions were systematically investigated, including reaction temperature, gas flow rate, and the concentration of $SiO_2$ sol on the morphologies of synthesized $SiO_2$ particles. the synthesized $SiO_2$ particle showed a pseudo-crystal phase, spherical morphology, and a smooth surface. The size of the spherical $SiO_2$ particle decreased as both reaction temperature increased and precursor concentration decreased. In addition, the synthesized $SiO_2$ particle size was increased by increasing the gas flow rate. Lastly, the scaled-up USP was compared with the lab-scale USP based on the same process conditions. Due to a short retention time in the reaction tube during the USP process, the $SiO_2$ particle synthesized via the lab-scale USP showed a larger particle size.