• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.374-375
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• 2013

Al/Ni 나노 멀티 포일은 상온에서 외부 방전 및 촉발에 따라 급속한 자기 발열 반응이 일어나는 특성을 보여, 외부 촉발을 통해 상온에서 온도를 높일 수 없는 접합이나 마이크로 수준의 미세 접합이 가능한 접합재료로서 활용이 상당히 기대되는 재료이다. 본 연구에서는 스퍼터링법을 이용하여 한 층이 20 nm 이하에서 Al과 Ni의 혼합 기준을 달리한 Al/Ni 나노 멀티 900층을 제조와 제조된 반응성 포일이 자기 발열 반응에 따른 미세구조에 대해 조사하였다. 박막의 증착은 3~10 mTorr의 공정압력 으로 Al 타겟 전류 1.7 A, Ni 타겟 전류 1.4 A로 하여 증착시간을 조절하여 제조하였다. SEM과 EDX를 통하여 Al/Ni 나노 멀티 포일의 성장구조와 각 원소의 함량을 조사하였다. XRD 미세결정구조 분석은 제조된 반응성 포일과 외부 촉발시킨 후 자기 발열 반응에 의해 형성되는 혼합 상에 대한 조사를 실시하였다. 혼합기준이 1:1의 Al/Ni 나노 멀티 포일에서 약 $980^{\circ}C$의 발열이 발생하는 것을 Pyrometer를 통해 측정하였으며, 자기 발열 반응 후의 혼합 상은 AlNi이 형성되었다. Ni rich 포일에서는 약 $730^{\circ}C$의 발열이 발생하였고, 혼합상으로 주로 AlNi이 형성되었고 Al3Ni2도 나타났으며, 반응에 참여하지 못한 Ni이 남아있는 것을 관찰하였다. Al rich 포일에서는 약 $720^{\circ}C$의 발열과 함께 AlNi, $AlNi_3$이 형성되었고 반응에 참여하지 못한 Al이 미세하게 나타났다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.112-112
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• 2008

박막형 태양전지에 관한 연구는 1954년 D.C. Reynolds 가 단결정 CdS 에서 광기전력을 발견하면서부터 시작되었다. 고효율 단결정 규소 태양전지가 간편하게 제작되고 박막형 태양전지의 수명문제가 대두되어 한때는 연구가 중단되어지기도 하였으나, 에너지 문제가 심각해지면서 값이 저렴하고 넓은 면적에 쉽게 실용화 할 수 있는 박막형 태양전지에 많은 관심을 가지게 되었다. 박막형 태양전지에 사용되는 CdS는 II-VI 족 화합물 반도체로서 에너지금지대폭이 2.42eV인 직접천이형 n-type 반도체로서 대부분의 태양광을 통과시킬 수 있으며 가시광선을 잘 투과시키고 낮은 비저항으로서 광흡수층인 CdTe/$CuInSe_2$ 등과 같이 태양전지의 광투과층(윈도레이어)으로 널리 사용되고 있다. 이러한 이종접합 박막형 태양전지의 효율을 높이기 위해선 윈도레이어 재료인 CdS 박막의 낮은 전기 비저항치와 높은 광 투과도 값이 요구되어지고 있다. CdS 박막의 제작방법으로는 spray pyrolysis법, 스크린프린팅, 소결법, puttering법, 전착법, CBD(chemical bath deposition)법 및 진공증착법 등의 여러 가지 방법들이 보고되었다. 이 중 sputtering의 경우, 다른 방법들에서는 얻기 어려운 매우 얇은 두께의 박막 증착이 가능하며, 균일성 또한 우수하다. 또한 대면적화가 용이하여 양산화 기술로는 다른 제조 방법들에 비해 많은 장점을 가지고 있다. 따라서 본 연구에서는 sputtering에 의해 증착한 CdS의 박막에 광투과도 등의 향상을 위하여 CMP( chemical mechanical polishing) 공정을 적용하여 표면 특성을 개선하고자 하였다. 그 기초적인 자료로서 CdS 박막의 CMP 공정 조건에 따른 연마율과 비균일도, 표면 특성 등을 ellipsometer, AFM(atomic force microscopy) 및 SEM(scanning electron microscope) 등을 활용 하여 분석하였다.

• Journal of Periodontal and Implant Science
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• v.34 no.1
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• pp.1-17
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• 2004

It is improtant that performing prophylaxis procedure on an infected implant surface in order to treat peri-implantitis should not change the surface roughness and composition, so that the surface can be recovered to almost same condition as initial implant surface. This thesis, therefore, studied an effect of various oral hygiene instrument on implant surface. A surface roughness measurement instrument and an infection electron microscope were used to observe a change on surface. The purpose of this study was to obtain a clinical guidelines during implant care and peri-implantitis treatment. The result were as follows 1. Ra values (surface roughness value) at experimental group 1, group 2, and group 5 were increased significantly as compared with comparison group(p<0.05). 2. When compared experimental group 1 with each experimental groups at which prohylaxis procedure was performed, mean values of Ra at experimental group 2, group 3, group 6, and group 7 were decreased significantly(p<0.05). 3. Mean value of Ra was lowest at experimental group 2, and highest at experimental group 2, and highest at experimental group 5. 4. Analysis of SEM showed that was significant surface change at experimental group 2, group 3, group 4, group 5, and group 6 as compared with comparison group(X1000). 5. Analysis fo EDX showed that a quantity of Ti on surface for experimental group 6 was very similar to that for comparison group. In conclusion, air-powder abrasive and citric acid, plastic instrument are safe methods to use for performing prophylaxis procedure on implant care or for cleaning and sterilization process on treatment of peri-implantitis, based on the result that those method did not affect implant surface roughness and Ti composition.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.312.1-312.1
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• 2014

Chalcopyrite계 화합물 반도체인 $Cu(InGa)Se_2$ (CIGS)는 직접천이형 에너지 밴드갭과 전파장 영역에 대하여 높은 광흡수계수($1{\times}$[10]^5/cm)를 가지므로 두께 $1{\sim}2{\mu}m$인 박막형태으로 고효율의 태양전지 제조가 가능하다. 또한, 박막공정의 저가 가능성을 나타내면서 전세계적으로 많은 연구와 관심을 받고 있고, 현재 상용화되어 있는 결정질실리콘 태양전지를 대체할만한 재료로 주목 받고 있다. 일반적으로, CIGS박막형 태양전지 구성은는 유리를 기판으로 하여 5개의 단위 박막인 Mo 후면전극, p형 반도체 CIGS 광흡수층, n형 반도체 CdS 버퍼층, doped-ZnO 상부 투명전극, $MgF_2$ 반사방지막으로 이루어진다. 이들 중에서 태양전지의 에너지 변환효율에 결정적인 영향을 미치는 구성된다. CIGS 광흡수층의 제조는 크게 진공법과 비진공방법으로 나뉜다. 현재까지 보고된 문헌에 따르면 CIGS 박막형 태양전지의 경우에 동시증발법으로 20.3%의 에너지 변환효율을 보였지만,는데, 이는 진공장비 특성상 공정단가가 높고 대면적화가 어렵다는 단점을 가진다. 따라서, 비진공법을 이용하여 광흡수층 제작하는 것이 기술적으로 진보할 여지가 크다고 볼 수 있다. 반면 현재 상용화되어 있는 결정질실리콘 태양전지를 대체할만한 방법으로 주목 받고 있는 비진공을 이용한 저가공정은 최근 15.5%의 에너지 변환효율이 보고 되었다. 비진공법에는 전계를 이용한 증착법 및 스프레이법으로 나뉘며, 이들 광흡수층 재료의 화학적 합성은 III족 원소인 In, Ga의 함량비에 따라 광흡수층의 에너지 밴드갭(1.04~1.5 eV) 조절이 가능하다. 따라서, 본 연구에서는 비진공법에 사용되는 CIGS재료의 화학적 합성조건을 변화시켜 III족 원소의 조성비 조절을 시도하였다. CIGS 분말 시료의 입자 형태와 크기를 FE-SEM을 이용하여 관찰하였고, 화합물의 성분비를 EDX 및 XRD 분석을 통해 Ga 함량에 따른 구조적 차이를 비교해 보았다.

• Proceedings of the KIEE Conference
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• 2002.07c
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• pp.2003-2005
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• 2002

바이오 마이크로 시스템 및 바이오 MEMS 분야, 특히 실리콘을 기질로 하는 바이오 센서 제작에서 반도체 공정 기술은 센서의 대량 생산과 초소형화를 위해서 반드시 필요한 기술이다. 그러나, 감지전극의 마이크로화에 따른 센서의 감도 및 안정성 저하 문제는 해결해야 할 과제이다. 최근, 다공질 실리콘이 갖는 대면적이 실리콘 기질과 생체 고분자 (예: 단백질, 핵산 등) 간의 결합력을 향상시킬 수 있음이 알려지면서, 바이오 센서 분야에서, 새로운 형태의 드랜스듀서 재료로서의 다공질 실리콘에 대한 논의가 활발히 전개되고 있으며 또한, ISFET (Ion-Selective Field-Effect Transistors) 와는 달리 다공질 실리콘 층은 저항이 크기 때문에 센서 제작 과정에서의 부가적인 절연막을 필요로 하지 않는다. 본 연구에서는, 백금을 증착한 다공질 실리콘 표면에 전도성 고분자로서 Polypyrrole (PPy) 필름과 생체 고분자 물질로서 Urease를 각각 전기화학적으로 흡착하였다. 다공질 실리콘 층의 형성을 위해 테플론 소재의 전기화학 전지에 불산 (49%), 에탄올 (95%), $H_2O$ 혼합 용액을 넣고 실리콘 웨이퍼에 일정시간 수 mA의 산화 전류를 흘려주었으며, 약 $200{\AA}$의 티타늄 박막과 $200{\AA}$의 백금 박막을 RF 스퍼터링하여 작업 전극을 제작하였고, 백금 박막 및 Ag를 기화 증착하여 제작한 Ag/AgCl 박막을 각각 상대 전극과 기준전극으로 하였다. 박막 전극의 표면 분석을 위해 SEM (Scanning Electron Microscopy), EDX (Energy Dispersive X-ray spectroscopy) 등을 이용하였다. 제작된 요소 센서로부터 요소 농도 범위 0.01 mmol/L ${\sim}$ 100 mmol/L에서 약 0.2 mA/decade의 감도를 얻었다.

• Korean Journal of Materials Research
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• v.34 no.5
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• pp.254-260
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• 2024

This study is to manufacture a titanium dioxide (TiO₂) photocatalyst by recycling sludge generated using titanium tetrachloride (TiCl₄) as a coagulant. Compared to general sewage, a TiCl₄ coagulant was applied to dyeing wastewater containing a large amount of non-degradable organic compounds to evaluate its performance. Then the generated sludge was dried and fired to prepare a photocatalyst (TFS). Scanning electron microscope-energy dispersive X-ray spectroscopy (SEM-EDX), X-ray diffraction (XRD), and nitrogen oxide reduction experiments were conducted to analyze the surface properties and evaluate the photoactive ability of the prepared TFS. After using titanium tetrachloride (TiCl₄) as a coagulant in the dyeing wastewater, the water quality characteristics were measured at 84 mg/L of chemical oxygen demand (COD), 10 mg/L of T-N, and 0.9 mg/L of T-P to satisfy the discharge water quality standards. The surface properties of the TFS were investigated and the anatase crystal structure was observed. It was confirmed that the ratio of Ti and O, the main components of TiO₂, accounted for more than 90 %. As a result of the nitric oxide (NO) reduction experiment, 1.56 uMol of NO was reduced to confirm a removal rate of 20.60 %. This is judged to be a photocatalytic performance similar to that of the existing P-25. Therefore, by applying TiCl₄ to the dyeing wastewater, it is possible to solve the problems of the existing coagulant and to reduce the amount of carbon dioxide generated, using an eco-friendly sludge treatment method. In addition, it is believed that environmental and economic advantages can be obtained by manufacturing TiO₂ at an eco-friendly and lower cost than before.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.12 no.1
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• pp.529-536
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• 2011

In this study, we confirmed that the SWRO(Sea Water Reverse Osmosis) production water has more hard corrosiveness than the tap water by fundamental experiment. According to the result, the target of this study was aimed at developing maintenance and anti-corrosion method. In the early stages of the research, batch tests using mild steel coupons and electrochemical experiments were applied to compare the corrosiveness between SWRO production water and the tap water. After then, two corrosion control methods for SWRO production water were applied. Liquid lime($Ca(OH)_2$) and Carbon Dioxide($CO_2$) were inserted and compared with the combination of liquid lime with phosphate corrosion inhibitor and carbon dioxide. The water qualities were evaluated through LSI(Langelier Saturation Index) and proper injection ratio was deduced by the result. Since then, simulated loop system test were performed to evaluate anti-corrosion effect depending on corrosion inhibitors. Subsequently, carbon steel pipes equipped at the loop system were detached for SEM, EDX and XRD analysis to acquire quantitative and qualitative data of the major corrosion products inside the pipes. In conclusion, the controled groups with anti-corrosion techniques applied were effective by appearing 97.4% and 90.9% of improvements in both case of liquid lime and the liquid lime with a phosphate corrosion Inhibitor. furthermore, major components of scale were iron oxides, on the other hand, protective effect of film formation by calcium carbonate($CaCO_3$) could be confirmed.

• Economic and Environmental Geology
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• v.47 no.2
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• pp.87-96
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• 2014

The objectives of this study were to characterize the physicochemical properties and mineralogy of Hwangto (yellow residual soils) from the southwestern part of Korea and to understand the soil-forming processes of the residual soils from their parent rocks. Both the yellowish residual soils as well as the unweathered and weathered parent rocks were obtained from Jangdong-ri, Donggang-myun, Naju, Jeollanam-do, Korea. The soil samples were examined to analyze the said soil's physicochemical properties such as color, pH, and particle size distribution. A scanning electron microscopy (SEM) with energy dispersive X-ray (EDX) analysis, transmission electron microscopy (TEM) and X-ray diffraction (XRD) analysis were performed in order to understand the mineralogy, chemical composition, and morphology of the soils. Two thin sections of a parent rock were analyzed to study its mineral composition. A particle size analysis of the soils indicates that the residual soil consists of mainly silt and clay (approximately 95%) and that soil textures are silty clay or silt clay loam. The soil colors of the residual soil are dark brown (7.5YR 3/4) through yellowish red (5YR 4/6). The pH of the residual soil ranges from 4.3 to 5.1. The major minerals of the parent rocks were quartz, biotite, chlorite, and plagioclase. The mineralogy of the sand fraction of the residual soil was quartz, biotite, muscovite and sanidine. The mineralogy of the silt fraction of the residual soil was quartz, biotite, muscovite, Na-feldspar, K-feldspar, and sanidine. The clay mineralogy of the soil was goethite, kaolinite, ilite, hydroxy-interlayed vermiculite(HIV), vermiculite, mica, K-feldspar and quartz. The mineral composition of the residual soil and the parent rock indicates that feldspar and mica in the parent rock weathered into illite, vermiculite and hydroxy-interlayed vermiculite(HIV), and finally changed into kaolinite and halloysite in the yellowish residual soils.

• Clean Technology
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• v.22 no.2
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• pp.132-138
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• 2016

The emission of SO₂ is inevitable in case of combustion of most fossil fuels except LNG in commercial power plant which has a bad effect on the durability of SCR catalyst. To develop a low temperature SCR catalyst which has a high NOx removal performance and excellent durability to SO₂, V₂O₅/TiO₂ catalysts were prepared by coating on the metal foam substrate with the impregnation amount of Sb₂O₃ as promotor. This study has evaluated the NOx removal performance and the durability to SO₂ on a laboratory scale atmospheric reactor and analyzed the properties of the prepared catalysts by means of porosimeter, BET, SEM (scanning electron microscope), EDX (energy dispersive x-ray spectrometer), XPS (X-ray photoelectron spectroscopy). It was found that the surface area of catalyst increased with the impregnation amount of Sb₂O₃ and the NOx removal performance showed the highest value at the 2 wt% impregnation of Sb₂O₃. This results was considered to be due to the optimum active site on the catalyst surface. And also, Sb₂O₃ impregnated catalysts presented that NOx removal performance was maintained despite the exposure to SO₂ for 5 hours. Therefore it was confirmed that metal foam SCR catalyst for low temperature could be manufactured with the optimum control of Sb₂O₃ impregnation according to the SO₂ presence or not.

• Korean Journal of Heritage: History & Science
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• v.44 no.3
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• pp.112-131
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• 2011

This article reports the results of scientific analysis using SEM-EDX, XRD, TG/DTA, performed on 5 green glaze samples of the brick and roofing tile excavated from the Sacheonwang temple site in Gyeongju in order to verify the chemical compositions and melting temperature. The glaze samples on 2 clay statues have similar chemical composition (PbO 74~81%, $SiO_2$ 14~18%) and melting temperature range ($970{\sim}1070^{\circ}C$), whereas the 2 tiles of goblin's face and 1 rhomb brick have different characteristics. Sample SC 003 (made of PbO 63~67%, $SiO_2$ 25~28%), one of the tiles of goblin's face, shows low melting temperature range (below $970^{\circ}C$), and sample SC 004 (composed of PbO 64~70%, $SiO_2$ 19~25% and melting point $970{\sim}1070^{\circ}C$), the other tile of goblin's face, shows different chemical characteristics compared with 2 clay statues. The green glaze on rhomb brick shows different composition compared with all the others from Sacheonwang temple site in that it does not show any impurity elements other than the main components (PbO 87~88%, $SiO_2$ 12~13%) with very low melting temperature range ($750{\sim}770^{\circ}C$). Surprizingly, the chemical and optical characteristics of this green-glaze on rhomb brick are very similar to that on the bricks from Yeongmyo temple site, Gyeongju. The above results indicate that raw material and manufacturing method are not same for 5 green-glaze samples from Sacheonwang temple site and therefore suggests that further study on the provenance of raw material such as lead isotope analysis is necessary. Our work will provide basic data for future reproduction study of green glazed brick of Sacheonwang temple site, Gyeongju and will also serve as a reference data for the study of raw material and manufacturing method of green glaze from other sites of cultural assets.