• Title/Summary/Keyword: SU-8 polymer

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Relation of weld-quality and core shape in injection molding (사출성형 시 코어 형상과 웰드품질과의 관계)

  • Lee, Gyu-Ho;Choi, Woo-Su;Noh, Keon-Cheol;Jeong, Yeong-Deug
    • Design & Manufacturing
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    • v.8 no.1
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    • pp.23-26
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    • 2014
  • The injection molding is used in more than 70% of total production of plastic products. Weld line in injection molded part is one of the defects in injection molding process. Weld line deteriorates not only appearance quality but also mechanical property. In this study weld quality has been examined according to the injection processing temperature, materials and mold designs. We selected four different materials such as PA, PP, ABS and PS as experimental materials. Weld quality increased as injection processing temperature increases. It was more dependent on materials flow ability. As a result, weld quality incase of rectangular core is better than circular core.

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수송기계 엔진 MEMS 용 SiCN 마이크로 구조물 제작

  • Jeong, Jun-Ho;Jeong, Gwi-Sang
    • Proceedings of the Korean Society Of Semiconductor Equipment Technology
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    • 2006.10a
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    • pp.14-17
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    • 2006
  • This paper describes a novel processing technique for fabrication of polymer-derived SiCN (silicone carbonitride) microstructures for super-temperature MEMS applications. PDMS (polydimethylsiloxane) mold is fabricated on SU-8 photoresist using standard UV photolithographic process. Liquid precursor is injected into the PDMS mold. Finally, solid polymer structure is cross-linked using HIP (hot isostatic pressure) at $400^{\circ}C$, 205 bar Optimum pyrolysis and anneal ins conditions are determined to form a ceramic microstructure capable of withstanding over $1400^{\circ}C$. The fabricated SiCN ceramic microstructure has excel lent characteristics, such as shear strength (15.2 N), insulation resistance ($2.163{\times}10^{14}\;{\Omega}$) and BDV (min. 1.2 kV) under optimum process condition.

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Characteristics of Organic Thin Film Transistors with Organic and Organic-inorganic Hybrid Polymer Gate Dielectric (유기물과 유무기 혼합 폴리머 게이트 절연체를 사용한 유기 박막 트랜지스터의 특성)

  • Bae, In-Seob;Lim, Ha-Young;Cho, Su-Heon;Moon, Song-Hee;Choi, Won-Seok
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.22 no.12
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    • pp.1009-1013
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    • 2009
  • In this study, we have been synthesized the dielectric layer using pure organic and organic-inorganic hybrid precursor on flexible substrate for improving of the organic thin film transistors (OTFTs) and, design and fabrication of organic thin-film transistors (OTFTs) using small-molecule organic semiconductors with pentacene as the active layer with record device performance. In this work OTFT test structures fabricated on polymerized substrates were utilized to provide a convenient substrate, gate contact, and gate insulator for the processing and characterization of organic materials and their transistors. By an adhesion development between gate metal and PI substrate, a PI film was treated using $O_2$ and $N_2$ gas. The best peel strength of PI film is 109.07 gf/mm. Also, we have studied the electric characteristics of pentacene field-effect transistors with the polymer gate-dielectrics such as cyclohexane and hybrid (cyclohexane+TEOS). The transistors with cyclohexane gate-dielectric has higher field-effect mobility, $\mu_{FET}=0.84\;cm^2/v_s$, and smaller threshold voltage, $V_T=-6.8\;V$, compared with the transistor with hybrid gate-dielectric.

Oxidative Line Width Reduction of Imprinted Nanopatterns

  • Park, Dae Keun;Kang, Aeyeon;Jeong, Mira;Lee, Jaejong;Yun, Wan Soo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.650-650
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    • 2013
  • Although imprinted nanopatterns of organic polymer can be modified by the heat treatment [1], it generally requires high process temperatures and is material-dependent since the heat-induced mass loss of the organic polymer is greatly affected by its chemical characteristics. When oxygen is added during the annealing process, one can reduce the process temperature as well as the dependence of the materials. With the oxygen, line width reduction of a polymer (SU-8) patterns could be accomplished at temperature of as low as $250^{\circ}C$ which was not possible in the heat only process. This oxidative line width reduction can be dramatically promoted with the introduction of oxygen plasma. The oxygen plasma, with its highly-reactive oxygen species, vigorously etches away the organic materials, proven to be extremely effective line with reduction method. It is, however, very hard to control the extent and homogeneity of the etching, particularly of very fine patterns. Here, we report an effective and reliable line width reduction method of imprinted nanopatterns by combined plasma and heat treatment. The merits of this process include the reduction of process temperature, time and material-dependence.

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The polymer waveguide type SPR sensor using a multi-wavelength light source (다파장 광원을 이용한 폴리머 광도파로형 SPR 센서)

  • Park, Chang-Sub;Yeom, Se-Hyuk;Kim, Do-Eok;Kang, Byoung-Ho;Kim, Kyu-Jin;Kim, Hak-Rin;Kang, Shin-Won
    • Journal of Sensor Science and Technology
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    • v.16 no.6
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    • pp.401-406
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    • 2007
  • In this paper, we fabricated the polymer waveguide type surface plasmon resonance (SPR) sensor using a white light source and optical spectrum analyzer (OSA). Fabricated sensor uses the principle of phase matching between evanescent wave and surface plasmon wave. According to the measuring result, the shift of resonance wavelength conducts the change of the refractive index. The proposed SPR sensor is expected to apply the integrated multichannel SPR sensor and the realtime monitoring system.

Preparation and Optical Characteristic of Polymer waveguide (Polymer 광도파로 제작 및 특성)

  • Kim, Seong-Ku;Jo, Jae-Chul;Jung, Won-Jo;Park, Gye-Choon;Kang, Seong-Jun;Lee, Jin
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1999.05a
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    • pp.275-277
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    • 1999
  • A application possibility of photoresist flexible film for optical waveguide is proposed and described. The optical waveguide dimensions that is consists of Mach-zehnder interferometric and single channel waveguide based on the single-mode conditions in LiNbO$_3$ device was utilized and fabricated by wet etching technique. This Polymer material for core layer is SU-8/5O(Microchem.) and its refractive index from prism couping method was measured about 1.59 thickness about 10${\mu}{\textrm}{m}$ at wavelength 0.6328${\mu}{\textrm}{m}$. From the results, this work can show the possibility of fabricating a flexible optical waveguide in the field of integrated optics.

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Preparation of Polymeric Self-Assembly and Its Application to Biomaterials

  • Cho, Chong-Su;Park, In-Kyu;Nah, Jae-Woon;Toshihiro Akaike
    • Macromolecular Research
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    • v.11 no.1
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    • pp.2-8
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    • 2003
  • The self-assembly of polymers can lead to supramolecular systems and is related to the their functions of material and life sciences. In this article, self-assembly of Langmuir-Blodgett (LB) films, polymer micelles, and polymeric nanoparticles, and their biomedical applications are described. LB surfaces with a well-ordered and layered structure adhered more cells including platelet, hepatocyte, and fibroblast than the cast surfaces with microphase-separated domains. Extensive morphologic changes were observed in LB surface-adhered cells compared to the cast films. Amphiphilic block copolymers, consisting of poly(${\gamma}$-benzyl L-glutamate) (PBLG) as the hydrophobic part and poly(ethylene oxide) (PEO) [or poly(N-isopropylacrylamide) (PNIPAAm)] as the hydrophilic one, can self-assemble in water to form nanoparticles presumed to be composed of the hydrophilic shell and hydrophobic core. The release characteristics of hydrophobic drugs from these polymeric nanoparticles were dependent on the drug loading contents and chain length of the hydrophobic part of the copolymers. Achiral hydrophobic merocyanine dyes (MDs) were self-assembled in copolymeric nanoparticles, which provided a chiral microenvironment as red-shifted aggregates, and the circular dichroism (CD) of MD was induced in the self-assembled copolymeric nanoparticles.

Silver Nanowire-based Stretchable and Transparent Electrodes (Silver Nanowire 기반 Stretchable 투명 전극)

  • Lee, Jin-Young;Kim, Su-Yeon;Jeong, Da-Hye;Shin, Dong-Kyun;Yoo, Su-Ho;Seo, Hwa-Il;Park, Jong-Woon
    • Journal of the Semiconductor & Display Technology
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    • v.14 no.3
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    • pp.51-55
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    • 2015
  • We have fabricated silver nanowire (AgNW) films as a stretchable and transparent electrode on polydimethylsiloxane (PDMS) substrates using a spray coater. Inherently, they show poor surface roughness and stretchability. To tackle it, we have employed a conductive polymer, poly (3,4-ethylenedioxythiophene) : Poly(styrene sulfonate) (PEDOT : PSS). PEDTO : PSS solution is mixed with AgNWs or spin-coated on the AgNW film. Compared with AgNW film only, PEDOT : PSS film only, and polymer-mixed AgNW films, the AgNW/polymer bilayer films exhibit much better surface roughness and stretchability. It is found that spray-coating of AgNWs on uncured PDMS and spin-coating of PEDOT : PSS solution on the AgNW films enhance the surface roughness of electrodes. Such a bilayer structure also provides a stable resistance under tensile strain due to the fact that each layer acts as a detour route for carriers. With this structure, we have obtained the peak-to-peak roughness ($R_{pv}$) as low as 76.8nm and a moderate increase of sheet resistance (from $10{\Omega}/{\Box}$ under 0% strain to $30{\Omega}/{\Box}$ under 40% strain).

Fabrication of $100{\mu}m$ High Metallic Structure Using Negative Thick Photoresist and Electroplating (Negative Thick Photoresist를 이용한 $100{\mu}m$ 높이의 금속 구조물의 제작에 관한 연구)

  • Chang, Hyun-Kee;Kim, Yong-Kweon
    • Proceedings of the KIEE Conference
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    • 1998.07g
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    • pp.2541-2543
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    • 1998
  • This paper describes the fabrication process to fabricate metallic structure of high aspect ratio using LlGA-like process. SU-8 is used as an electroplating mold. SU-8 is an epoxy-based photoresist, designed for ultrathick PR structure with single layer coating [1,2]. We can get more than $100{\mu}m$ thick layer by single coating with conventional spin coater, and applying multiple coating can make thicker layers. In the experiments, we used different kinds of SU-8, having different viscosity. To optimize the conditions for mold fabrication process, experiments are performed varying spinning time and speed, soft-bake, develop and PEB (Post Expose Bake) condition. With the optimized condition, minimum line and space of $3{\mu}m$ pattern with a thickness of $40{\mu}m$ and $4{\mu}m$ pattern with a thickness of $130{\mu}m$ were obtained. Using the patterned PR as a plating mold, metallic structure was fabricated by electroplating. We have fabricated a electroplated nickel comb actuator using SU-8 as plating mold. The thickness of PR mold is $45{\mu}m$ and that of plated nickel is$40{\mu}m$. Minimum line of the mold is $5{\mu}m$. Patterned metallic layer or polymer layer, which has selectivity with the structural plated metallic layer, can be used as sacrificial layer for fabrication of free-standing structure.

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