• 제목/요약/키워드: Shottky Barrier Height

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Variations of Interface Potential Barrier Height and Leakage Current of (Ba, Sr)$TiO_3$ Thin Films Deposited by Sputtering Process

  • Hwang, Cheol-Seong;Lee, Byoung-Taek
    • The Korean Journal of Ceramics
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    • 제2권2호
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    • pp.95-101
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    • 1996
  • Variations of the leakage current behaviors and interface potential barrier $({\Phi}_B)$ of rf-sputter deposited (Ba, Sr)$TiO_3$ (BST) thin films with thicknesses ranging from 20 nm to 150nm are investigated as a function of the thickness and bias voltages. The top and bottom electrodes are dc-sputter-deposited Pt films. ${\Phi}_B$ critically depends on the BST film deposition temperature, postannealing atmosphere and time after the annealing. The postannealing under $N_2$ atmosphere results in a high interface potential barrier height and low leakage current. Maintaining the BST capacitor in air for a long time reduces the ${\Phi}_B$ from about 2.4 eV to 1.6 eV due to the oxidation. ${\Phi}_B$ is not so dependent on the film thickness in this experimental range. The leakage conduction mechanism is very dependent on the BST film thickness; the 20 nm thick film shows tunneling current, 30 and 40 nm thick films show Shottky emission current.

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고내압용 Au/Ni/Ti/3C-SiC 쇼트키 다이오드의 제작과 그 특성 (Fabrication of a Au/Ni/Ti/3C-SiC Schottky Diode and its Characteristics for High-voltages)

  • 심재철;정귀상
    • 한국전기전자재료학회논문지
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    • 제24권4호
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    • pp.261-265
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    • 2011
  • This paper describes the fabrication and characteristics of a Au/Ni/Ti/3C-SiC Schottky diode with field plate (FP) edge termination. The Schottky contacts were annealed for 30 min at temperatures ranging from 0 to $800^{\circ}C$. At annealing temperature of $600^{\circ}C$, it showed an inhomogeneous Schottky barrier and had the best electrical characteristics. However, the annealing of $800^{\circ}C$ replaced it with ohmic behaviors because of the formation of many different types of nickel silicides. The fabricated Schottky diode had a breakdown voltage of 200 V, Schottky barrier height of 1.19 eV and worked normally even at $200^{\circ}C$.

GaAs MESFET의 온도변화에 다른 게이트 누설전류 특성 (Gate Leakage Current Characteristics of GaAs MESFETS′ with different Temperature)

  • 원창섭;김시한;안형근;한득영
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 하계학술대회 논문집
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    • pp.50-53
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    • 2001
  • In this study, gate leakage current mechanism has been analyzed for GaAs MESFET with different temperatures ranging from 27$^{\circ}C$ to 300$^{\circ}C$ . It is expected that the thermionic and field emission at the MS contact will dominate the current flow. Thermal cycle is applied to test the reliability of the device. From the results, it is proved that thermal stress gradually increases the gate leakage current at the same bias conditions and leads to the breakdown and failure mechanism which is critical in the field equipment. Finally the gate contact under the repeated thermal shock has been tested to check the quality of Schottky barrier and the current will be expressed in the analytical from to associate with the electrical characteristics of the device.

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Gate Leakage Current of Power GaAs MESFET's at High Temperature

  • Won Chang-sub;Ahn Hyungkeun;Han Deuk-Young
    • 전력전자학회:학술대회논문집
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    • 전력전자학회 2001년도 Proceedings ICPE 01 2001 International Conference on Power Electronics
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    • pp.44-46
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    • 2001
  • Increase of gate leakage current causes decrease of gain and increase of noise. In this paper, gate leakage current of GaAs MESEFTs' has been traced with different temperatures from $27^{\circ}C\;to\;350^{\circ}C$ to obtain the zero voltage saturation current $J_s$ which is critical to the temperature dependency of total current. From the results, thermal leakage current coefficient has been proposed to compensate for the total current due to the thermionic emission, tunneling, generation and/or hole injection.

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Metal/SiC(4H) 쇼트키 다이오드의 포텐셜 장벽 높이 (Potential barrier height of Metal/SiC(4H) Schottky diode)

  • 박국상;김정윤;이기암;남기석
    • 한국결정성장학회지
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    • 제8권4호
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    • pp.640-644
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    • 1998
  • Sb/SiC(4H) 및 Ti/SiC(4H) 쇼트키 다이오드(SBD)를 제작하여 그 특성을 조사하였다. 용량-전압(C-V) 측정으로부터 얻은 n-형 SiC(4H)의 주개(donor) 농도는 약 $2.5{\times}10 ^{17}{\textrm}cm^{-3}$이었다. 순방향 전류-전압(I-V) 특성의 기울기로부터 얻은 Sb/SiC(4H) 쇼트키 다이오드의 이상계수는 1.31이었고, 역방향 항복전장(breakdown field)은 약 4.4$\times$102V/cm 이었다. 용량-전압(C-V) 측정으로부터 얻은 Sb/SiC(4H) SBD의 내부전위(built-in potential) 및 쇼트키 장벽 높이는 각각 1.70V 및 1.82V이었다. Sb/SiC(4H)의 장벽높이 1.82V는 Ti/SiC(4H)의 0.91V보다 높았다. 그러나 Sb/SiC(4H)의 전류밀도와 역방향 항복전장은 Ti/SiC(4H)의 것보다 낮았다. Ti/SiC(4H)는 물론 Sb/SiC(4H) 쇼트키 다이오드는 고전력 전자소자로서 유용하다.

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