• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집
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• pp.181-184
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• 2002

This paper describes fabrication and characteristics of ceramic pressure sensor for working at high temperature. The proposed pressure sensor consists of a Ta-N thin-film, patterned on a Wheatstone bridge configuration, sputter deposited onto thermally oxidized Si membranes with an aluminium interconnection layer. The fabricated pressure sensor presents a low temperature coefficient of resistance, high sensitivity, low non-linearity and excellent temperature stability The sensitivity is 1.097∼1.21 mV/V$.$kgf/$\textrm{cm}^2$ in the temperature range of 25∼200$^{\circ}C$ and the maximum non-linearity is 0.43 %FS.

• 한국전기전자재료학회논문지
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• 제23권5호
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• pp.383-387
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• 2010

The response characteristics of AE (acoustic emission) sensors with a coupled vibration mode and a non-coupled vibration mode were investigated according to PD(partial discharge) quantities in XLPE (cross linked polyethylene) sheets and craft papers immersed in insulating oil. The response voltages of a coupled vibration mode AE sensor were linearly proportional to the PD quantities up to 1,000 pC in XLPE sheets, while a non-coupled vibration mode AE sensor did not show the similar linearity. In case of a test of craft papers immersed in insulating oil, a linearity between response voltages and PD quantities was observed up to 550 pC, but after that, similar linearity between response voltage of any types of AE sensor and PD quantities was not shown.

• 한국전기전자재료학회논문지
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• 제14권5호
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• pp.405-409
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• 2001

This paper describes fabrication and characteristics of metal thin-film pressure sensor for working at high temperature. The proposed pressure consists of a chrom thin-film, patterned on a Wheat stone bridge configuration, sputter-deposited onto thermally oxidized Si membranes with an aluminium interconnection layer. The fabricated pressure sensor presents a low temperature coefficient of resistance, high-sensitivity, low non-linearity and excellent temperature stability. The sensitivity is 1.097∼1.21mV/V$.$kgf/$\textrm{cm}^2$ in the temperature range of 25∼200$^{\circ}C$ and the maximum non-linearity is 0.43%FS.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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• pp.456-459
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• 2002

This paper describes fabrication and characteristics of ceramic pressure sensor for working at high temperature. The proposed pressure sensor consists of a Ta-N thin-film, patterned on a Wheatstone bridge configuration, sputter deposited onto thermally oxidized Si membranes with an aluminium interconnection layer. The fabricated pressure sensor presents a low temperature coefficient of resistance, high sensitivity, low non-linearity and excellent temperature stability. The sensitivity is 1.097~1.21mV/$V{\cdot}kgf/cm^2$ in the temperature range of $25{\sim}200^{\circ}C$ and the maximum non-linearity is 0.43 %FS.

• 한국정밀공학회지
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• 제22권8호
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• pp.50-56
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• 2005

This paper is described a development of an optical fiber displacement sensor. The optical fiber sensor using an intensity modulated measures the displacement between target and sensor. A prototype sensor is composed of a transmitting part, a receiving part and a signal processing circuit. The experiment was conducted not only the sensor performance but also factors that affect intensity. The main performance of this sensor is resolution of 0.37um and the non-linearity $0.7\%$ FS and the dynamic bandwidth of about 6.3kHz. As a result of rotation test, the prototype sensor showed an equivalent performance to a commercial eddy current sensor.

• 센서학회지
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• 제23권6호
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• pp.392-396
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• 2014

The 2-dimensional silicon vertical Hall devices, which are sensitive to X,Y components of the magnetic field parallel to the surface of the chip, are fabricated using a modified bipolar process. It consists of the thin p-layer at Si-$SiO_2$ interface and n-epi layer to improve the sensitivity and influence of interface effect. Experimental samples are a sensor type K with and type J without $p^+$ isolation dam adjacent to the center current electrode. The results for both type show a more high sensitivity than the former's 2-dimensional vertical Hall devices and a good linearity. The measured non-linearity is about 0.8%. The sensitivity of type J and type K are about 66 V/AT and 200 V/AT, respectively. This sensor's behavior can be explained by the similar J-FET model.

• 센서학회지
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• 제25권2호
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• pp.148-154
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• 2016

This paper describes the design and fabrication of a two-axis force/torque sensor and an one-axis force sensor with parallel plate beams(PPSs) for measuring forces and torque in an ankle rehabilitation exercise using by a lower rehabilitation robot. The two-axis force/torque sensor is composed of a Fy force sensor and Tz torque sensor and the force sensor detects x direction force. The two-axis force/torque sensor and one-axis force sensor were designed using by FEM(Finite Element Method), and manufactured using strain-gages. The characteristics experiment of the two-axis force/torque sensor and one-axis force sensor were carried out respectively. As a test results, the interference error of the two-axis force/torque sensor was less than 1.56%, the repeatability error and the non-linearity of the two-axis force/torque sensor were less than 0.03% respectively, and the repeatability error and the non-linearity of the one-axis force sensor were less than 0.03% and 0.02% respectively.

• 센서학회지
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• 제26권5호
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• pp.353-359
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• 2017

This paper describes the design and manufacture of a ankle two-axis force sensor of a walking assist robot for hemiplegic leg patient. The walking assist robot for the hemiplegic leg patient can safely control the robot by detecting whether the foot wearing the walking assist robot is in contact with the obstacle or not. To do so, a two-axis force sensor should be attached to the robot's ankle. The sensor is used to measure the force of a patient's ankle lower part. The two-axis force sensor is composed of a Fx force sensor, a Fy force sensor and a pulley, and they detect the x and y direction forces, respectively. The two-axis force sensor was designed using by FEM(Finite Element Method), and manufactured using by strain-gages. The characteristics experiment of the two-axis force sensor was carried out respectively. The test results indicated that the interference error of the two-axis force sensor was less than 1.2%, the repeatability error and the non-linearity of the two-axis force sensor was less than 0.04% respectively. Therefore, the fabricated two-axis force sensor can be used to measure the force of ankle lower part in the walking assist robot.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1995년도 Proceedings of the Korea Automation Control Conference, 10th (KACC); Seoul, Korea; 23-25 Oct. 1995
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• pp.154-157
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• 1995

A magnetic levitation control system is nonlinear and very unstable. Thus there should be a stabilizing compensation network and a feedback path. Due to the levitation control a noncontact photoresistor sensor is generally used. One photocell provides a certain amount of variation in length by the ball shadow casted on the cell surface. Furthermore at the boundary of the cell, the linearity of sensitivity deteriorates severely. To overcome the constraints of the length and linearity, an efficient sensor array is deviced and applied in the feedback path of a large-gap magnetic levitation control system. A number of CdS photocells and a summing circuit of the sensor output signals are used for a sensor array. The levitation length of a ball and the transient performances are main objectives of the large-gap suspension system using the sensor array.

• 센서학회지
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• 제14권4호
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• pp.237-243
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• 2005

Strain gauge type load cell is used widely as weight sensor. However, it has problems such as noise, power consumption, high cost and big size. Semiconductor type piezoresistive pressure sensor is practically used in recent for low hysteresis, good linearity, small size, light weight and strong on vibration. In this paper, we have fabricated the piezoresistive pressure sensor and packaged the miniature weight sensor. We packaged the miniature weight sensor by flip-chip bonding between die and PCB for durability, because the weight sensor is directly contacted on a physical solid distinct from air and oil pressure. We measured the characteristics of the weight sensor, which had the output of $10{\sim}80$ mV on the weight range of $0{\sim}2$ kg. In the result, we could fabricate the weight sensor with an accuracy of 3 %FSO linearity.