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Development of point-of-use filter evaluation method using chemical mechanical planarization slurry (Chemical mechanical planarization 슬러리에 사용되는 point-of-use 필터의 평가 방법 개발)

  • Jang, Sunjae;Kulkarni, Atul;Kim, Hyeong-U;Kim, Taesung
    • Particle and aerosol research
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    • v.12 no.4
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    • pp.145-150
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    • 2016
  • During the chemical mechanical planarization (CMP) process, slurry that comprises abrasive particles can directly affect the CMP performance and quality. Mainly, the large particles in the slurry can generate the defects on the wafer. Thus, many kinds of filters have been used in the CMP process to remove unwanted over-sized particles. Among these filters, the point-of-use (POU) filter is used just before the slurry is supplied onto the CMP pad. In the CMP research field, analysis of the POU filter has been relatively exceptional, and previous studies have not focused on the standardized filtration efficiency (FE) or filter performance. Furthermore, conventional evaluation methods of filter performance are not appropriate for POU filters, as the POU filter is not a membrane type, but is instead a depth type roll filter. In order to accurately evaluate the POU filter, slurry FE according to particle size was measured in this study. Additionally, a CMP experiment was conducted with filtered slurry to demonstrate the effects of filtered slurry on CMP performance. Depending on the flow rate and the filter retention size, the FE according to particle size was different. When the small and large particles have different FEs, the total filtration efficiency (TFE) can still have a similar value. For this reason, there is a need to measure the FE with respect to the particle size to verify the effects of the POU filter on the CMP process.

Quasi-Two-Dimensional Model for Floodplain Flow Simulation (준2차원 홍수범람 모형에 관한 연구)

  • Jeon, Gyeong-Su
    • Journal of Korea Water Resources Association
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    • v.31 no.5
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    • pp.515-528
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    • 1998
  • A quasi-two-dimensional model for simulating the flood plain flow is developed. The model consists, in general, of a multiply-connected network which combines the main channel and two-dimensional flood plain cells. The main channel flow is described by the Saint Venant equations for one-dimensional unsteady flow, and the flood plain flow by the cell continuity and river-or weir-type stage-discharge relations between flood plain cells. The implicit algorithm for unsteady flow in looped channel network is extended to incorporate the flood plain flow. To verify the performance of the model, it is applied to three test problems, and sensitivities to various model parameters are analyzed. It turns out that the present model gives more accurate result than that by Cunge (1975) as the shape of cross section becomes more complex and irregular. Not only the inundation of water from the main channel but the return flow from the flood plain is successfully simulated.

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The Correlation of the Area of the Base of Support with the Maximal Voluntary Isometric Contraction of Upper Limb Muscles (기저면의 넓이와 상지 근육의 최대 수의적 등척성 수축의 상관관계)

  • Lee, Sang-Yeol;Jo, Marg-Eun
    • PNF and Movement
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    • v.14 no.1
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    • pp.49-52
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    • 2016
  • Purpose: The purpose of the present study was to examine the effects of the area of the base of support formed by the human body on the maximal voluntary isometric contraction of upper limb muscles. Methods: The study was conducted with 20 normal adults. To identify changes in the base of support, the maximal voluntary isometric contraction of the biceps muscle was measured in a standing position, a sitting position, and a lying position for each subject. The sizes of the base of support formed in the standing, sitting, and lying positions were set to 1, 2, and 3 respectively, based on the sizes, to analyze the correlations. The maximal voluntary isometric contraction of the biceps muscle was measured using surface electromyograms (EMGs) (Noraxon DTS, Germany). Results: The results showed negative correlations in which, as the size of the base of support increased, the maximal voluntary isometric contraction of the biceps muscle decreased. Conclusion: Changes in the base of support of the body affect the maximal voluntary isometric contraction of the upper limbs. Therefore, when resistance exercises are applied for muscle strengthening, the positions should be changed considering the changes in muscle activity according to those positions. In addition, when EMGs are used to measure the maximal voluntary isometric contraction, the measurements should be conducted in the same positions, considering muscle activity that changes according to the base of support and positions, for data quantification.

Experimental Study of Ginkgo-Chunghyul-dan on Anti-oxidant, Anti-platelet Aggregation, and Anti-hyperlipidemic Activity

  • Yun, Sang-Pil;Bae, Hyung-Sup;Park, Seong-Uk;Jung, Woo-Sang;Moon, Sang-Kwan;Park, Jung-Mi;Ko, Chang-Nam;Cho, Ki-Ho;Kim, Young-Suk
    • The Journal of Korean Medicine
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    • v.29 no.5
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    • pp.52-66
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    • 2008
  • Objectives :Ginkgo-Chunghyul-dan (GCHD) is newly developed herbal medicine to prevent and treat stroke. In this study, we investigated whether the GCHD had antioxidant activity and anti-platelet aggregation effect in vitro and hypolipidemic activities in vivo. Methods :Anti-oxidant activity of GCHD was measured using the Blois method, anti-platelet effect of GCHD was assessed by the Born method, and hypolipidemic activities of GCHD were evaluated in corn oil- or Triton WR-1339-induced and cholesterol-fed rats. Results :GCHD showed anti-oxidant activity in the study inhibiting the formation of 1-diphenyl-2-picrylhydrazyl radicals and xanthine oxidase activity. GCHD had anti-platelet aggregation activity. GCHD significantly lowered total cholesterol (TC), triglyceride (TG), and low density lipoprotein cholesterol (LDL-C) in high cholesterol diet and Triton WR-1339 induced model TG in corn oil-induced model. GCHD had no acute toxicity at a single dosage. Conclusion : These results suggest that GCHD has the potential to treat hyperlipidemia and stroke.

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Binary transition metal sulfides hierarchical multi-shelled hollow nanospheres with enhanced energy storage performance (향상된 에너지 저장 능력을 가진 이중 전이금속 황화물 계층적 중공 구조의 나노구)

  • Lee, Young Hun;Choi, Hyung Wook;Kim, Min Seob;Jeong, Dong In;Tiruneh, Sintayehu Nibret;Kang, Bong Kyun;Yoon, Dae Ho
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.28 no.3
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    • pp.112-117
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    • 2018
  • The metal alkoxide, CuCo-glycerate nanospheres (NSs), were successfully synthesized as Cu-Co bimetallic sulfides hierarchical multi-shelled hollow nanospheres ($CuCo_2S_4$ HMHNSs) through solvothermal synthesis. In this reaction mechanism, the solvothermal temperature and the amount of glycerol as a cosurfactant play significant role to optimize the morphology of CuCo-glycerate NSs. Furthermore, $CuCo_2S_4$ HMHNSs were obtained under optimized sulfurization reaction time of 10 h via anion exchange reaction between glycerate and sulfur ions. Finally, the structural and chemical compositions of CuCo-glycerate NSs and $CuCo_2S_4$ HMHNSs were confirmed through field emission scanning electron microscopy (FESEM), transmission electron microscope (TEM), X-ray diffraction (XRD) and electrochemical performances.

Crystal growth and optical properties of near-stoichiometric $Zn:LiNbO_3$ fiber single crystal by ${\mu}-PD$ method (${\mu}-PD$ 법으로 성장시킨 near-stoichiometric 조성 $Zn:LiNbO_3$ fiber 단결정 성장 및 광손상 특성)

  • Lee, H.J.;Shur, J.W.;Shin, T.I.;Song, W.Y.;Yoon, D.H.
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.16 no.6
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    • pp.235-239
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    • 2006
  • ZnO-doped near-stoichiometric $LiNbO_3$ single crystals of $0.8{\sim}1.0mm$ diameter and $30{\sim}35mm$ length were grown by the micro-pulling down (U-PD) method. The structure of the grown crystals was confirmed by powder x-ray diffraction (XRD) patterns. Electron probe micro analysis (EPMA) showed that Zn ions were homogeneously incorporated In grown crystals. The threshold in ZnO doping level was confirmed that an abrupt change in the features of $OH^-$ absorption band as doping level reaching about 2 mol%.

Risk Assessment for Retrofitting a Ballast Water Treatment System on an Exising Vessel (현존선에 선박 평형수 처리장치를 설치를 위한 위험도 평가 분석)

  • JEE, Jae-Hoon;OH, Cheol
    • Journal of Fisheries and Marine Sciences Education
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    • v.28 no.6
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    • pp.1602-1613
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    • 2016
  • Since Ballast Water Management Convention has been adopted, Ballast Water Management Convention is not effected yet. This convention will only enter into force 12 months after its ratification by 30 states, collectively representing 35% of world merchant shipping tonnnage. Morocco, Indonesia and Ghana have ratified this convention during last 29th IMO Assembly meeting which was held in November 2015. In 2016, Belgium, Fiji, Saint Lucia and Peru have become the latest countries to ratify the convention. As of now, 51 states and 34.87% combined merchant fleets are being calculated. BWM convention will be applied to not only new ships but also, existing ships after it is effected. Thus, existing vessel will be retrofitted a Ballast Water Treatment System according to D-2 Requirement until first IOPP nenewal survey after date of entry into force of the convention. Currently, about 65 BWTSs certified by Administration will be reported to IMO, even type of BWTSs is very various. Thus, a risk of each BWTS can be existed, and this existed risk can be also effected to ship's crew safety and protection of ship's own property. Therefore, we have evaluated a risk assessment for an existing vessel retrofitting an ultra violet type Ballast Water Treatment System which is mostly developed in the world. And we described the procedure of selecting a sample vessel, consequently, bulk carrier is selected because this vessel kind is mostly charged in the world. Especially, DWT 175K size is selected. Risk Assessment is using a HAZID and HAZOP method, evaluation method is referred to IMO Document "Considerated test of the Guidelines for Formal Safety Assessment (FSA) for use in the IMO rule-marking process(MSC/Circ.1203-MEPC/Circ.392)". The Risk Assessment Section is decided to 3 Nodes, Consequently, total risks have evaluated 51 items.

CFD Analysis of Axial Flow Cyclone Separator for Subway Station HVAC System (지하역사 공기조화기에 적용 가능한 미세먼지 제거용 사이클론의 수치해석적 연구)

  • Kim, Jin-Kwan;Kim, Ho-Joong;Lee, Myung-Jun;Kim, Tae-Sung;Kwon, Soon-Bark
    • Proceedings of the SAREK Conference
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    • 2008.11a
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    • pp.546-550
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    • 2008
  • In this study, 3-dimensional Computational Fluid Dynamics (CFD) analysis was induced to simulate air flow and particle motion in the axial flow cyclone separator. The commercialized CFD code FLUENT was used to visualize pressure drop and particle collection efficiency inside the cyclone. We simulated 4 cyclone models with different shape of vane, such as turning angle or shape of cross section. For the air flow simulation, we calculated the flow field using standard ${\kappa}-{\varepsilon}$ turbulence viscous model. Each model was simulated with different inlet or outlet boundary conditions. Our major concern for the flow filed simulation was pressure drop across the cyclone. For the particle trajectory simulation, we adopted Euler-Lagrangian approach to track particle motion from inlet to outlet of the cyclone. Particle collection efficiencies of various conditions are calculated by number based collection efficiency. The result showed that the rotation angle of the vane plays major roll to the pressure drop. But the smaller rotation angle of vane causes particle collection efficiency difference with different inlet position.

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Synthesis and Characterization of Silica/Polystyrene Composite Nanoparticles by in situ Miniemulsion Polymerization (In situ 미니에멀젼중합에 의한 실리카/폴리스타이렌 복합체 나노입자의 합성과 특성)

  • Patole, Archana S.;Patole, S.P.;Song, Mi-Hyang;Yoon, Joo-Young;Kim, Jin-Hwan;Kim, Tae-Ho
    • Elastomers and Composites
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    • v.44 no.1
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    • pp.34-40
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    • 2009
  • New coupling agent or surface modified agent (9-decenoic acid) was used to enhance the compatibility between silica and polystyrene in silica/polystyrene hybrid nanocomposite, synthesized by in situ miniemulsion polymerization. Composites contain well dispersed nanosize silica particles. Related tests and analyses confirmed the success of synthesis. Functionalization of silica by 9-decenoic acid and silica on the polystyrene was confirmed by FTIR. TGA showed presence and amount of silica in final latex. The glass transition temperature of the hybrid nanocomposite was increased with the silica amount. SEM and TEM analysis showed the spherical morphology of PS and composite with an average diameter of 55 nm. The presence of silica within composite was confirmed by EDS attached to the existing TEM.

Clinical Study on Effect of Acupuncture Therapy(Sinmaek $BL_{62}$, Johae $KI_6$) with Venesection(Eunbaek $SP_1$) on Insomnia (불면증에 신맥(申脈).조해(照海) 자침(刺鍼) 및 은백(隱白) 사혈(瀉血)을 시술한 환자의 임상 보고)

  • Choi, Byoung-Sun;Yim, Jung-Hoon;Seong, Eun-Jin;Lee, Chang-Hee;Lee, Dong-Yeop;Han, A-Lum;Cho, Nam-Geun
    • Journal of Acupuncture Research
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    • v.27 no.5
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    • pp.69-78
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    • 2010
  • Objectives : To prove the effectiveness of acupuncture treatment targeting the insomnia-complaining patients from the group of hospital inpatients. Methods : Among Wonkwang University Iksan Oriental Medical Hospital impatients, needling Sinmaek($BL_{62}$) and Johae($KI_6$) and Venesection on Eunbaek(SP1) on the 15 insomnia-complaining patients. Then, confirmed the degree of insomnia symptom improvements through Saint's Mary Hospital(SMH) questionnaire, insomnia severity index(ISI), and Korean sleep scale(KSS). Results : 1. Result indicated after the acupuncture treatment, the total hours of sleeping increased in average per hour. 2. When evaluating the degree of improvement using Insomnia Severity Index(ISI) after the treatment, average score was lowered and the statistical data showed the result was significant. 3. When evaluating the degree of improvement using Korean Sleep Scale(KSS), the average score was increased and the statistical data showed the result was significant. Conclusions : Among the insomnia patients from the group of Oriental Medical Hospital inpatients, the total hours of sleeping increased, showed the score improvement by using the tool for evaluating sleeping, and indicated statistically significant treatment effectiveness.