• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.382-382
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• 2012

CIGS thin films have received great attention as a promising material for solar cells due to their high absorption coefficient, appropriate bandgap, long-term stability, and low cost production. CIGS thin films are deposited by various methods such as co-evaporation, sputtering, spray pyrolysis and electro-deposition. The deposition technique is one of the most important processes in preparing CIGS thin film solar cells. Among these methods, co-evaporation is one of the best technique for obtaining high quality and stoichiometric CIGS films. However, co-evaporation method is known to be unsuitable for commercialization. The sputtering is known to be very effective and feasible process for mass production. In this study, CIGS thin films have prepared by rf magnetron sputtering using a $Cu(In_{1-x}Ga_x)Se_2$ single quaternary target without post deposition selenization. This process has been examined by the effects of deposition parameters on the structural and compositional properties of the films. In addition, we will explore the influences of substrate temperature and additional annealing treatment after deposition on the characteristics of CIGS thin films. The thickness of CIGS films will be measured by Tencor-P1 profiler. The crystalline properties and surface morphology of the films will be analyzed using X-ray diffraction and scanning electron microscopy, respectively. The optical properties of the films will be determined by UV-Visible spectroscopy. Electrical properties of the films will be measured using van der Pauw geometry and Hall effect measurement at room temperature using indium ohmic contacts.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.24 no.9
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• pp.755-759
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• 2011

$Cu(In_{1-x},Ga_x)Se_2$ thin films have been considered as an effective absorber material for high efficient solar cells. In this paper, the CIGS thin films with varied Ga content were prepared using a co-evaporation process of three stage. We carry out structure and electrical optical property on the thin film in varied Ga content. CIGS thin films have been characterized by X-ray diffraction(XRD), scanning electron microscopy(SEM), energy-dispersive spectroscopy(EDS), four-point probe measurement, and the Hall measurement. To optimize Ga contents, Ga/(In+Ga) ratio were changed from 0.13 to 0.72. At this time the carrier concentrations were varied from $1.22{\times}10^{11}\;cm^{-3}$ to $5.07{\times}10^{16}\;cm^{-3}$, and electrical resistivity were varied from $1.11{\times}10^0\;{\Omega}-cm$ to $1.08{\times}10^2\;{\Omega}-cm$. A strong <220/204> orientation and a lager grain size were obtained at a Ga/(In+Ga) of 0.3. We were able to achieve conversion efficiency as high as 15.95% with a Ga/(In+Ga) of 0.3.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.11a
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• pp.416-419
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• 2002

There are being two prominent studying for Digital Radiography. Direct and Indirect method of Digital Radiography are announced for producing high quality digital image. The one is using amorphous selenium as photoconductor and the other is using phosphor layer as a light conversion. But each two systems have strength and weakness such as high voltage and blurring effect. In this study, we investigated the electrical characteristic of $multi-layer\left(CaWO_{4}+a-Se \right)$ as a photoconductor according to the changing arsenic composition ratio. This is a basic research for developing of Hybrid digital radiography which is a new type X-ray detector. The arsenic composition ratio of a-Se compound is classified into 7 different kinds which have 0.1%, 0.3%, 0.5%, 1%, 1.5%, 5%, 10% and were made test sample throught thermo-evaporation. The phosphor layer of $CaWO_4$ was overlapped on a-Se using EFIRON optical adhesives. We measured the dark and photo current about the test sample and compared the electrical characteristic of the net charge and signal-to-noise ratio. Among other things, test sample of compound material of 0.3% arsenic showed good characteristic of $2.45nA/cm^2$ dark current and $357.19pC/cm^2/mR$ net charge at $3V/{\mu}m$.

• 한국신재생에너지학회:학술대회논문집
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• 2008.05a
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• pp.438-440
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• 2008

Effects of Ga contents of CIGS absorber layer on the performance of thin films solar cells were investigated. As Ga content increased, the grain size of CIGS films decreased presumably because Ga diffusion during 2nd stage of co-evaporation process is more difficult than In diffusion. Performances of corresponding solar cell show systematic dependence on Ga content in which open circuit voltage increases and short circuit current and fill factor decrease as Ga contents increases. At a optimal condition of Ga/(In+Ga)=0.27, the solar cell shows a conversion efficiency of 15.6% with $V_{OC}$ of 0.625 V, $J_{SC}$ of 35.03 mA/$cm^2$ and FF of 71.3%.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.427-427
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• 2012

Cu(In,Ga)$Se_2 $ (CIGS) 박막 태양전지는 높은 효율과 낮은 생산 단가로 인해 많은 연구가 이루어지고 있다. 특히, Se flux는 박막의 특성에 가장 중요한 CIGS의 결정성, 결정립 크기, 결정방향을 형성하는데 영향을 주는 것으로 알려져 있다. 일반적인 co-evaporation에 사용되는 Se effusion cell의 경우, 높은 분자가를 가지는 Se 분자들이 공급되기 때문에 낮은 반응성을 보이지만 Se cracker cell을 사용할 경우 Se 분자들이 열적으로 크래킹되어 낮은 분자가를 가지므로 화학적으로 높은 반응성을 가진다. 따라서 적은 양의 Se으로도 양질의 CIGS 박막 제작이 가능하다. 본 연구에서는 Se effusion cell과 cracker cell을 이용하여 CIGS 광흡수층을 제작하였으며, 각각 제작된 CIGS 박막의 특성을 비교하였다. 또한 Se cracker cell의 reservoir zone(R-zone) 온도를 통해 Se flux를 변화시켜 Se flux에 따른 CIGS 박막 태양전지의 특성에 대해 알아보았다. SEM, EDS, XRD 측정을 통해 박막의 특성을 분석하였고, J-V 측정을 통해 태양전지의 특성에 대해 알아보았다. Se cracker를 사용하여 제작된 CIGS 박막의 결정립 크기가 effusion cell로 제작된 박막보다 더 크게 나타났고, Se flux가 증가할수록 결정립의 크기는 증가하였다. Se cracker의 flux가 $0.17{\'{{\AA}}}$/s일 때 반사방지막 없이 13.14%의 효율을 나타내었다.

• Applied Science and Convergence Technology
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• v.23 no.6
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• pp.371-375
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• 2014

Diffusion coefficient of Fe in polycrystalline host ZnSe as a mid-IR gain medium has been measured in the annealing temperature ranges of 850 to $950^{\circ}C$. The synthesis of the samples was carried out in quartz ampoule in which the Fe thin film deposited by physical vapor evaporation method on the ZnSe. One can realize that the diffusion coefficient strongly depends on the surface active surfactants through the cleaning process and the substrate temperature during the thin film deposition leading to $2.04{\times}10^{-9}cm^2/s$ for $Fe^{2+}:ZnSe$. The Annealing temperature dependence of the Fe ions diffusion in ZnSe was used to evaluate the activation energy, $E_a$=1.39 eV for diffusion and the pre-exponential factor $D_0$ of $13.5cm^2/s$.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1992.05a
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• pp.114-116
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• 1992

ITO/TiO$_2$/Se solar cell were fabricated by vacuum deposition method, the Se and TiO$_2$were deposited on the ITO/Glass. Prior to the electrical properties of film, the provide Te between the ITO and the Se film were deposited by substrate temperature 20[$^{\circ}C$] and evaporation time 15[min], next time TiO$_2$ were treated by rf-magnetron sputtering in substrate temperature 250[$^{\circ}C$]. Fabricated ITO/TiO$_2$/Se solar cell were as follows : Open Voltage V$\_$oc/=848[mV], Short Circuit Current I$\_$sc/=10.79[mA/$\textrm{cm}^2$]. Fill Factor FF=0.518, energy conversion efficiency η=4.74[%] under the illumination of AM 1.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.24 no.2
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• pp.162-165
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• 2011

In this paper, $CuInSe_2$ thin film was prepared by use of the co-evaporation method with the variation of the substrate temperature in the range of $100^{\circ}C$ to $400^{\circ}C$. The film was annealed at $300^{\circ}C$ for an hour in a vacuum chamber at $3{\times}10-4$ Pa. After annealing, the thin film prepared at the substrate temperatures of $100^{\circ}C$ and $200^{\circ}C$ was observed. The XRD (x-ray diffraction) pattern of sample prepared at $100^{\circ}C$ showed the single phase formation of $CuInSe_2$. However, at $200^{\circ}C$, there was no apparent difference in the XRD pattern except a variation in the intensity of the peak. As the annealing treatment of substrate improved the crystal structure of the film, it affected to the increase of an electron mobility, resulted in an increase in conductivity and a decrease in resistance. As a results, when the substrate temperature was at $200^{\circ}C$ and $300^{\circ}C$, the sheet resistance was 1.534 $\Omega/\Box$ and 1.554 $\Omega/\Box$, respectively, and the resistivity was $1.76{\times}10-6\;{\Omega}{\cdot}cm$ and $1.7210-6\;{\Omega}{\cdot}cm$, respectively. From the absorption spectrum measurements, there was no variation between the before and after annealing conductions. And it means that the annealing step does not affect the thickness of the thin film.

• 한국신재생에너지학회:학술대회논문집
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• 2011.11a
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• pp.58.1-58.1
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• 2011

CIS(CuInSe2)계 화합물 태양전지는 높은 광흡수계수와 열적 안정성으로 고효율 태양전지 제조가 가능하여 태양전지용 광흡수층으로 매우 이상적이다. 미국 NREL에서는 이러한 CIGS 태양전지를 Co-evaporation 방법으로 제조 20%이상의 에너지 변환 효율을 달성하였다고 보고하였다. CIGS 태양전지의 경우 기존의 유리 기판 대신 유연한 철강 기판을 사용해 태양 전지를 flexible하게 제조 할 수 있다는 장점이 있다. 이러한 flexible 태양전지의 경우 기존의 rigid 태양전지의 적용분야 뿐만 아니라 BIPV, 선박, 장난감, 군용, 자동차등 더욱 더 많은 분야에 활용이 가능하다. 본 연구에서는 기존의 rigid한 기판인 soda lime glass와 flexible 기판인 stainless steel 기판으로 소자를 제조하여 효율을 비교 분석 및 stainless steel 기판의 표면 처리 방법에 따라서 표면 조도의 특성을 분석하여 stainless steel 기판별 효율 특성도 비교 분석 하였다. 후면전극으로는 약 $1{\mu}m$의 Mo를 DC Sputtering 방법을 이용하여 증착하였고, CIGS 광흡수층은 약 $2.5{\mu}m$의 두께로 미국의 NREL과 같은 3 stage 방식을 이용하여 광흡수층을 Co-Evaporation 방법으로 제조하였고, 버퍼층인CdS는 약 50nm의 두께로 CBD 방법으로 제조 하였으며, 창층인 ZnO는 약 500nm 두께로 RF Sputtering 방법으로 제조 하였고, 마지막으로 약 $1{\mu}m$ 두께의 Al 전면전극은 Thermal Evaporation 방법으로 제조 하였다. 소자의 물리적, 전기적 특성을 분석하기위해 FE-SEM, AFM, Solar Cell Simulator 분석을 실시하였다.

• Current Photovoltaic Research
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• v.7 no.1
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• pp.15-20
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• 2019

Most high-efficiency n-type silicon solar cells are based on the high quality surface passivation and ohmic contact between the emitter and the metal. Currently, various metalization methods such as screen printing using metal paste and physical vapor deposition are being used in forming electrodes of n-type silicon solar cell. In this paper, we analyzed the degradation factors induced by the front electrode formation process using e-beam evaporation of double passivation structure of p-type emitter and $Al_2O_3/SiN_x$ for high efficiency solar cell using n-type bulk silicon. In order to confirm the cause of the degradation, the passivation characteristics of each electrode region were determined through a quasi-steady-state photo-conductance (QSSPC).