• JSTS:Journal of Semiconductor Technology and Science
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• v.4 no.2
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• pp.128-132
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• 2004

This paper presents the design, fabrication sequence and measurement results of a highly sensitive capacitive-type humidity sensor using a polyimide film without hydrophobic elements. The structure of the humidity sensor is MIM (metalinsulator-metal). For a high sensitivity, a modified aromatic polyimides as a moisture absorbing layer has been synthesized instead of using general polyimides containing hydrophobic elements. The polyimide film was obtained by synthesizing and thermally polymerizing polyamic acid composed of m-pyromellitic dianhydride, phenelenediamine and dimethylacetamide. Characteristics of fabricated sensors which include sensitivity, hysteresis and stability have been measured. The measurement result shows the percent normalized capacitance change of 0.37/%RH over a range from 10 to 90%RH, hysteresis of 0.77% over the same %RH range and maximum drift of 0.25% at 50%RH. The result shows that the developed humidity sensor can be applied to evaluate a hermeticity of various sensors and actuator systems as well as micro packages.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.26 no.3
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• pp.40-45
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• 2012

We substantially increased the temperature sensitivity of a fiber Bragg grating temperature sensor by gluing it onto a piece of bi-metal strip. The temperature-induced Bragg wavelength shift is increased upto 5 times more than that of the intrinsic FBG sensor by the strain effect from the deflected bi-metal. We showed the feasibility of the proposed sensor by comparing the temperature measuring experiments with those of the intrinsic FBG sensors. Also we measured temperature varying the length of the bi-metal pieces and analyzed the result effect of it.

• Transactions on Electrical and Electronic Materials
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• v.13 no.5
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• pp.215-220
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• 2012

Miniature ultrasonic and tactile sensors on Si substrate have been proposed, fabricated and characterized to detect objects for a dexterous robot. The ultrasonic sensor consists of piezoelectric PZT thin film on a Pt/Ti/$SiO_2$ and/or Si diaphragm fabricated using a micromachining technique; the ultrasonic sensor detects the piezoelectric voltage as an ultrasonic wave. The sensitivity has been enhanced by improving the device structure, and the resonant frequency in the array sensor has been equalized. Position detection has been carried out by using a sensor array with high sensitivity and uniform resonant frequency. The tactile sensor consists of four or three warped cantilevers which have NiCr or $Si:B^+$ piezoresistive layer for stress detection. Normal and shear stresses can be estimated by calculation using resistance changes of the piezoresitive layers on the cantilevers. Gripping state has been identified by using the tactile sensor which is installed on finger of a robot hand, and friction of objects has been measured by slipping the sensor.

• 한국신재생에너지학회:학술대회논문집
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• 2010.06a
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• pp.51.3-51.3
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• 2010

Due to the recent public awareness of global warming and sustainable economic growth, there has been a growing interest in alternative clean energy sources. Hydrogen is considered as a clean fuel for the next generation. One of the technical challenges related to the use of hydrogen is safe monitoring of the hydrogen leak during separation, purification and transportation. For detecting various gases, chemiresistor-type gas sensors have been widely studied and used due to their well-established detection scheme and low cost. However, it is known that many of them have the limited sensitivity and slow response time, when used at low temperature conditions. In our work, a sensor based on Schottky barriers at the electrode/sensing material interface showed promising results that can be utilized for developing fast and highly sensitive gas sensors. Our hydrogen sensor was designed and fabricated based on indium oxide (In2O3)-doped tin oxide (SnO2) semiconductor nanoparticles with platinum (Pt) nanoclusters in combination with interdigitated electrodes. The sensor showed the sensitivity as high as $10^7%$ (Rair/Rgas) and the detection limit as low as 30 ppm. The sensor characteristics could be obtained via optimized materials synthesis route and sensor electrode design. Not only the contribution of electrical resistance from the film itself but also the interfacial effect was identified as an important factor that contribute significantly to the overall sensor characteristics. This promises the applicability of the developed sensor for monitoring hydrogen leak at room temperature.

• Journal of Sensor Science and Technology
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• v.20 no.6
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• pp.406-411
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• 2011

$Co_3O_4$ thick film gas sensor using the powder prepared by hydrothermal reaction method(HRM) was fabricated. For comparison study, we also prepared the sensor using commercial $Co_3O_4$ powder under the same fabrication conditions. Sensitivity, time response, and selectivity of them to variable gases such as iso-$C_4H_{10}$, CO, $NH_3$, and $CH_4$ were investigated. The sensor from the powder prepared by HRM showed higher sensitivity to every gas than those from commercial powder. For iso-$C_4H_{10}$ gas, the sensitivities of both sensor to 100 ppm are 160 % and 40 %, respectively. Time response and selectivity of the sensor using the powder prepared by HRM were better than those of the sensor using commercial powder.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.229.1-229.1
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• 2014

Tactile sensors have widely been researched in the areas of electronics, robotic system and medical tools for extending to the form of bio inspired devices that generate feeling of touch mimicking those of humans. Recent efforts in adapting the tactile sensor have included the use of novel materials with both scalability and high sensitivity [1]. Graphene, a 2-D allotrope of carbon, is a prospective candidate for sensor technology, having strong mechanical properties [2] and flexibility, including recovery from mechanical stress. In addition, its truly 2-D nature allows the formation of continuous films that are intrinsically useful for realizing sensing functions. However, very few investigations have been carrier out to investigate sensing characteristics as a device form with the graphene subjected to strain/stress and pressure effects. In this study, we present a sensor of vertical forces based on single-layer graphene, with a working range that corresponds to the pressure of a gentle touch that can be perceived by humans. In spite of the low gauge factor that arises from the intrinsic electromechanical character of single-layer graphene, we achieve a resistance variation of about 30% in response to an applied vertical pressure of 5 kPa by introducing a pressure-amplifying structure in the sensor. In addition, we demonstrate a method to enhance the sensitivity of the sensor by applying resistive single-layer graphene.

• Journal of the Korea Convergence Society
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• v.9 no.4
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• pp.137-142
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• 2018

This paper is studied, as basic research for measuring the accurate fuel amount of the CNG tank by using the transmit-receive ultrasonic sensor, the receiving sensitivity according to changed the pressure inside the tank and the contact surface of the ultrasonic sensor is analyzed. Measurement was carried out while changing the contact surface of the tank and the sensor to three shapes of Point, Line, and Surface and charging the pressure in the tank at an interval of 1 bar from 0 bar to 5 bar. Experiment results, as the pressure in the tank increased the tendency of the received signal value of the ultrasonic sensor to decrease was confirmed. As the contact area between the tank and the sensor increased, the value of the received signal increased, but the noise also increased. The results of experiment, it is judged that accuracy can be improved by changing the contact surface of the sensor.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.36D no.10
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• pp.45-50
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• 1999

We report a solder-clad fiber Bragg grating(FBG) temperature sensor in order to obtain better Bragg wavelength sensitivity to temperature than a bare FBG sensor. The solder-clad FBG sensor shows a wavelength sensitivity improvement by a factor of four compared to the case of a bare FBG sensor at temperatures below $110^{\circ}C$. However, it has a sensitivity of 0.01 $nm/^{\circ}C$ at temperatures over $110^{\circ}C$, which is identical to that of a bare FBG sensor. Bragg wavelength of the sensor shows a blue-shift below $110^{\circ}C$ because the sensor is fabricated above melting temperature of solder. The thermal stress at the FBG-solder interface has been relieved by annealing, which results in a stable operation.

• Korean Journal of Optics and Photonics
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• v.26 no.2
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• pp.83-87
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• 2015

This study was focused on developing an optical sensor that monitors ultraviolet (UV) light. Recently, we proposed and demonstrated a novel, highly sensitive UV sensor based on a fiber Bragg grating (FBG). To ensure that the incident UV light is focused on the FBG surface, the sensor was coated with an azobenzene polymer material that acts as a UV-induced stretchable functional material, in combination with a cylindrical focal lens. In this study we have improved the sensitivity of the sensor by employing a cylindrical focal mirror as a curved reflector, to refocus the UV light passing through the FBG. We considered the performance of several different types of reflectors and chose the optimal radius of curvature for the reflector. Compared to the UV sensor without an auxiliary device, the sensitivity of the FBG sensor with a focal lens and a curved reflector was 15 times as high.

• Journal of the Korean Society of Radiology
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• v.13 no.3
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• pp.333-338
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• 2019

In the field of radiotherapy, the Quality Assurance(QA) procedure to verify the safety of treatment is considered to be very important. However, due to various problems of the conventional dosimeters used for the QA, researches on these dosimeters have been actively carried out to replace them. In this study, to maximize the sensitivity by visible light(VL) emitted from phosphors, blended hybrid sensors were fabricated by blending various weight percent(wt%) of $Gd_2O_2S:Tb$ which is a phosphor with excellent fluorescence efficiency into $PbI_2$. Then, the electrical properties to high energy radiation from the blended sensors and the pure $PbI_2$ sensor were compared and evaluated. As a result of the sensitivity evaluation, the sensor of 3wt% showed the highest value with more than 40% difference from the other sensors, and gradual decreasing in sensitivity was observed with increasing wt% except for the sensor of 3wt%. Also, in the reproducibility evaluation, the pure $PbI_2$ sensor exhibited a large variation in coefficient of variation(CV)>0.015, while all the blended sensors showed CV<0.015.