• 제목/요약/키워드: Shaped crystal growth

검색결과 76건 처리시간 0.042초

EFG법에 의한 ${\Alpha} - Al_2O_3$ tube 단결정 성장 (${\Alpha} - Al_2O_3$ tube shaped single crystal growth by the EFG method)

  • 박한수;한종원;전병식;오근호
    • 한국결정성장학회지
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    • 제5권1호
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    • pp.11-18
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    • 1995
  • EFG 장치를 설계제작하여 ${\Alpha} - Al_2O_3$ tube 형태의 단결정을 육성하였다. 서로 다른 두 개의 heating arrangement를 고안하여 각각의 결정 성장조건을 비교 검토하였으며, 각각의 heating arrangement에서 성장된 tube 단결정의 결함을 비교하여 안정한 성장 조건을 확립하였다.

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The development of automated control system for the growth of shaped sapphire crystals: combined control

  • Borodin, A.V.;Borodin, V.A.;Petkov, I.S.;Sidorov, V.V.
    • 한국결정성장학회지
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    • 제9권4호
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    • pp.437-440
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    • 1999
  • New method of control based upon a physical model of the Stepanov growth technique has been developed. The controller keeps the system stable and completely denies operator's interference into the process. The system demonstrates very reliable results under commercial production of shaped sapphire crystals.

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EFG법에 의한 Sapphire Ribbon 단결정 성장 (Sapphire Ribbon Single Crystal Growth by EFG Method)

  • 박신서;류두형;정재우;최종건;오근호;손선기;변영재;전형탁
    • 한국세라믹학회지
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    • 제27권6호
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    • pp.783-789
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    • 1990
  • Shaped crystal growth apparatus were made for sapphire ribbon single crystal growth. Sapphire ribbon single crystal are grown by EFG(Edge-defined Film-fed Growth) methdo for use as watch-glass and SOS(Silicon-On-Sapphire) devices. Sapphire ribbon crystals were grown to be 40min wide, 1.8mm thick, 96mm long. Therelationshiops between growth striation and surface roughness, with various growth rates, were investigated and compared. It was found that sapphire ribbon crystal is suitable for watch-glass by measuring the transmittance in the visible light region.

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THE DEVELOPMENT OF AUTOMATED CONTROL SYSTEM FOR THE GROWTH OF SHAPED SAPPHIRE CRYSTALS: COMBINED CONTROL

  • Borodin, A.V.;Borodin, V.A.;Petkov, I.S.;Sidorov, V.V.
    • 한국결정성장학회:학술대회논문집
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    • 한국결정성장학회 1999년도 PROCEEDINGS OF 99 INTERNATIONAL CONFERENCE OF THE KACG AND 6TH KOREA·JAPAN EMG SYMPOSIUM (ELECTRONIC MATERIALS GROWTH SYMPOSIUM), HANYANG UNIVERSITY, SEOUL, 06월 09일 JUNE 1999
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    • pp.361-369
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    • 1999
  • New method of control based upon a physical model of the Stepanov growth technique has been developed. The controller keeps the system stable and completely denies operator's interference into the process. The system demonstrates very reliable results under commercial production of shaped sapphire crystals.

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PVT 방법에 의한 링 모양의 SiC 다결정 성장 (Crystal growth of ring-shaped SiC polycrystal via physical vapor transport method)

  • 박진용;김정희;김우연;박미선;장연숙;정은진;강진기;이원재
    • 한국결정성장학회지
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    • 제30권5호
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    • pp.163-167
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    • 2020
  • 본 연구에서는 PVT(Physical Vapor Transport) 방법을 이용하여 반도체 식각 공정용 소재로 사용되는 링 모양의 SiC(Silicon carbide) 다결정을 제조하였다. 흑연 도가니 내부에 원기둥 모양의 흑연 구조물을 배치하여 PVT법에 의한 링 모양의 SiC 다결정을 성장시켰다. 성장된 결정은 Raman 및 UVF(Ultra Violet Fluorescence) 분석을 이용하여 결정의 상분석을 하였고, SEM(Scanning Electron Microscope), EDS(Energy Dispersive Spectroscopy) 분석을 통해 미세조직 및 성분을 확인하였다. PVT 성장 초기의 온도변화를 통하여 SiC 다결정의 결정립 크기와 성장 속도를 조절할 수 있었다.

AlN 단결정 성장에 대한 반복 성장성에 관한 연구 (A study on the repeatability of large size of AlN single crystal growth)

  • 강승민
    • 한국결정성장학회지
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    • 제28권4호
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    • pp.148-151
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    • 2018
  • 물리기상이동법(Physical Vapor Transport(PVT) method)을 적용하여 질화알루미늄 단결정을 성장하였다. 자체적으로 성장하고 제조한 직경 33 mm 크기의 종자결정을 사용하여 직경 46 mm, 길이 7.6 mm 크기의 벌크단결정을 성장하였으며, 성장 온도는 $1950{\sim}2100^{\circ}C$, 성장 압력은 0.1~1 atm의 범위에서 조절하여 반복 성장을 통하여 성장한 결과를 보고하고자 한다.

Macroscopic and microscopic mass transfer in silicon czochralski method

  • Kakimoto, Koichi
    • 한국결정성장학회지
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    • 제9권4호
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    • pp.381-383
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    • 1999
  • First topic of this paper aims to clarify how oxygen and heat transfer in silicon melt under cusp-shaped magnetic fields. We obtained asymmetric temperature distribution by using time dependent and three-dimensional calculation. Second topic is study on molecular dynamics simulation, which was carried out to estimate diffusion constants of oxygen in silicon melt.

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Growth of 1 inch $LuVO_4$ single crystals by the edge-defined film-fed-growth (EFG) technique

  • Kochurikhin, V.V.;Klassen, A.V.;Kvyat, E.V.;Ivanov, M.A.
    • 한국결정성장학회지
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    • 제15권6호
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    • pp.222-224
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    • 2005
  • In suite of their superior optical and laser properties rare-earth orthovanadate single crystals have not been adopted yet into extensive industrial applications because of crystal growth difficulties. The edge-defined film-fed-growth (EFG) technique was applied successfully for the production of such crystals. At first time 1 inch $LuVO_4$ single crystals were grown by the EFG technique using newly developed die construction of high porous iridium with the application of automatic diameter control system.