• 한국인터넷방송통신학회논문지
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• 제14권5호
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• pp.215-221
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• 2014

본 논문에서는 RF 고전력 스트레스에 의한 SAW 디바이스의 신뢰성 분석을 위하여 향상된 내전력 시험시스템 및 시험방법을 제안하고 고장분석을 통해 고장메카니즘을 분석하였다. 광학현미경, SEM(Scanning Electron Microscope) 및 EDX(Energy Dispersive X-ray Spectro-scopy)장비를 이용하여 고장 분석한 결과, SAW 디바이스의 고장메카니즘은 고전류 밀도 및 고온 조건에서 줄열에 의한 Electromigration으로 분석하였다. Electromigration은 IDT전극에 void와 hillock을 생성하고, 그 결과로 전극이 단락과 단선되어 삽입손실이 증가하는 것이다. 제안된 내전력 시험시스템과 방법을 이용하여 450MHz CDMA용 SAW 필터의 가속수명시험을 수행하고, 아이링 모델과 와이블 분포를 이용하여 SAW 필터의 $B_{10}$수명은 98,500시간으로 추정하였다.

• 한국전기전자재료학회논문지
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• 제25권12호
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• pp.979-983
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• 2012

We proposed the ZnO thin film for a SAW filter by PLD and RF sputtering method. ZnO thin films was pre-deposited on a sapphire substrate as a seed layer by PLD method and then deposited on seed layer by RF sputtering. The surface characteristics of ZnO thin film were investigated by XRD, SEM and AFM. The minimum surface roughness was 1.92 nm and FWHM of rocking curve was $0.92^{\circ}$. We demonstrated the SAW filter with bandwidth of approximately 0.97 MHz and the center frequency of 18.72 MHz using the proposed ZnO thin film.

• 전자공학회논문지D
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• 제35D권4호
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• pp.32-39
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• 1998

Remez exchange algorithm was applied to realize an IF SAW filter for CDMA cellular phone systems. A SAW filter with withdrawal weighted transducers was simulated and then fabricated on 42.75.deg. ST-cut Quaritz wafer. Excellent agreement wasobtained between calculated andmeasured responses. Fabricated SAWfilterswere mounted on ceramic SMD package for reducing their size and volume. SAW filters were measured under matched circuit. As a result, 5 dB bandwidth of 1.32 MHz, 33dB bandwidth of 1.76 MHz, insertion loss of 13.8 dB and peak to peak ripple at passband of 0.26 dB were obtained. Linear group delay responses at passband were also obtained. These characteristics were good for practical use of IF SAW filter for CDMA system.

• Transactions on Electrical and Electronic Materials
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• 제9권1호
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• pp.33-37
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• 2008

This paper describes the development of a new $5.0{\times}3.2mm$ SAW filter bank which is consist of 12 L, C matching components and 4 SAW bare chips on PCB substrate with CSP technology. We improved the manufacturing cost by removing the ceramic package through direct flip bonding of $LiTaO_3$ SAW bare chip on PCB board after mounting L, C passive element on PCB board. After that we realized the hermitic sealing by laminating the epoxy film. To confirm the confidentiality and durability of the above method, we have obtained the optimum flip bonding & film laminating condition, and figured out material property and structure to secure the durability & moisture proof of PCB board. The newly developed super mini $5.0{\times}3.2mm$ filter bank shows the superior features than those of existing products in confidence, electrical, mechanical characters.

• E2M - 전기 전자와 첨단 소재
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• 제10권1호
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• pp.1-7
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• 1997

SAW filter has been used in mobile communication device, bandpass filter and resonator for merits )f miniaturization and high reliability. Materials for substrate mainly used single crystal such as LiNbO$_{3}$, LiTaO$_{3}$, ZnO. In this study, it was attempted that LiNbO$_{3}$ was substituted for piezoelectric ceramics(PZT4, PZT5A and PZT8) which had simple fabrication process because fabrication of crystal is difficult and it's cost is high. SAW filters were fabricated by the photolithography on piezoelectric ceramics substrates in order to compare their characteristics with LiNbO$_{3}$'s. The experimental value of center frequency was compared with theoretical one. The average difference of center frequency was 3.7%. PZT8 showed the best bandwidth properties among them. It is considered that PZT8 has higher mechanical quality factor and propagation velocity than others.

• 한국표면공학회지
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• 제42권5호
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• pp.216-219
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• 2009

A surface acoustic wave (SAW) filter structure was fabricated employing $4{\mu}m$ thick nanocrystalline diamond (NCD) and $2.2{\mu}m$ thick ZnO films on Si wafer. The NCD film was deposited in an $Ar/CH_4$ gas mixture by microwave plasma chemical vapor deposition method. The ZnO film was formed over the NCD film in an RF magnetron sputter using ZnO target and $Ar/O_2$ gas. On the top of the two layers, copper film was deposited by the RF sputter and inter digital transducer (IDT) electrode pattern (line/space : $1.5/1.5{\mu}m$) was defined by the photolithography including a lift-off etching process. The fabricated SAW filter exhibited the center frequency of 1.66 GHz and the phase velocity of 9,960 m/s, which demonstrated that a giga Hertz SAW filter can be realized by utilizing the nanocrystalline diamond thin film.

• 한국음향학회지
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• 제21권2호
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• pp.102-109
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• 2002

본 논문에서는 위드로월 (withdrawal) 가중형 SAW필터를 자동으로 최적화할 수 있는 설계도구의 개발 내용을 제시하였다. SAW 공진기에 위드로월 가중법이 적용될 경우, 향상된 대역폭 및 천이대역 특성을 구현할 수 있으며, 이러한 위드로월 가중효과를 이용하여 사다리형 위드로월 SAW필터의 최적화도구를 완성하였다. 본 설계방법의 유효성을 검증하기 위하여 RF 대역 CDMA용 TX 및 RX SAW 필터를 본 설계도구를 이용하여 최적화하였으며 실제 실험 결과, 이론과 매우 잘 일치함을 알 수 있었다.

• 한국전자파학회:학술대회논문집
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• 한국전자파학회 2003년도 종합학술발표회 논문집 Vol.13 No.1
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• pp.140-144
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• 2003

To investigate failure analysis of surface acoustic wave (SAW) filter for radio frequency, high temperature storage test was carried out. The failure criteria were insertion loss at passband and rejection level at stopband. As a result, the insertion loss at passband increase about 4 dB was due to damages of interdigital transducer (IDT). That is caused by poor adhesion between metal electrode(AI) and piezoelectric substrate and defects on a manufacturing process. This result indicates that good adhesion between electrode and ceramic substrate is important factor And also we investigated the demage factors of electrode. Screen possible of saw filter using high temperature storage test(HTOL) in the manufacturing phase be presented.

• 한국통신학회논문지
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• 제13권5호
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• pp.400-410
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• 1988

본 논문에서는 SAW TDL정합필터와 SAW 재순환 루프를 이용하여 SNR이 낮은 경우의 직접확산 방식 스펙트럼확산 통신의 수신단에서 포착 및 추적의 구분없이 동기를 수행할 수 있는 고속동기 시스템을 설계하여 그 특성을 조사하였다. 그 수신단에서 SNR이 -16dB인 신호를 입력시켰을때 이를 SAW TDL정합필터와 재순환루프를 통해 30회 순환시켜 동기신호를 추출하여 수신단의 PN코드를 동기시킬 수 있었다. 그리고 이 동기 시스템의 평균 동기 시간을 계산하였다. 그 결과 이동기 시스템이 수신된 신호의 SNR이 매우 낮은 환경하에서 정합필터만을 사용하는 동기 시스템보다 훨씬 고속으로 수신단의 PN 코드를 동기화 시킬 수 있음을 알 수 있었다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 춘계학술대회 논문집 센서 박막재료 반도체 세라믹
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• pp.141-144
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• 2003

This study proposes ZnO thin film as a piezoelectric material for SAW (surface acoustic wave) filter. The ZnO thin film with thickness $2.6{\mu}m$ was deposited (0001)-oriented sapphire by RF magnetron sputtering technique. IDTs (inter-digital transducers) electrodes were patterned upon SAW filter mask with solid finger structure unapodized using lift-off method on ZnO piezoelectric thin film. SAW propagation velocity was measured with the center frequency by HP 8753C network analyzer. A fabricated ZnO SAW filter exhibited a high propagation velocity of 5433 $^m/s$ and relatively insertion loss of -53.391dB at $\lambda=80{\mu}m$. The side-lobe attenuation of the center frequency was about 17dB. When the wavelength was $80{\mu}m$ $(\lambda/4=20{\mu}m)$, the center frequency was 67.907 MHz. $k^2$ (electromechanical coupling coefficient) was 15.84 %.