Fabrication and characteristic of metal insertedteflon diaphragm piezoeletric device module using quartz crystal oscillator (수정진동자를 이용한 메탈 삽입 테프론 다이어프램 압전소자모듈의제조 및 특성)
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- Journal of Sensor Science and Technology
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- v.19 no.2
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- pp.149-154
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- 2010