• 제어로봇시스템학회:학술대회논문집
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• 2004.08a
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• pp.574-578
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• 2004

In this paper, a nonlinear feedback system is analyzed for a surface micromachined resonant accelerometer. For this, a brief illustration of the plant dynamics is given. In the analysis, the periodic signal in the nonlinear feedback loop is obtained by the limit cycle point, which is best approximated via the describing function method. Considering the characteristic feature of plant dynamics, a simple phase shifted relay with finite slope is designed for the nonlinearity implementation. With a describing function for random plus sinusoidal input, we analyzed the effect of a white Gaussian noise on oscillation frequency. Finally, simulation and experimental result is given.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.36 no.7
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• pp.674-679
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• 2008

In this paper, we introduce a new design approach for self-sustained resonant accelerometer, that takes advantage of the automatic gain control (AGC) loop to achieve a stabilized oscillation dynamics. Fundamental idea of this accelerometer is to maintain uniform amplitude of oscillation under input accelerations. Through system modeling and loop transformation considering the envelope of oscillation, the controller is designed to maintain uniform amplitude in oscillation under dynamic input acceleration. The simulation results demonstrate the feasibility of the proposed accelerometer design, which is applicable to control grade inertial measurement system in industrial and civil application fields.

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.2182-2186
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• 2003

This paper presents the differential type resonant accelerometer (DRXL) and its performance test results. The DRXL is the INS grade, surface micro-machined sensor. The proposed DRXL device produces a differential digital output upon an applied acceleration, and the principle is a gap-dependent electrical stiffness variation of the electrostatic resonator with torsion beam structures. Using this new operating concept, we designed, fabricated and tested the proposed device. The final device was fabricated by using the wafer level vacuum packaging process. To test the performance of the DRXL, a nonlinear self-oscillation loop is designed using describing function technique. The oscillation loop is implemented using discrete electronic elements. The performance test of the DRXL shows that the sensitivity of the accelerometer is 12 Hz/g and its long term bias stability is about $2mg(1{\sigma})$. The turn on repeatability, bandwidth, and dynamic range are 4.38 mg, 100 Hz, and ${\pm}\;70g$, respectively.