• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.20 no.3
• /
• pp.228-233
• /
• 2007

Core technologies for integrating hydrogen gas sensor were investigated. In this study, the thermally isolated micro-hot-plate with areas of $100{\times}100-260{\times}260{\mu}m^2$ was fabricated by utilizing surface micromachining technique that provides better manufacturing yield than bulk micromachining counterpart. The optimum design of the sensor was peformed by analyzing the thermal profile of the structure obtained from a ANSYS simulator. The 400-nm-thick polysilicon films doped with phosphorus, the 300-nm-thick aluminum films, and the 200-nm-thick $SnO_2$(or ZnO)films were used as the micro-heater material, the temperature sensor material, and the gas sensitive material, respectively. The experimental results show that the developed gas sensors can detect $H_2$ concentration as low as 1 ppm.

• International Journal of Precision Engineering and Manufacturing
• /
• v.4 no.3
• /
• pp.12-19
• /
• 2003

This paper describes the design of a robot's hand with two fingers for stably grasping an unknown object, and the development of a 3-axis force sensor for which is necessary to constructing the robot's fingers. In order to safely grasp an unknown object using the robot's fingers, they should measure the forces in the gripping and in the gravity directions, and control the measured forces. The 3-axis force sensor should be used for accurately measuring the weight of an unknown object in the gravity direction. Thus, in this paper, the robot's hand with two fingers for stably grasping an unknown object is designed, and the 3-axis force sensor is newly modeled and fabricated using several parallel-plate beams.

• Journal of the Korean Society for Precision Engineering
• /
• v.20 no.7
• /
• pp.105-113
• /
• 2003

This paper describes the development of a 6-axis robot's finger force/moment sensor, which measures forces Fx, Fy, Fz, and moments Mx, My, Mz simultaneously, for stably grasping an unknown object. In order to safely grasp an unknown object using the robot's gripper, it should measure the force in the gripping direction and the force in the gravity direction, and perform the force control using the measured forces. Thus, the robot's gripper should be composed of 6-axis robot's finger force/moment sensor that can measure forces Fx, Fy, Fz, and moments Mx, My, Mz simultaneously. In this paper, the 6-axis robot's finger force/moment sensor for measuring forces Fx, Fy, Fz, and moments Mx, My, Mz simultaneously was newly modeled using several parallel-plate beams, designed, and fabricated. The characteristic test of made sensor was performed. and the result shows that interference errors of the developed sensor are less than 3%. Also, Robot's gripper with the 6-axis robot's finger force/moment sensor for the characteristic test of force control was manufactured, and the characteristic test for grasping an unknown object was performed using it. The fabricated gripper could grasp an unknown object stably. Thus, the developed 6-axis robot's finger force/moment sensor may be used for robot's gripper.

• Composites Research
• /
• v.13 no.6
• /
• pp.47-54
• /
• 2000

One promising method for impact detection of composite structures is based on the use of piezopolymer thin fim (PVDf) sensor. In this paper, the relationship between the contact force and the signals of the attached strain gage and PVDF sensor to the composite plate subjected to low-velocity impact were derived. The relation for the open circuit and short circuit voltage of PVDF sensor was derived based on the equivalent circuit model of the piezoelectric sensor. The work was then extended to include experimental investigation into the use of short circuit voltage of PVDF sensor without using charge amplifier to detect low-velocity impact. The natural frequencies and damping ratio of the composite plate obtained from the vibration test were used to modify the analytical model and therefore the differences between measured and simulated signal of the modified analytical model in both forward and backward problem were considerably reduced. The reconstructed contact force and simulated sensor signals agreed well with the measured contact force, strain gage signal, and PVDF sensor singanl.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2003.06a
• /
• pp.490-493
• /
• 2003

This paper describes the development of a small 6-axis force/moment sensor for robot's finger, which measures forces Fx. Fy, Fz, and moments Mx, My, Mz simultaneously. In order to safely grasp an unknown object using the robot's gripper, and accurately perceive the position of it in the gripper, it should measure the force in the gripping direction, the force in the gravity direction and the moments each direction. and perform the control using the measured forces and moments. Thus, the robot's gripper should be composed of 6-axis force/moment sensor that can measure forces Fx, Fy, Fz, and moments Mx, My. Mz simultaneously. In this paper, the small 6-axis force/moment sensor for measuring forces Fx, Fy, Fz, and moments Mx, My, Mz simultaneously was newly modeled using several parallel-plate beams, designed, and fabricated. The characteristic test of made sensor was performed, and the result shows that interference errors or the developed sensor are less than 3%. Thus, the developed small 6-axis force/moment sensor may be used for robot's gripper.

• Transactions on Control, Automation and Systems Engineering
• /
• v.3 no.1
• /
• pp.66-70
• /
• 2001

This paper describes the design of a two-axis force sensor for robots finger. In detects the x-direction force Fx and y-direction force Fy simultaneously. In order to safely grasp an unknown object using the robots fingers, they should detect the force or gripping direction and the force of gravity direction, and perform the force control using the forces detected. Therefore, the robots hand should be made by the robots finger with tow-axis force sensor that can detect the x-direction force and y-direction force si-multaneously. Thus, in this paper, the two-axis force sensor for robots finger is designed using several parallel-plate beams. The equations to calculate the strain of the beams according to the force in order to design the sensing element of the force sensor are derived and these equations are used to design the aize of two-axis force sensor sensing element. The reliability of the derive equa-tions is verified buy performing a finite element analysis of the sensing element. The strain obtained through this process is compared to that obtained through the theory analysis and a characteristics test of the fabricated sensor. It reveals that the rated strains calculated from the derive equations make a good agreement with the results from the Finite Element Method analysis and from the character-istic test.

• Journal of the Korean Society for Precision Engineering
• /
• v.21 no.3
• /
• pp.51-58
• /
• 2004

This paper describes the development of a small 6-axis force/moment sensor for robot's finger, which measures farces Fx, Fy, Fz, and moments Mx, My, Mz simultaneously. In order to safely grasp an unknown object using the robot's gripper, and accurately perceive the position of it in the gripper, it should measure the force in the gripping direction, the force in the gravity direction and the moments each direction, and perform the force control using the measured forces and moments. Also, it should detect the moments Mx (x-direction moment), My and Mz to accurately perceive the position of the object in the grippers. Thus, the robot's gripper should be composed of 6-axis force/moment sensor that can measure forces Fx, Fy, Fz, and moments Mx, My, Mz simultaneously. In this paper, the small 6-axis force/moment sensor for measuring forces Fx, Fy, Fz, and moments Mx, My, Mz simultaneously was newly modeled using several parallel-plate beams, designed, and fabricated. The characteristic test for the developed sensor was performed, and the result shows that intereference errors of the developed sensor are less than 4.23％. Thus, the developed small 6-axis force/moment sensor may be used a robot's gripper.

• Smart Structures and Systems
• /
• v.8 no.5
• /
• pp.433-447
• /
• 2011

The present paper addresses the nonlinear response of a FG square plate with two smart layers as a sensor and actuator under pressure. Geometric nonlinearity was considered in the strain-displacement relation based on the Von-Karman assumption. All the mechanical and electrical properties except Poisson's ratio can vary continuously along the thickness of the plate based on a power function. Electric potential was assumed as a quadratic function along the thickness direction and trigonometric function along the planar coordinate. By evaluating the mechanical and electrical energy, the total energy equation can be minimized with respect to amplitude of displacements and electrical potential. The effect of non homogenous index was investigated on the responses of the system. Obtained results indicate that with increasing the non homogenous index, the displacements and electric potential tend to an asymptotic value. Displacements and electric potential can be presented in terms of planar coordinate system. A linear analysis was employed and then the achieved results are compared with those results that are obtained using the nonlinear analysis. The effect of the geometric nonlinearity is investigated by using the comparison between the linear and nonlinear results. Displacement-load and potential-load curves verified the necessity of a nonlinear analysis rather than a linear analysis. Improvement of the previous results (by the linear analysis) through employing a nonlinear analysis can be presented as novelty of this study.

• Smart Structures and Systems
• /
• v.9 no.2
• /
• pp.127-143
• /
• 2012

The present paper deals with the nonlinear analysis of the functionally graded piezoelectric (FGP) annular plate with two smart layers as sensor and actuator. The normal pressure is applied on the plate. The geometric nonlinearity is considered in the strain-displacement equations based on Von-Karman assumption. The problem is symmetric due to symmetric loading, boundary conditions and material properties. The radial and transverse displacements are supposed as two dominant components of displacement. The constitutive equations are derived for two sections of the plate, individually. Total energy of the system is evaluated for elastic solid and piezoelectric sections in terms of two components of displacement and electric potential. The response of the system can be obtained using minimization of the energy of system with respect to amplitude of displacements and electric potential. The distribution of all material properties is considered as power function along the thickness direction. Displacement-load and electric potential-load curves verify the nonlinearity nature of the problem. The response of the linear analysis is investigated and compared with those results obtained using the nonlinear analysis. This comparison justifies the necessity of a nonlinear analysis. The distribution of the displacements and electric potential in terms of non homogenous index indicates that these curves converge for small value of piezoelectric thickness with respect to elastic solid thickness.

• The Journal of the Acoustical Society of Korea
• /
• v.29 no.8
• /
• pp.483-490
• /
• 2010

In this paper, an Inter-Digital Transducer (IDT) type Lamb wave sensor is proposed to estimate the geometry and number of cracks on a plate structure, and its validity is checked through experiments. This IDT type sensor is more readily controllable than conventional patch type piezoelectric sensors to modify its operation frequency and directionality by altering its finger patterns. In this work, omni-directional annular IDT and highly directional rectangular IDT sensors are designed and fabricated. The IDT sensors are used to diagnose the length, number and orientation of cracks on an aluminum plate by measuring the amplitude and time of flight of Lamb waves. The results are analyzed to discuss the efficacy of the IDT sensors.