• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.545-545
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• 2008

Poly-Si is an essential material for floating gate in NAND Flash memory. To fabricate this material within region of floating gate, chemical mechanical polishing (CMP) is commonly used process for manufacturing NAND flash memory. We use colloidal silica abrasive with alkaline agent, polymeric additive and organic surfactant to obtain high Poly-Si to SiO2 film selectivity and reduce surface defect in Poly-Si CMP. We already studied about the effects of alkaline agent and polymeric additive. But the effect of organic surfactant in Poly-Si CMP is not clearly defined. So we will examine the function of organic surfactant in Poly-Si CMP with concentration separation test. We expect that surface roughness will be improved with the addition of organic surfactant as the case of wafering CMP. Poly-Si wafer are deposited by low pressure chemical vapor deposition (LPCVD) and oxide film are prepared by the method of plasma-enhanced tetra ethyl ortho silicate (PETEOS). The polishing test will be performed by a Strasbaugh 6EC polisher with an IC1000/Suba IV stacked pad and the pad will be conditioned by ex situ diamond disk. And the thickness difference of wafer between before and after polishing test will be measured by Ellipsometer and Nanospec. The roughness of Poly-Si film will be analyzed by atomic force microscope.

• 방사성폐기물학회지
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• 제15권1호
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• pp.83-90
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• 2017

사용후핵연료 파이로프로세싱에서는 방사성 희토류 염화물($RECl_3$)을 함유한 LiCl-KCl 공융염폐기물이 발생되며, 핫셀시설에서 운영을 목적으로 단순한 형태의 공융염폐기물 처리공정을 개발하는 것이 필요하다. 본 연구에서는, LiCl-KCl 공융염폐기물 내 희토류 핵종 분리/고화공정의 단순화를 목적으로 $Li_2O-Al_2O_3-SiO_2-B_2O_3$계의 무기합성매질을 이용하여 LiCl-KCl 공융염 내 희토류 핵종(Nd)을 분리한 후 분리생성물을 바로 고화하는 시험을 실시하였다. 공융염 내 희토류 염화물($NdCl_3$) 대비 0.67의 무게비에 해당하는 무기합성매질의 양으로도 Nd 핵종을 98wt% 이상 분리할 수 있었고, 이 때 얻은 희토류 핵종 포집생성물은 약 50wt% 수준의 희토류 산화물 함량을 보유하고 있었으며, 이 포집생성물을 화학적 내구성이 우수한 단일상의 균질한 유리고화체로 제조할 수 있었다. 이 결과들은 LiCl-KCl 공융염폐기물 내 희토류 핵종의 분리/고화공정을 단순화하기 위한 방안수립에 활용될 수 있을 것이다.

• 분석과학
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• 제13권5호
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• pp.601-607
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• 2000

란탄은 사용후핵연료의 연소도 지표원소들 중 하나로써 이용되고 있다. $U_3Si/Al$ 사용후핵연료는 다량의 U과 Al 속에 미량의 La이 포함되어 있어 정량시 매질의 영향을 줄이기 위해 화학적 분리가 요구된다. La의 분리 및 측정을 위해 IC-ICP-MS를 이용하였으며, 우선 방사성 시료를 취급하기 위하여 유도결합 플라스마 질량분석기의 플라스마 부분 및 분리관을 방사선 차폐 글로브박스 내에 설치하였다. CG10 분리관과 ${\alpha}$-HiBA 용리액을 사용하여 U, Al, La 및 몇 가지 핵분열생성물 (Sr, Zr, Y, Mo, Ru, Pd, Rh, Cs, Ba, Ce, Pr, Nd, Sm, Eu 및 Cd)의 머무름 거동을 살펴보았다. 0.2 M ${\alpha}$-HiBA 용리액에서 U과 Al이 초기에 용출되므로 분리관과 ICP-MS의 시료분무기 사이에 3방향 밸브를 연결하여 다량의 U과 Al이 ICP-MS로 유입되지 않도록 하므로써 매질의 영향을 줄일 수 있었다. 이 조건에서 La은 약 12분 정도에 분리 및 측정이 가능하였으며, $1-10{\mu}g/L$ (ppb)의 농도범위가 측청에 적합하였고 시료양을 $200{\mu}L$ 취할 경우 La의 검출한계는 $0.25{\mu}g/L$이었다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2010년도 하계학술대회 논문집
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• pp.54-54
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• 2010

This article reports a spontaneous method for controlling the growth mode from vertically arrayed ultra-slim MgZnO nanowires to nanowalls through the Zn random motion of seeds formed by surface phase separation by Mg injection near an evaporation temperature of Zn. The random motion of single crystal MgZnO seeds with relative Zn rich phase played a vital role in the growth of the MgZnO nanowalls. The seeds were networked with increasing Zn flux compared with Mg flux and closing to the evaporation temperature of Zn on phase separation layers. We achieved fabrication of MgZnO nanowalls on various non- and conducting substrates by this advanced growth method. The MgZnO nanowalls hydrogen sensor showed an improved sensing performance compared to the MgZnO nanowires grown under the similar conditions. Based on the microstructural characterizations, the growth procedure and models for the evolution of the structure transition from MgZnO nanowires to nanowalls on the Si substrates are proposed for phased growth times.

• 한국세라믹학회지
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• 제25권1호
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• pp.59-65
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• 1988

To develop porous glass membranes used for a effective membrane-separation process, porous glasses and glass membranes were prepared from the sodium borosilicate parent glass by the phaseseparation technique and effects of heat-treatment and leaching conditions on their characteristics were investigated. The crack-free glass membranes could be fabricated from the 9.4 Na2-O-30.7 B2O3-59.2 SiO2-0.7 Al2O3(wt%) parent glass by heat-treatment at the lower temperature(550-570$^{\circ}C$) and for longer than 45 hrs for the phase separation, followed by leaching with 3N-HCl＋60% ethylene glycol solution at 90$^{\circ}C$ over 25 hrs. Porous glasses prepared in this work showed large specific surface areas(400㎡/g) and narrow pore size distribution with the mean pore radius of 14${\AA}$ enough for the application as reverse osmosis membranes. The salt-rejection efficiency and product-flux of the glass membranes heat-treated at 570$^{\circ}C$ for 80 hrs were found to be 51.8% and 270cc/㎡. hr, respectively. This result suggests that the porous glass membranes fabricated in this study could be applied for the reverse osmosis process.

• 한국세라믹학회지
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• 제25권2호
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• pp.173-183
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• 1988

Effects of oxide additives such as MoO3, MnO2 ZrO2 and Fe2O3 on the phase separation and the chemical durability of sodium borosilicate glasses which are the host of waste glasses have been investigated as the basic study on the nuclear-waste immobilization through vitrification. MoO3 and MnO2 were found to be phase separation promotors which increased the temperature as well as catalyzed nucleation and growth for the phase separation of the 10Na2-O-3OB2O3-6OSiO2 (wt%) parent glass within the immiscibility region. The glasses had the interconnected phase-separated structure as the amount of addition increased. On the other hand, ZrO2 and Fe2O3 were inhibitors which showed the reverse effects to the above promotors. It was also found that addition of MoO3 could cause the phase separaton of the 20Na2O-10B2O3-70SiO2(wt%) glass even within the miscibility region. Addition of ZrO2 and Fe2O3 increased the chemical durability of the parent glass within the immiscibility region. Within the miscibility region, however, the addition of 1.96 wt % of MoO3 increased the chemical durability considerably, while MnO2 had little effects.

• 한국세라믹학회지
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• 제29권6호
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• pp.496-504
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• 1992

Alumina tubes suitable for the support of gas separation membranes have been prepared by the slipcasting technique. These supports have the average pore size of 0.1 ${\mu}{\textrm}{m}$ within the narrow distribution. The sol-gel dipcoating process of nanoparticulate sols is very sensitive to microstructure of the support, and the coating on the inside surface of the tube is found to be more successful than on the outside surface. Nanoparticulate silica sols (0.82 mol/ι) have been synthesized by an interfacial hydrolysis reaction between TEOS and high alkaline water. When coating an alumina tube with these sols, the minimum limits of the particle size and the aging time required for forming the coated gel layer at the given pH are provided. It is optimum to coat the support with less concentrated sols stabilized through aging for the appropriate time (more than 22 days) at the lower pH (pH 2.0) for producing a reproducible crack free thin film coating in composite membranes.

• 한국세라믹학회지
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• 제23권5호
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• pp.93-101
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• 1986

Microporous glasses were prepared from the 50 $SiO_2-44$ $B_2O_3-6$ $Na_2O$(wt%) parent glass by the phase eparation technique and were characterized by SEM, BET, and Gas Adsorption methods to investigate the possiblity of their use as salt-rejection membranes for reverse osmosis. The conditions of the phase separation for the possible glass membranes were optimized for the given parent glass. The temperature and duration of heat-treatment were desired to be lower(853K) and shorter (1/2~1 hr) respectively. The specific surface areas of porous glasses prepared in this study were about 80~120$m^2$/g and their pore size distribution had a unimodal shape(peak pore radius less than 15$\AA$) It was suggested that the porous glass obtained in this work could be effective for salt-rejection in point of pore size distributions but the way to increase its surface area for the high flux must be studied.

• KSBB Journal
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• 제6권4호
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• pp.425-429
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• 1991

이상의 실험 결과로부터 다음과 같은 결과를 얻었다. 1. $TiO_2-SiO_2-AL_2O_3-B_2O_3-CaO-Na_2O$계에서 분상을 일으켰을 때 $600^{\circ}C$, 6시간 열처리시켰을 때 최대의 비표면적을 나타냈다. 2. 저온에서 열처리 시간이 증가하면 비표면적은 증가하고 고온에서는 열처리 시간이 증가하면 비표면적은 감소하다가 다시 증가한다. 3. 상분리 및 비표면적은 열처리 시간보다 열처리 온도에 더욱 민감하였다.

• 태양에너지
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• 제19권4호
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• pp.1-10
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• 1999

The phenomena of energy separation through the vortex tube was investigated experimentally, to see the effect of nozzle area ratio and partial admission rate on the energy separation and cooling capacity. The experiment was tarried out with various nozzle area ratios from 0.031 to 0.232 and partial admission rate from 0.176 to 0.956 by varying input pressure($0.2{\si\m}0.5$ MPa) and cold air mass fraction($y=0.1{\sim}1.0$). From the experimental result, we found the optimum nozzle area ratio and the effective partial admission rate for the available use and best cooling performance in given operation condition. While the maximum drop of cold air temperature was observed at around y=0.3 and $S_n=0.155$, the maximum cooling capacity was observed at around y=0.6 and $S_n=0.094$.