• Title/Summary/Keyword: SELAX

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SELAX Technology for Poly-Si TFTs Integrated with Amorphous-Si TFTs

  • Kaitoh, Takuo;Miyazawa, Toshio;Miyake, Hidekazu;Noda, Takeshi;Sakai, Takeshi;Owaku, Yoshiharu;Saitoh, Terunori
    • 한국정보디스플레이학회:학술대회논문집
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    • 2008.10a
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    • pp.903-906
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    • 2008
  • We developed the advanced LTPS (A-LTPS) manufacturing process. The a-Si TFT process was combined with selectively enlarging laser crystallization (SELAX) technology to improve the carrier mobility in the region where the peripheral circuits are to be fabricated. A 2.4-inch IPS-pro LCD panel for personal digital assistant use was successfully fabricated using the developed technology.

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