• 제목/요약/키워드: Sensor Sensitivity

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Fabrication of Micromachined Ceramic Thin-Film Pressure Sensors for High Overpressure Tolerance

  • Chung, Gwiy-Sang
    • 한국반도체및디스플레이장비학회:학술대회논문집
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    • 한국반도체및디스플레이장비학회 2002년도 추계학술대회 발표 논문집
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    • pp.59-63
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    • 2002
  • This paper reports on the fabrication process and characteristics of a ceramic thin-film pressure sensor based on Ta-N strain-gauges for harsh environment applications. The Ta-N thin-film strain-gauges are sputter-deposited on a thermally oxidized micromachined Si diaphragms with buried cavities for overpressure tolerance. The proposed device takes advantage of the good mechanical properties of single-crystalline Si as a diaphragm fabricated by SDB and electrochemical etch-stop technology, and in order to extend the temperature range, it has relatively higher resistance, stability and gauge factor of Ta-N thin-films more than other gauges. The fabricated pressure sensor presents a low temperature coefficient of resistance, high-sensitivity, low non-linearity and excellent temperature stability. The sensitivity is 1.21 ~ 1.097 mV/V.kgf/$\textrm{cm}^2$ in temperature ranges of 25~ $200^{\circ}C$ and a maximum non-linearity is 0.43 %FS.

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고감도 CCD센서 카메라의 영상신호 성능향상을 위한 DSP 회로 설계 (A DSP Circuit Design on Improvement of Video Signal With High Sensotivity CCD Sensor Camera)

  • 박재철;김용득
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 2007년도 하계종합학술대회 논문집
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    • pp.331-332
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    • 2007
  • This Paper deals with the high sensitive camera circuit design, which is more sensitive than those on the market now in a way that it got rid of chronic smearing problem in CCD sensor and other kinds of noises in video signal effectively. This paper focused on the principle of CCD and video signal process and analyzed the specialized technique of industry and fundamental high sensitivity of CCTV camera. 1 also looked into the SONY super-HAD CCD camera which is very popular in the field now and compared this with the SONY EXview CCD camera to analyze the picture improvement using video test equipment. For the result, it had 190mv on camera sensitivity, 14dB on smearing, and 2dB on signal to noise ratio.

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$\alpha$-Fe$_2$O$_3$의 가스감지특성에 미치는 황산이온의 영향 (Effects of Sulfate Ion the Gas Sensing Characteristic of the $\alpha$-Fe$_2$O$_3$)

  • 양천희
    • 한국안전학회지
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    • 제4권1호
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    • pp.71-74
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    • 1989
  • The $\alpha$-Fe$_2$O$_3$ gas sensor, prepared by the precipitation of Fe(OH)$_3$ from a solution of iron(III) sulfate and tin (IV) chloride, was composed of fine particles and was superior in sensitivity to other $\alpha$-Fe$_2$O$_3$. The gas sensitivity was found to depend on the amounts of remaining sulfate ion the microstructure and a small amount of iron(II) species generated through the reduction of $\alpha$-Fe$_2$O$_3$. The sensing mechanism of $\alpha$-Fe$_2$O$_3$gas sensor was confirmed to be due to the reduction of $\alpha$-Fe$_2$O$_3$ to the low resistive Fe$_3$-xO$_4$ by combustible gas and to depend on the crystral structure.

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High Oxygen Sensitivity of Nanocrystalline Ceria Prepared by a Thermochemical Process

  • Lee, Dong-Won;Yu, Ji-Hoon;Lim, Tae-Soo;Jang, Tae-Suk
    • 한국분말야금학회:학술대회논문집
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    • 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part 1
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    • pp.416-417
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    • 2006
  • Nanostructured ceria powder was synthesized by a thermochemical process and investigated its applicability for an oxygen gas sensor. An amorphous precursor powders prepared by spray drying a cerium-nitrate solution were transformed successfully into nanostructured ceria by heat-treatment in air atmosphere. The powders were a loose agglomerated structure with extremely fine $CeO_2$ particles about 15 nm in size, resulting in a very high specific surface area $(110\;m^2/g)$. The oxygen sensitivity and the response time $t_{90}$ measured at sintered sample at $1000^{\circ}C$ was about -0.25 and very short, i.e., $3{\sim}5$ seconds, respectively.

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ZnO를 기반으로한 에탄올 가스 센서 (ZnO-based Ethanol Gas Sensor)

  • 최동한
    • 센서학회지
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    • 제22권6호
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    • pp.444-449
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    • 2013
  • ZnO-based ethanol gas sensors were fabricated by the painting method and their electrical and ethanol gas sensing characteristics were investigated. The ZnO-Pt (1 wt.%) film heat treated at $400^{\circ}C$, for 2 hrs. in air showed the highest sensitivity to ethanol gas in air at an operating temperature of $250^{\circ}C$ The sensitivity of the gas sensors to 1000 ppm ethanol in air at $250^{\circ}C$ was 8.7 and rising time and falling time of the gas sensors were 3.12 minutes and 25 minutes, respectively.

Discernibly Temperature-insensitive Pressure Sensitivity in Porous Random-Hole Optical Fibers

  • Kim, Jeong;Kominsky, Dan;Pickrell, Gary
    • Journal of the Optical Society of Korea
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    • 제17권4호
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    • pp.300-304
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    • 2013
  • Novel breakthrough random-hole optical fibers (RHOFs) are fabricated in a draw tower facility, by tapering an optical fiber preform packed with a silica powder mixture capable of producing air holes in situ at the high temperature of tens of hundreds in degrees Celsius. Structural and propagation characteristics of the porous RHOF are explained briefly. Experimental investigations of the invented RHOF are performed for pressure sensor applications. Remarkable results are obtained for the RHOF with desirable pressure sensitivity independent of temperature, as is required for harsh conditions as in oil reservoirs.

CMOS Binary Image Sensor with Gate/Body-Tied PMOSFET-Type Photodetector for Low-Power and Low-Noise Operation

  • Lee, Junwoo;Choi, Byoung-Soo;Seong, Donghyun;Lee, Jewon;Kim, Sang-Hwan;Lee, Jimin;Shin, Jang-Kyoo;Choi, Pyung
    • 센서학회지
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    • 제27권6호
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    • pp.362-367
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    • 2018
  • A complementary metal oxide semiconductor (CMOS) binary image sensor is proposed for low-power and low-noise operation. The proposed binary image sensor has the advantages of reduced power consumption and fixed pattern noise (FPN). A gate/body-tied (GBT) p-channel metal-oxide-semiconductor field-effect transistor (PMOSFET)-type photodetector is used as the proposed CMOS binary image sensor. The GBT PMOSFET-type photodetector has a floating gate that amplifies the photocurrent generated by incident light. Therefore, the sensitivity of the GBT PMOSFET-type photodetector is higher than that of other photodetectors. The proposed CMOS binary image sensor consists of a pixel array with $394(H){\times}250(V)$ pixels, scanners, bias circuits, and column parallel readout circuits for binary image processing. The proposed CMOS binary image sensor was analyzed by simulation. Using the dynamic comparator, a power consumption reduction of approximately 99.7% was achieved, and this performance was verified by the simulation by comparing the results with those of a two-stage comparator. Also, it was confirmed using simulation that the FPN of the proposed CMOS binary image sensor was successfully reduced by use of the double sampling process.

Pd 촉매금속의 표면형상 변형에 의한 고감도 MEMS 형 마이크로 수소가스 센서 제조공정 (Highly Sensitive MEMS-Type Micro Sensor for Hydrogen Gas Detection by Modifying the Surface Morphology of Pd Catalytic Metal)

  • 김정식;김범준
    • 한국재료학회지
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    • 제24권10호
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    • pp.532-537
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    • 2014
  • In this study, highly sensitive hydrogen micro gas sensors of the multi-layer and micro-heater type were designed and fabricated using the micro electro mechanical system (MEMS) process and palladium catalytic metal. The dimensions of the fabricated hydrogen gas sensor were about $5mm{\times}4mm$ and the sensing layer of palladium metal was deposited in the middle of the device. The sensing palladium films were modified to be nano-honeycomb and nano-hemisphere structures using an anodic aluminum oxide (AAO) template and nano-sized polystyrene beads, respectively. The sensitivities (Rs), which are the ratio of the relative resistance were significantly improved and reached levels of 0.783% and 1.045 % with 2,000 ppm H2 at $70^{\circ}C$ for nano-honeycomb and nano-hemisphere structured Pd films, respectively, on the other hand, the sensitivity was 0.638% for the plain Pd thin film. The improvement of sensitivities for the nano-honeycomb and nano-hemisphere structured Pd films with respect to the plain Pd-thin film was thought to be due to the nanoporous surface topographies of AAO and nano-sized polystyrene beads.

주파수 출력을 갖는 MAGFET Hybrid IC (MAGFET Hybrid IC with Frequency Output)

  • 김시헌;이철우;남태철
    • 센서학회지
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    • 제6권3호
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    • pp.194-199
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    • 1997
  • 자기센서가 전압이나 전류의 형태 그대로 출력되는 경우에 발생되는 잡음 유입 및 전압 손실 문제를 개선하기 위하여 소자부는 CMOS공정을 이용하여, 포화영역에서 동작하는 2 drain의 MAGFET을 설계 제작하고, 연산증폭기를 이용한 I-V변환회로, VCO(Voltage Controlled Oscillator)를 만들고 Schmitt trigger에 의한 주파수(Pulse) 변환회로의 시스템부를 하이브릿드 IC로 구성하여 packaging했다. 이 때 자기센서 절대감도는 1.9 V/T, 적감도는 $3.2{\times}10^{4}\;V/A{\cdot}T$ 이었으며 190 kHz/T의 안정된 출력 주파수 특성을 얻을 수 있었다.

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자동 보정형 디지털 제어기 설계에 관한 연구 (A Study on the Design of Digital Controllers with Automatic Calibration)

  • 나승유;박민상
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 1998년도 추계종합학술대회 논문집
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    • pp.413-416
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    • 1998
  • Sensitivity and calibration considerations are most important in the design and implementation of real control systems. Ideally parameter changes due to various causes should not appreciably affect the system's performances. But all the values of physical components of the plants and controllers as well as the relevant environmental conditions change in time, thus the output performance can be deteriorated during the operating span of the system. Naturally the duty of calibration or the prevention of performance deterioration due to excessive component sensitivity should be provided to the control system. In this paper, we propose a digital controller which has the capability of calibration and gain adjustment as well as the execution of control law. Specifically the problems of gain adjustment and offset calibration in the light source and CdS sensor module for position measurement in a flexible link system are considerably resolved. The parameters of measurement module are prone to change due to environmental brightness conditions resulting in poor steady state performance of the overall control system. Thus a proper method is necessary to provide correction to the changed values of gain and offset in the position measurement module. The proposed controller, whenever necessary, measures the open-loop characteristics, andthen calculates the offset and sensor gain correction values based on the prepared standard measurements. It is applied to the control of a flexible link system with the gain and offset calibration porblems in the light sensor module for position to show the applicability.

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