• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1997년도 추계학술대회 논문집
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• pp.56-59
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• 1997

SAW filters of transversal type were fabricated on some piezoelectric substrates of the LN 128$^{\circ}$ Y-X, LN 64$^{\circ}$Y-X, Quartz ST-cut wafers through the simulation in which the number o: IDT and window function were changed for the required frequency, and the mask making. Their IDT spacing and width were 3 ${\mu}{\textrm}{m}$, chip size was 4.462 $\times$ 2.086 mm$^2$, and they had double electrode transversal type IDTs. In addition to pure Al electrode devices, Ti thin films having the different thicknesses was introduced between the Al electrode and the substrate for improving the power resistance strength. They had 11-12 dB insertion losses similar to those of pure Al electrode SAW filters in case of LN 128$^{\circ}$ Y-X, LN 64$^{\circ}$ Y-X, meaning that Ti thin film was not detrimental to the insertion loss and general frequency properties. The filters had the center frequencies 162MHz for LN 128$^{\circ}$ Y-X, 186MHz for 64$^{\circ}$ Y-X, and 131MHz for Quartz ST-cut substrates.

• 한국진공학회지
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• 제4권4호
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• pp.413-416
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• 1995

고주파 마그네트론 스펏터링법을 이용하여 ZnO막을 제조하고 유리기판 위에 ZnO-SAW필터를 제작하였다. ZnO막의 제조 조건은 고주파 전력 150W, 기판온도 $200^{\circ}C$, 분위기압 5mTorr 및 O2/(Ar+O2)비 50%였다. 한편 IDT(Inter-digital transducer)전극은 전극 폭을 2.56mm, 전극 거리를 2,936mm, λ/8폭을 $8mu$m로 설계하였다. 제작된 ZnO-SAW필터의 주파수 응답을 측정하기 위해 소자는 mount(TO8)에 고정시켰다. ZnO SAW필터의 통과 대역(3 dB대역폭)은 345.2~44.8 MHz로 9.6MHz의 대역 폭을 나타내었으며 중심주 파수는 40 MHz를 나타내었다. 또한 삽입 손실은 39 dB, 통과 대역에서의 리플(ripple)은 $\pm$ 0.8 dB 및 rejection은 17 dB를 나타내었다.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제54권2호
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• pp.83-90
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• 2005

In this paper, we proposed the newly design method for extracting of the saw resonator characteristic. For the parameters of the proposed equivalent model, we adjusted and optimized the variables of several functions. As verification of proposed method, we firstly designed and fabricated cellular saw resonator by using the proposed model resonator. As the simulated and measured results of the proposed design method are almost equaled, we confirmed the usefulness of this method. we knew the usefulness of this method. Finally we designed the 800MHz cellular Tx/Rx band pass filter by using this designed resonator.

• 센서학회지
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• 제16권4호
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• pp.301-306
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• 2007

AlN thin film for SAW filter application was deposited on (100) silicon wafers by reactive magnetron sputtering method. The structural characteristics were dependent on the deposition conditions such as sputtering pressure, RF power, substrate temperature, and nitrogen partial pressure. Scanning Electron Microscope (SEM), X-ray Diffraction (XRD), Electron Probe MicroAnalyzer (EPMA) and Atomic Force Microscope (AFM) have been used to find out structural properties and preferred orientation of AlN thin films. Insertion loss of SAW devices was 28.51 dB and out of band rejection was about 24 dB.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2006년도 하계종합학술대회
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• pp.597-598
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• 2006

This paper describes a development of a new $1.4{\times}1.1$ and $2.0{\times}1.4mm$ RF SAW filters made by PCB substrate instead of HTCC package, and this technology can reduce the cost of materials down to 40%. We have investigated the multi-layered PCB substrate structures and raw materials to find out the optimal flip-bonding condition between the $LiTaO_3$ wafer and PCB substrates. Also the optimal materials and processing conditions of epoxy laminating film were found out through the experiments which can reduce the bending moment caused by the difference of the thermal expansion between the PCB substrate and laminating film. The new PCB SAW filter shows good electrical and reliability performances with respect to the present SAW filters.

• 한국통신학회논문지
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• 제18권4호
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• pp.468-480
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• 1993

본 논문에서는 2개의 동일한 1-Port 형 공진기를 병렬로 근접배치시킨 이중모드 SAW 공진기의 설계를 위하여, 우선, 결합 모드이론에 의한 1-Port 형 공진기의 특성을 기초로 하여, 도파로 모델을 적용한 이중모드 SAW 공진기의 특성을 분석하였으며, 이를 이용해서 중심 주파수가 150.15MHz이고 대역폭이 80KHz인 2-Pole 및 4-Pole 협대역 필터를 설계.제작 하였다. 이중모드 SAW 필터를 설계변수를 달리하여 여러 번 제작.실험하여 실험치와 이론치를 비교함으로써, 제품 설계에 사용 가능한 실험적 설계 특성을 얻었으며, 이동통신기기에서 사용될 수 있는 헙대역 통과 필터를 구현하였다. DMS 공진기를 구성한 압전 기판으로는 높은 주파수에서도 온도변화에 의한 주파수 이동 및 물성의 변화가 적은 ST-cut quartz(수정)를 선택하였으며, 필터의 제작은 정확한 전극구조를 얻기 위하여 고해상도 사진 식각법과 전극의 수직식각특성이 우수한 이온반응 식각법(Reactive Ion Etching)을 적용하였다.

• 한국음향학회지
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• 제9권2호
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• pp.53-60
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• 1990

MSK 신호는 PSK 신호보다 좁은 주파수 대역을 차지하여 채널간 간섭을 줄을 수 있는 장점이 있지만, 고주파 대역에서는 신호를 만들기 어렵다. 본 논문에서는 탄성표면과 필터가 고주파 대역에서도 원하는 임펄스 응답과 선형 위상 특성을 얻기 용이하다는 장점을 이용하여 손쉽게 고주파 PSK 신호를 MSK 신호로 실시간 변환 처리하는 탄성표면과 PSK-MSK 변환 필터를 설계 제작하고 그특성을 고찰하였다.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2007년도 하계종합학술대회 논문집
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• pp.117-118
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• 2007

The received signal of ICS repeater is composed of BS(Base Station) and feedback signals. In this case, if the feedback signal is not rejected, system is oscillated. we use the IF signal for rejecting the feedback signal at ICS system. In general, SAW filter is used to reject the image of If signal. the use of this filter generates the system delay problems. In this paper, instead of SAW filter we use the Hilbert transform for rejecting image signal.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2010년도 추계학술대회 논문집
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• pp.537-537
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• 2010

High precision sensing is very important in various technologies. Especially, it is more important when it were applied to nano/micro meter level's sensing like AFM, storage, etc. And capacitive sensing is widely used method. To improve the measurement efficiency, many signal conditioners were studied and one of them was surface acoustic wave (SAW) device. SAW device is very widely used as a high frequency bandwidth filter. Due to the reflective characteristic of high frequency, the response of SAW device contains both propagative and reflective signal at the external impedance. In this paper, we used SAW device as signal conditioner of capacitive sensor. And high precision gap measurement was executed using capacitive load. Reference signal was reflective SAW response and the magnitude at the center frequency of SAW device by the change of impedance was checked. Finally, the attainable gap resolution was determined.

• 한국마이크로전자및패키징학회:학술대회논문집
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• 한국마이크로전자및패키징학회 2004년도 추계 기술심포지움 초록집
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• pp.45-45
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• 2004