• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2009년도 제38회 동계학술대회 초록집
• /
• pp.464-464
• /
• 2010

A few years ago, for maintaining high stability and production yield of production equipment in a semiconductor fab, on-line monitoring of wafers is required, so that semiconductor manufacturers are investigating a software based process controlling scheme known as virtual metrology (VM). As semiconductor technology develops, the cost of fabrication tool/facility has reached its budget limit, and reducing metrology cost can obviously help to keep semiconductor manufacturing cost. By virtue of prediction, VM enables wafer-level control (or even down to site level), reduces within-lot variability, and increases process capability, $C_{pk}$. In this research, we have practiced VM on $SiO_2$ etch rate with optical emission spectroscopy(OES) data acquired in-situ while the process parameters are simultaneously correlated. To build process model of $SiO_2$ via, we first performed a series of etch runs according to the statistically designed experiment, called design of experiments (DOE). OES data are automatically logged with etch rate, and some OES spectra that correlated with $SiO_2$ etch rate is selected. Once the feature of OES data is selected, the preprocessed OES spectra is then used for in-situ sensor based VM modeling. ICP-RIE using 葰.56MHz, manufactured by Plasmart, Ltd. is employed in this experiment, and single fiber-optic attached for in-situ OES data acquisition. Before applying statistical feature selection, empirical feature selection of OES data is initially performed in order not to fall in a statistical misleading, which causes from random noise or large variation of insignificantly correlated responses with process itself. The accuracy of the proposed VM is still need to be developed in order to successfully replace the existing metrology, but it is no doubt that VM can support engineering decision of "go or not go" in the consecutive processing step.

• 제어로봇시스템학회:학술대회논문집
• /
• 제어로봇시스템학회 1994년도 Proceedings of the Korea Automatic Control Conference, 9th (KACC) ; Taejeon, Korea; 17-20 Oct. 1994
• /
• pp.140-145
• /
• 1994

In this paper, we consider a problem to estimate process parameters using input-output data collected from the process operating in closed-loop control system. When orders and delay-time of the process are known correctly, under some conditions of identifying experiments, it is reported that accurate identification results can be obtained by applying prediction error method. To get accurate estimates, it is necessary to know orders and delay-time of the process. It is difficult to determine them in closed-loop identification, because ill-condition for identification are easily caused by selection of unsuitable order or delay time. Furthermore, the procedures to select orders and delay-time in open-loop identification aren't always available in closed-loop identification. The purpose of this paper is to determine a delay-time under suitable assumption that order of the process are known as the first step.

• 한국경영과학회:학술대회논문집
• /
• 대한산업공학회/한국경영과학회 1996년도 춘계공동학술대회논문집; 공군사관학교, 청주; 26-27 Apr. 1996
• /
• pp.627-630
• /
• 1996

One of the most common communication mechanisms to describe a situation or a process is a story written as an ordered sequence of events or activities. For example, a shop floor supervisor may present the operations of his manufacturing system by describing the processes of manunfacturing a product in his shop. Although IDEF3 is one of the most commonly used methods for describing a business process, but it is not common for a manufacturing process. In this study, we tried to apply IDEF3 for describing a manufacturing process. Problems and suggestions such as selection probability, programmable process modeling, manufacturing resource model were presented.

• 한국소성가공학회:학술대회논문집
• /
• 한국소성가공학회 1997년도 춘계학술대회논문집
• /
• pp.144-147
• /
• 1997

Process design of multi-step wire drawing process, conducted by means of finite element analysis and ANN(Artificial Neural Network), has been considered. The investigated problem involves the adequate selection of the drawing die angle and the correspondent reduction rate sequence in the condition of desired initial and final diameter. Combinations of the process parameters which are used in finite element simulation are selected by using orthogonal array. Also the orthogonal array and the results of finite element simulation which are related to the process energy are used as train data of ANN. In this study, it is shown that the new technique using ANN is useful method in application to the wide range of metal forming process.

• 대한기계학회논문집A
• /
• 제21권2호
• /
• pp.209-216
• /
• 1997

A feature is well known as a medium to integrate CAD, CAPP and CAM systems. For a part drawing including both simple geometry and compound geometry, a process plan such as the selection of process, machine tool, cutting tool etc. normally needs simple geometry data and non-geometry data of the feature as the input. However, a extended process plan such as the generation of process sequence, operation sequence, jig & fixture, NC program etc. necessarily needs the compound geometry data as well as the simple geometry data and non-geometry data. In this paper, we propose a feature data model according to the result of analyzing necessary data, including the compound geometry data, the simple geometry data and the non-geometry data. Also, an example of the feature data model in milling process planning is described.

• 한국주조공학회지
• /
• 제15권5호
• /
• pp.477-482
• /
• 1995

A computer simulation model of various smelting process for melting waste sand was developed by using energy and material balance concept. This model can predict the coal, flux and oxygen consumption and the volume and temperature of off-gas. The major critical variables for smelting process can be explained by using the analysis of energy and material balance. The major conclusions were as follows; 1. The most important variables for smelting process were high post-combustion ratio, high heat transfer efficiency and refractory protection technology. 2. For saving energy in this smelting process, selection of raw materials i.e coal, flux are very important, espacially using of low volatile coal is very profitable. 3. The treatment cost of waste sand is high and environmental restriction is severe, in this reason we must be concerned in the treatment of waste sand by smelting process.

• 산업경영시스템학회지
• /
• 제29권1호
• /
• pp.9-17
• /
• 2006

This paper considers a six sigma project for improving productivity of the brace complement center pillar. The project follows a disciplined process of fife phases: define, measure, analyze, improve, and control. A process map is used to identify process input and output variables. Eleven key process input variables are selected by using X&Y matrix and FMEA, and finally eight vital few input variables are selected from analyze phase. The optimum process conditions of the vital few input variables are jointly obtained by maximizing productivity of the brace complement center pillar using DOE and alternative selection method.

• 한국공작기계학회:학술대회논문집
• /
• 한국공작기계학회 2005년도 춘계학술대회 논문집
• /
• pp.383-388
• /
• 2005

In this paper Research development about a micro metal forming manufacturing system has been developed. A micro forming system has been achieved in Japan and it's developed micro press is limited to single forming process. To coincide with the purpose to be more practical, research and development is necessary about the press which the multi forming process is possible. We set the development of the equipment including micro deep drawing, micro punching and micro restriking process to the goal. To achieve this goal, Research about micro forming process to be related to multi process forming must be preceded first. Material selection and analysis about micro forming process are accomplished in this paper. And the basis research to make actual system is accomplished.

• 소성∙가공
• /
• 제31권1호
• /
• pp.5-10
• /
• 2022

In multi-stage cold forging process, to enhance the productivity and product quality, in-site process monitoring technique by implanting sensors such as piezo-sensor and acoustic emission sensor has been continuously studied. For accurate analysis of the process, the selection of appropriate sensors and implantation positions are very important. Until now, in a multi-state forging machine, wedge parts located at the end of punch-set are used but it is difficult to analyze minute changes in die block-set. In this study, we also implanted sensors to the die part (die spacer) and compared signals from both sensors and found that sensing signals from die part showed enhanced process monitoring results.

• 품질경영학회지
• /
• 제17권2호
• /
• pp.47-54
• /
• 1989

This study is concerned with the reduction of fraction defective for quality improvement model in manufacturing system. For the methodology, a heuristic method for the selection of alternatives of process improvement is introduced for quality improvement and cost problem subject to cost constraints. This study suggests a model for selecting fraction defective reduction alternatives in multi-stage manufacturing system and a numerical example is presented.