• International Journal of Precision Engineering and Manufacturing
• /
• v.8 no.2
• /
• pp.44-48
• /
• 2007

In recent years, the size of plane substrates and semiconductor wafers has increased. As conventional contact transportation systems composed of, for example, carrier rollers, belt conveyers, and robot hands carry these longer and wider substrates, the increased weight results in increased potential for fracture. A noncontact transportation system is required to solve this problem. We propose a new noncontact transportation system combining acoustic viscous and aerostatic forces to provide damage-free transport. In this system, substrates are supported by aerostatic force and transported by acoustic viscous streaming induced by traveling wave deformation of a disk-type stator. A ring-type piezoelectric transducer bonded on the stator excites vibration. A stator with a high Q piezoelectric transducer can generate traveling vibrations with amplitude of $3.2{\mu}m$. Prior to constructing a carrying road for substrates, we clarified the basic properties of this technique and stator vibration characteristics experimentally. We constructed the experimental equipment using a rotational disk with a 95-mm diameter. Electric power was 70 W at an input voltage of 200 Vpp. A rotational torque of $8.5\times10^{-5}Nm$ was obtained when clearance between the stator and disk was $120{\mu}m$. Finally, we constructed a noncontact transport apparatus for polycrystalline silicon wafers $(150(W)\times150(L)\times0.3(t))$, producing a carrying speed of 59.2 mm/s at a clearance of 0.3 mm between the stator and wafer. The carrying force when four stators acted on the wafer was $2\times10^{-3}N$. Thus, the new noncontact transportation system was demonstrated to be effective.

• Journal of The Korean Astronomical Society
• /
• v.35 no.4
• /
• pp.159-174
• /
• 2002

Cosmological hydrodynamic simulations of large scale structure in the universe have shown that accretion shocks and merger shocks form due to flow motions associated with the gravitational collapse of nonlinear structures. Estimated speed and curvature radius of these shocks could be as large as a few 1000 km/s and several Mpc, respectively. According to the diffusive shock acceleration theory, populations of cosmic-ray particles can be injected and accelerated to very high energy by astrophysical shocks in tenuous plasmas. In order to explore the cosmic ray acceleration at the cosmic shocks, we have performed nonlinear numerical simulations of cosmic ray (CR) modified shocks with the newly developed CRASH (Cosmic Ray Amr SHock) numerical code. We adopted the Bohm diffusion model for CRs, based on the hypothesis that strong Alfven waves are self-generated by streaming CRs. The shock formation simulation includes a plasma-physics-based 'injection' model that transfers a small proportion of the thermal proton flux through the shock into low energy CRs for acceleration there. We found that, for strong accretion shocks, CRs can absorb most of shock kinetic energy and the accretion shock speed is reduced up to $20\%$, compared to pure gas dynamic shocks. For merger shocks with small Mach numbers, however, the energy transfer to CRs is only about $10-20\%$ with an associated CR particle fraction of $10^{-3}$. Nonlinear feedback due to the CR pressure is insignificant in the latter shocks. Although detailed results depend on models for the particle diffusion and injection, these calculations show that cosmic shocks in large scale structure could provide acceleration sites of extragalactic cosmic rays of the highest energy.

• The Journal of the Korea Contents Association
• /
• v.5 no.1
• /
• pp.9-17
• /
• 2005

In this paper we developed e-Leaning system based on open source software. We selected the Moodle that after compared the open source learning management systems. Moodle is LAMP(Linux, Apache, MySQL, PHP) based course management system (CMS), a software package designed to help educators create quality online courses. One of the main advantages of Moodle over other systems is a strong grounding in social constructionist pedagogy. Also we integrated Moodle and legacy systems such as streaming service, webhard service, and short message service. The system operated during one semester at college using blended learning model. We had obtained showed that the students had almost all scored quite highly as preferred learning environment through COLLES(Constructivist On-Line Learning Environment Survey) and ATTLS(Attitudes to Thinking and Learning Survey). Therefore this research showed that open source based e-Loaming system is stable and possible.