• Title/Summary/Keyword: Sensitive film

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Characteristics of SAW humidity sensor using nanocrystalline ZnO films

  • Hong, Hoang-Si;Chung, Gwiy-Sang
    • Journal of Sensor Science and Technology
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    • v.19 no.5
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    • pp.337-341
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    • 2010
  • In this work, the nanocrystalline ZnO/polycrystalline(poly) aluminum nitride(AlN)/ Si-layered structure was fabricated for humidity sensor applications based on surface acoustic wave(SAW). The ZnO film was used as a sensitive material layer. The ZnO and AlN(0002) were deposited by a sol-gel process and a pulse reactive magnetron sputtering, respectively. The ZnO sensitive films coated on AlN have a hexagonal wurtzite structure after the thin films annealed at $400^{\circ}C$, $500^{\circ}C$ and $600^{\circ}C$. The surface of the film exhibits sponginess and a nanometer particle size(below 50 nm). The largest shift in the frequency response was at approximately 200 kHz(the relative humidity: 10 %~90 %) for the structure annealed at $400^{\circ}C$. The effect of the change in the environmental temperature on the frequency response of the SAW humidity sensor was also investigated.

A Novel Photoresist based on Polymeric Acid Amplifier (고분자형 산 증식제에 기초한 새로운 포토레지스트의 연구)

  • Lee, Eun-Ju;Jeong, Yong-Seok;Lim, Kwon-Taek;Jeong, Yeon-Tae
    • Journal of the Korean Chemical Society
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    • v.48 no.1
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    • pp.39-45
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    • 2004
  • Acid amplifying copolymers are synthesized by the copolymerization of tert-butyl methacrylate(tBMA) with acid-sensitive functional group and 4-hydroxy-4'p-styrenesufonyloxyisopropylidene dicyclohexane(HSI) or 4-p-styrenesulfonyloxy-4'-tosyloxyisopropylidenedicyclohexane(STI) with acid-amplifying group as novel polymeric acid amplifying photoresists. Poly(HSI-co-tBMA) film and Poly(STI-co-tBMA) film as acid amplifying photoresists show reasonable thermal stability in the absence of an acid species. Poly(STI-co-tBMA) film exhibits 2X higher photosensitivity, whereas Poly(HSI-co-tBMA) film show 2X lower photosensitivity compared with ptBMA homopolymer. The attachment of acid-amplifying units to polymer backbones could provide a novel way to enhance the photosensitivity of acid-sensitive polymers depending on the structure of acid-amplifying units.

Imaging Plate Technique for the Electron Diffraction Study of a Radiation-sensitive Material under Electron Beam (전자 빔 조사 민감 물질의 전자회절분석을 위한 Imaging Plate 기술)

  • Kim, Young-Min;Kim, Yang-Soo;Kim, Jin-Gyu;Lee, Jeong-Yong;Kim, Youn-Joong
    • Applied Microscopy
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    • v.38 no.3
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    • pp.185-193
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    • 2008
  • An experimental comparison of the detection properties between imaging plate and film for recording the electron diffraction pattern was carried out on a radiation-sensitive material, an aluminum trihydroxide(gibbsite, ${\gamma}-Al(OH)_3$), through the electron beam irradiation. Because the imaging plate has a wide dynamic range sufficient for recording extremely low- and high-electron intensities, the range of spatial frequency for the diffraction pattern acquired by the imaging plate was extended to two times larger than the range by the film, especially at a low electron dose condition(${\leq}0.1\;e^-/{\mu}m^2$). It is also demonstrated that the imaging plate showed better resolving power for discriminating fine intensity levels even in saturated transmitted beam. Hence, in the respect of investigating the structures of radiation-sensitive materials and cryo-biological specimens, our experimental demonstrations suggest that the imaging plate technique may be a good choice for those studies, which have to use an extremely low electron intensity for recording.

Optimization of Process Parameters for Dry Film Thickness to Achieve Superior Water-based Coating in Automotive Industries

  • Prasad, Pranay Kant;Singh, Abhinav Kr;Singh, Sandeep;Prasad, Shailesh Kumar;Pati, Sudhanshu Shekher
    • Corrosion Science and Technology
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    • v.21 no.2
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    • pp.121-129
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    • 2022
  • A study on water-based epoxy coated on mild steel using the electroplating method was conducted to optimize the process parameters for dry film thickness to achieve superior paint quality at optimal cost in an automotive plant. The regression model was used to adjust various parameters such as electrode voltage, bath temperature, processing time, non-volatile matter, and surface area to optimize the dry film thickness. The average dry film thickness computed using the model was in the range of 15 - 35 ㎛. The error in the computed dry film thickness with reference to the experimentally measured dry film thickness value was - 0.5809%, which was well within the acceptable limits of all paint shop standards. Our study showed that the dry film thickness on mild steel was more sensitive to electrode voltage and bath temperature than processing time. Further, the presence of non-volatile matter was found to have the maximum impact on dry film thickness.

Humidity Sensitive Characterization by Electrode Pattern on the Capacitive Humidity Sensor Using Polyimide (폴리이미드 용량형 습도센서의 전극 패턴에 따른 감습 특성)

  • Park, Sung-Back;Shin, Hoon-Kyu;Lim, Jun-Woo;Chang, Sang-Mok;Kwon, Young-Soo
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.27 no.9
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    • pp.566-570
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    • 2014
  • Electrode pattern effects on the capacitive humidity sensor were investigated. The fabrication of the capacitive humidity sensor was formed with three steps. The bottom electrode was formed on the silicon substrate with Pt/Ti thin layer by using shadow mask and e-beam evaporator. The photo sensitive polyimide was formed on the bottom electrode by using photolithography process as a humidity sensitive thin film. The upper electrode was formed on the polyimide thin film with Pt/Ti thin layer by using e-beam evaporator and lift-off method. Three electrode patterns, such as circle, square, and triangle pattern, were used and changed the sizes to investigate the effects. The capacitances of the sensors were decreased 622 to 584 pF with the area decreament of patterns 250,000 to $196,250{\mu}m^2$. From these results, a capacitive humidity sensor with photo sensitive polyimide is expected to be applied to a high sensitive humidity sensor.

Preparation of Thermostable Polyimide/Polysiloxane Double Layered Films with Pressure-sensitive Adhesion Property (점착특성을 갖는 내열 폴리이미드/폴리실록산 이중층 필름 제조 연구)

  • Kwon, Eunjin;Jung, Hyun Min
    • Polymer(Korea)
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    • v.38 no.4
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    • pp.544-549
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    • 2014
  • Double layered film consisting of polyimide/polysiloxane and interface with nano domain structure was fabricated through stepwise layer formation and subsequent aging steps. During aging of film, nano phase separation occurred between the top layer polysiloxane and the upper layer of polyimide, which was observed by transmission electron microscope (TEM). A stable and uniform polysiloxane layer was obtained, showing the reproducible pressure-sensitive adhesion (PSA) property with the peel strength of 8-13 g/inch at even $300^{\circ}C$. In addition, the resulting polymide/polysiloxane film was thermo-stable up to $435^{\circ}C$, providing the promising properties suitable for application in microelectronics processing.

Preparation of Aminosiloxane-grafted Poly(imidesiloxane) Copolymer and its Morphology and Adhesive Properties in Film (아미노실록산이 그래프팅된 폴리(이미드실록산) 공중합체 제조와 필름 모폴로지 및 점착 특성 연구)

  • Lee, Ji Mok;Kwon, Eunjin;Lee, Sunyoung;Jung, Hyun Min
    • Polymer(Korea)
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    • v.37 no.4
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    • pp.547-552
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    • 2013
  • Polyimide (PI) containing carboxyl functional group was prepared and reacted with diaminosiloxane during high temperature film casting. The morphology of resulting film was observed by using transmission electron microscopy (TEM) and energy dispersive X-ray spectroscopy (EDX), which revealed that globular 100 nm-sized PI domains and continuous polysiloxane phase were formed. X-ray photoelectron spectroscopy (XPS) study indicated that air-film interface mainly consisted of polysiloxane blocks. Poly(imidesiloxane) thin layer was thermostable until $400^{\circ}C$ and its pressure- sensitive adhesive property was retained up to $300^{\circ}C$. The comparative experiments revealed that grafting between carboxyl groups of polyimide and aminosiloxane was crucial for formation of microdomain structure and pressure-sensitive adhesive property.

A Study on the Measurement of Oil-Film Pressure in Engine Connecting Rod Bearing and Piston Pin-Boss by Thin-Film Sensor

  • Mihara, Yuji;Someya, Tsuneo
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2002.10b
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    • pp.409-410
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    • 2002
  • In order to measure the oil-film pressure in sliding surface of machinery, we have developed a piezo-resistive type thin-film pressure sensor. To reduce the measurement error due to temperature and strain, the constituent of the pressure sensitive alloy was optimized and a new sensor shape was devised. In this study, we present the measurement results of the oil-film pressure distribution in engine connecting rod big-end bearing and piston pin- bosses with 3 different pin-boss shapes using the newly developed thin-film pressure sensor.

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Commercialization & Process Optimization of Protective Film on Nano Silver Transparent Conductive Substrate by Means of Large Scale Roll-to-Roll Coating and Experimental Design (나노실버 투명전도소재 보호필름의 개발 및 공정 최적화와 실험 계획법을 이용한 검증)

  • Park, Kwang-Min;Lee, Ji-Hoon
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.28 no.12
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    • pp.813-820
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    • 2015
  • We have studied commercialization and process optimization of protective film on transparent conductive coated substrate, nano silver on flexible PET (poly ethylene terephthalate), by means of roll-to-roll micro-gravure coater. Nanosilver on flexible PET substrate is potential materials to replace ITO (indium tin oxide). Protective film is most important to maintain unique silver pattern on top of transparent PET. PSA pressure sensitive adhesives) was developed solely for nano silver on PET and protective film was successfully laminated. We have optimized all process conditions such as coating thickness, line speed and aging time & temperature via experimental design. Transparent conductive film and its protective film developed in this research are commercially available at this moment.

Optical Characteristics of Bimetallic Silver-Gold Film Structure in Surface Plasmon Resonance Sensor Applications (표면 플라즈몬 공명 센서에서의 쌍금속 은-금 박막 구조의 광학 특성)

  • Gwon, Hyuk-Rok;Lee, Seong-Hyuk
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.56 no.1
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    • pp.156-160
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    • 2007
  • Surface plasmon resonance(SPR) has been widely studied for biological and chemical sensing applications. The present study conducts numerical simulation for the single and bimetallic layer SPR configurations by using the multiple beam interference matrix(MBIM) method to investigate the influence of wave interference and complex refractive indices of materials on optical characteristics such as reflectance and optical phase shift which are used for sensing. First, calculated reflectances are compared with experimental data for validation. In addition, in the single film structures this study finds out the appropriate film thicknesses with minimum reflectance for cases of gold film and silver film. For a bimetallic silver-gold film structure, in particular, the bimetallic film thicknesses that has the minimum reflectance are found 36 nm for silver and 5 nm for gold. From the results, the use of phase shift would be useful compared to reflectance in determining the SPR configuration because the phase shift becomes more sensitive than reflectance.