Effect of Surfactant Molecular weight and Concentration in Nano-Ceria Slurry on Nanotopography Impact in Chemical Mechanical Polishing

• Choi, Hyuk-Yul;Kang, Hyun-Goo;Kim, Jun-Seok;Paik, Un-Gyu;Park, Jea-Gun
• • 한국재료학회:학술대회논문집
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  • 한국재료학회 2006년도 추계학술발표대회 및 제11회 신소재 심포지엄
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  • pp.16.1-16.1
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  • 2006
• PDF

Influence of Bead Size during Ceria Abrasive Milling Process on High Selectivity and Light Point Defect (LPD) Formation alter STI-CMP

• Moon, Seung-Hyun;Lee, Keun-Hoo;Kim, Jun-Seok;Kang, Hyun-Goo;Paik, Un-Gyu;Park, Jea-Gun
• • 한국재료학회:학술대회논문집
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  • 한국재료학회 2006년도 춘계학술발표대회 및 제10회 신소재 심포지엄 논문개요집
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  • pp.17.2-17.2
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  • 2006
• PDF

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