• Journal of Sensor Science and Technology
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• v.16 no.1
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• pp.39-43
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• 2007

This paper presents characteristics of surface acoustic wave (SAW) gas sensor for detecting volatile gases such as acetone, methanol, and ethanol by measuring phase shift of output signal. A delay-line by combining with a center frequency of 200 MHz was fabricated on S-T Quartz substrates. Using gas chromatography column, the selectivity of the SAW gas sensor were introduced. Experimental results, which show the phase change of output signal under the absorption of volatile gas on sensor surface, were presented. This SAW gas sensor system may be well suited for a high performance electronic nose system.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.20 no.5
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• pp.437-443
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• 2010

SAW device is widely used as band pass filters, chemical or physical sensors, and actuators. In this paper, we propose the capacitive gap measurement system with high precision using SAW device. The research process is mainly composed of theoretical and experimental part. In the theoretical part, equivalent circuit model was used to predict the SAW response by the change of load impedance. In the experimental part, commercialized capacitor was used to see the SAW response by the change of load capacitance to check the feasibility as a sensor unit. After that, experimental setup to measure and adjust the gap was made and the SAW response by the change of gap which caused the capacitance change was measured. Finally, resolution and stroke was decided compared with the signal change and basic measurement noise level.

• The Journal of the Acoustical Society of Korea
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• v.24 no.3
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• pp.160-165
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• 2005

We have developed SH (shear horizontal) surface acoustic wave (SAW) sensors for detection of the immobilization and hybridization of DNA (deoxyribonucleic acid) on the gold coated delay line of transverse SAW devices. The experiments of DNA immobilization and hybridization were performed with 15-mer oligonucleotides (probe and complementary target DNA). The sensor consists of twin SAW delay line oscillators operating at 100 MHz fabricated on $36^{\circ}$ rotated Y-cut $LiTaO_3$ piezoelectric single crystals. The relative change in the frequency of the two oscillators was monitored to detect the hybridization between target DNA and immobilized probe DNA in pH 7.4 PBS (phosphate buffered saline) solution. The measurement results showed a good response of the sensor to the mass loading effects of the DNA immobilization and hybridization with the sensitivity up to $1.55{\cal}ng/{\cal}ml/Hz$.

• Journal of Sensor Science and Technology
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• v.5 no.3
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• pp.41-48
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• 1996

We developed SAW gas sensor for monitoring SOx gas with high sensitivity. It was fabricated as a microsensor for detecting SOx gas by depositing sensing material on SAW device. As a detecting layer material, CdS was selected. Deposition of CdS in the form of thin films was carried out by the ultrasonic spray pyrolysis method using ultrasonic spray nozzle. Thin films with the uniform and large surface area for sensors were deposited. The stable pyrolysis environment provided by uniform and fine droplets formed by spray nozzle made it possible to obtain thin films with excellent quality. The minimum grain size of the CdS thin films was about 50 nm when deposited at $300^{\circ}C$. SAW gas sensors showed reasonable sensitivity and reproducibility. Further studies are required to investigate the interference of other gases to SOx gas detection.

• Journal of Sensor Science and Technology
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• v.16 no.5
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• pp.349-354
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• 2007

This paper presents characteristics of surface acoustic wave (SAW) gas sensor for detecting volatile gases such as ethanol gas by measuring the phase shift of output signal. A delay-line with a center frequency of 400 MHz was fabricated on $128^{\circ}$ Y-Z $LiNbO_{3}$ substrates. Experimental results, which showed the phase change of the output signal under the absorption of volatile gas on sensor surface, were presented. The sensitivities of SAW delay lines coated with polyurethane films were greatly increased compared to those for uncoated devices. This SAW gas sensor system may be well suited for a high sensitivity electronic nose system.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.364-364
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• 2007

This paper presents characteristics of surface acoustic wave (SAW) gas sensor for detecting volatile gases such as ethanol gas by measuring phase shift of output signal. A delay-line with a center frequency of 400MHz was fabricated on 128o Y-Z $LiNbO_3$ substrates. Experimental results, which show the phase change of output signal under the absorption of volatile gas on sensor surface, were presented. The sensitivities of SAW delay lines coated with polyurethane films are greatly increased compared to those for uncoated devices. This SAW gas sensor system may be well suited for a high sensitivity electronic nose system.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.56 no.8
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• pp.1430-1435
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• 2007

We developed a 440MHz surface acoustic wave (SAW) microsensor integrated with pressure-temperature sensors and ID tag. Two piezoelectric substrates were bonded, in which ${\sim}150\;{\mu}m$ cavity was structured. Four sides were completely sealed by JSR photoresist (PR). Pressure sensor was placed on the top substrate, whereas ill tag and temperature sensor were placed on the bottom substrate. Using network analyzer, the developed microsensor was wirelessly tested. Sharp reflection peaks with high S/N ratio, small signal attenuation, and small spurious peaks were observed. All the reflection peaks were well matched with the coupling of mode (COM) simulation results. With a 10mW RF power from the network analyzer, a ${\sim}1$ meter readout distance was observed. Eight sharp ON reflection peaks were observed for ID tag. Temperature sensor was characterized from $20^{\circ}C$ to $200^{\circ}C$. A large phase shift per unit temperature change was observed. The evaluated sensitivity was ${\sim}10^{\circ}/^{\circ}C$.

• Proceedings of the KIPE Conference
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• 2013.07a
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• pp.461-462
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• 2013

In this paper, a studied the SAW system being developed shipbuilding and plant industry with changing welding method to progress productivity. It studies a SAW system using one sensor instead previous one which is using two sensors. It suggests SAW system which has AC output with high current makes high speed welding and DC output with accurate arcing makes detailed control.

• Proceedings of the KOSOMBE Conference
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• v.1991 no.05
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• pp.98-100
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• 1991

A sensitive surface acoustic wave (SAW) sensor for the detection of odorants has been constructed by depositing different phospholipids and fatty acids on the surface of the SAW device wi th the Langmuir-Blodgett technique. The characteristics of SAW device operating at 310 MHz deposited with phosphatidylcholine were analyzed. Amyl acetate, acetoin, menthone and other organic gases showed different affinities. The identification of odorants depending on the species of lipid used for coating is discussed in terms of the similarity of the normalized resonant frequency shift pattern. Using a number of different lipid-coated SAW devices, odorants could be identified by a neural-network pattern recognition with back-propagation algorithm.

• Proceedings of the Acoustical Society of Korea Conference
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• spring
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• pp.319-322
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• 2004

본 연구에서는 DNA의 상보적인 결합을 이용하여 DNA 혼성화 반응을 감지할 수 있는 SH형 SAW 센서를 개발하였다. 측정에 사용된 DNA는 15개의 염기를 가진 올리고 뉴클레오티드를 사용하였으며 이에 대해 상보적 결합이 가능한 염기서열을 가진 것과 그렇지 않은 미스매치 형태의 DNA 올리고뉴클레오티드를 이용하여 DNA 혼성화 반응 특성을 측정하였다. SH형 SAW 센서는 압전 단결정 $LiTaO_{3}$를 사용하여 100 MHz 발진되는 형태로 제작하였으며, 센서의 지연선 위에 Ti/Au 층을 증착하여 SH기가 수식된 탐침 DNA의 고정화가 가능하게 하였다. 제작된 센서는 Au가 증착된 박막위에 탐침 DNA를 SAM 방법으로 고정화 시켰을 경우와 고정화된 탐침 DNA와 표적 DNA와의 혼성화 반응을 시키고 난 후의 센서의 주파수 변화를 각각 측정하였다. 개발된 DNA 혼성화 반응 측정용 SH형 SAW센서는 DNA 혼성화 특성에 기인한 질량하중 효과에 따른 안정적인 주파수 변화를 나타내었다.