• Transactions on Electrical and Electronic Materials
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• 제14권3호
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• pp.139-142
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• 2013

Silicon nanowire (SiNW) silicon-oxide-nitride-oxide-silicon (SONOS) flash memory devices were fabricated and their electrical characteristics were analyzed. Compared to planar SONOS devices, these SiNW SONOS devices have good program/erase (P/E) characteristics and a large threshold voltage ($V_T$) shift of 2.5 V in 1ms using a gate pulse of +14 V. The devices also show excellent immunity to short channel effects (SCEs) due to enhanced gate controllability, which becomes more apparent as the nanowire width decreases. This is attributed to the fully depleted mode operation as the nanowire becomes narrower. 3D TCAD simulations of both devices show that the electric field of the junction area is significantly reduced in the SiNW structure.

• JSTS:Journal of Semiconductor Technology and Science
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• 제14권5호
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• pp.566-571
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• 2014

Channel-stacked 3D NAND flash memory is very promising candidate for the next-generation NAND flash memory. However, there is an inherent issue on cell size variation between stacked channels due to the declined etch slope. In this paper, the effect of the cell variation on the incremental step pulse programming (ISPP) characteristics is studied with 3D TCAD simulation. The ISPP slope degradation of elliptical channel is investigated. To solve that problem, a new programming method is proposed, and we can alleviate the $V_T$ variation among cells and reduce the total programming time.

• 한국정보통신학회:학술대회논문집
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• 한국정보통신학회 2014년도 추계학술대회
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• pp.773-776
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• 2014

본 연구에서는 채널 길이와 폭의 변화에 따른 실리콘 나노와이어 MOSFET 소자의 아날로그 특성을 비교 분석 하였다. 측정 온도는 $30^{\circ}C$, $50^{\circ}C$, $75^{\circ}C$, $100^{\circ}C$이다. 사용된 소자의 폭은 20nm, 30nm, 80nm, 130nm 와 길이는 250nm, 300nm, 250nm, 500nm을 사용하였다. 소자의 아날로그 특성은 이동도, 트랜스컨덕턴스, Early 전압, 전압이득, 드레인 전류 이다. 이동도는 폭이 증가함에 따라 증가하고 길이와 온도가 증가할수록 감소한다. 트랜스 컨덕턴스는 폭이 증가하면 증가한다. Early 전압은 길이와 온도가 증가함에 따라 증가하고 폭이 증가함에 따라 감소한다. 따라서 이득은 폭의 감소와 길이가 증가함에 따라 증가하고 온도가 증가함에 따라 감소하는 것을 알 수 있었다.