• Title/Summary/Keyword: Semiconductor Smoke Management

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A Smoke Management System Design For Semiconductor Fabrication Facilities (반도체 공장의 제연설계)

  • ;Michael J. Ferreira
    • Fire Science and Engineering
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    • v.14 no.4
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    • pp.23-28
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    • 2000
  • A performance-based design of smoke management systems for semiconductor fabrication facilities is described in this paper. The example of one such facility is discussed. Performance criteria for smoke control systems were established, effective smoke removal system features were identified and optimal system exhaust capacity requirements were developed by applying engineering tools including Fire Dynamic Simulator model. Considering the fact that the absence of relevant design guide, codes for consensus standards for semiconductor smoke design in Korea and United States this performance based approach can and should be applied to other fabrication facilities designs.

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A Study on Fire Hazard Analysis and Smoke Flowing for the Semiconductor Manufacturing Process (반도체 제조공정의 연기유동에 관한 연구)

  • Han, Soo-Jin;Kang, Kyung-Sik
    • Journal of the Korea Safety Management & Science
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    • v.9 no.1
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    • pp.197-211
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    • 2007
  • The power of semiconductor, Korea is continuously constructing semiconductor production line for keeping a front-runner status. however, studies and data about potential risks in semiconductor factory are still short. If fire does not initially suppressed, the fire causes a great damage. To decrease fire risk factors, in addition to fire fighting safety equipment, more important thing is how to design and construct fire protection system. The current fire protection codes about semiconductor factory come under functional law, and this law is short of consideration about particularity of factory. The existing prescriptive fire codes depending on experience compose without evident engineering verifications, thus equipments which is created by the current prescriptive fire code may bring about a variety of problems. For example, the design under the current regulation can not cope with the excessive investments, low efficiencies, and the diversifying construction designs and be applied to the quick changes of new technologies. Ergo, an optimal design for fire protection is to equip fire protection arrangements with condition and environment of production field. Manufacturing factory of semiconductors is a windowless airtight space. And for cleanliness, there exists strong flow of cooperation. Therefore, there is a need for fire safety design that meets the characteristic of a clean room. Accordingly, we are to derive smoke flow according to cooperation process within a clean room and construction plan of an optimal sensor system. In this study, in order to confirm the performance of proposed smoke-exhaust equipment and suggest efficient smoke exhaust device when there is a fire of 1MW of methane in the clean room of company H, we have implemented fire simulation using fluid dynamics computation.

Fire Hazard Analysis and Performance Based Fire safety Design for the Clean Room in Semiconductor Factory (반도체공장 Clean Room에 대한 화재요인 분석 및 성능위주 화재안전설계)

  • Han, Su-Jin;Kang, Kyung-Sik
    • Proceedings of the Safety Management and Science Conference
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    • 2006.11a
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    • pp.325-336
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    • 2006
  • This research analyzes clean room major fire prevention standard of clean Room (FM, IRI, and NFPA Code), the structure of Performance-Based Fire Safety Design (PBD) applied the korean fire industry situation. Performance-Based Fire Safety can operate effectively the performance of fire protection equipment & building design, so the fitness of fire safety system can be embodied by operating this. moreover, cost to be consume fire safety of real building can reduce and Performance-Based Fire Safety is considered to important technique in fire protection field. A fire in a clean room may cause a serious loss by spreading smoke particles. We will be investigated by using a computational fluid dynamics, for loss prevention by smoke spreading from one fire area to another for clean room and compared the Performance-Based Fire Safety Design with the prescriptive code design. The methodology of fire safety performance-based fire safety design and guarantee of many kinds design skill of fire system and developing design procedure will be very serious one in order to improve efficiency of domestic system. Therefore, This research will be contributing to secure safety of clean room and to set up the performance-based fire safety design in Korea by regulation for the performance-based fire safety design effectively.

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Fire Hazard Analysis and Performance Based Fire safety Design for the Clean Room in Semiconductor factory(1) (반도체공장 Clean Room에 대한 화재요인 분석 및 성능위주 화재안전설계(1))

  • Han, Su-Jin;Kang, Kyung-Sik
    • Journal of the Korea Safety Management & Science
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    • v.8 no.5
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    • pp.211-229
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    • 2006
  • This research analyzes clean room major fire prevention standard of clean Room(FM, IRI, and NFPA Code), the structure of Performance-Based Fire Safety Design(PBD) applied the korean fire industry situation. Performance-Based Fire Safety can operate effectively the performance of fire protection equipment & building design, so the fitness of fire safety system can be embodied by operating this. moreover, cost to be consume fire safety of real building can reduce and Performance-Based Fire Safety is considered to important technique in fire protection field. A fire in a clean room may cause a serious loss by spreading smoke particles. We will be investigated by using a computational fluid dynamics, for loss prevention by smoke spreading from one fire area to another for clean room and compared the Performance-Based Fire Safety Design with the prescriptive code design. The methodology of fire safety performance-based fire safety design and guarantee of many kinds design skill of fire system and developing design procedure will be very serious one in order to improve efficiency of domestic system. Therefore, This research will be contributing to secure safety of clean room and to set up the performance-based fire safety design in Korea by regulation for the performance-based fire safety design effectively.