• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.391-395
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• 2002

This paper described about the ultra-precision profile measurement of aspheric surfaces using contact probing technique. A contact probe has been designed as a sensing device to obtain measuring resolutions in nanometer regime utilizing a leaf spring mechanism and a capacitive-type sensor. The contact probe is attached on the z-axis during measurement while aspheric objects are supported on the single point diamond turning machine(SPDTM). The machine xz-axis motions are monitored by a set of two orthogonal plane mirror type laser interferometers. Experimental results show that the contact probing technique developed of On-machine Measurement System in this investigation is capable of providing a repeatability of 20 nanometers with a $\pm$20 uncertainty of 300 nanometers.

• 한국정밀공학회지
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• 제23권5호
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• pp.44-50
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• 2006

This paper describs about the technique of ultra-precision machining for an infrared(IR) camera aspheric mirror. A 200 mm diameter aspheric mirror was fabricated by SPDTM(Single Point Diamond Turning Machine). Aluminum alloy as mirror substrates is known to be easily machined, but not polishable due to its ductility. Aspheric large reflector without a polishing process, the surface roughness of 5 nm Ra, and the form error of ${\lambda}/2\;({\lambda}=632.8\;nm)$ for reference curved surface 200 mm has been required. The purpose of this research is to find the optimum machining conditions for cutting reflector using Al6061-T651 and apply the SPDTM technique to the manufacturing of ultra precision optical components of Al-alloy aspheric reflector. The cutting force and the surface roughness are measured according to each cutting conditions feed rate, depth of cut and cutting speed, using diamond turning machine to perform cutting processing. As a result, the surface roughness is good when feed rate is 1mm/min, depth of cut $4{\mu}m$ and cutting speed is 220 m/min. We could machined the primary mirror for IR camera in diamond machine with a surface roughness within $0.483{\mu}m$ Rt on aspheric.

• 한국기계가공학회지
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• 제6권4호
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• pp.50-56
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• 2007

This study aims to find the optimal cutting conditions, when are IR Detection device HgCdTe is machined with diamond tool of diamond turning machine. Machining technique for HgCdTe with single point diamond turning tool is reported in this paper. The main factors influencing the machined surface quality are discovered and regularities of machining process are drawn. It has been found HgCdTe has more and more important applications in the field of modern optics. The purpose of our research is to find the optimum machining conditions for ductile cutting of HgCdTe and apply the SPDT technique to the manufacturing of ultra precision optical components of brittle materials.

• 한국정밀공학회지
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• 제23권6호
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• pp.7-13
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• 2006

• 한국정밀공학회지
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• 제24권2호
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• pp.19-24
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• 2007

• 한국정밀공학회지
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• 제24권2호
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• pp.25-32
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• 2007