• 센서학회지
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• 제16권1호
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• pp.39-43
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• 2007

This paper presents characteristics of surface acoustic wave (SAW) gas sensor for detecting volatile gases such as acetone, methanol, and ethanol by measuring phase shift of output signal. A delay-line by combining with a center frequency of 200 MHz was fabricated on S-T Quartz substrates. Using gas chromatography column, the selectivity of the SAW gas sensor were introduced. Experimental results, which show the phase change of output signal under the absorption of volatile gas on sensor surface, were presented. This SAW gas sensor system may be well suited for a high performance electronic nose system.

• 한국소음진동공학회논문집
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• 제20권5호
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• pp.437-443
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• 2010

SAW device is widely used as band pass filters, chemical or physical sensors, and actuators. In this paper, we propose the capacitive gap measurement system with high precision using SAW device. The research process is mainly composed of theoretical and experimental part. In the theoretical part, equivalent circuit model was used to predict the SAW response by the change of load impedance. In the experimental part, commercialized capacitor was used to see the SAW response by the change of load capacitance to check the feasibility as a sensor unit. After that, experimental setup to measure and adjust the gap was made and the SAW response by the change of gap which caused the capacitance change was measured. Finally, resolution and stroke was decided compared with the signal change and basic measurement noise level.

• 한국음향학회지
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• 제24권3호
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• pp.160-165
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• 2005

본 연구에서는 DNA의 고정화 및 DNA 혼성화 반응을 감지할 수 있는 SH형 SAW 센서를 개발하였다. 고정화 및 혼성화 반응에 사용된 탐침 DNA 및 표적 DNA는 상보적 결합이 일어날 수 있는 염기서열을 가진 15-mer의 올리고뉴클레 오티드를 사용하였다. SH형 SAW 센서는 압전 단결정 $36^{\circ}\;YX\;LiTaO_3$를 사용하여 100 MHz로 발진되는 이중 지연선 형태로 제작하였다. 제작된 센서는 Au가 증착된 박막위에 고정화된 탐침 DNA와 표적 DNA와의 혼성화 반응을 시키고 난 후 센서의 주파수 변화를 측정하였으며, DNA 고정화 및 혼성화 반응은 pH 7.4의 PBS 완충용액상에서 수행하였다. 개발된 SH형 SAW센서는 $1.55 {\cal}ng/{\cal}ml/Hz$의 민감도를 가지며, DNA 혼성화 특성에 기인한 질량하중 효과에 따른 안정적인 주파수 변화를 나타내었다.

• 센서학회지
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• 제5권3호
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• pp.41-48
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• 1996

SOx 가스를 고감도로 감지할 수 있는 SAW 가스 센서를 개발하였다. 이는 SAW device 위에 SOx 가스에 감응하는 재료를 박막으로 증착함으로써 고감도의 마이크로 센서형으로 한 것이다. SOx 감응 재료로서 CdS를 선정하였으며, 이를 SAW device 위에 박막화하기 위해 초음파 분무 노즐을 이용한 분무 열분해의 박막 증착공정을 응용하였다. 초음파 분무 노즐을 통하여 생성된 균일하고 미세한 입자들은 기판위에서 안정한 열분해 환경을 조성함으로써 센서 감응막을 위한 넓은 표면적의 박막을 증착 시켰는데 기판의 온도는 $300^{\circ}C$ 내외에서 최소 50 nm수준의 결정립의 박막을 얻었다. 이렇게 하여 얻은 SAW 가스 센서는 $SO_{2}$ 가스에 감응하였으며 재현성도 보였다. 다른 가스의 존재하에서 $SO_{2}$ 가스에 대한 선택성에 관하여는 계속적인 연구가 필요하다.

• 센서학회지
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• 제16권5호
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• pp.349-354
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• 2007

This paper presents characteristics of surface acoustic wave (SAW) gas sensor for detecting volatile gases such as ethanol gas by measuring the phase shift of output signal. A delay-line with a center frequency of 400 MHz was fabricated on $128^{\circ}$ Y-Z $LiNbO_{3}$ substrates. Experimental results, which showed the phase change of the output signal under the absorption of volatile gas on sensor surface, were presented. The sensitivities of SAW delay lines coated with polyurethane films were greatly increased compared to those for uncoated devices. This SAW gas sensor system may be well suited for a high sensitivity electronic nose system.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.364-364
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• 2007

This paper presents characteristics of surface acoustic wave (SAW) gas sensor for detecting volatile gases such as ethanol gas by measuring phase shift of output signal. A delay-line with a center frequency of 400MHz was fabricated on 128o Y-Z $LiNbO_3$ substrates. Experimental results, which show the phase change of output signal under the absorption of volatile gas on sensor surface, were presented. The sensitivities of SAW delay lines coated with polyurethane films are greatly increased compared to those for uncoated devices. This SAW gas sensor system may be well suited for a high sensitivity electronic nose system.

• 전기학회논문지
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• 제56권8호
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• pp.1430-1435
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• 2007

We developed a 440MHz surface acoustic wave (SAW) microsensor integrated with pressure-temperature sensors and ID tag. Two piezoelectric substrates were bonded, in which ${\sim}150\;{\mu}m$ cavity was structured. Four sides were completely sealed by JSR photoresist (PR). Pressure sensor was placed on the top substrate, whereas ill tag and temperature sensor were placed on the bottom substrate. Using network analyzer, the developed microsensor was wirelessly tested. Sharp reflection peaks with high S/N ratio, small signal attenuation, and small spurious peaks were observed. All the reflection peaks were well matched with the coupling of mode (COM) simulation results. With a 10mW RF power from the network analyzer, a ${\sim}1$ meter readout distance was observed. Eight sharp ON reflection peaks were observed for ID tag. Temperature sensor was characterized from $20^{\circ}C$ to $200^{\circ}C$. A large phase shift per unit temperature change was observed. The evaluated sensitivity was ${\sim}10^{\circ}/^{\circ}C$.

• 전력전자학회:학술대회논문집
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• 전력전자학회 2013년도 전력전자학술대회 논문집
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• pp.461-462
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• 2013

In this paper, a studied the SAW system being developed shipbuilding and plant industry with changing welding method to progress productivity. It studies a SAW system using one sensor instead previous one which is using two sensors. It suggests SAW system which has AC output with high current makes high speed welding and DC output with accurate arcing makes detailed control.

• 대한의용생체공학회:학술대회논문집
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• 대한의용생체공학회 1991년도 춘계학술대회
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• pp.98-100
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• 1991

A sensitive surface acoustic wave (SAW) sensor for the detection of odorants has been constructed by depositing different phospholipids and fatty acids on the surface of the SAW device wi th the Langmuir-Blodgett technique. The characteristics of SAW device operating at 310 MHz deposited with phosphatidylcholine were analyzed. Amyl acetate, acetoin, menthone and other organic gases showed different affinities. The identification of odorants depending on the species of lipid used for coating is discussed in terms of the similarity of the normalized resonant frequency shift pattern. Using a number of different lipid-coated SAW devices, odorants could be identified by a neural-network pattern recognition with back-propagation algorithm.

• 한국음향학회:학술대회논문집
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• 한국음향학회 2004년도 춘계학술발표대회 논문집 제23권 1호
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• pp.319-322
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• 2004

본 연구에서는 DNA의 상보적인 결합을 이용하여 DNA 혼성화 반응을 감지할 수 있는 SH형 SAW 센서를 개발하였다. 측정에 사용된 DNA는 15개의 염기를 가진 올리고 뉴클레오티드를 사용하였으며 이에 대해 상보적 결합이 가능한 염기서열을 가진 것과 그렇지 않은 미스매치 형태의 DNA 올리고뉴클레오티드를 이용하여 DNA 혼성화 반응 특성을 측정하였다. SH형 SAW 센서는 압전 단결정 $LiTaO_{3}$를 사용하여 100 MHz 발진되는 형태로 제작하였으며, 센서의 지연선 위에 Ti/Au 층을 증착하여 SH기가 수식된 탐침 DNA의 고정화가 가능하게 하였다. 제작된 센서는 Au가 증착된 박막위에 탐침 DNA를 SAM 방법으로 고정화 시켰을 경우와 고정화된 탐침 DNA와 표적 DNA와의 혼성화 반응을 시키고 난 후의 센서의 주파수 변화를 각각 측정하였다. 개발된 DNA 혼성화 반응 측정용 SH형 SAW센서는 DNA 혼성화 특성에 기인한 질량하중 효과에 따른 안정적인 주파수 변화를 나타내었다.