• 제목/요약/키워드: Scanning Electron Microscopy (SEM)

검색결과 2,622건 처리시간 0.03초

플라즈마 분자선 에피택시에 의해 성장 멈춤법으로 증착된 완충층에 성장된 ZnO 박막의 특성 변화

  • 임광국;김민수;김소아람;남기웅;박대홍;천민종;이동율;김진수;김종수;이주인;임재영
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
    • /
    • pp.83-83
    • /
    • 2011
  • 본 연구에서는 p-type Si (100) 위에 분자선 에피택시 성장방법으로 ZnO 완충층이 삽입된 ZnO 박막을 성장시켰다. ZnO 완충층은 Zn 셀 셔터의 열림/닫힘을 반복하는 성장 멈춤법으로 성장되었다. Zn 셀 셔터의 열림 시간은 4분, 2분, 1분이며 닫힘 시간은 2분으로 동일하게 유지하였다. 이러한 과정은 각각 5, 10, 20회로 반복되었으며 ZnO 완충층을 성장한 후 ZnO 박막은 기존의 분자선 에피택시 방법으로 성장되었다. ZnO 박막의 구조적, 광학적 특성은 field-emission scanning electron microscopy (FE-SEM), atomic force microscopy (AFM), X-ray diffraction (XRD), photoluminescence (PL)로 조사하였다. SEM 측정결과 성장 멈춤 횟수가 증가함에 따라 ZnO 박막의 표면은 섬(island) 구조에서 미로(maze) 구조로 변화하였고, XRD 측정결과 full-width at half-maximum (FWHM) 이 감소하고 결정립 크기(grain size)가 증가하였다. 그리고 PL 측정결과 성장 멈춤 횟수가 증가함에 따라 near-band-edge emission (NBE) 피크의 세기가 증가하였고 deep-level emission (DLE) 피크의 위치는 오렌지 발광에서 녹색 발광으로 청색편이(blue-shift)하였다.

  • PDF

산화막위에 증착된 금속박막과 산화막과의 계면결합에 영향 미치는 열처리 효과 (Annealing Effect on Adhesion Between Oxide Film and Metal Film)

  • 김응수
    • 대한전자공학회논문지SD
    • /
    • 제41권1호
    • /
    • pp.15-20
    • /
    • 2004
  • 산화막위에 증착된 금속박막과 산화막과의 계면효과를 조사하였다. 산화막으로는 현재 반도체소자제조공정에 많이 사용되고 있는 BPSG 산화막과 PETEOS 산화막을 사용하였다. 이 두 종류의 산화막위에 적층구조의 금속박막을 형성한 후, 금속박막의 열처리에 의한 계면의 영향을 SEM (scanning electron microscopy), TEM (transmission electron microscopy), AES (auger electron spectroscopy)를 사용하여 조사하였다. BPSG 산화막위에 증착된 금속박막을 $650^{\circ}C$ 이상에서 RTP anneal을 한 경우, BPSG 산화막과 금속박막의 계면결합상태가 좋지 않았고, BPSG 산화막과 금속박막의 계면에 phosphorus가 축적된 영역을 확인하였다. 반면에 PETEOS 산화막위에 증착된 금속박막의 경우, RTP anneal 온도에 관계없이 계면결합상태는 좋았다. 본 연구에서 BPSG 산화막위에 금속박막을 증착할 경우 RTP anneal 온도는 $650^{\circ}C$ 보다 작게 하여야 함을 알 수 있었다.

Technical Investigation into the In-situ Electron Backscatter Diffraction Analysis for the Recrystallization Study on Extra Low Carbon Steels

  • Kim, Ju-Heon;Kim, Dong-Ik;Kim, Jong Seok;Choi, Shi-Hoon;Yi, Kyung-Woo;Oh, Kyu Hwan
    • Applied Microscopy
    • /
    • 제43권2호
    • /
    • pp.88-97
    • /
    • 2013
  • Technical investigation to figure out the problems arising during in-situ heating electron backscatter diffraction (EBSD) analysis inside scanning electron microscopy (SEM) was carried out. EBSD patterns were successfully acquired up to $830^{\circ}C$ without degradation of EBSD pattern quality in steels. Several technical problems such as image drift and surface microstructure pinning were taking place during in-situ experiments. Image drift problem was successfully prevented in constant current supplying mode. It was revealed that the surface pinning problem was resulted from the $TiO_2$ oxide particle formation during heating inside SEM chamber. Surface pinning phenomenon was fairly reduced by additional platinum and carbon multi-layer coating before in-situ heating experiment, furthermore was perfectly prevented by improvement of vacuum level of SEM chamber via leakage control. Plane view in-situ observation provides better understanding on the overall feature of recrystallization phenomena and cross sectional in-situ observation provides clearer understanding on the recrystallization mechanism.

Surface treatment of feldspathic porcelain: scanning electron microscopy analysis

  • Valian, Azam;Moravej-Salehi, Elham
    • The Journal of Advanced Prosthodontics
    • /
    • 제6권5호
    • /
    • pp.387-394
    • /
    • 2014
  • PURPOSE. Topographic analysis of treated ceramics provides qualitative information regarding the surface texture affecting the micromechanical retention and locking of resin-ceramics. This study aims to compare the surface microstructure following different surface treatments of feldspathic porcelain. MATERIALS AND METHODS. This in-vitro study was conducted on 72 porcelain discs randomly divided into 12 groups (n=6). In 9 groups, feldspathic surfaces were subjected to sandblasting at 2, 3 or 4 bar pressure for 5, 10 or 15 seconds with $50{\mu}m$ alumina particles at a 5 mm distance. In group 10, 9.5% hydrofluoric acid (HF) gel was applied for 120 seconds. In group 11, specimens were sandblasted at 3 bar pressure for 10 seconds and then conditioned with HF. In group 12, specimens were first treated with HF and then sandblasted at 3 bar pressure for 10 seconds. All specimens were then evaluated under scanning electron microscopy (SEM) at different magnifications. RESULTS. SEM images of HF treated specimens revealed deep porosities of variable sizes; whereas, the sandblasted surfaces were more homogenous and had sharper peaks. Increasing the pressure and duration of sandblasting increased the surface roughness. SEM images of the two combined techniques showed that in group 11 (sandblasted first), HF caused deeper porosities; whereas in group 12 (treated with HF first) sandblasting caused irregularities with less homogeneity. CONCLUSION. All surface treatments increased the surface area and caused porous surfaces. In groups subjected to HF, the porosities were deeper than those in sandblasted only groups.

덴탈 바이오필름에서 분리한 세균의 주사전자현미경적 관찰 및 동정 (Identification and morphology of scanning electron microscopy(sem) of bacteria isolated from dental biofilm)

  • 장계원
    • 한국치위생학회지
    • /
    • 제8권4호
    • /
    • pp.241-250
    • /
    • 2008
  • In this study, specimens such as tongue, supragingival and subgingival biofilm were taken from total 20 scaling subjects who visited the oral prophylaxis practice lab at department of dental hygienics, J Health College in order to observe bacterial distributions and morphology using scanning electron microscopy(sem). as a result, this study came to the following conclusions: 1. According to observation of tongue, supragingival and subgingival biofilm through sem, it is found that there are round colonies of gram-positive cocci and gram-negative bacilli on blood agar medium. 2. The observation of bacterial morphology on dental biofilm through sem, cocci in chain cocci in cluster and bacillus(rod) respectively. 3. For tongue biofilm, it is found that a variety of bacterial species are detected, such as Granulicatolla adiacens(1), Gemella morbillorum(3), Streptococcus mitis(2), Streptococcus sanguinis(1), Aerococcus viridans (2), Streptococcus equinus(1), Leuconostoc spp.(1), Gemella haemolysans (1) and Lactococcus lactis spp.(1) respectively. 4. For supragingival biofilm, it is found that a variety of bacterial species detected, such as Aerococcus viridans(1), Gemella haemolysans(2), Leuconostoc spp.(2), Gemella morbillorum(1) and Pseudomonas fluoescens (1) respectively. 5. For subgingival biofilm, it is found that a variety of bacterial species detected, such as Leuconostoc spp.(1), Staphylococcus lugdunensis(1) and Streptococcus salivarius(1) respectively.

  • PDF

전기방사법을 이용한 폴리(비닐 알코올)/수분산 폴리우레탄/몬모릴로나이트 나노복합섬유의 제조 및 특성분석 (Electrospinning Fabrication and Characterization of Poly(vinyl alcohol)/Waterborne Polyurethane/Montmorillonite Nanocomposite Nanofibers)

  • 김인교;염정현
    • 폴리머
    • /
    • 제35권6호
    • /
    • pp.553-557
    • /
    • 2011
  • 전기방사법을 이용하여 폴리(비닐 알코올)(poly(vinyl alcohol), PVA)/수분산 폴리우레탄(waterborne polyurethane, WBPU)/montmorillonite clay(MMT) 나노복합섬유를 제조하고 특성을 분석하였다. Scanning electron microscopy(SEM), transmission electron microscopy(TEM), X선 회절, thermal gravimetric analyzer(TGA) 의 분석장비들을 이용하여 제조된 나노복합섬유의 형태와 구조적, 열적특성을 확인한 결과, 평균직경이 600~900 nm인 나노복합섬유들이 성공적으로 제조되었으며, MMT가 나노섬유 내에 완전박리되어 기존의 고분자 나노섬유에 비해 열적성질이 향상되었음을 확인할 수 있었다. 본 연구를 통해 제조된 나노복합섬유는 친수성이고 생체친화적인 재료들을 이용하여 제조되었으며, 의료 분야를 비롯하여 의류 및 산업용 코팅제, 필터 등의 분야로 이용이 가능할 것으로 보인다.

Scanning Electron Microscopic Observation of Human Skin Replica

  • Rhyu, Yeon-Seung;Chung, Ye-Ji;Uhm, Chang-Sub
    • Applied Microscopy
    • /
    • 제40권4호
    • /
    • pp.267-270
    • /
    • 2010
  • The skin is the largest organ of the integument system whose surface is closely related with many physiological and pathological conditions. Various methods are used to understand the structural and functional status of human skin. We would like to present usefulness of scanning electron microscopic (SEM) observation of skin replica and its significance of training module for a novice. The silicon replicas from several regions of the body (hand, finger, forearm, lip, and face) were casted by applying Exafine$^{(R)}$ mixture. The positive replicas were prepared by applying EPON 812 mixture on negative silicon replicas. Some of the negative silicon replicas were cut with a razor blade and surface profiles were observed. The negative and positive replicas were coated with platinum and were observed under the scanning electron microscope. We could investigate the detailed structures of the human skin surface without any physical damage to the subject. The positive replicas depicted real surface structure of the human skin vividly. The cross sectional view of the negative silicon replicas provided surface profile clearly. The scanning electron microscopic observation of the human skin replicas would be useful to study skin surface structures and to evaluate medical and esthetical applications.

Hot stage microscopy and its applications in pharmaceutical characterization

  • Arun Kumar;Pritam Singh;Arun Nanda
    • Applied Microscopy
    • /
    • 제50권
    • /
    • pp.12.1-12.11
    • /
    • 2020
  • Hot stage microscopy (HSM) is a thermal analysis technique that combines the best properties of thermal analysis and microscopy. HSM is rapidly gaining interest in pharmaceuticals as well as in other fields as a regular characterization technique. In pharmaceuticals HSM is used to support differential scanning calorimetry (DSC) and thermo-gravimetric analysis (TGA) observations and to detect small changes in the sample that may be missed by DSC and TGA during a thermal experiment. Study of various physical and chemical properties such sample morphology, crystalline nature, polymorphism, desolvation, miscibility, melting, solid state transitions and incompatibility between various pharmaceutical compounds can be carried out using HSM. HSM is also widely used to screen cocrystals, excipients and polymers for solid dispersions. With the advancements in research methodologies, it is now possible to use HSM in conjunction with other characterization techniques such as Fourier transform infrared spectroscopy (FTIR), DSC, Raman spectroscopy, scanning electron microscopy (SEM) which may have additional benefits over traditional characterization techniques for rapid and comprehensive solid state characterization.

The bactericidal effect of an atmospheric-pressure plasma jet on Porphyromonas gingivalis biofilms on sandblasted and acid-etched titanium discs

  • Lee, Ji-Yoon;Kim, Kyoung-Hwa;Park, Shin-Young;Yoon, Sung-Young;Kim, Gon-Ho;Lee, Yong-Moo;Rhyu, In-Chul;Seol, Yang-Jo
    • Journal of Periodontal and Implant Science
    • /
    • 제49권5호
    • /
    • pp.319-329
    • /
    • 2019
  • Purpose: Direct application of atmospheric-pressure plasma jets (APPJs) has been established as an effective method of microbial decontamination. This study aimed to investigate the bactericidal effect of direct application of an APPJ using helium gas (He-APPJ) on Porphyromonas gingivalis biofilms on sandblasted and acid-etched (SLA) titanium discs. Methods: On the SLA discs covered by P. gingivalis biofilms, an APPJ with helium (He) as a discharge gas was applied at 3 different time intervals (0, 3, and 5 minutes). To evaluate the effect of the plasma itself, the He gas-only group was used as the control group. The bactericidal effect of the He-APPJ was determined by the number of colony-forming units. Bacterial viability was observed by confocal laser scanning microscopy (CLSM), and bacterial morphology was examined by scanning electron microscopy (SEM). Results: As the plasma treatment time increased, the amount of P. gingivalis decreased, and the difference was statistically significant. In the SEM images, compared to the control group, the bacterial biofilm structure on SLA discs treated by the He-APPJ for more than 3 minutes was destroyed. In addition, the CLSM images showed consistent results. Even in sites distant from the area of direct He-APPJ exposure, decontamination effects were observed in both SEM and CLSM images. Conclusions: He-APPJ application was effective in removing P. gingivalis biofilm on SLA titanium discs in an in vitro experiment.

The measurement of p-n junction depth by SEM

  • Hur, Chang-Wu;Lee, Kyu-Chung
    • Journal of information and communication convergence engineering
    • /
    • 제5권4호
    • /
    • pp.324-327
    • /
    • 2007
  • In this paper, the p-n junction depth with nondestructive method by using scanning electron microscopy (SEM) is determined and conformed. By measuring the critical short circuit current on the p-n junction which induced by electron beam and calculating generation range, the diffusion depth can be obtained. It can be seen that values destructively measured by constant angle lapping and nondestructively by this study almost concur. As this result, it is purposed that diffusion depth of p-n junction can be easily measured by nondestruction. This nondestructive method can be recommended highly to the industrial analysis.