• Title/Summary/Keyword: Selective removal

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A Study of End Point Detection Measurement for STI-CMP Applications (STI-CMP 공정 적용을 위한 연마 정지점 고찰)

  • 이경태;김상용;김창일;서용진;장의구
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.07a
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    • pp.90-93
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    • 2000
  • In this study, the rise throughput and the stability in fabrication of device can be obtained by applying of CMP process to STI structure in 0.18um semiconductor device. To employ in STI CMP, the reverse moat process has been added thus the process became complex and the defects were seriously increased. Removal rates of each thin films in STI CMP was not equal hence the devices must to be effected, that is, the damage was occured in the device dimension in the case of excessive CMP process and the nitride film was remained on the device dimension in the case of insufficient CMP process than these defects affect the device characteristics. To resolve these problems, the development of slurry for CMP with high removal rate and high selectivity between each thin films was studied then it can be prevent the reasons of many defects by reasons of many defects by simplification of process that directly apply CMP process to STI structure without the reverse moat pattern process.

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An Experiment of SCR System On-board Ship

  • Choi Jae-Sung;Cho Kwon-Hae;Lee Jae-Hyun;Lee Jin-Wook;Kim Jeong-Gon;Jang Sung-Hwan;Yang Hee-Sung;Ko Jun-Ho;Park Ki-Yong
    • Journal of Advanced Marine Engineering and Technology
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    • v.29 no.3
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    • pp.306-312
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    • 2005
  • IMO $NO_x$ levels are generally possible to meet by means of primary on-engine measures. Further significant follow-on reductions are likely to require a secondary after-treatment technique. SCR(Selective Catalytic Reduction) technology is used almost exclusively for $NO_x$ removal in stationary combustion systems. In order to develop a practical SCR system for marine application on board ship, a primary SCR system using urea was made. The SCR system was set up on the ship, 'HANNARA' as a test vessel. employed a two-stroke cycle diesel engine as main propulsion, which is a training ship of Korea Maritime University. The purpose of this paper is to report the results about the basic effects of the below system parameters, The degree of $NO_x$ removal depends on some parameters, such as the amount of urea solution added, space velocity, reaction gas temperature and activity of catalyst.

A Study on the Formation and Reduction of NOx in 5TPD SRF Boiler (5톤/일 규모 SRF 전용 연소보일러에서의 질소산화물의 생성과 저감에 대한 연구)

  • Yoon, Young-Sik;Park, Dong-Kyu;Gu, Jae-Hoi;Park, Yeong-Su;Seo, Yong-Chil
    • Journal of Korea Society of Waste Management
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    • v.35 no.7
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    • pp.647-652
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    • 2018
  • The emission of nitrogen oxides has a great environmental impact. It leads to Los Angeles type smog, and it recently has attracted attention as a source of ultrafine dust. The main sources of nitrogen oxides are internal combustion engines and industrial boilers. These emission sources are processes that are essential for human industrial activities, so the regulation of original use is impossible. Therefore, special control methods should be applied to reduce NOx emissions into the atmosphere. In this study, we investigated how the supply of ER and urea influences the removal of nitrogen oxides from SRF combustion boilers. Experimental results show that the removal efficiency of nitrogen oxides can be up to 80% under the conditions of ER 2.0 and a urea feed of 0.5 LPM.

Novel Detection Protocol for Erwinia amylovora in Orchard Soil after Removal of Infected Trees

  • Sujin Song;Byeori Kim;Kwang-Pyo Kim;Eunjung Roh
    • The Plant Pathology Journal
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    • v.40 no.3
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    • pp.282-289
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    • 2024
  • Fire blight is a bacterial disease caused by Erwinia amylovora. In Korea, fire blight was first reported in 2015 in an orchard. If the infection is confirmed, all trees in the orchard must be removed and the orchard must remain closed for 3 years. Since 2020, if the number of trees infected with fire blight is less than 5% of the total trees in the orchard, only the infected tree and adjacent trees are removed in Korea. Three years after removal, the trees can be replanted after confirming that the orchard soil is free from E. amylovora. In this study, a protocol was established for detecting E. amylovora in soil via selective enrichment, using tryptic soy broth with 0.05% bile salts and 50 ㎍/ml cycloheximide, and real-time polymerase chain reaction. This protocol resulted in a 1,000-times improved detection limit for E. amylovora in soil samples compared to that in unenriched samples. Soil monitoring was performed for orchards where fire blight-infected trees had been removed 3-27 months prior; the selected orchards were monitored every 3 months. Monitoring confirmed that E. amylovora was not present in the soil at any site in any of the orchards. A new detection protocol facilitates the monitoring of E. amylovora in soil and could help permit the replanting of trees in orchards. Also monitoring results provide evidence that trees can be planted earlier.

Screening of White Rot Fungi with Selective Delignification Capacity for Biopulping (백색목재부후균중 Biopulping에 이용가능한 선택적 리그닌분해균의 스크리닝)

  • Lee, Jong-Kyu;Oh, Eun-Sung
    • The Korean Journal of Mycology
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    • v.26 no.2 s.85
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    • pp.144-152
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    • 1998
  • To obtain white rot fungi which have selective delignification capacity and can be used in biopulping processes, 94 different wood rotting fungi were screened and the capabilities of selected species were evaluated on deciduous and coniferous wood blocks. White rot fungi, first of all, were selected by simple enzyme tests, i.e., cellulase activity test; phenol oxidase activity test; laccase and peroxidase activity test. Most organisms that gave a positive Bavendamm gave a strongly positive laccase test with syringaldazine whereas most of those that gave a negative Bavendamm test also negative test for laccase and peroxidase, even if some exceptions were noted. Wood decay experiement were carried out to select fungal species with selective lignin-degrading ability by inoculating selected fungi to both wood blocks of Populus tomentiglandulosa and Larix leptolepis. After 12 weeks of incubation, weight losses, lignin losses, and morphological characteristics of the decayed wood were investigated. Almost all fungi tested caused 2 or more times of weight losses in P. tomentiglandulosa than in L. leptolepis, while no weight losses were detected from the un-inoculated wood blocks. Ceriporiopsis subvermispora and Phanerochaete chrysosporium were the best delignifiers for both hardwood and softwood. P. chrysosporium, however, was less effective than C. subvermispora. Bjerkandera adusta and two unidentified spp. caused delignification for only P. tomentiglandulosa. B. adusta caused simultaneous rot of all cell wall components, resulted in thinning of the secondary cell wall layers. Other fungi caused selective delignification resulting in the removal of lignin from middle lamella and separation of cells from each other.

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A Study on Selective Catalytic Reduction on Diesel Particulate Filter Catalyst and Coating Technology the Removal of Particulate Matters and NOx for Old Special Cargo Vehicles (노후 특수·화물 차량 PM/NOx 저감을 위한 SDPF 촉매 및 코팅 기술 연구)

  • Jeong, Kwanhyoung;Seo, Philwon;Oh, Hungsuk;Kim, Jongkook;Kang, Soyeon;Kang, Jeongho;Kim, Hyunjun;Shin, Byeongseon
    • Applied Chemistry for Engineering
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    • v.32 no.6
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    • pp.695-699
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    • 2021
  • In this study, Selective Catalytic Reduction on Diesel Particulate Filter (SDPF) after-treatment system was introduced to simultaneously remove NOx and Particulate Matters (PM) emitted from trucks and special cargo vehicles using old engine. First, in order to select an Selective Catalytic Reduction (SCR) catalyst for SDPF, the de-NOx performance of V/TiO2 and Cu-Zeolite catalysts were compared, and the SCR catalyst characteristics were analyzed through Brunauer Emmett Teller (BET), X-ray Diffraction (XRD) and NH3-TPD (Temperature Programmed Desorption). From the activity test results, the Cu-zeolite catalyst showed the best thermal stability. For optimal coating of SDPF, slurry was prepared according to the target particle size. From the coating stability and back pressure test results of SDPF according to the amount of SCR coating, As a result of comparing coating stability, back pressure, and de-NOx performance by producing A, B, and C samples for each loading amount of the SDPF catalyst, the best results were found in the B sample. The engine dynamometer test was conducted for the optimal SDPF after-treatment system, and the test results satisfied Eu-5 regulations.

CFD Analysis on the Internal Reaction in the SNCR System (SNCR 시스템 내부의 물질 반응에 관한 전산해석적 연구)

  • Koo, Seongmo;Yoo, Kyung-Seun;Chang, Hyuksang
    • Clean Technology
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    • v.25 no.1
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    • pp.63-73
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    • 2019
  • Numerical analysis was done to evaluate the chemical reaction and the reduction rate inside of selective non-catalytic reduction to denitrification in combustion process. The $NO_X$ reduction in selective non-catalytic reduction is converted to not only nitrogen but also nitrous oxide. Simultaneous $NO_X$ reduction and nitrous oxide generation suppressing is required in selective non-catalytic reduction because nitrous oxide influences the global warming as a greenhouse gas. The current study was performed compare the computational analysis in the same temperature and amount of NaOH, and in comparison with the previous research experiments and confirmed the reliability of the computational fluid dynamics. Additionally, controlling the addition amount of NaOH to predict the $NO_X$ reduction efficiency and nitrous oxide production. Numerical analysis was done to check the mass fraction of each material in the measurement point at the end of selective non-catalytic reduction. Experimental Value and simulation value by numerical analysis showed an error of up to 18.9% was confirmed that a generally well predicted. and it was confirmed that the widened temperature range of more than 70% $NO_X$ removal rate is increased when the addition amount of NaOH. So, large and frequent changes of the reaction temperature waste incineration facilities are expected to be effective.

A Study on Electrodeionization for Purification of Primary Coolant of a Nuclear Power Plant (원자력 발전소의 일차 냉각수 정화를 위한 전기탈이온법의 기초연구)

  • Yeon, Kyeong-Ho;Moon, Seung-Hyeon;Jeong, Cheorl-Young;Seo, One-Sun;Chong, Sung-Tai
    • Journal of Radiation Protection and Research
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    • v.24 no.2
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    • pp.73-86
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    • 1999
  • The ion-exchange method for the purification of primary coolant has been used broadly in PWR(pressurized water reactor)-type nuclear power plants due to its high decontamination efficiency, simple system, and easy operation. However, its non-selective removal of metal and non-radionuclides shortens its life, resulting in the generation of a large amount of waste ion-exchange resin. In this study, the feasibility of electrodeionization (EDI) was investigated for the purification of primary cooling water using synthetic solutions under various experimental conditions as an alternative method for the ion exchange. The results shows that as the feed flow-rate increased, the removal efficiency increased and the power consumption decreased. The removal rate was observed as a 1000 decontamination factor(DF) at a nearly constant level. For the synthetic solution of 3 ppm TDS (Total Dissolved Solid), the power consumption was 40.3 mWh/L at 2.0 L/min of feed flow rate. The higher removal rate of metal species and lower power consumption were obtained with greater resin volume per diluting compartment. However, the flow rate of the EDI process decreased with the elapsed time because of the hydrodynamic resistivity of resin itself and resin fouling by suspended solids. Thus, the ion-exchange resin was replaced by an ion-conducting spacer in order to overcome the drawback. The system equipped with the ion-conducting spacer resolved the problem of the decreasing flow rate but showed a lower efficiency in terms of the power consumption, the removal rate of metal species and current efficiency. In the repeated batch operation, it was found that the removal efficiency of metal species was stably maintained at DF 1000.

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Studies on the Preparation of SiO2-TiO2-V2O5 Catalyst by SOL-GEL Method and its Application as a Simultaneous Removal of NOx and SOx from Stationary Sources (SOL-GEL법을 이용한 SiO2-TiO2-V2O5계 촉매들의 제조와 촉매상에서의 고정원 배가스 중 NOx 및 SOx의 동시제거에 관한 연구)

  • Bae, Seungju;Choung, Sukjin
    • Applied Chemistry for Engineering
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    • v.7 no.2
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    • pp.269-279
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    • 1996
  • The porous armophous catalysts, composed of $SiO_2-TiO_2-V_2O_5$ were prepared through SOL-GEL process by differing the preparation parameters. Selected the optimum SOL-GEL catalyst which has the best NO removal activity through the screening test, and repeated coating it on the cordierite monolith which is the freely through and inert. And examined the NOx, SOx simultaneous removal effect under S. C. R. condition. In addition to its characterization performances by the DTA, TGA, BET, $NH_3$ and NO TPD, ESCA, XRD etc.

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A Study on Remediation of Heavy Metal Contaminated Soil using a Soil Electrolysis Apparatus with Spiral Paddle (나선형패들이 장착된 토양전기분해장치를 이용한 중금속 오염토양 정화에 관한 연구)

  • Lee, Jun-Hee;Choi, Young-Ik;Jung, Jin-Hee
    • Journal of Environmental Science International
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    • v.26 no.6
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    • pp.797-802
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    • 2017
  • This study aimed to remove organic matter and heavy metals that could affect the recycling of soils contaminated by heavy metals, by means of electrolysis, carried out simultaneously with the leaching of the soil. To ensure better experimental equipment, a soil electrolysis apparatus, equipped with spiral paddles, was used to agitate the heavy-metal-contaminated soil effectively. The heavy-metal-contaminated soil was electrolyzed by varying the voltage to 5 V(Condition 1), 15 V(Condition 2), and 20 V(Condition 3), under the optimal operating conditions of the electrolysis apparatus, as determined through previous studies. The results showed that the pH of the electrolyte solution and the heavy-metal-contaminated soil, after electrolysis, tended to decrease with an increase in voltage. The highest removal efficiencies of TOC and $COD_{Cr}$ were 18.8% and 29.1%, 38.8% and 4.2%, and 33.3% and 50.0%, under conditions 1, 2 and 3, respectively. Heavy metals such as Cd and As were not detected in this experiment. The removal efficiencies of Cu, Pb and Cr were 4.7%, 8.3% and 2.1%, respectively, under Condition 1, while they were 42.9%, 15.2% and 22.1%, respectively, under Condition 2, and 4.7%, 23.0%, and 24.9%, respectively, under Condition 3. These results suggest that varying the voltage with the soil electrolysis apparatus for removing contaminants for the recycling of heavy-metal-contaminated soil allows the selective removal of contaminants. Therefore, the results of this study can be valuable as basic data for future studies on soil remediation.