Study on the mechanism and air flow of SMIF (Standard Mechanical Interface) to remove fluid particles at Semiconductor (반도체 유동성 미세먼지 제거를 위한 SMIF(Standard Mechanical InterFace) 내부 기류 및 Mechanism 연구)
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- Proceedings of the Korean Society of Precision Engineering Conference
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- 2012.05a
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- pp.465-466
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- 2012