• Journal of Institute of Control, Robotics and Systems
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• v.14 no.6
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• pp.519-522
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• 2008

As industry of a semiconductor and LCD industry have been rapidly growing, precision technologies of machining such as etching and 3D measurement are required. Stylus has been important measuring method in traditional manufacturing process. However, its disadvantages are low measuring speed and damage possibility at contacting point. To overcome mentioned disadvantage, non-contacting measurement method is needed such as PMP(Phase Measuring Profilometry), WSI(white scanning interferometer) and Confocal Profilometry. Among above 3 well-known methods, WSI started to be applied to FPD(flat panel display) manufacturing process. Even though it overcomes 21t ambiguity of PMP method and can measure objects which has specular surface, the measuring speed and vibration coming from manufacturing machine are one of main issue to apply full automatic total inspection. In this study, We develop high speed WSI system and algorithm to reduce unknown noise. The developing WSI and algorithm are implemented to measure 3D surface of wafer. Experimental results revealed that the proposed system and algorithm are able to measure 3D surface profile of wafer with a good precision and high speed.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.7
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• pp.149-154
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• 2001

This study discusses a non-contact optical technique, electronic speckle pattern interferometry(ESPI), that is well suited for a deformation measurement of structure. Phase shifting method and unwrapping method have used to make deformation quantitative widely. In this paper, a previous numerical formula for phase shifting method is reconstructed in addition to least square fitting method to improve sensitivity and phase unwrapping based on vertical-horizontal scanning method is applied to analyze in-plane and out-of-plane deformation quantitatively.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.349-353
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• 2005

This paper describes the variations of resonance frequencies and vibration mode shapes of laser welded cold rolled carbon steel plate(SCP1) induced by thermal loading during laser welding processing. The characteristics of those are analyzed with stroboscopic ESPI. Electronic speckle pattern interferometry (ESPI) that the electronic processes were added to SPI is one of the very powerful method in the experimental vibration analysis field. Stroboscopic ESPI to make it reliable are compared with theory and experimental method: Finite Element Method(FEM) and Scanning Laser Doppler Vibrometer(SLDV). The results of stroboscopic ESPI are well agreed with SLDV and also the comparison with theory give good agrement within $5\%$.

• Journal of Institute of Control, Robotics and Systems
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• v.22 no.2
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• pp.139-146
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• 2016

Recently, popularity of 3D technology has been growing significantly and it has many application parts in the various fields of industry. In order to overcome the limitations of 2D machine vision technologies based on 2D image, we need the 3D measurement technologies. There are many 3D measurement methods as such scanning probe microscope, phase shifting interferometry, confocal scanning microscope, white-light scanning interferometry, and so on. In this paper, we have used the extended depth of focus (EDF) algorithm among 3D measurement methods. The EDF algorithm is the method which extracts the 3D information from 2D images acquired by short range depth camera. In this paper, we propose the EDF algorithm using the edge informations of images and the average values of all pixel on z-axis to improve the performance of conventional method. To verify the performance of the proposed method, we use the various synthetic images made by point spread function(PSF) algorithm. We can correctly make a comparison between the performance of proposed method and conventional one because the depth information of these synthetic images was known. Through the experimental results, the PSNR of the proposed algorithm was improved about 1 ~ 30 dB than conventional method.

• Journal of Korea Multimedia Society
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• v.21 no.8
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• pp.864-875
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• 2018

In this paper, we propose a measurement method for height of white light scanning interferometer using deep learning. In order to measure the fine surface shape, a three-dimensional surface shape measurement technique is required. A typical example is a white light scanning interferometer. In order to calculate the surface shape from the measurement image of the white light scanning interferometer, the height of each pixel must be calculated. In this paper, we propose a neural network for height calculation and use virtual data generation method to train this neural network. The accuracy was measured by inputting 57 actual data to the neural network which had completed the learning. We propose two new functions for accuracy measurement. We have analyzed the cases where there are many errors among the accuracy calculation values, and it is confirmed that there are many errors when there is no interference fringe or outside the learned range. We confirmed that the proposed neural network works correctly in most cases. We expect better results if we improve the way we generate learning data.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.7 no.3
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• pp.81-86
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• 2008

I present a 3-D profiler specially devised for the profile measurement of specular surfaces that requires precision shape accuracy up to a few nanometer. A profile is reconstructed from the curvature of a test part of the surface at several locations along a line. The local curvature data are acquired with White-light Scanning Interferometry. Test measurement proves that the proposed profiler is well suited for the specular surface inspection like precision mirror.

• Current Optics and Photonics
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• v.3 no.1
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• pp.16-21
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• 2019

We present a broad-bandwidth comb-spacing-swept source (CSWS) based on a differential polarization delay line (DPDL) for interferometric three-dimensional (3D) imaging. The comb spacing of the CSWS is repeatedly swept by the tunable DPDL in the multiwavelength source to provide depth-scanning optical coherence tomography (OCT). As the polarization differential delay of the DPDL is tuned from 5 to 15 ps, the comb spacing along the wavelength continuously varies from 1.6 to 0.53 nm, respectively. The wavelength range of various semiconductor optical amplifiers and the cavity feedback ratio of the tunable fiber coupler are experimentally selected to obtain optimal conditions for a broader 3-dB bandwidth of the multiwavelength spectrum and thus provide a higher axial resolution of $35{\mu}m$ in interferometric OCT imaging. The proposed CSWS-OCT has a simple imaging interferometer configuration without reference-path scanning and a simple imaging process without the complex Fourier transform. 3D surface images of a via-hole structure on a printed circuit board and the top surface of a coin were acquired.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2002.10b
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• pp.277-278
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• 2002

Magnetron and Ion beam sputtering were used to texture the air-bearing surface of magnetic recording sliders. Flying height measurements and Laser-Doppler interferometry were used to compare the 'flyability' of textured and untextured sliders. Lubricant redistribution on the disk surface caused by slider/disk interactions was investigated using scanning ellipsometry (Surface Reflectance Analyzer (SRA)). The results show that slider surface texture causes only small changes in the flying height of sliders but reduces slider in-plane and out-of-plane vibrations. Textured sliders were found to cause less lubricant depletion on the disk surface than untextured sliders.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.22 no.3
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• pp.684-687
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• 1998

The biggest problem common on to all forms of Phase Shift Interferometer is unwrapping the phase. Simple phase unwrapping algorithms assume that every pixel is within radians of its neighbors. If this is true, any reasonable algorithm will return the correct unwrapped phase. If not, correct unwrapped phase will not be obtained. In rough surface, frequently, neighboring pixels have phase steps greater than. This paper proposes the new method which makes phase steps smaller than by sub-pixel movement.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.195-198
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• 2002

Demand for high precision measurement of large area is increasing in many industrial fields. White-light Scanning Interferometer(WSI) is a well-known method for 3D profile measurement. However WSI has some limitations in a measurement range because of the sensing mechanism. Therefore, in this paper we use a heterodyne laser interferometer to get over the limitations of a short measurement range in WSI, We suggest a new WSI system combined with heterodyne laser interferometer. This system is aimed at eliminating Abbe error with measuring the focus point directly. With the use of triggering functionality of WSI, we can use this system as a probe of a precision stage such as a probe of CMM. The suggested system gives a repeatability of 87 nm in the absolute distance measurement test under the laboratory environment.