• Title, Summary, Keyword: Sensor linearity

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The Fabrication of a Ceramic Pressure Sensor Using Tantalum Nitride Thin-Films (질화탄탈박막을 이용한 세라믹 압력센서의 제작)

  • 정수용;최성규;이종춘;정귀상
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • pp.181-184
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    • 2002
  • This paper describes fabrication and characteristics of ceramic pressure sensor for working at high temperature. The proposed pressure sensor consists of a Ta-N thin-film, patterned on a Wheatstone bridge configuration, sputter deposited onto thermally oxidized Si membranes with an aluminium interconnection layer. The fabricated pressure sensor presents a low temperature coefficient of resistance, high sensitivity, low non-linearity and excellent temperature stability The sensitivity is 1.097∼1.21 mV/V$.$kgf/$\textrm{cm}^2$ in the temperature range of 25∼200$^{\circ}C$ and the maximum non-linearity is 0.43 %FS.

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The Fabrication of Ceramic Thin-Film Type Pressure Sensors for High-Temperature applications (고온용 세라믹 박막형 압력센서의 제작)

  • Kim, Jae-Min;Choi, Sung-Kyu;Chung, Gwiy-Sang
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • pp.456-459
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    • 2002
  • This paper describes fabrication and characteristics of ceramic pressure sensor for working at high temperature. The proposed pressure sensor consists of a Ta-N thin-film, patterned on a Wheatstone bridge configuration, sputter deposited onto thermally oxidized Si membranes with an aluminium interconnection layer. The fabricated pressure sensor presents a low temperature coefficient of resistance, high sensitivity, low non-linearity and excellent temperature stability. The sensitivity is 1.097~1.21mV/$V{\cdot}kgf/cm^2$ in the temperature range of $25{\sim}200^{\circ}C$ and the maximum non-linearity is 0.43 %FS.

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Response Characteristics of Acoustic Emission Sensor according to Partial Discharge Quantities (부분방전 전하량에 따른 음향방출 센서의 응답특성)

  • Jeong, Yeong-Ho
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.23 no.5
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    • pp.383-387
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    • 2010
  • The response characteristics of AE (acoustic emission) sensors with a coupled vibration mode and a non-coupled vibration mode were investigated according to PD(partial discharge) quantities in XLPE (cross linked polyethylene) sheets and craft papers immersed in insulating oil. The response voltages of a coupled vibration mode AE sensor were linearly proportional to the PD quantities up to 1,000 pC in XLPE sheets, while a non-coupled vibration mode AE sensor did not show the similar linearity. In case of a test of craft papers immersed in insulating oil, a linearity between response voltages and PD quantities was observed up to 550 pC, but after that, similar linearity between response voltage of any types of AE sensor and PD quantities was not shown.

Fabrication of Metal Thin-Film Pressure Sensor and Its Characteristics (금속박막형 압력세서의 제작과 그 특성)

  • 정귀상;최성규;남효덕;이원재;송재성
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.14 no.5
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    • pp.405-409
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    • 2001
  • This paper describes fabrication and characteristics of metal thin-film pressure sensor for working at high temperature. The proposed pressure consists of a chrom thin-film, patterned on a Wheat stone bridge configuration, sputter-deposited onto thermally oxidized Si membranes with an aluminium interconnection layer. The fabricated pressure sensor presents a low temperature coefficient of resistance, high-sensitivity, low non-linearity and excellent temperature stability. The sensitivity is 1.097∼1.21mV/V$.$kgf/$\textrm{cm}^2$ in the temperature range of 25∼200$^{\circ}C$ and the maximum non-linearity is 0.43%FS.

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Performance Improvement of CO Sensor Signal Conditioner for Early Fire Detection System (조기화재 감시시스템을 위한 CO센서의 시그널컨디셔너 성능개선)

  • Park, Jong-Chan;Shon, Jin-Geun
    • The Transactions of the Korean Institute of Electrical Engineers P
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    • v.66 no.2
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    • pp.82-87
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    • 2017
  • This paper presents performance improvement of CO gas sensor signal conditioner for early fire warning system. The warning system is based on the CO sensor and its advanced signal conditioning modules network that employ electochemical gas sensor. The electochemical has advantage of having a linear output and operating with a low consumption and fast response. This electrochemical gas sensor contains a gas membrane and three electrodes(working, counter, reference electrode) in contact with an electrolyte. To use a three-electrode sensor, a voltage has to be applied between the working and the reference electrode according to the specification of the sensor. In this paper, we designed these requirements that should be considered in temperature compensation algorithm and electrode measurement of CO sensor modules by using advanced signal conditioning method included 3-electrode. Simulation and experimental results show that signal conditioner of CO sensor module using 3-electrode have a advantage linearity, sensitivity and stability, fast response etc..

Development of Optical Fiber Displacement Sensor for Non-contact Vibration Measurement in the High Speed Rotation System (고속회전체의 진동 측정용 비접촉 광섬유 변위센서 개발)

  • Lee, Kee-Seok;Hong, Jun-Hee;Shin, Woo-Cheol
    • Journal of the Korean Society for Precision Engineering
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    • v.22 no.8
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    • pp.50-56
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    • 2005
  • This paper is described a development of an optical fiber displacement sensor. The optical fiber sensor using an intensity modulated measures the displacement between target and sensor. A prototype sensor is composed of a transmitting part, a receiving part and a signal processing circuit. The experiment was conducted not only the sensor performance but also factors that affect intensity. The main performance of this sensor is resolution of 0.37um and the non-linearity $0.7\%$ FS and the dynamic bandwidth of about 6.3kHz. As a result of rotation test, the prototype sensor showed an equivalent performance to a commercial eddy current sensor.

Magnetic Sensitivity Improvement of 2-Dimensional Silicon Vertical Hall Device (2 차원 Si 종형 Hall 소자의 자기감도 개선)

  • Ryu, Ji-Goo
    • Journal of Sensor Science and Technology
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    • v.23 no.6
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    • pp.392-396
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    • 2014
  • The 2-dimensional silicon vertical Hall devices, which are sensitive to X,Y components of the magnetic field parallel to the surface of the chip, are fabricated using a modified bipolar process. It consists of the thin p-layer at Si-$SiO_2$ interface and n-epi layer to improve the sensitivity and influence of interface effect. Experimental samples are a sensor type K with and type J without $p^+$ isolation dam adjacent to the center current electrode. The results for both type show a more high sensitivity than the former's 2-dimensional vertical Hall devices and a good linearity. The measured non-linearity is about 0.8%. The sensitivity of type J and type K are about 66 V/AT and 200 V/AT, respectively. This sensor's behavior can be explained by the similar J-FET model.

Design of Force Sensors for the Ankle Rehabilitation Robot of Severe Stroke Patients (중증뇌졸중환자의 발목재활로봇을 위한 힘센서 설계)

  • Kim, Han-Sol;Kim, Gab-Soon
    • Journal of Sensor Science and Technology
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    • v.25 no.2
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    • pp.148-154
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    • 2016
  • This paper describes the design and fabrication of a two-axis force/torque sensor and an one-axis force sensor with parallel plate beams(PPSs) for measuring forces and torque in an ankle rehabilitation exercise using by a lower rehabilitation robot. The two-axis force/torque sensor is composed of a Fy force sensor and Tz torque sensor and the force sensor detects x direction force. The two-axis force/torque sensor and one-axis force sensor were designed using by FEM(Finite Element Method), and manufactured using strain-gages. The characteristics experiment of the two-axis force/torque sensor and one-axis force sensor were carried out respectively. As a test results, the interference error of the two-axis force/torque sensor was less than 1.56%, the repeatability error and the non-linearity of the two-axis force/torque sensor were less than 0.03% respectively, and the repeatability error and the non-linearity of the one-axis force sensor were less than 0.03% and 0.02% respectively.

Design of Calf Link Force Sensor of Walking Assist Robot of Leg Patients (편마비 다리환자를 위한 보행보조로봇의 발목 2축 힘센서 설계)

  • Choi, Chi-Hun;Kim, Gab-Soon
    • Journal of Sensor Science and Technology
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    • v.26 no.5
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    • pp.353-359
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    • 2017
  • This paper describes the design and manufacture of a ankle two-axis force sensor of a walking assist robot for hemiplegic leg patient. The walking assist robot for the hemiplegic leg patient can safely control the robot by detecting whether the foot wearing the walking assist robot is in contact with the obstacle or not. To do so, a two-axis force sensor should be attached to the robot's ankle. The sensor is used to measure the force of a patient's ankle lower part. The two-axis force sensor is composed of a Fx force sensor, a Fy force sensor and a pulley, and they detect the x and y direction forces, respectively. The two-axis force sensor was designed using by FEM(Finite Element Method), and manufactured using by strain-gages. The characteristics experiment of the two-axis force sensor was carried out respectively. The test results indicated that the interference error of the two-axis force sensor was less than 1.2%, the repeatability error and the non-linearity of the two-axis force sensor was less than 0.04% respectively. Therefore, the fabricated two-axis force sensor can be used to measure the force of ankle lower part in the walking assist robot.

AN EFFICIENT SENEOR ARRAY FOR A LATFE-GAP MAGNETIC LEVITATION SYSTEM

  • Na, Seung-You;Shin, Dae-Jung
    • 제어로봇시스템학회:학술대회논문집
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    • pp.154-157
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    • 1995
  • A magnetic levitation control system is nonlinear and very unstable. Thus there should be a stabilizing compensation network and a feedback path. Due to the levitation control a noncontact photoresistor sensor is generally used. One photocell provides a certain amount of variation in length by the ball shadow casted on the cell surface. Furthermore at the boundary of the cell, the linearity of sensitivity deteriorates severely. To overcome the constraints of the length and linearity, an efficient sensor array is deviced and applied in the feedback path of a large-gap magnetic levitation control system. A number of CdS photocells and a summing circuit of the sensor output signals are used for a sensor array. The levitation length of a ball and the transient performances are main objectives of the large-gap suspension system using the sensor array.

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