• Title/Summary/Keyword: Self contact

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GPU Based Feature Profile Simulation for Deep Contact Hole Etching in Fluorocarbon Plasma

  • Im, Yeon-Ho;Chang, Won-Seok;Choi, Kwang-Sung;Yu, Dong-Hun;Cho, Deog-Gyun;Yook, Yeong-Geun;Chun, Poo-Reum;Lee, Se-A;Kim, Jin-Tae;Kwon, Deuk-Chul;Yoon, Jung-Sik;Kim3, Dae-Woong;You, Shin-Jae
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.80-81
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    • 2012
  • Recently, one of the critical issues in the etching processes of the nanoscale devices is to achieve ultra-high aspect ratio contact (UHARC) profile without anomalous behaviors such as sidewall bowing, and twisting profile. To achieve this goal, the fluorocarbon plasmas with major advantage of the sidewall passivation have been used commonly with numerous additives to obtain the ideal etch profiles. However, they still suffer from formidable challenges such as tight limits of sidewall bowing and controlling the randomly distorted features in nanoscale etching profile. Furthermore, the absence of the available plasma simulation tools has made it difficult to develop revolutionary technologies to overcome these process limitations, including novel plasma chemistries, and plasma sources. As an effort to address these issues, we performed a fluorocarbon surface kinetic modeling based on the experimental plasma diagnostic data for silicon dioxide etching process under inductively coupled C4F6/Ar/O2 plasmas. For this work, the SiO2 etch rates were investigated with bulk plasma diagnostics tools such as Langmuir probe, cutoff probe and Quadruple Mass Spectrometer (QMS). The surface chemistries of the etched samples were measured by X-ray Photoelectron Spectrometer. To measure plasma parameters, the self-cleaned RF Langmuir probe was used for polymer deposition environment on the probe tip and double-checked by the cutoff probe which was known to be a precise plasma diagnostic tool for the electron density measurement. In addition, neutral and ion fluxes from bulk plasma were monitored with appearance methods using QMS signal. Based on these experimental data, we proposed a phenomenological, and realistic two-layer surface reaction model of SiO2 etch process under the overlying polymer passivation layer, considering material balance of deposition and etching through steady-state fluorocarbon layer. The predicted surface reaction modeling results showed good agreement with the experimental data. With the above studies of plasma surface reaction, we have developed a 3D topography simulator using the multi-layer level set algorithm and new memory saving technique, which is suitable in 3D UHARC etch simulation. Ballistic transports of neutral and ion species inside feature profile was considered by deterministic and Monte Carlo methods, respectively. In case of ultra-high aspect ratio contact hole etching, it is already well-known that the huge computational burden is required for realistic consideration of these ballistic transports. To address this issue, the related computational codes were efficiently parallelized for GPU (Graphic Processing Unit) computing, so that the total computation time could be improved more than few hundred times compared to the serial version. Finally, the 3D topography simulator was integrated with ballistic transport module and etch reaction model. Realistic etch-profile simulations with consideration of the sidewall polymer passivation layer were demonstrated.

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Perfluoropolymer Membranes of Tetrafluoroethylene and 2,2,4Trifluofo- 5Trifluorometoxy- 1,3Dioxole.

  • Arcella, V.;Colaianna, P.;Brinati, G.;Gordano, A.;Clarizia, G.;Tocci, E.;Drioli, E.
    • Proceedings of the Membrane Society of Korea Conference
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    • 1999.07a
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    • pp.39-42
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    • 1999
  • Perfluoropolymers represent the ultimate resistance to hostile chemical environments and high service temperature, attributed to the presence of fluorine in the polymer backbone, i.e. to the high bond energy of C-F and C-C bonds of fluorocarbons. Copolymers of Tetrafluoroethylene (TEE) and 2, 2, 4Trifluoro-5Trifluorometoxy- 1, 3Dioxole (TTD), commercially known as HYFLON AD, are amorphous perfluoropolymers with glass transition temperature (Tg)higher than room temperature, showing a thermal decomposition temperature exceeding 40$0^{\circ}C$. These polymer systems are highly soluble in fluorinated solvents, with low solution viscosities. This property allows the preparation of self-supported and composite membranes with desired membrane thickness. Symmetric and asymmetric perfluoropolymer membranes, made with HYFLON AD, have been prepared and evaluated. Porous and not porous symmetric membranes have been obtained by solvent evaporation with various processing conditions. Asymmetric membranes have been prepared by th wet phase inversion method. Measure of contact angle to distilled water have been carried out. Figure 1 compares experimental results with those of other commercial membranes. Contact angles of about 120$^{\circ}$for our amorphous perfluoropolymer membranes demonstrate that they posses a high hydrophobic character. Measure of contact angles to hexandecane have been also carried out to evaluate the organophobic character. Rsults are reported in Figure 2. The observed strong organophobicity leads to excellent fouling resistance and inertness. Porous membranes with pore size between 30 and 80 nanometers have shown no permeation to water at pressures as high as 10 bars. However high permeation to gases, such as O2, N2 and CO2, and no selectivities were observed. Considering the porous structure of the membrane, this behavior was expected. In consideration of the above properties, possible useful uses in th field of gas- liquid separations are envisaged for these membranes. A particularly promising application is in the field of membrane contactors, equipments in which membranes are used to improve mass transfer coefficients in respect to traditional extraction and absorption processes. Gas permeation properties have been evaluated for asymmetric membranes and composite symmetric ones. Experimental permselectivity values, obtained at different pressure differences, to various single gases are reported in Tab. 1, 2 and 3. Experimental data have been compared with literature data obtained with membranes made with different amorphous perfluoropolymer systems, such as copolymers of Perfluoro2, 2dimethyl dioxole (PDD) and Tetrafluorethylene, commercialized by the Du Pont Company with the trade name of Teflon AF. An interesting linear relationship between permeability and the glass transition temperature of the polymer constituting the membrane has been observed. Results are descussed in terms of polymer chain structure, which affects the presence of voids at molecular scale and their size distribution. Molecular Dyanmics studies are in progress in order to support the understanding of these results. A modified Theodoru- Suter method provided by the Amorphous Cell module of InsightII/Discover was used to determine the chain packing. A completely amorphous polymer box of about 3.5 nm was considered. Last but not least the use of amorphous perfluoropolymer membranes appears to be ideal when separation processes have to be performed in hostile environments, i.e. high temperatures and aggressive non-aqueous media, such as chemicals and solvents. In these cases Hyflon AD membranes can exploit the outstanding resistance of perfluoropolymers.

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A Study on UAV and The Issue of Law of War (무인항공기의 발전과 국제법적 쟁점)

  • Lee, Young-Jin
    • The Korean Journal of Air & Space Law and Policy
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    • v.26 no.2
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    • pp.3-39
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    • 2011
  • People may operate unmanned aerial vehicles (UAVs or drones) thousands of miles from the drone's location. Drones were first used (like balloons) for surveillance. By 2001, the United States began arming drones with missiles and using them to strike targets during combat in Afghanistan. By mid-2010, over forty states and other entities possessed drones, many with the capability of launching missiles and dropping bombs. Each new development in military weapons technology invites assessment of the relevant international law. This Insight surveys the international law applicable to the recent innovation of weaponizing drones. In determining what international law rules govern drone use, the most salient feature is not the fact that drones are unmanned. The fact drones carry no human operator may be the most important new technological breakthrough, but the key feature for international law purposes is the type of weaponry drones carry. Whether law enforcement rules govern drone use depends on the situation and not necessarily who is operating the drone. Battlefield weapons may also be lawfully used before an armed conflict in the following situations: when initiating self-defense under Article 51 of the United Nations Charter; when authorized by the UN Security Council; when a government seeks to suppress internal armed conflict; and, perhaps, when a state is invited to assist a government in suppressing internal armed conflict. The rules governing resort to force in self-defense are found in Article 51 of the UN Charter and a number of decisions by international courts and tribunals. Commentators continue to debate whether drone technology represents the next revolution in military affairs. Regardless of the answer to that question, drones have not created a revolution in legal affairs. The current rules governing battlefield launch vehicles are adequate for regulating resort to drones. More research must be undertaken, however, to understand the psychological effects of deploying unmanned vehicles and the effects on drone operators of sustained, close visual contact with the aftermath of drone attacks.

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Actual Experience of the Oracle of the I Ching-Death, God and Love: In Front of My Father's Spirit (주역 점(占)의 실제 체험-죽음, 신 그리고 사랑: 아버지의 영전(靈前)에서)

  • Ju Hyun Lee;Bou-Yong Rhi
    • Sim-seong Yeon-gu
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    • v.37 no.2
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    • pp.149-183
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    • 2022
  • The oracle of the I Ching, divination can be understood as 'synchronicity phenomenon' in analytic psychology. In order to experience divination actually, it requires a religious attitude that asks questions with a serious mind when a person is in trouble that consciousness reaches its limit. It is not just a passive attitude, but a modest, active attitude to ask what I can do now. The experience of the oracle of the I Ching connected to supra-consciousness is similar to 'active imagination'-talking with the archetype of collective unconsciousness-and is 'the process of finding the rhythm of Self-archetype, the absolute wisdom of unconsciousness.' One month before my father's death, I took care of him who couldn't communicate verbally and I divination with a question 'What can I do for my father and me now?' The I Ching's answer was hexagram 19 Lin 臨, nine at the beginning. It's message was '咸臨貞吉 joint approach. perseverance brings good fortune.' 志行正也 we must adhere perseveringly to what is right.' Through this phrase, I learned the attitude of waiting for life after death as if 'joyful obedient' to the providence of nature that spring comes after winter. And I found that keeping the touching emotion of meeting infinity (in analytical psychological terms, 'Self') with perseveration is to do the true meaning of life beyond popular money-mindedness. And six months before my father's death, I had a dream about the afterlife. In the process of interpreting that dream, I learned not only from the shock of the direct message that 'it is a truth that there is something after death,' but also the regeneration of the mind through introversion from the similarity between the closed ward and '黃泉'-chinese underworld through amplification. And I learned the importance of an open attitude to accept new things through the 'window to eternity' symbolized by the white iron gate. In my father's catholic funeral ritual, I had hope that the catholic doctrine 'Communio Sanctorum'-A spiral cycle in which the living and the dead help each other may be real as well as a symbol of the individuation process in which consciousness and unconsciousness interact in our minds. Through the consolation received through the funeral visit of many people I met in my life, I found the answer that the path to contact with infinity begins with loving the beings in front of me. I tried to understand this continuous experience by the perspective of analytical psychology.

The Effect of Corporate SNS Marketing on User Behavior: Focusing on Facebook Fan Page Analytics (기업의 SNS 마케팅 활동이 이용자 행동에 미치는 영향: 페이스북 팬페이지 애널리틱스를 중심으로)

  • Jeon, Hyeong-Jun;Seo, Bong-Goon;Park, Do-Hyung
    • Journal of Intelligence and Information Systems
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    • v.26 no.1
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    • pp.75-95
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    • 2020
  • With the growth of social networks, various forms of SNS have emerged. Based on various motivations for use such as interactivity, information exchange, and entertainment, SNS users are also on the fast-growing trend. Facebook is the main SNS channel, and companies have started using Facebook pages as a public relations channel. To this end, in the early stages of operation, companies began to secure a number of fans, and as a result, the number of corporate Facebook fans has recently increased to as many as millions. from a corporate perspective, Facebook is attracting attention because it makes it easier for you to meet the customers you want. Facebook provides an efficient advertising platform based on the numerous data it has. Advertising targeting can be conducted using their demographic characteristics, behavior, or contact information. It is optimized for advertisements that can expose information to a desired target, so that results can be obtained more effectively. it rethink and communicate corporate brand image to customers through contents. The study was conducted through Facebook advertising data, and could be of great help to business people working in the online advertising industry. For this reason, the independent variables used in the research were selected based on the characteristics of the content that the actual business is concerned with. Recently, the company's Facebook page operation goal is to go beyond securing the number of fan pages, branding to promote its brand, and further aiming to communicate with major customers. the main figures for this assessment are Facebook's 'OK', 'Attachment', 'Share', and 'Number of Click' which are the dependent variables of this study. in order to measure the outcome of the target, the consumer's response is set as a key measurable key performance indicator (KPI), and a strategy is set and executed to achieve this. Here, KPI uses Facebook's ad numbers 'reach', 'exposure', 'like', 'share', 'comment', 'clicks', and 'CPC' depending on the situation. in order to achieve the corresponding figures, the consideration of content production must be prior, and in this study, the independent variables were organized by dividing into three considerations for content production into three. The effects of content material, content structure, and message styles on Facebook's user behavior were analyzed using regression analysis. Content materials are related to the content's difficulty, company relevance, and daily involvement. According to existing research, it was very important how the content would attract users' interest. Content could be divided into informative content and interesting content. Informational content is content related to the brand, and information exchange with users is important. Interesting content is defined as posts that are not related to brands related to interesting movies or anecdotes. Based on this, this study started with the assumption that the difficulty, company relevance, and daily involvement have an effect on the dependent variable. In addition, previous studies have found that content types affect Facebook user activity. I think it depends on the combination of photos and text used in the content. Based on this study, the actual photos were used and the hashtag and independent variables were also examined. Finally, we focused on the advertising message. In the previous studies, the effect of advertising messages on users was different depending on whether they were narrative or non-narrative, and furthermore, the influence on message intimacy was different. In this study, we conducted research on the behavior that Facebook users' behavior would be different depending on the language and formality. For dependent variables, 'OK' and 'Full Click Count' are set by every user's action on the content. In this study, we defined each independent variable in the existing study literature and analyzed the effect on the dependent variable, and found that 'good' factors such as 'self association', 'actual use', and 'hidden' are important. Could. Material difficulties', 'actual participation' and 'large scale * difficulties'. In addition, variables such as 'Self Connect', 'Actual Engagement' and 'Sexual Sexual Attention' have been shown to have a significant impact on 'Full Click'. It is expected that through research results, it is possible to contribute to the operation and production strategy of company Facebook operators and content creators by presenting a content strategy optimized for the purpose of the content. In this study, we defined each independent variable in the existing research literature and analyzed its effect on the dependent variable, and we could see that factors on 'good' were significant such as 'self-association', 'reality use', 'concernal material difficulty', 'real-life involvement' and 'massive*difficulty'. In addition, variables such as 'self-connection', 'real-life involvement' and 'formative*attention' were shown to have significant effects for 'full-click'. Through the research results, it is expected that by presenting an optimized content strategy for content purposes, it can contribute to the operation and production strategy of corporate Facebook operators and content producers.

A Study on the Correlation Analysis of EEG and Vibraimage due to Auditory and Olfactory Stimulation (청각 및 후각자극에 의한 뇌파(EEG)와 진동이미지기술의 상관성 분석에 관한 연구)

  • Kim, Jung-Min;Kim, Myung-Ho
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.16 no.6
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    • pp.4291-4297
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    • 2015
  • EEG has been used to measure the emotion of amenity and discomfort in the interior space. EEG is limited to the experiment, because it is a equipment of contact type. However, Vibraimage can measure the emotion with a web camera. Because Vibraimage is a equipment of non-contact type, it is more suitable for the interior space than EEG. Therefor, it tries to find a correlation variable between EEG and Vibraimage to measure the human emotions. In this study, it were analyzed correlation of EEG and vibraimage due to variation of loudness 60[dB], 90[dB] and rosemary, jasmine scents. Check the health status of subjects who were selected 3 male students, and the period of this experiment was about months. The condition of the environmental test room was in temperature 25[$^{\circ}C$], relative humidity 50[RH%], air current speed 0.02[m/s] and illuminance 1000[lux]. It were analyzed correlation of twenty-three index of EEG(absolute ${\theta}$, relative ${\theta}$, absolute $S{\alpha}$, relative $S{\alpha}$, absolute ${\alpha}$, relative ${\alpha}$, absolute ${\beta}$, relative ${\beta}$, absolute $\gamma$, relative $\gamma$, absolute $F{\alpha}$, relative $F{\alpha}$, absolute SMR, relative SMR, $SMR/{\theta}$, $SMR+M{\beta}/{\theta}$, absolute $H{\beta}$, relative $H{\beta}$, $H{\beta}/{\alpha}$, absolute $M{\beta}$, relative $M{\beta}$, SEF50, ASEF50) and ten index of Vibraimage(Aggression, Stress, Tension/Anxiety, Suspect, Balance, Charm, Energy, Self regulation, Inhibition, Neuroticism). As a result, I was found that relative ${\gamma}$ index of EEG and neuroticism index of Vibraimage have a high correlation as (${\pm}$).414 and (${\pm}$).424.

A Study on Act on Certified Detective and Certified Detective Business (공인탐정 관련 법률(안)의 문제점과 개선방안에 관한 연구)

  • Kim, Bong-Soo;Choo, Bong-Jo
    • Korean Security Journal
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    • no.61
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    • pp.285-305
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    • 2019
  • In the bill of [Act on Certified Detective and Certified Detective Business] (hereinafter referred to as the Certified Detective Act) proposed and represented by the member of National Assembly, Lee Wan-Yong in 2017, the legislative point of view showed that various incidents and accidents, including new crimes, are frequently increasing as society develops and becomes more complex, however, it is not possible to solve all the incidents and accidents with the investigation force of the state alone due to manpower and budget, and therefore, a certified detective or private investigator are required. According to the decision of the Constitutional Court in June 2018, Article 40 (4) of the Act on the Use and Protection of Credit Information is concerned with 'finding the location and contact information of a specific person or investigating privacy other than commerce relations such as financial transactions' are prohibited. It is for the purpose of preventing illegal acts in the process of investigation such as the location, contact information, and the privacy of a specific person and protecting the privacy and tranquility of personal privacy from misuse and abuse of the personal information etc. Such 'privacy investigation business' currently operates in the form of self-employment business, which becomes a social issue as some companies illegally collect and provide such privacy information by using illegal cameras or vehicle location trackers and also comes to be the objects of clampdown of the investigative agency. Considering this reality, because it is difficult to find a resolution to materialize the legislative purpose of the Act on the use and protection of credit information other than prohibiting 'investigation business including privacy etc' and it is possible to run a similar type of business as a detective business in the scope that the laws of credit research business, security service business, the position of the Constitutional Court is that 'the ban on the investigations of privacy etc' does not infringe the claimant's freedom to choose a job. In addition to this decision, the precedent positions of the Constitutional Court have been that, in principle, the legislative regulation of a particular occupation was a matter of legislative policy determined by the legislator's political, economic and social considerations, unless otherwise there were any special circumstances, and. the Constitutional Court also widely recognized the legislative formation rights of legislators in the qualifications system related to the freedom of a job. In this regard, this study examines the problems and improvement plans of the certified detective system, focusing on the certified detective bill recently under discussion, and tries to establish a legal basis for the certified detective and certified detective business, in order to cultivate and institutionalize the certified detective business, and to suggest methodologies to seek for the development of the businesses and protect the rights of the people.

The Trend of Nursing Research in Korea on Mother-Child Relationship (모아관계에 관한 국내 간호연구 동향)

  • Paik Seung Nam;Kim Jeong Hwa;Wang Myung Ja;Sung Mi Hae;Cho Kyoul Ja
    • Child Health Nursing Research
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    • v.2 no.1
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    • pp.55-68
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    • 1996
  • Although nursing researchers have performed studies on parent-child relationship actively since early 1980s in Korea, nothing hasn't been tried on the analysis of the contents of researches. We researchers tried examining the trend of researches by investigating treaties on mother-child relationship conducted from 1981 to 1994. The purpose of this study was to analyze the trend of research on the mother-child relationship and to suggest direction for future study. The total numbers of the studies were 27 cases, These studies were analyzed for 1) time of publication 2) research design 3)main concept 4)thesis for a degree or nondegree 5) measurement tool The finding of the analysis were as follows. 1) In the chronological situation, the research on mother-child relationship began to perform in 1981 in the country and had been made most for five years to 1986 with 14 treaties and has decreased since 1990. 2) In the research plan, there are 21 survey(the most) ,5 quasi experimental(before 1986), 1 qualitative. 3) In the subject, the researches on mother-child are the most, 22 and of them 17 treaties on normal infant,4 comparative research on high risk infant and normal infant,5 treaties on mother, 4) The conception of mother-child relationship was used as various conceptions such as affection, union, bonding in early research of 1980s, but it hasn't been used as union bonding but studied mostly as the conception of 'mother-child interaction'since 1986. 5) The measurement tool of research was used variously, the Cropley's tool was used in early 1980s, but Walker's MIPS, Barnard's NCAST were used mostly in 1990. 6) Mother-child interaction influence on mother's self-conception, stress, care and feeding of child, frequency of delivery, planned pregnancy and delivery and health condition of child, birth weight, fetal period, period of mother-child life. Aspects of mother-child interaction composed on visual contact, looking at each other, skinship and caress with finger and fingertip. The leading action of mother-child interaction was mostly uttering action. 7) I suggest that the program for professional education is necessary for the establishment of the aspects of mother-child interaction.

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The influence of internet addiction on health behavior, sexual behavior and mental health of college student (대학생의 인터넷 중독이 건강행동, 성행동, 정신건강에 미치는 요인)

  • Nam, Mun-Hee;Kim, Jeoung-Mi
    • Journal of Digital Convergence
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    • v.12 no.4
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    • pp.367-378
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    • 2014
  • The purpose of this study was to explore the factors related to internet addiction in college student of Korea. Methods: From November 19, 2012 until December 14, 2012, 300 college students from one of the universities located at K city were surveyed. This study is a cross-sectional survey of college students in K city, and data was collected through self-report questionnaires. Data was analyzed by Fisher's exact test, independent t-test to identify different according to addiction group, and logistic regression analysis in order to factors related to on health behavior, sexual behavior and mental health of among college students. According to results, factors related to risk of addiction were lower frequency of exercise (p<0.05), no eat breakfast for 2 day (p<0.05), porno magazine/porno video contact pornography (p<0.05), subjective happiness index (p<0.05), and suicidal Ideation (p<0.05). This study suggest that exercise, regular diet, important of reproductive health, subjective happiness index and Suicidal Ideation are associated with internet addiction in College student. It is necessary to develop some preventive programs for those of internet addiction.

Numerical Analysis of Nuclear-Power Plant Subjected to an Aircraft Impact using Parallel Processor (병렬프로세서를 이용한 원전 격납건물의 항공기 충돌해석)

  • Song, Yoo-Seob;Shin, Sang-Shup;Jung, Dong-Ho;Park, Tae-Hyo
    • Journal of the Computational Structural Engineering Institute of Korea
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    • v.24 no.6
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    • pp.715-722
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    • 2011
  • In this paper, the behavior of nuclear-power plant subjected to an aircraft impact is performed using the parallel analysis. In the erstwhile study of an aircraft impact to the nuclear-power plant, it has been used that the impact load is applied at the local area by using the impact load-time history function of Riera, and the target structures have been restricted to the simple RC(Reinforced Concrete) walls or RC buildings. However, in this paper, the analysis of an aircraft impact is performed by using a real aircraft model similar to the Boeing 767 and a fictitious nuclear-power plant similar to the real structure, and an aircraft model is verified by comparing the generated history of the aircraft crash against the rigid target with another history by using the Riera's function which is allowable in the impact evaluation guide, NEI07-13(2009). Also, in general, it is required too much time for the hypervelocity impact analysis due to the contact problems between two or more adjacent physical bodies and the high nonlinearity causing dynamic large deformation, so there is a limitation with a single CPU alone to deal with these problems effectively. Therefore, in this paper, Message-Passing MIMD type of parallel analysis is performed by using self-constructed Linux-Cluster system to improve the computational efficiency, and in order to evaluate the parallel performance, the four cases of analysis, i.e. plain concrete, reinforced concrete, reinforced concrete with bonded containment liner plate, steel-plate concrete structure, are performed and discussed.