• Title/Summary/Keyword: Sensor Probe

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$TiO_2$ Thin Film Patterning on Modified Silicon Surfaces by MOCVD and Microcontact Printing Method

  • 강병창;이종현;정덕영;이순보;부진효
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.77-77
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    • 2000
  • Titanium oxide (TiO2) thin films have valuable properties such as a high refractive index, excellent transmittance in the visible and near-IR frequency, and high chemical stability. Therefore it is extensively used in anti-reflection coating, sensor, and photocatalysis as electrical and optical applications. Specially, TiO2 have a high dielectric constant of 180 along the c axis and 90 along the a axis, so it is highlighted in fabricating dielectric capacitors in micro electronic devices. A variety of methods have been used to produce patterned self-assembled monolayers (SAMs), including microcontact printing ($\mu$CP), UV-photolithotgraphy, e-beam lithography, scanned-probe based micro-machining, and atom-lithography. Above all, thin film fabrication on $\mu$CP modified surface is a potentially low-cost, high-throughput method, because it does not require expensive photolithographic equipment, and it produce micrometer scale patterns in thin film materials. The patterned SAMs were used as thin resists, to transfer patterns onto thin films either by chemical etching or by selective deposition. In this study, we deposited TiO2 thin films on Si (1000 substrateds using titanium (IV) isopropoxide ([Ti(O(C3H7)4)] ; TIP as a single molecular precursor at deposition temperature in the range of 300-$700^{\circ}C$ without any carrier and bubbler gas. Crack-free, highly oriented TiO2 polycrystalline thin films with anatase phase and stoichimetric ratio of Ti and O were successfully deposited on Si(100) at temperature as low as 50$0^{\circ}C$. XRD and TED data showed that below 50$0^{\circ}C$, the TiO2 thin films were dominantly grown on Si(100) surfaces in the [211] direction, whereas with increasing the deposition temperature to $700^{\circ}C$, the main films growth direction was changed to be [200]. Two distinct growth behaviors were observed from the Arhenius plots. In addition to deposition of THe TiO2 thin films on Si(100) substrates, patterning of TiO2 thin films was also performed at grown temperature in the range of 300-50$0^{\circ}C$ by MOCVD onto the Si(100) substrates of which surface was modified by organic thin film template. The organic thin film of SAm is obtained by the $\mu$CP method. Alpha-step profile and optical microscope images showed that the boundaries between SAMs areas and selectively deposited TiO2 thin film areas are very definite and sharp. Capacitance - Voltage measurements made on TiO2 films gave a dielectric constant of 29, suggesting a possibility of electronic material applications.

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Estimation of Road Surface Condition during Summer Season Using Machine Learning (기계학습을 통한 여름철 노면상태 추정 알고리즘 개발)

  • Yeo, jiho;Lee, Jooyoung;Kim, Ganghwa;Jang, Kitae
    • The Journal of The Korea Institute of Intelligent Transport Systems
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    • v.17 no.6
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    • pp.121-132
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    • 2018
  • Weather is an important factor affecting roadway transportation in many aspects such as traffic flow, driver 's driving patterns, and crashes. This study focuses on the relationship between weather and road surface condition and develops a model to estimate the road surface condition using machine learning. A road surface sensor was attached to the probe vehicle to collect road surface condition classified into three categories as 'dry', 'moist' and 'wet'. Road geometry information (curvature, gradient), traffic information (link speed), weather information (rainfall, humidity, temperature, wind speed) are utilized as variables to estimate the road surface condition. A variety of machine learning algorithms examined for predicting the road surface condition, and a two - stage classification model based on 'Random forest' which has the highest accuracy was constructed. 14 days of data were used to train the model and 2 days of data were used to test the accuracy of the model. As a result, a road surface state prediction model with 81.74% accuracy was constructed. The result of this study shows the possibility of estimating the road surface condition using the existing weather and traffic information without installing new equipment or sensors.

Fabrication and Electromechanical Behaviors of a SWNT/PANi Composite Film Actuator (탄소나노튜브/도전성폴리머 복합재 엑츄에이터의 제조 및 특성실험)

  • Zhang, Shuai;Kim, Cheol
    • Composites Research
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    • v.19 no.5
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    • pp.7-11
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    • 2006
  • The improved SWNTs/PANi composite actuator films applicable to an artificial muscle were fabricated successfully using a new process of manufacture that consists of 90% pure single-walled carbon nanotubes (SWNT) and chemical polymerization. PANi is electrically conducting polyaniline polymer. The conductivities of the composite SWNTs/PANi film-type actuators and the pure PANi films fabricated were measured as 56.15 S/cm and 17.38 S/cm, respectively, by the 4-prove method. The conductivity of the composite actuator is 3.2 times higher than the pure PANi film. The fabricated composite actuator showed higher conductivity than any other similar ones. The quality of samples was investigated by an electron scanning microscope (SEM). To measure the actuating strains, a specially designed beam balance apparatus was developed and strains of the composite actuators was measured by a laser displacement sensor subjected to electric currents. During the operation, the sample was soaked in the $NaNO_3$ solution and the sine-wave voltage in the range of $+1V{\sim}-1V$ was applied. The length of the composite actuator changed from $l_0=12.690$ mm to $l_1=12.733$ so that the change of length was l=0.043 mm and the strain was 0.34 %. This is a very high strain for this kind of a composite actuator. Other result reported by Tahhan showed 0.23 % strain, so that the present result is improved by 48%.

Conductive Performance of Mortar Containing Fe-Activated Biochar (Fe에 의해 활성화된 목질계 바이오차를 혼입한 모르타르의 전도성능)

  • Jin-Seok Woo;Ai-Hua Jin;Won-Chang Choi;Soo-Yeon Seo;Hyun-Do Yun
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.28 no.2
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    • pp.27-34
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    • 2024
  • This study was conducted to examine the feasibility of using Fe-activated wood-derived biochar as a conductive filler for manufacturing cement-based strain sensor. To evaluate the compressive and electrical properties of cement composite with 3% Fe-activated biochar, three cubic specimens of size 50 x 50 x 50mm3 and three prismatic cement-based sensors of size 40 x 40 x 80mm3 were prepared respectively. The four-probe method of electrical resistance measurement was used for cement-based sensors. For cement-based sensors with FE-activated biochar, the conductive performance such as electrical resistance and impedance under different water content and repeated compression was investigated. Results showed that the fractional changes in the DC electrical resistivity of cement-based sensors increase with increasing time and the maximum fractional changes in the resistivity decrease with increasing the moisture contents during 900s. At moisture content of 7.5% range, the conductive performance of cement composite including 3% Fe-activated biochar as a conductive filler showed the most stable, while the strain detection ability tended to decrease somewhat as the repeated compressive stress increased between repeated compressive strain and fractional change in resistivity (FCR).

Fertigation Techniques Using Fertilizers with Peristaltic Hose Pump for Hydroponics (연동펌프를 이용한 비료염 공급 관비재배기술 연구)

  • Kim, D.E.;Lee, G.I.;Kim, H.H.;Woo, Y.H.;Lee, W.Y.;Kang, I.C.
    • Journal of Practical Agriculture & Fisheries Research
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    • v.17 no.1
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    • pp.57-71
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    • 2015
  • This study was conducted to develop the fertigation system with a peristaltic hose pump and brushless DC motor. The fertigation system was consisted of sensor, main controller, motor control unit, peristaltic pump, water supply pump, control panel, and filter. The peristaltic pump discharges liquid by squeezing the tube with rollers. Rollers attached to the external circumference of the rotor compresses the flexible tube. The fluid is contained within a flexible tube fitted inside a circular pump casing. The developed fertigation system has no mixing tank but instead injects directly a concentrated nutrient solution into a water supply pipe. The revolution speed of the peristaltic pump is controlled by PWM (Pulse width modulation) method. When the revolution speed of the peristaltic pump was 300rpm, the flow rate of the 3.2, 4.8, 6.3mm diameter tube was 202, 530, 857mL/min, respectively. As increasing revolution speed, the flow rate of the peristaltic pump linearly increased. As the inner diameter of a tube larger, a slope of graph is more steep. Flow rate of three roller was more than that of four roller. Flow rate of a norprene tube with good restoring force was more than that of a pharmed tube. As EC sensor probe was installed in direct piping in comparison with bypass piping showed good performance. After starting the system, it took 16~17 seconds to stabilize EC. The maximum value of EC was 1.44~1.7dS/m at a setting value of 1.4dS/m. The developed fertigation system showed ±0.06dS/m deviation from the setting value of EC. In field test, Cucumber plants generally showed good growth. From these findings, this fertigation system can be appropriately suitable for fertigation culture for crops.

K-DEV: A Borehole Deviation Logging Probe Applicable to Steel-cased Holes (철재 케이싱이 설치된 시추공에서도 적용가능한 공곡검층기 K-DEV)

  • Yoonho, Song;Yeonguk, Jo;Seungdo, Kim;Tae Jong, Lee;Myungsun, Kim;In-Hwa, Park;Heuisoon, Lee
    • Geophysics and Geophysical Exploration
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    • v.25 no.4
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    • pp.167-176
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    • 2022
  • We designed a borehole deviation survey tool applicable for steel-cased holes, K-DEV, and developed a prototype for a depth of 500 m aiming to development of own equipment required to secure deep subsurface characterization technologies. K-DEV is equipped with sensors that provide digital output with verified high performance; moreover, it is also compatible with logging winch systems used in Korea. The K-DEV prototype has a nonmagnetic stainless steel housing with an outer diameter of 48.3 mm, which has been tested in the laboratory for water resistance up to 20 MPa and for durability by running into a 1-km deep borehole. We confirmed the operational stability and data repeatability of the prototype by constantly logging up and down to the depth of 600 m. A high-precision micro-electro-mechanical system (MEMS) gyroscope was used for the K-DEV prototype as the gyro sensor, which is crucial for azimuth determination in cased holes. Additionally, we devised an accurate trajectory survey algorithm by employing Unscented Kalman filtering and data fusion for optimization. The borehole test with K-DEV and a commercial logging tool produced sufficiently similar results. Furthermore, the issue of error accumulation due to drift over time of the MEMS gyro was successfully overcome by compensating with stationary measurements for the same attitude at the wellhead before and after logging, as demonstrated by the nearly identical result to the open hole. We believe that the methodology of K-DEV development and operational stability, as well as the data reliability of the prototype, were confirmed through these test applications.

M-mode Ultrasound Assessment of Diaphragmatic Excursions in Chronic Obstructive Pulmonary Disease : Relation to Pulmonary Function Test and Mouth Pressure (만성폐쇄성 폐질환 환자에서 M-mode 초음파로 측정한 횡격막 운동)

  • Lim, Sung-Chul;Jang, Il-Gweon;Park, Hyeong-Kwan;Hwang, Jun-Hwa;Kang, Yu-Ho;Kim, Young-Chul;Park, Kyung-Ok
    • Tuberculosis and Respiratory Diseases
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    • v.45 no.4
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    • pp.736-745
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    • 1998
  • Background: Respiratory muscle interaction is further profoundly affected by a number of pathologic conditions. Hyperinflation may be particularly severe in chronic obstructive pulmonary disease(COPD) patients, in whom the functional residual capacity(FRC) often exceeds predicted total lung capacity(TLC). Hyperinflation reduces the diaphragmatic effectiveness as a pressure generator and reduces diaphragmatic contribution to chest wall motion. Ultrasonography has recently been shown to be a sensitive and reproducible method of assessing diaphragmatic excursion. This study was performed to evaluate how differences of diaphragmatic excursion measured by ultrasonography associate with normal subjects and COPD patients. Methods: We measured diaphragmatic excursions with ultrasonography on 28 healthy subjects(l6 medical students, 12 age-matched control) and 17 COPD patients. Ultrasonographic measurements were performed during tidal breathing and maximal respiratory efforts approximating vital capacity breathing using Aloka KEC-620 with 3.5 MHz transducer. Measurements were taken in the supine posture. The ultrasonographic probe was positioned transversely in the midclavicular line below the right subcostal margin. After detecting the right hemidiaphragm in the B-mode the ultrasound beam was then positioned so that it was approximately parallel to the movement of middle or posterior third of right diaphragm. Recordings in the M-mode at this position were made throughout the test. Measurements of diaphragmatic excursion on M-mode tracing were calculated by the average gap in 3 times-respiration cycle. Pulmonary function test(SensorMedics 2800), maximal inspiratory(PImax) and expiratory mouth pressure(PEmax, Vitalopower KH-101, Chest) were measured in the seated posture. Results: During the tidal breathing, diaphragmatic excursions were recorded $1.5{\pm}0.5cm$, $1.7{\pm}0.5cm$ and $1.5{\pm}0.6cm$ in medical students, age-matched control group and COPD patients, respectively. Diaphragm excursions during maximal respiratory efforts were significantly decreased in COPD patients ($3.7{\pm}1.3cm$) when compared with medical students, age-matched control group($6.7{\pm}1.3cm$, $5.8{\pm}1.2cm$, p< 0.05}. During maximal respiratory efforts in control subjects, diaphragm excursions were correlated with $FEV_1$, FEVl/FVC, PEF, PIF, and height. In COPD patients, diaphragm excursions during maximal respiratory efforts were correlated with PEmax(maximal expiratory pressure), age, and %FVC. In multiple regression analysis, the combination of PEmax and age was an independent marker of diaphragm excursions during maximal respiratory efforts with COPD patients. Conclusion: COPD subjects had smaller diaphragmatic excursions during maximal respiratory efforts than control subjects. During maximal respiratory efforts in COPD patients, diaphragm excursions were well correlated with PEmax. These results suggest that diaphragm excursions during maximal respiratory efforts with COPD patients may be valuable at predicting the pulmonary function.

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