• Ceramist
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• v.7 no.3
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• pp.38-47
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• 2004

최근 micro structure, micro sensor, micro actuator 및 microelectronics 등을 활용하는 microelectromecha-nical systems (MEMS) 기술은 마이크로 로봇, micro manipulation, 광학 소자 및 시스템, 유체, 열, 바이오 및 화학공정 등을 위한 시스템 그리고 atomic force와 scanning tunneling microscope 등에 사용되는 다양한 소자 등 많은 잠재력을 가지고 있다. 이들 응용 분야 들은 micro actuator와 같은 mechanical power source가 요구되는 경우가 있다. 압전 특성을 포함하는 강유전체 재료는 이러한 micro actuator를 위해 여러 가지 다양한 장점을 지니고 있는데, 이들을 정리하면 다음과 같다. (중략)

• Journal of Sensor Science and Technology
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• v.10 no.2
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• pp.125-133
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• 2001

Conducting polymer sensors show high sensitivity when exposed to volatile organic compounds gases at room temperature. The 8 sensor array using by polypyrrole and polyaniline has been fabricated by chemical polymerization for measuring sensing characteristics of VOCs gases. Conducting polymer was polymerized by using distilled pyrrole, aniline as a monomer and ammonium persulfate (APS) as an oxidant and dodecylbenzene sulfonic acid (DBSA) as a dopant. Dedoped film was synthesized by reverse voltage and redoped film was synthesized by using 1-octanesulfonic acid sodium salt as another dopant in electrochemical cell. The sensitivity and reversibility were influenced by doping, dedoping, redoping and thickness for the polypyrrole and polyaniline. We investigated the relation between the structure of conducting polymer and sensitivity of these sensors through the analysis of scanning electron microscope (SEM), scanning probe microscope (SPM) and $\alpha$-step.

• Korean Journal of Materials Research
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• v.24 no.9
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• pp.451-457
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• 2014

We developed a high-performance methane gas sensor based on a $SnO_2$ hollow hemisphere array structure of nano-thickness. The sensor structures were fabricated by sputter deposition of Sn metal over an array of polystyrene spheres distributed on a planar substrate, followed by an oxidation process to oxidize the Sn to $SnO_2$ while removing the polystyrene template cores. The surface morphology and structural properties were examined by scanning electron microscopy. An optimization of the structure for methane sensing was also carried out. The effects of oxidation temperature, film thickness, gold doping, and morphology were examined. An impressive response of ~220% was observed for a 200 ppm concentration of $CH_4$ gas at an operating temperature of $400^{\circ}C$ for a sample fabricated by 30 sec sputtering of Sn, and oxidation at $800^{\circ}C$ for 2 hr in air. This high response was enabled by the open structure of the hemisphere array thin films.

• Journal of the Korean Society for Precision Engineering
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• v.14 no.5
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• pp.34-41
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• 1997

The dimension measurement problem of products has been a major concern in the quality control in the industrial fields. A non-contacting measurement system using the vision sensor is proposed in this paper. The system consists of a CCD camera for the image capture, a frame grabber for the acquired image processing, a laser unit for the illumination, scanning unit for the measurement, and a personal computer for the geometry computation. The slit beam which is generated by passing the laser beam through a cylin- drical lens is fired to the axial-symmetric object on the rotating plate. The image of objects reflected by the laser slit beam, acquired by the CCD camera, becomes much brighter than the other parts of objects. After the histogram of brightness for the captured image is calculated, low intensity pixels are filtered out by threshold method. The performance of proposed measurement system is obtained for several different axial symmetric objects. The proposed system is verified as a good tool for measuring axial-symmetric parts in a limited condition with a minor investment cost.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.21 no.6
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• pp.499-502
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• 2008

In this work, Ga-doped ZnO (GZO) thin films for gas sensor application were deposited on low temperature co-fired ceramics (LTCC) substrates, by RF magnetron sputtering method. The LTCC substrate is one of promising materials for this application since it has many advantages (e.g., low cost production, high manufacturing yields and easy realizing 3D structure etc.). The LTCC substrates with thickness of $400\;{\mu}m$ were fabricated by laminating 12 green tapes which consist of alumina and glass particle in an organic binder. The structural properties of the fabricated GZO thin film with thickness of 50 nm is analyzed by X-ray diffraction method (XRD) and field emission scanning electron microscope (FESEM). The film shows good adhesion to the substrate. The GZO gas sensors are tested by gas measurement system and show fast response and recovery characteristics to $NO_x$ gas that is 27.2 and 27.9 sec, recpectively.

• Proceedings of the KSME Conference
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• 2007.05a
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• pp.1439-1443
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• 2007

In this paper, vibration reduction techniques of a voice coil motor (VCM) actuator are presented for AFM imaging system. The damping coefficient of the actuator driven by VCM with a flexure hinge is quite low and it cause the about 30dB peak amplitude response at the resonance frequency. To decrease this peak response, we design and apply elliptical band-stop filters to xy and z axis VCM actuator. Frequency response of each actuator with filter is measured to verify the effect of the filters. As a sensor, capacitive sensor is used. Vibration reduction rate of the xy actuator with the filter is also measured while real AFM scanning condition. As another method, closed loop control with the capacitive sensor is applied to the xy axis actuator to add an electrical damping effect and vibration reduction rate measured. These vibration reduction rates with each method are compared. In the case of z axis actuator, the frequency response of force (gap) control loop is measured. For comparison, the frequency response using a conventional PID controller is also obtained. Finally, the AFM image of a standard grid sample is measured with the designed controller to analyze the effect in the AFM imaging.

• Journal of Sensor Science and Technology
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• v.17 no.1
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• pp.9-14
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• 2008

In this paper, the gas responses of tungsten oxide films prepared by anodic reaction was discussed. Sensing electrodes and heating electrodes were patterned by photolithography method on quartz substrate. Porous tungsten oxide was fabricated in electrolyte solutions of 5 % HF (HF :$C_2H_6OH:H_2O$=3 : 2 : 20) by anodic reaction. The anodic reaction with metal (platinum wire) as a cathode and the sensing device as an anode was conducted under the various reaction times (1-10 min) at 10 mA/$cm^2$ The surface structure and morphology of the fabricated sensor have been analysed by X-ray diffraction (XRD) and field-emission scanning electron microscopy (FE-SEM). All the peaks of XRD results were well indexed to the pure phase pattern. The average diameter of the porous tungsten oxide surface were ranged about 100 nm. The fabricaed sensor showed good sensitivity to 200 ppm toluene at operating temperature of $250^{\circ}C$.

• JSTS:Journal of Semiconductor Technology and Science
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• v.6 no.4
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• pp.293-298
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• 2006

Thermopiezoelectric method, using poly silicon heater and a piezoelectric sensor, was proposed for writing and reading in a probe based data storage system. Resistively heated tip writes data bits while scanning over a polymer media and piezoelectric sensor reads data bits from the self-generated charges induced by the deflection of the cantilever. 34${\times}$34 array of thermopiezoelectric nitride cantilevers were fabricated by a single step wafer level transfer method. We analyzed the noise level of the charge amplifier and measured the noise signal. With the sensor and the charge amplifier 20mn of deflection could be detected at a frequency of 10KHz. Reading signal was obtained from the cantilever array and the sensitivity was calculated.

• Journal of the korean society of oceanography
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• v.38 no.4
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• pp.166-172
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• 2003

Multi­Sensor Core Logger (MSCL) is a useful system for logging the physical properties (compressional wave velocity, wet bulk density, fractional porosity, magnetic susceptibility and/or natural gamma radiation) of marine sediments through scanning of whole cores in a nondestructive fashion. But MSCL has a number of problems that can lead to spurious results depending on the various factors such as core slumping, gas expansion, mechanical stretching, and the thickness variation of core liner and sediment. For the verification of MSCL data, compressional wave velocity, wet bulk density, and porosity were measured on discrete samples by Hamilton Frame and Gravimetric method, respectively. Acoustic impedance was also calculated. Physical property data (velocity, wet bulk density, and impedance) logged by MSCL were slightly larger than those of discrete sample, and porosity is reverse. Average difference between MSCL and discrete sample at both sites is relatively small such as 22­24 m/s in velocity, $0.02­-0.08\;g/\textrm{cm}^3$ in wet bulk density, and 2.5­2.7% in porosity. The values also show systematic variation with sediment depth. A variety of factors are probably responsible for the differences including instrument error, various measurement method, sediment disturbance, and accuracy of calibration. Therefore, MSCL can be effectively used to collect physical property data with high resolution and quality, if the calibration is accurately completed.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.450-450
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• 2011

This study reports the hydrogen sulfide gas sensing properties of ZnO nanorods bundle and the investigation of gas sensing mechanism. Also the improvement of sensing properties was also studied through the application of ZnO heterstructured nanorods. The 1-Dimensional ZnO nano-structure was synthesized by hydrothermal method and ZnO nano-heterostructures were prepared by sonochemical reaction. Scanning electron microscopy (SEM) and X-ray diffraction (XRD) spectra confirmed a well-crystalline ZnO of hexagonal structure. The gas response of ZnO nanorods bundle sensor increased with increasing temperature, which is thought to be due to chemical reaction of nanorods with gas molecules. Through analysis of X-ray photoelectron spectroscopy (XPS), the sensing mechanism of ZnO nanorods bundle sensor was explained by well-known surface reaction between ZnO surface atoms and hydrogen sulfide. However at high sensing temperature, chemical conversion of ZnO nanorods becomes a dominant sensing mechanism in current system. In order to improve the gas sensing properties, simple type of gas sensor was fabricated with ZnO nano-heterostructures, which were prepared by deposition of CuO, Au on the ZnO nanorods bundle. These heteronanostructures show higher gas response and higher current level than ZnO nanorods bundle. The gas sensing mechanism of the heteronanostructure can be explained by the chemical conversion of sensing material through the reaction with target gas.