• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.156-157
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• 2012

단일 셀에서 비휘발성 및 고속의 휘발성 메모리를 모두 구동할 수 있는 다기능 메모리는 모바일 기기 및 embedded 장치의 폭발적인 성장에 있어 그 중요성이 커지고 있다. 따라서 최근 이러한 fusion기술을 응용한 unified RAM (URAM)과 같은 다기능 메모리의 연구가 주목 받고 있다. 이러한 다목적 메모리는 주로 silicon on insulator (SOI)기반의 1T-DRAM과 SONOS기술 기반의 비휘발성 메모리의 조합으로 이루어진다. 하지만 이런 다기능 메모리는 주로 단결정기반의 SOI wafer 위에서 구현되기 때문에 값이 비싸고 사용범위도 제한되어 있다. 따라서 이러한 다기능메모리를 다결정 실리콘을 이용하여 제작한다면 기판에 자유롭게 메모리 적용이 가능하고 추후 3차원 적층형 소자의 구현도 가능하기 때문에 다결정실리콘 기반의 메모리 구현은 필수적이라고 할 수 있겠다. 본 연구에서는 다결정실리콘을 이용한 channel recessed구조의 다기능메모리를 제작하였으며 각 1T-DRAM 및 NVM동작에 따른 memory 특성을 살펴보았다. 실험에 사용된 기판은 상부 비정질실리콘 100 nm, 매몰산화층 200 nm의 SOI구조의 기판을 이용하였으며 고상결정화 방법을 이용하여 $600^{\circ}C$ 24시간 열처리를 통해 결정화 시켰다. N+ poly Si을 이용하여 source/drain을 제작하였으며 RIE시스템을 이용하여 recessed channel을 형성하였다. 상부 ONO게이트 절연막은 rf sputter를 이용하여 각각 5/10/5 nm 증착하였다. $950^{\circ}C$ N2/O2 분위기에서 30초간 급속열처리를 진행하여 source/drain을 활성화 하였다. 계면상태 개선을 위해 $450^{\circ}C$ 2% H2/N2 분위기에서 30분간 열처리를 진행하였다. 제작된 Poly Si MFM에서 2.3V, 350mV/dec의 문턱전압과 subthreshold swing을 확인할 수 있었다. Nonvolatile memory mode는 FN tunneling, high-speed 1T-DRAM mode에서는 impact ionization을 이용하여 쓰기/소거 작업을 실시하였다. NVM 모드의 경우 약 2V의 memory window를 확보할 수 있었으며 $85^{\circ}C$에서의 retention 측정시에도 10년 후 약 0.9V의 memory window를 확보할 수 있었다. 1T-DRAM 모드의 경우에는 약 $30{\mu}s$의 retention과 $5{\mu}A$의 sensing margin을 확보할 수 있었다. 차후 engineered tunnel barrier기술이나 엑시머레이저를 이용한 결정화 방법을 적용한다면 device의 특성향상을 기대할 수 있을 것이다. 본 논문에서는 다결정실리콘을 이용한 다기능메모리를 제작 및 메모리 특성을 평가하였다. 제작된 소자의 단일 셀 내에서 NVM동작과 1T-DRAM동작이 모두 가능한 것을 확인할 수 있었다. 다결정실리콘의 특성상 단결정 SOI기반의 다기능 메모리에 비해 낮은 특성을 보여주었으나 이는 결정화방법, high-k절연막 적용 및 engineered tunnel barrier를 적용함으로써 해결 가능하다고 생각된다. 또한 sputter를 이용하여 저온증착된 O/N/O layer에서의 P/E특성을 확인함으로써 glass위에서의 MFM구현의 가능성도 확인할 수 있었으며, 차후 system on panel (SOP)적용도 가능할 것이라고 생각된다.

• Journal of Sensor Science and Technology
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• v.6 no.6
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• pp.476-482
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• 1997

A portable electronic nose system has been fabricated and characterized using an oxide semiconductor gas sensor array and pattern recognition techniques such as principal component analysis and back-propagation artificial neural network. The sensor array consists of six thick-film gas sensors whose sensing layers are Pd-doped $WO_{3}$, Pt-doped $SnO_{2}$, $TiO_{2}-Sb_{2}O_{5}-Pd$-doped $SnO_{2}$, $TiO_{2}-Sb_{2}O_{5}-Pd$-doped $SnO_{2}$ + Pd coated layer, $Al_{2}O_{3}$-doped ZnO and $PdCl_{2}$-doped $SnO_{2}$. The portable electronic nose system consists of an 16bit Intel 80c196kc as CPU, an EPROM for storing system main program, an EEPROM for containing optimized connection weights of artificial neural network, an LCD for displaying gas concentrations. As an application the system has been used to identify 26 carbon monoxide/hydrocarbon (CO/HC) car exhausting gases in the concentration range of CO 0%/HC 0 ppm to CO 7.6%/HC 400 ppm and the identification has been successfully demonstrated.

• Journal of the Korean Magnetics Society
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• v.20 no.2
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• pp.35-40
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• 2010

The GMR-SV (giant magnetoresistance-spin valve) device depending on the micro patterned features according to two easy directions of longitudinal and transversal axes has been studied. The GMR-SV multilayer structure was Ta(5 nm)/NiFe(8 nm)/Cu(2.3 nm)/NiFe(4 nm)/IrMn(8 nm)/Ta(2.5 nm). The applied anisotropy direction of the GMR-SV thin film was performed under the magnitude of 300 Oe using by permanent magnet during the deposition. The size of micro patterned device was a $1\;{\times}\;18\;{\mu}m^2$ after the photo lithography process. In the aspects of the shape magnetic anisotropy effect, there are two conditions of fabrication for GMR-SV device. Firstly, the direction of sensing current was perpendicular to the magnetic easy axis of the pinned NiFe/IrMn bilayer with the transversal direction of device. Secondly, the direction of shape magnetic anisotropy was same to the magnetic easy axis of the free NiFe layer with the longitudinal direction of device.

• Spatial Information Research
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• v.7 no.2
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• pp.159-173
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• 1999

GIS has been regarded as one of important tools or methodologies for various geoscience applications. Recently, spatial data integration schemes for site-specific or field-specific thematic mapping are newly developed and utilized. However, these kinds of approaches are somewhat insufficient quantitative assessment of integrated layers towards known targets in-detailed . Moreover, GIS analysis scheme is rarely extended to scientific approaches. In this study, simple approach of Multi-Buffer Zone Analysis , related to GIS analystical aspect, is addressed and an actual application for predicting or favorable mapping of mineral occurrences, one of GIS-based geoscientific approaches, is performed, As for geo-processing in GIS itself, this scheme can be regarded as extension or adaptiation of cell-based buffering or proximity analysis to geoscientific data interpretation. This study is based on rationale that surface geological pattern around primitives such as a point, a line, or a polygon in GIS, representing significant geological features, can be efficiently utilized to delineate complex geological behaviors or events, especially handling multiple dta sets originated from multiple sources such as airborne geophysical/radiometric exploration, field survey, and even a classified image of remote sensing. Conclusively, this methodology associated wit GIS is though to be helpful to analyze the spatial pattern of multiple data, pointing given sources, and is expected to effectively utilize for exploratory analysis of cell-based resultant layer integrated with complex or different data sources.

• Journal of the Microelectronics and Packaging Society
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• v.16 no.1
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• pp.13-19
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• 2009

A 440MHz wireless and passive surface acoustic wave (SAW) based chemical sensor was developed on a $41^{\circ}YX\;LiNbO_3$ piezoelectric substrate for simultaneous measurement of $CO_2$ gas and relative humidity (RH) using a reflective delay line pattern as the sensor element. The reflective delay line is composed of an interdigital transducer (IDT) and several shorted grating reflectors. A Teflon AF 2400 and a hydrophilic $SiO_2$ layer were used as $CO_2$ and water vapor sensitive films. The coupling of mode (COM) modeling was conducted to determine optimal device parameters prior to fabrication. According to simulation results, the device was fabricated and then wirelessly measured using the network analyzer. The measured reflective coefficient $S_{11}$ in the time domain showed high signal/noise (S/N) ratio, small signal attenuation, and few spurious peaks. In the $CO_2$ and humidity testing, high sensitivity ($2^{\circ}/ppm$ for $CO_2$ detection and $7.45^{\circ}/%$RH for humidity sensing), good linearity and repeatability were observed in the $CO_2$ concentration ranges of $75{\sim}375ppm$ and humidity levels of $20{\sim}80%$RH. Temperature and humidity compensations were also investigated during the sensitivity evaluation process.

• Applied Chemistry for Engineering
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• v.32 no.6
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• pp.684-689
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• 2021

In this paper, we develop a cost effective and disposable voltammetric sensing platform involving screen-printed carbon electrode (SPCE) modified with the nanocomposites composed of multi-walled carbon nanotubes, polyelectrolyte, and tyrosinase for bisphenol A. This is known as an endocrine disruptor which is also related to chronic diseases such as obesity, diabetes, cardiovascular and female reproductive diseases, precocious puberty, and infertility. A negatively charged oxidized multi-walled carbon nanotubes (MWCNTs) wrapped with a positively charged polyelectrolyte, e.g., polydiallyldimethylammonium, was first wrapped with a negatively charged tyrosinae layer via electrostatic interaction and assembled onto oxygen plasma treated SPCE. The nanocomposite modified SPCE was then immersed into different concentrations of bisphenol A for a given time where the tyrosinase reacted with OH group in the bisphenol A to produce the product, 4,4'-isopropylidenebis(1,2-benzoquinone). Cyclic and differential pulse voltammetries at the potential of -0.08 V vs. Ag/AgCl was employed and peak current changes responsible to the reduction of 4,4'-isopropylidenebis(1,2-benzoquinone) were measured which linearly increased with respect to the bisphenol A concentration. In addition, the SPCE based sensor showed excellent selectivity toward an interferent agent, bisphenol S, which has a very similar structure. Finally, the sensor was applied to the analysis of bisphenol A present in an environmental sample solution prepared in our laboratory.

• The Journal of Korea Institute of Information, Electronics, and Communication Technology
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• v.12 no.4
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• pp.366-372
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• 2019

In this paper, we fabricated a capacitive humidity sensor with an IDT(Interdigitated) electrode using commercial polyimide containing fluorine, and its properties were measured and analyzed. First, in order to analyze the composition of commercial polyimide, EDS analysis was performed after patterning process on a silicon wafer. The area of the humidity sensor was $1.56{\times}1.66mm^2$, and the width of the electrode and the gap between the electrodes were $3{\mu}m$ each. The number of electrodes was 166 and the length of the electrode was 1.294mm for the sensitivity of the sensor. The fabricated sensor showed that the sensitivity was 24 fF/%RH, linearity <${\pm}2.5%RH$ and hysteresis <${\pm}4%RH$. As a result of measuring the capacitance value according to the frequency change, the capacitance vlaue decreased with increasing frequency. Capacitance deviations with 10kHz and 100kHz were measured as 0.3pF on average.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.20 no.5
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• pp.1-6
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• 2019

Organic dye-doped silica nanoparticles are used as a promising nanomaterials for bio-labeling, bio-imaging and bio-sensing. Fluorescent silica nanoparticles(NPs) have been synthesized by the modified $St{\ddot{o}}ber$ method. In this study, dye-free fluorescent silica NPs of various sized were synthesized by Sol-Gel process as the modified $St{\ddot{o}}ber$ method. The functional material of APTES((3-aminopropyl)triethoxysilane) was added as an additive during the Sol-Gel process. The as-synthesized silica NPs were calcined at $400^{\circ}C$ for 2 hours. The surface morphology and particle size of the as-synthesized silica NPs were characterized by field-emission scanning electron microscopy. The fluorescent characteristics of the as-synthesized silica NPs was confirmed by UV lamp irradiation of 365 nm wavelength. The photoluminescence (PL) of the as-synthesized silica NPs with different size was analyzed by fluorometry. As the results, the as-synthesized silica NPs exhibits same blue fluorescent characteristics for different NPs size. Especially, as increased of the silica NPs size, the intensity of PL was decreased. The blue fluorescence of dye-free silica NPs was attributed to linkage of $NH_2$ groups of the APTES layer and oxygen-related defects in the silica matrix skeleton.

• Journal of the Korean Society of Mineral and Energy Resources Engineers
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• v.55 no.6
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• pp.576-587
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• 2018

This study has focused on analysis factors affecting safety monitoring system at tailings sites, and the evaluation equipment to monitor the factors. Twenty sites at eighteen mines with unsafe conditions were selected to examine the equipment. There were three main factors influenced safety in the sites including surface erosion, piping, and slope instability. In detail, the surface erosion was divided into three sub-factors (planting, soil-topping layer, and tailings), piping into three sub-factors (liner, rain protection facility and leachate), and slop instability was also divided into three sub-factors (slop, concrete wall, and reinforcing wall). As results of in-field measurement, a CCTV was the most effective facility, and electrical resistivity survey, acoustic sensing, thermal liner sensor, structure inclinometer, rainfall meter, and flowmeter were also highly effective. According to applications of the facilities in the unstable tailings, structural defects were mainly found in the piping, which was the most important monitoring factor for safety management of tailings sites.

• Journal of Convergence for Information Technology
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• v.10 no.12
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• pp.201-207
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• 2020

In this study, the practicality of unmanned aerial vehicle photography information was identified. Therefore, a total of four consecutive surveys were conducted on the field-level survey areas among the areas subject to photography using unmanned aerial vehicles, and the changes in crop conditions were analyzed using pictures of unmanned aerial vehicles taken during each survey. It is appropriate to collect and utilize photographic information by directly taking pictures of the survey area according to the time of the on-site survey using unmanned aerial vehicles in the field layer, which is an area where many changes in topography, crop vegetation, and crop types are expected. And it turned out that it was appropriate to utilize satellite images in consideration of economic and efficient aspects in relatively unchanged rice paddies and facilities. If the survey area is well equipped with systems for crop cultivation, deep learning can be utilized in real time by utilizing libraries after obtaining photographic data for a certain area using unmanned aircraft in the future. Through this process, it is believed that it can be used to analyze the overall crop and shipment volume by identifying the crop status and surveying the quantity per unit area.