• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.26 no.11
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• pp.841-845
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• 2013

We give a textured front on silicon wafer for high-efficiency solar cells by using micro contact printing method which uses PDMS (polydimethylsiloxane) silicon rubber as a stamp and SAM (self assembled monolayer)s as an ink. A random pyramidal texturing have been widely used for a front-surface texturing in low cost manufacturing line although the cell with random pyramids on front surface shows relatively low efficiency than the cell with inverted pyramids patterned by normal optical lithography. In the past two decades, the micro contact printing has been intensively studied in nano technology field for high resolution patterns on silicon wafer. However, this promising printing technique has surprisingly never applied so far to silicon based solar cell industry despite their simplicity of process and attractive aspects in terms of cost competitiveness. We employ a MHA (16-mercaptohexadecanoic acid) as an ink for Au deposited $SiO_2/Si$ substrate. The $SiO_2$ pattern which is same as the pattern printed by SAM ink on Au surface and later acts as a hard resist for anisotropic silicon etching was made by HF solution, and then inverted pyramidal pattern is formed after anisotropic wet etching. We compare three textured surface with different morphology (random texture, random pyramids and inverted pyramids) and then different geometry of inverted pyramid arrays in terms of reflectivity.

• Korean Journal of Materials Research
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• v.15 no.11
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• pp.705-710
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• 2005

NIL (nanoimprint lithography) technique has demonstrated a high potential for wafer size definition of nanometer as well as micrometer size patterns. During the replication process by NIL, the stiction between the stamp and the polymer is one of major problems. This stiction problem is moi·e important in small sized patterns. An antistiction layer prevents this stiction ana insures a clean demolding process. In this paper, we were using a TCP (transfer coupled plasma) equipment and $C_4F_8$ as a precursor to make a Teflon-like antistiction layer. This antistiction layer was deposited on a 6 inch silicon wafer to have nanometer scale thicknesses. The thickness of deposited antistiction layer was measured by ellipsometry. To optimize the process factor such as table height (TH), substrate temperature (ST), working pressure (WP) and plasma power (PP), we were using a design of experimental (DOE) method. The table of full factorial arrays was set by the 4 factors and 2 levels. Using this table, experiments were organized to achieve 2 responses such as deposition rate and non-uniformity. It was investigated that the main effects and interaction effects between parameters. Deposition rate was in proportion to table height, working pressure and plasma power. Non-uniformity was in proportion to substrate temperature and working pressure. Using a response optimization, we were able to get the optimized deposition condition at desired deposition rate and an experimental deposition rate showed similar results.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.23 no.6
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• pp.637-644
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• 2019

In recent years, many public safety systems in the smart city are developed. These systems are taking responsibility to make a safe and comfortable city. In this paper, we propose vehicle tracking systems include a public safety system that enables the policeman to track the stolen vehicles more efficiently by providing the vehicle information in real time. When a vehicle is stolen, the vehicle owner can send a user emergency request. Then, the public safety server which supported by a geospatial query technique will give information such as time, distance, and routes to a policeman who is closest to the location of the vehicle to catch the thief. 300 simulations were performed to evaluate the performance of the system. We found that the average of times required when vehicle owner send a user emergency message on user application until policeman obtain a vehicle tracking request on police application below 1.2 seconds.

• Korean Chemical Engineering Research
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• v.45 no.2
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• pp.149-154
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• 2007

Nanoimprint lithography (NIL) is useful technique because of its low cost and high throughput capability for the fabrication of sub-micrometer patterns which has potential applications in micro-optics, magnetic memory devices, bio sensors, and photonic crystals. Usually, a chemical surface treatment of the stamp is needed to ensure a clean release after imprinting and to protect the expensive original master against contamination. Meanwhile, adhesion promoter between resin and substrate is also important in the nanoscale pattern. In this work, we have investigated the effect of surface treatment using silane coupling agent as release layer and adhesion promoter for UV-Nanoimprint lithography. Uniform SAM (self-assembled monolayer) could be fabricated by vapor deposition method. Vapor phase process eliminates the use of organic solvents and greatly simplifies the handling of the sample. It was also proven that 3-acryloxypropyl methyl dichlorosilane (APMDS) could strongly improve the adhesion force between resin and substrate compared with common planarization layer such as DUV-30J or oxygen plasma treatment.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.15 no.12
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• pp.7292-7301
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• 2014

With the development of IT Info-Communications technology, the vehicle with a combination of wireless-communication technology has resulted in significant research into the convergence of the component of existing traffic with information, electronics and communication technology. Intelligent Vehicle Communication is a Machine-to-Machine (M2M) concept of the Vehicle-to-Vehicle. The Vehicle-to-Infrastructure communication consists of safety and the ease of transportation. Security technologies must precede the effective Intelligent Vehicle Communication Structure, unlike the existing internet environment, where high-speed vehicle communication is with the security threats of a wireless communication environment and can receive unusual vehicle messages. In this paper, the Vehicle Identification number between the V2I and the secure message communication protocol was proposed using hash functions and a time stamp, and the validity of the vehicle was assessed. The proposed system was the performance evaluation section compared to the conventional technique at a rate VPKI aspect showed an approximate 44% reduction. The safety, including authentication, confidentiality, and privacy threats, were analyzed.