• Journal of Sensor Science and Technology
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• v.14 no.2
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• pp.131-135
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• 2005

This paper describes the ohmic contact formation of single crystalline 3C-SiC thin films heteroepitaxially grown on Si(001) wafers. In this work, a TiW (Titanium-tungsten) film as a contact matieral was deposited by RF magnetron sputter and annealed with the vacuum and RTA (rapid thermal anneal) process respectively. Contact resistivities between the TiW film and the n-type 3C-SiC substrate were measured by the C-TLM (circular transmission line model) method. The contact phases and interface the TiW/3C-SiC were evaulated with XRD (X-ray diffraction), SEM (scanning electron microscope) and AES (Auger electron spectroscopy) depth-profiles, respectively. The TiW film annealed at $1000^{\circ}C$ for 45 sec with the RTA play am important role in formation of ohmic contact with the 3C-SiC substrate and the contact resistance is less than $4.62{\times}10^{-4}{\Omega}{\cdot}cm^{2}$. Moreover, the inter-diffusion at TiW/3C-SiC interface was not generated during before and after annealing, and kept stable state. Therefore, the ohmic contact formation technology of single crystalline 3C-SiC using the TiW film is very suitable for high temperature MEMS applications.

• Journal of Sensor Science and Technology
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• v.20 no.2
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• pp.71-76
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• 2011

To characterize the relationship between the stage of hepatic fibrosis and bioimpedance, several electric parameters were estimated in rats with $CCl_4$-induced liver fibrosis. Thirty three Sprague-Dawley rats were intraperitoneally injected with a $CCl_4$-mineral oil mixture (1:1, 0.2 mL/100 g) twice a week for 8 weeks. The resistance(R), reactance(X), impedance(Z), and dissipation factor(D) between 1 kHz and 100 kHz were then evaluated in the livers of the rats under pentobarbital anesthesia using an HP4294A Impedance Analyzer. The rats were killed 2, 4, 6, and 8 weeks later, and their livers were classified in accordance with Ishak's scoring system. R, X, and Z changed in accordance with the progression of hepatic fibrosis and the changes were greater at lower frequencies than at higher frequencies. In comparison, the D spectrum was biphasic; D increased initially then decreased with increasing frequency. All of the parameters(R, X, Z, and D) changed in accordance with the stage of fibrosis in the livers, but D changed specifically with the progression of fibrosis. These results indicate that hepatic fibrosis may be evaluated by determining the changes in D.

• Journal of Sensor Science and Technology
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• v.13 no.1
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• pp.35-40
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• 2004

A thin-film multijunction thermal converter was fabricated through the process using 6 inch silicon wafer semiconductor process and bulk micromachining. Evanohm R alloy and chromel-constantan were used as a heater and thermocouple materials, respectively. The temperature coefficient of resistance of Evanohm R heater was about 75.12 ppm/$^{\circ}C$ and the voltage sensitivity of the thermal converter indicated about 5.75 mV/mW in air. The transfer differences, measured by FRDC-DC method in the frequency range from 20 Hz to 10 kHz, showed the value under about 1.36 ppm, 0.83 ppm for the film thickness of 500, 200 nm, respectively. And in case of a 200 nm-thick thermal converter, the AC-DC transfer differences seems to be stabilized below the value of 1 ppm in the frequency range from 1 kHz to 500 kHz.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.65 no.8
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• pp.1430-1435
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• 2016

Electrical impedance tomography (EIT) has been applied to measure the location of external disturbance using a phantom and conductive yarns. According to the test results, the addition of carbon nanotube particles into the phantom does not show remarkable improvement in location errors. On the other hand combined fabric, conductive yarns with fabric, and non-woven fabric, were added to evaluate its performance as a fabric sensor. The combined fabric resulted in a decrease of 21.5% in the circumferential location error and a decrease of 50% in the radial location error, compared to those of the yarns. Additionally, it was revealed that the measurement error is almost linearly proportional to the conductivity of the phantom liquid and resistance of the conductive yarns. The combined fabric can be a promising material for fabric sensors in sports utilities and medical devices.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.18 no.8
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• pp.1-7
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• 2019

Materials that can be used for 3D printing have been developed in terms of phase and functionality. Materials should also be easily printed with high accuracy. In recent years, the concept of 4D printing has been extended to materials whose physical properties such as shape or volume can change depending on the environment. Typically, such high-performance 3D printing materials include bio-inks and inks for sensors. This study deals with the optimization of the manufacturing method to improve the functional properties of the pressure sensitive material, which can be used as a sensor based on change of the resistance according to the pressure. Specifically, the number of milling for dispersion, the ratio of hardener for controlling elasticity, and the content of MWCNTs were optimized. As a result, a method of manufacturing a highly sensitive pressure-sensitive ink capable of use in 3D printing was introduced.

• International Journal of Naval Architecture and Ocean Engineering
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• v.4 no.1
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• pp.9-19
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• 2012

A set of equations of motion is derived for vibratory motions of an underwater cable connected to a moving vehicle at one end and with drogues at the other end. From the static analysis, cable configurations are obtained for different vehicle speeds and towing pretensions are determined by fluid resistance of drogues. Also the dynamic analysis is required to predict its vibratory motion. Nonlinear fluid drag forces greatly influence the dynamic tension. In this study, a numerical analysis program was developed to find out the characteristic of cable behaviour. The motion is described in terms of space and time coordinates based on Chebyshev polynomial expansions. For the spatial integration the collocation method is employed and the Newmark method is applied for the time integration. Dynamic tensions, displacements, velocities, accelerations were predicted in the time domain while natural frequencies and transfer functions were obtained in the frequency domain.

• Korean Chemical Engineering Research
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• v.57 no.2
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• pp.259-266
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• 2019

Tuning of electro-optical properties of nano-structured $SnO_2:Ga$ powders in a micro drop fluidized reactor (MDFR) was highly effective to enhance the activities of powders to be used as sensor materials. The tuning was conducted continuously in a facile one-step process during the formation of powders. The microscopic hydrodynamic forces affected the band gap structure and charge transfer of $SnO_2:Ga$ powders through the oxygen and interfacial tin vacancies by providing plausible pyro-hydraulic conditions, which resulted in the decrease in the electrical resistance of the materials. The analyses of room-temperature photoluminescence (PL) spectra and FT-IR exhibited that the tuning could improve the surface activities of $SnO_2:Ga$ powders by adjusting the excitation as well as separation of electrons and holes, thus maximizing the oxygen vacancies at the surface of the powders. The scheme of photocatalytic mechanism of $SnO_2:Ga$ powders was also discussed.

• Korean Journal of Materials Research
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• v.29 no.2
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• pp.121-128
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• 2019

Supercapacitors are attracting much attention in sensor, military and space applications due to their excellent thermal stability and non-explosion. The ionic liquid is more thermally stable than other electrolytes and can be used as a high temperature electrolyte, but it is not easy to realize a high temperature energy device because the separator shrinks at high temperature. Here, we report a study on electrochemical supercapacitors using a composite electrolyte film that does not require a separator. The composite electrolyte is composed of thermoplastic polyurethane, ionic liquid and fumed silica nanoparticles, and it acts as a separator as well as an electrolyte. The silica nanoparticles at the optimum mass concentration of 4wt% increase the ionic conductivity of the composite electrolyte and shows a low interfacial resistance. The 5 wt% polyurethane in the composite electrolyte exhibits excellent electrochemical properties. At $175^{\circ}C$, the capacitance of the supercapacitor using our free standing composite electrolyte is 220 F/g, which is 25 times higher than that at room temperature. This study has many potential applications in the electrolyte of next generation energy storage devices.

• Journal of Sensor Science and Technology
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• v.28 no.2
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• pp.117-120
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• 2019

Graphene is recognized as a promising material for silicon photonics, since it has a wide optical-window that entirely covers the optical communication wavelength region ($1.3{\sim}1.6-{\mu}m$) and extremely high-carrier mobility that makes it possible to fabricate the high-speed photodetectors. However, the maximum absorbance of monolayer graphene is only 2.3%, which limits the photoresponse characteristics of graphene photodetectors. As a result, a low photoresponsivity of graphene photodetector is a critical issue limiting the use of graphene photodetectors in the optical communications field. In this paper, we investigated effects of optically-modulated metal-graphene contact on the photoresponsivity of graphene photodetectors. The optical modulation of the contact resistance mainly determined the photoresponse characteristics of graphene photodetectors. The Ni-contact graphene photodetector which has a characteristic of the significant optical modulation of metal-graphene contact showed a higher photoresponsivity than the Pd-contact device. This work will provide a way to improve the photoresponse characteristics of graphene-based photodetector and contribute to the development of high-speed/high-responsivity graphene photodetector.

• Journal of Sensor Science and Technology
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• v.28 no.2
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• pp.127-132
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• 2019

In this study, the fabrication of through-silicon vias (TSVs) filled with SWNTs/Sn by utilizing surface/bulk micromachining and MEMS technologies is proposed. Tin (Sn) and single-walled nanotube (SWNT) powders are used as TSV interconnector materials in the development of a novel TSV at low temperature. The measured resistance of a TSV filled with SWNT/Sn powder is considerably reduced by increasing the fraction of Sn and is lower than that of a TSV filled with only Sn. This is because of a decrease in the surface scattering of electrons along with an increase in the grain size of sintered SWNTs/Sn. The proposed method is conducted at low temperatures (< $400^{\circ}C$) due to the low melting temperature of Sn; hence, the proposed TSVs filled with SWNTs/Sn can be utilized in CMOS based applications.