• Journal of the Korean institute of surface engineering
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• v.37 no.2
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• pp.71-75
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• 2004

The technology of $C_{60}$ fullerite films preparation by means of gas-phase deposition and structure of fullerite films are described. A three-channel flow plant was used to obtain fullerite films. The films were deposited in the flow of inert gas under reduced pressure onto a cooled silicon or sapphire substrate placed inside the reaction chamber of the plant. The plant allows one to obtain the films of pure fullerenes and to synthesise the films from fullerene compounds and doped fullerenes. The structure of two types of films were investigated by FE-SEM and SEM techniques: pure fullerite films onto silicon and sapphire substrates as well as compound films were studied by FE-SEM technique. All samples have shown columnar structure with high level of porosity. The synthesis of films composed of fullerene and its compounds for use in electronics is demonstrated to be promising. For example, experiments confirm the possibility to use fullerite films in sensor electronics to produce humidity and thermal sensors. It is also possible to use the sensitivity of these films to isotropic pressure. The experiments with $C_{60}$-Cu-J films have shown quite strong dependence of their resistance on pressure of different sort of medium-gas that could be used in gas-sensitive sensors. The structure and preparation technology of resistive sensor based on fullerite films are described.bed.

• Journal of Sensor Science and Technology
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• v.9 no.2
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• pp.106-112
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• 2000

A FET-type reference electrode(REFET) is an effective method to eliminate typical problems with ISFET(ion sensitive field-effect transistor) such as drift, temperature, light-dependence and miniaturization of reference electrode. However, it is difficult to make the highly reliable REFET with excellent long-term stability and reproducibility. In this paper, an ion-blocking membrane was applied to the REFET for the PET-type electrolyte sensors(pH, pNa-ISFET). The fabricated REFET indicated the stable sensitivity (55.4 mV/pH, 53.5 mV/decade) and good linearity in the pH and pNa measurement. In the measurement, ISFET/Pt/REFET configuration showed excellent stability and reproducibility.

• Journal of Sensor Science and Technology
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• v.3 no.1
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• pp.5-11
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• 1994

This paper describes the characteristics of a piezoresistive pressure sensor fabricated on a SOI (Si-on-insulator) structure, in which the SOI structures of Si/$SiO_{2}$/Si and Si/$Al_{2}O_{3}$/Si were formed by SDB (Si-wafer direct bonding) technology and hetero-epitaxial growth, respectively. The SOI pressure sensors using the insulator of a SOI structure as the dielectrical isolation layer of piezoresistors, were operated at higher temperatures up to $300^{\circ}C$. In the case of pressure sensors using the insulator of a SOI structure as an etch-stop layer during the formation of thin Si diaphragms, the pressure sensitivity variation of the SOI pressure sensors was controlled to within a standard deviation of ${\pm}2.3%$ over 200 devices. Moreover, the pressure sensors fabricated on the double SOI ($Si/Al_{2}O_{3}/Si/SiO_{2}/Si$) structures formed by combining SDB technology with epitaxial growth also showed very excellent characteristics with high-temperature operation and high-resolution.

• Korean Journal of Materials Research
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• v.20 no.4
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• pp.223-227
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• 2010

Recently, one-dimensional semiconducting nanomaterials have attracted considerable interest for their potential as building blocks for fabricating various nanodevices. Among these semiconducting nanomaterials,, $SnO_2$ nanostructures including nanowires, nanorods, nanobelts, and nanotubes were successfully synthesized and their electrochemical properties were evaluated. Although $SnO_2$ nanowires and nanobelts exhibit fascinating gas sensing characteristics, there are still significant difficulties in using them for device applications. The crucial problem is the alignment of the nanowires. Each nanowire should be attached on each die using arduous e-beam or photolithography, which is quite an undesirable process in terms of mass production in the current semiconductor industry. In this study, a simple process for making sensitive $SnO_2$ nanowire-based gas sensors by using a standard semiconducting fabrication process was studied. The nanowires were aligned in-situ during nanowire synthesis by thermal CVD process and a nanowire network structure between the electrodes was obtained. The $SnO_2$ nanowire network was floated upon the Si substrate by separating an Au catalyst between the electrodes. As the electric current is transported along the networks of the nanowires, not along the surface layer on the substrate, the gas sensitivities could be maximized in this networked and floated structure. By varying the nanowire density and the distance between the electrodes, several types of nanowire network were fabricated. The $NO_2$ gas sensitivity was 30~200 when the $NO_2$ concentration was 5~20ppm. The response time was ca. 30~110 sec.

• Journal of Navigation and Port Research
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• v.29 no.10 s.106
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• pp.871-876
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• 2005

Application of semiconductor sensors has been widely spreaded into various industries because those have several merits like easy miniaturization and batch production comparison with previous mechanical sensors. But external conditions such as thermal and repetitive load have a bad effect on sensors's lifetime. Especially, this paper was focused on fatigue life of a interconnect made by various materials. Firstly we implemented the stress analysis for interconnect under thermal load and wording pressure. And the fatigue lifetime of each material was induced by Manson & Coffin Equation using the plastic stress-strain curve obtained by the plastic-elastic Finite Element Analysis. The Fatigue lifetime in its bottom is smaller than others and bending load have not an effect on the fatigue lifetime of the interconnect but the stress distribution.

• Composites Research
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• v.14 no.5
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• pp.12-19
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• 2001

In aircraft composite structures, structural defects such as matrix cracks, delaminations and fiber breakages are hard to detect if they are breaking out in operating condition. Therefore, to assure the structural integrity, it is desirable to perform the real-time health monitoring of the structures. In this study, a fiber optic sensor was applied to the composite beams to monitor failure and strain in real-time. To detect the failure signal and strain simultaneously, laser diode and ASE broadband source were applied in a single EFPI sensor using wavelength division multiplexer. Short time courier transform and wavelet transform were used to characterize the failure signal and to determine the moment of failure. And the strain measured by AEFPI was compared with the that of strain gage. From the result of the tensile test, strain measured by the AEFPI agreed with the value of electric strain gage and the failure detection system could detect the moment of failure with high sensitivity to recognize the onset of micro-crack failure signal.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.10
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• pp.1101-1109
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• 2012

Accelerometers play a key role in the structural assessment. However, the current electric type accelerometers have certain limitations to apply some structures such as heavy cabling labor, installed sea structure and sensitivity to electromagnetic fields. An optical Fiber Bragg Grating (FBG) accelerometer has many advantages over conventional electrical sensors since their immunity to electromagnetic interference and their capability to transmit signals over long distance without any additional amplifiers, and there is no corrosion from sea water. In this paper, we have developed a new FBG-based accelerometer. The accelerometer consists of two cantilevered type beams and a mass and two rollers. A bragg grating element is not directly glued to a cantilever to avoid possible non-uniform strain in the element. Instead, the bragg grating element will be attached to rotation part that rolled inducing vertical movement of the mass and support cantilever beams so that the bragg grating element is uniformly tensioned to achieve a constant strain distribution. After manufacturing, we will prove the performance and the natural frequency of the accelerometer through the experiment with a vibration shaker. The FBG-based accelerometer is developed for measuring the vibration not exceeding 50 Hz for the marine and civil structures.

• Journal of the Korean Society for Nondestructive Testing
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• v.29 no.4
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• pp.299-307
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• 2009

Emerging fiber optic sensor technologies have shown great potential to overcome the difficulties associated with conventional sensors. Fiber optic sensors are immune to EM noise and electric shock and thus can be used in explosion-prone areas. Several kinds of fiber optic sensors have been developed over the last two decades to take advantage of these merits. There have also been many field applications of fiber optic sensors for structural health monitoring as NDT/HDE. However, very few sensors, particularly a load cell have been successfully commercialized. This Paper Presents a load cell using fiber Bra99 gra1ing (FBG) sensors. The shape of the load cell is a link type, and three FBG sensors are used for measuring strains at three different points. Especially, these strains are processed with a differential method in order to exclude common mode noise such as temperature. Moreover, the sensitivity, the linearity and the resolution of the load cell were successfully verified from the experiment of tension test.

• Journal of Food Hygiene and Safety
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• v.13 no.3
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• pp.206-212
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• 1998

An improved antibody-coated sensor system based on quartz crystal microbalance was developed for the detection of Salmonella spp. An antibody against Salmonella common structural antigen was immobilized onto one gold electrode of the piezoelectric quartz crystal surface by various immobilization procedures. The best results in sensitivity and stability were obtained with the thin layers of protein A and 3,3'-dithiopropionimidate.2HCI(DTBP), a homobifunctional thiol-cleavable crosslinker. After the addition of a S. typhimurium suspension into a reaction cell with 0.1 M sodium phosphate buffer, pH 7.2, the resonant frequency owing to S. typhimurium adsorption decreased conspicuously. The antibody-immobilized crystals prepared by the gold-protein A complex formation and DTBP thiolation showed the frequency shifts of 80 and 283 Hz, respectively. The time required for maximum frequency shift was about 30~60 min. The antibody-coated crystal could be reused for 6~8 consecutive assays.

• The Journal of the Korea Contents Association
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• v.8 no.6
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• pp.8-15
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• 2008

In this paper, in order to analyze property of frequency response in optical microphone, system was implemented. The capacitance microphone and fiber-optic transmission path type fiber-optic microphone (FOM) have weaknesses in directivity, size, weight, and price. However suggested optical microphone can be constituted by cheap devices, so it has many benefits like small size, light weight, high directivity, etc. Head part of optical microphone which is suggested in this paper is movable back and forth by sound pressure with the attached reflection plate. Operating point is determined by measuring the respond characteristics and choosing the point on which has maximum linearity and sensitivity while changing the distance between optical head and vibrating plate. We measured the output of the O/E transformed signal of the optical microphone while frequency of sound signal is changed using sound measurement/analysis program, Smaart Live and USBPre, which are based on PC, and compared the result from an existing capacitance microphone. The measured Optical microphone showed almost similar output characteristics as those of the compared condenser microphone, and its bandwidth performance was about 300[Hz]-3[kHz] at up to 3 [dB].