• Journal of the Institute of Electronics Engineers of Korea TC
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• 제43권1호
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• pp.33-40
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• 2006

This paper presents a novel surface acoustic wave (SAW)-based pressure sensor, which is composed of single phase unidirectional transducer (SPUDT), three reflectors, and a deep etched substrate for bonding underneath the diaphragm. Using the coupling of modes (COM) theory, the SAW device was simulated, and the optimized design parameters were extracted. Finite Element Methods (FEM) was utilized to calculate the bending and stress/strain distribution on the diaphragm under a given pressure. Using extracted optimal design parameters, a 440 MHz reflective delay line on 41o YX LiNbO3 was developed. High S/N ratio, shan reflection peaks, and small spurious peaks were observed. The measured S11 results showed a good agreement with simulated results obtained from coupling-of-modes (COM) modeling and Finite Element Method (FEM) analysis.

• Korean Journal of Food Science and Technology
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• 제35권1호
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• pp.144-148
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• 2003

Volatile components were detected from domestic and imported Angelica gigas Nakai without any pretreatment using GC based on Surface Acoustic Wave (SAW) sensor. This system produced a frequency proportional to the amount of column effluent deposited on the SAW sensor. Discrimination between domestic and imported Angelica gigas Nakai was achieved through recognition of visual pattern using $VaporPrint^{TM}$ derived from frequency and chromatogram of GC-SAW sensor.

• The Journal of the Acoustical Society of Korea
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• 제9권4호
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• pp.18-32
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• 1990

Deeping on purpose, SAW device may have to function while immersed in a liquid. Those who are familiar with SAW devices would anticipate difficulty since the propagating surface waves will tend to radiate energy into the liquid and hence suffer attenuation. Thus, to design an immerable SAW device, more attention and full information about the wave properites is required to overcome the attenuation and get the highest SAW generation eficiency. Though numerical simulation, the optimal geometry of underwater SAW devices, such as optimal piezoelectric crystal cut, SAW propagation direction and nondimensional wave number(ka) is determined to get the maximum SAW excitation efficiency, the minimum attenuation in propagation and pure mode propagation for all the modes of surface wave propagation. The design technique can be appliedto an arbitrary combination of a piezoelectric layer, a substrate and a liquid medium. In this paper, PZT and PVDF layers and a steel substrate are use for the solid medium. The technique can be easily employed for the design of underwater sensors and actuators for the applications, such as sonar marine antifouling, industrial and medical uses.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 한국정밀공학회 2010년도 춘계학술대회 논문집
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• pp.557-558
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• 2010

• Transactions of the Korean Society for Noise and Vibration Engineering
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• 제20권5호
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• pp.437-443
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• 2010

SAW device is widely used as band pass filters, chemical or physical sensors, and actuators. In this paper, we propose the capacitive gap measurement system with high precision using SAW device. The research process is mainly composed of theoretical and experimental part. In the theoretical part, equivalent circuit model was used to predict the SAW response by the change of load impedance. In the experimental part, commercialized capacitor was used to see the SAW response by the change of load capacitance to check the feasibility as a sensor unit. After that, experimental setup to measure and adjust the gap was made and the SAW response by the change of gap which caused the capacitance change was measured. Finally, resolution and stroke was decided compared with the signal change and basic measurement noise level.

• Journal of Sensor Science and Technology
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• 제5권4호
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• pp.81-87
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• 1996

This paper presents the optimal design method of SAW filters with arbitrary frequency characteristics. The design program using the unconstrained nonlinear optimization method and FFT algorithm is developed for optimal design of SAW filters with arbitrary frequency characteristics. As a design example, a SAW TV IF filter with asymmetric-amplitude and nonlinear-phase frequency characteristics is designed.

• Transactions of the Society of Information Storage Systems
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• 제8권1호
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• pp.16-21
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• 2012

SAW device is widely used as filters, sensors, actuators in various technologies. And capacitive sensor is tremendously used to measure pressure, gap, etc. The application of SAW device as signal conditioner of capacitive sensor reduces noise level and enables high precision measurement. The response increase of SAW based capacitive sensor is produced just before the two capacitive electrode contacts by the existence of parasitic resistance of capacitive electrode. In this paper, we analyze the effects of parasitic resistance and propose the calibrating method using lumped component and execute the high precision gap measurement using calibrated system. And xx nm resolution and yy ${\mu}m$ stroke was attained.

• Journal of Sensor Science and Technology
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• 제19권5호
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• pp.337-341
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• 2010

In this work, the nanocrystalline ZnO/polycrystalline(poly) aluminum nitride(AlN)/ Si-layered structure was fabricated for humidity sensor applications based on surface acoustic wave(SAW). The ZnO film was used as a sensitive material layer. The ZnO and AlN(0002) were deposited by a sol-gel process and a pulse reactive magnetron sputtering, respectively. The ZnO sensitive films coated on AlN have a hexagonal wurtzite structure after the thin films annealed at $400^{\circ}C$, $500^{\circ}C$ and $600^{\circ}C$. The surface of the film exhibits sponginess and a nanometer particle size(below 50 nm). The largest shift in the frequency response was at approximately 200 kHz(the relative humidity: 10 %~90 %) for the structure annealed at $400^{\circ}C$. The effect of the change in the environmental temperature on the frequency response of the SAW humidity sensor was also investigated.

• The Journal of the Acoustical Society of Korea
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• 제16권2호
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• pp.89-94
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• 1997

A new type SO$_2$ gas sensor with a particular inorganic thin film on SAW devices was developed. The sensor consisted of twin SAW oscillators of the center frequency of 54 MHz fabricated on the LiTaO$_3$ piezoelectric single crystal. One delay line of the sensor was coated with a CdS thin film that selectively adsorbed and desorbed SO$_2$, while the other was uncoated for use as a stable reference. Deposition of the CdS thin film was carried out by the spray pyrolysis method using an ultrasonic nozzle. The sensor could measure the concentration in air less than 0.25 parts per million of SO$_2$. Stability of the sensor turned out to be as good as less than 20ppm, recovery time after each measurement was as short as 5 minutes. Repeatability of the measurement was confirmed through so many reiterated experiments. Hence, the SAW sensor developed through this work showed promising performance as a microsensing tool of SO$_2$. Further work required to improve the performance of the sensor includes enhancement of the reactivity of the CdS thin film with SO$_2$ through appropriate dopant addition, an increase of the center frequency of the SAW device.

• The Journal of Korean Institute of Communications and Information Sciences
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• 제38C권9호
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• pp.813-821
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• 2013

In this paper, a vital signal sensor based on impedance variation of resonator is presented. Proposed vital signal sensor can detect the vital signal, such as respiration and heart-beat signal. System is composed of resonator, oscillator, surface acoustic wave (SAW) filter, and power detector. The cyclical movement of a dielectric such as a human body, causes the impedance variation of resonator within the near-field range. So oscillator's oscillation frequency variation is effected on resonator's resonant frequency. SAW filter's skirt characteristic of frequency response can be transformed a small amount of frequency deviation to a large variation. Aim to enhance the existing sensor detection range, proposed sensor operates in 870 MHz ISM band, and detect respiration and heart-beat signal at distance of 120 mm.