• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.215-215
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• 2012

급속한 산업의 발달은 심각한 환경오염 및 에너지 문제를 가져왔다. 이를 해결하기 위한 방안으로 수소에너지에 대한 관심이 증가하고 있으며, 수소에너지를 생산하는 방법 중 하나로 태양에너지를 원천으로 하는 광촉매(photocatalyst)에 대한 연구가 점차적으로 증가하고 있는 추세이다. 현재 광촉매로 가장 많이 사용되는 $TiO_2$의 경우, 뛰어난 광활성과 저렴한 가격, 광 안정성, 화학적 안정성을 가짐에도 불구하고, 3.2 eV라는 넓은 band gap을 가지기 때문에 385 nm 이상의 긴 파장을 갖는 가시광선은 흡수할 수 없다. 또한, 광촉매 반응과정 중 recombination으로 인한 효율의 손실이 크기 때문에 이러한 문제들을 해결하기 위해 많은 연구가 진행되어 왔다. 본 연구에서는 ICP-assisted DC magnetron sputtering 방법을 이용하여 높은 결정성을 갖는 $TiO_2$ 박막을 제조하였다. 제작된 $TiO_2$ 박막은 높은 광촉매 특성을 나타냈으며, 또한 $TiO_2$의 anatase phase와 rutile phase의 bilayer structure를 통하여 recombination을 감소시킴으로써 높은 효율을 갖는 광촉매를 제작하였다. 박막의 chemical state와 crystallinity를 확인하기 위하여 X-ray photoelectron spectroscopy와 X-ray diffractometer를 이용하여 분석을 수행하였으며, 물 분해 장치(water splitting device)를 제작하여 수소와 산소 생성시 흐르는 전류를 측정하여 광촉매 특성을 평가하였다.

• Journal of the Korean Ceramic Society
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• v.46 no.3
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• pp.263-270
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• 2009

The effect of photoelectrocatalytic (PEC) degradation for different dyes with the CNT/$TiO_2$ electrode was studied. The prepared electrode was characterized with surface properties, structural crystallinity, elemental identification, and PEC activity. The $N_2$ adsorption data showed that the composites had decreased surface area compared with the pristine CNT. This indicated the blocking of micropores on the surface of CNT, which was further supported by observation via FESEM. XRD patterns of the composites showed that the CNT/$TiO_2$ composite contained a mixing anatase and rutile phase. EDX spectra showed the presence of C, O and Ti peaks for all samples. The decomposition efifciency of the prepared electrode was evaluated by the PEC degradation of three dyes (methylene blue (MB), rhodamine B (RH.B), methyl orange (MO)). The variations of the FT-IR spectra and pH value of dye solutions were measured during the PEC system; it was found that the CNT/$TiO_2$ electrode has better PEC degradation for MB solution than that of RH.B and MO. The proposed degradation mechanism was present.

• Journal of the Korean Ceramic Society
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• v.35 no.1
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• pp.88-96
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• 1998

The structural and electrical properties of titanium dioxide(TiO2) thin films deposited on p-type (100) si and 4$^{\circ}$off(100) Si substartes by metalorganic chemical vapor deposition (MOCVD) have been studied with post rapid thermal annealing. TiO2 thin films of anatase phase were grown at 300-500$^{\circ}C$ using titanium post rapid thermal annealing at a temperature of 800$^{\circ}C$ for 30sec. rutile phase was observed in the condition of the deposition temperature over 350$^{\circ}C$ in the ambient air atmosphere and at 500$^{\circ}C$ in cacuu,. SEM and AFM study show-ed surface roughness were increased slightly from 40${\AA}$to 55${\AA}$ after annealing due to grain growth and phase transformation. From capacitane-voltage measurement of Al/TiO2./p-Si structure after annealing we obtained ideal capacitance-voltage characteristics of MOS structure with dielectric constant of 16-22 in case of (100) Si and about 30- in case of 4$^{\circ}$off(100) Si but showed the higher leakage current.

• Journal of the Korean Ceramic Society
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• v.39 no.3
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• pp.252-258
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• 2002

Transparent $TiO_2$ thin films prepared by sol-gel process using the modification of titanium(IV) alkoxide showed improved thermal stability and high refraction index. Compared to the pure $TiO_2$ film, the modified $TiO_2$ films show the increased index of refraction under proper condition at pH 2.5. Transparency of these $TiO_2$ thin films were more than 80% in the visible region. It has been demonstrated that the reaction occurs in the amorphous phase: an exchange of phase results in anatase before and after 400$^{\circ}C$, in rutile over 700$^{\circ}$C form the XRD results. The particle sizes, shapes and structures of these nanoclusters in the $TiO_2$ films have been identified through a SEM and XRD. The physical properties and structures of their powders have also been studied through a SEM, XRD, TGA and DSC. The thickness and index of refraction have been determined by the analysis of ellipsometric spectra.

• Journal of the Korean Ceramic Society
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• v.38 no.4
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• pp.331-336
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• 2001

TiOCl$_2$수용액과 암모니아수의 반응으로부터 얻은 titanium hydroxide 침전물에 대해 각각 NaOH 또한 HCl 처리를 통하여 비교적 낮은 온도에서 결정성이 우수하고, 높은 비표면적을 갖는 결정형 TiO$_2$나노분말을 제조하였다. 저온처리 조건을 변화시킴으로써 TiO$_2$분말의 결정상과 입자 모양을 제어할 수 있었는데, NaOH 처리한 다음 산처리한 분말에는 아나타제와 루틸상이 함께 형성되었으며 구형입자와 긴 스핀들 모양의 입자들로 이루어져 있었고, 비등수 처리 시에는 열처리를 통해 아나타제상의 구형 입자들을 얻을 수 있었다. Titanium hydroxide를 0.1M과 0.5M에 산처리한 분말은 모두 아나타제상을 나타내었는데, 0.1M의 분말은 구형입자로 이루어져 있었고, 0.5M의 경우는 대부분 구형입자들로 이루어져 있었지만 스핀들 모양의 입자들도 소량 관찰되었으며, 2M에 산처리한 분말은 루틸상으로서 모두 스핀들 모양의 입자들로 이루어져 있었고, 제조된 분말의 비표면적은 약 240-250$m^2$/g을 나타내었다.

• Journal of the Korean Ceramic Society
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• v.31 no.12
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• pp.1577-1587
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• 1994

TiO2 thin films with the substitution of oxygen with nitrogen were deposited on silicon substrate by metalorganic chemical vapor deposition (MOCVD) using Ti(OCH(CH3)2)4 (titanium tetraisopropoxide, TTIP) and N2O as source materials. X-ray diffraction (XRD) results indicated that the crystal structure of the deposited thin films was anatase TiO2 with only (101) plane observed at the deposition temperatures of 36$0^{\circ}C$ and 38$0^{\circ}C$, and with (101) and (200) plane at above 40$0^{\circ}C$. Raman spectroscopic results indicated that the crystal structure was anatase TiO2 in accordance with the XRD results without any rutile, fcc TiN, or hcp TiN structure. No fundamental difference was observed with temperature increase, but the peak intensity at 194.5 cm-1 increased with strong intensity at 143.0 cm-1 for all samples. The crystalline size of the films varied from 49.2 nm to 63.9 nm with increasing temperature as determined by slow-scan XRD experiments. The refractive index of the films increased from 2.40 to 2.55 as temperature increased. X-ray photoelectron spectroscopy (XPS) study showed only Ti 2s, Ti 2p, C 1s, O 1s and O 2s peaks at the surface of the film. The composition of the surface was estimated to be TiO1.98 from the quatitative analysis. In the bulk of the film Ti 2s, Ti 2p, O 1s, O 2s, N 1s and N 2s were detected, and Ti-N bonding was observed due to the substitution of oxygen with nitrogen. A satellite structure was observed in the Ti 2p due to the Ti-N bonding, and the composition of titanium nitride was determined to be about TiN1.0 from the position of the binding energy of Ti-N 2p3/2 and the quatitative analysis. The spectrum of Ti 2p energy level could be the sum of a 4, 5, or 6 Gaussian curve reconstruction, and the case of the sum of the 6 Gaussian curve reconstruction was physically most meaningful. From the results of Auger electron spectroscopy (AES), it was known that the composition was not varied significantly throughout the whole thickness of the film, and silicon oxide was not observed at the interface between the film and the substrate. The composition of the film was possible (TiO2)1-x.(TiN)x or TiO2-2xNx and in this experimental condition x was found to be about 0.21-0.16.

• Applied Chemistry for Engineering
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• v.23 no.3
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• pp.308-312
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• 2012

Nitrogen doped $TiO_2$ photocatalysts were prepared by ammonia for exploring the visible light photocatalytic activity. To explore the visible light photocatalytic activity of the nitrogen doped $TiO_2$ photocatalyst, the removal of methylene blue dye was investigated under the sunlight. SEM images showed that the flocculated particle sizes of N-doped $TiO_2$ decreased due to the reaction with ammonia. XRD patterns demonstrated that the samples calcined at temperatures up to $600^{\circ}C$ and doped with nitrogen using ammonia clearly showed rutile as well as anatase peaks. The XPS results showed that the nitrogen composition onto $TiO_2$ increased according to the reaction time with ammonia. Photocatalytic activity of the nitrogen doped $TiO_2$ was better than that of undoped $TiO_2$. Nitrogen doping onto the $TiO_2$ also affected the crystal type of $TiO_2$ photocatalyst.

• Korean Journal of Metals and Materials
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• v.49 no.8
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• pp.596-600
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• 2011

Thermal degradation behavior of a $WO_3-TiO_2$ monolithic catalyst was investigated in terms of structural, morphological, and physico-chemical analyses. The catalyst with 4 wt.% $WO_3$ contents were prepared by a wet-impregnation method, and a durability test of the catalysts were performed in a temperature range between $400^{\circ}C$ and $800^{\circ}C$ for 3 h. An increase of thermal stress decreased the specific surface area, which was caused by grain growth and agglomeration of the catalyst particles. The phase transition from anatase to rutile occurred at around $800^{\circ}C$ and a decrease in the Brønsted acid sites was confirmed by structural analysis and physico-chemical analysis. A change in Brønsted acidity can affect to the catalytic efficiency; therefore, the thermal degradation behavior of the $WO_3-TiO_2$ catalyst could be explained by the transition to a stable rutile phase of $TiO_2$ and the decrease of specific surface area in the SCR catalyst.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.213-213
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• 2009

Titanium dioxide ($TiO_2$) thin films were prepared on glass substrates by ion-assisted electron-beam evaporation with 200nm thickness and subsequently crystallized by rapid thermal annealing at the rage of $200{\sim}700^{\circ}C$ in flowing $N_2$ gas. The crystal structure of the films were examined by X-ray diffractometer. As-deposited $TiO_2$ films were amorphous. After annealing, anatase and rutile phase of $TiO_2$ films were observed together.

• Transactions of the Korean hydrogen and new energy society
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• v.22 no.4
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• pp.432-442
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• 2011

Anodized tubular $TiO_2$ electrodes (ATTEs) with three noticeably different lengths are prepared to determine their optimum length for the photo-driven activity in the reaction of Cr(VI) reduction and hydrogen evolution. The ATTEs with ethylene glycol have longer $TiO_2$ tubes (7-15.6 ${\mu}m$) than those with hydrfluoric acid (0.6-0.8 ${\mu}m$). These samples, which differ only in the length of the tubes, with a wall thickness of ca. 20 nm, consist mainly of an anatase crystalline phase after heat treatment at $650^{\circ}C$, since the anatase crystallites at the tube walls do not undergo transformation into rutile phase, due to the constraints imposed by the wall thickness. Among them, the medium size (ca. 8 ${\mu}m$) tubes provide the optimum conditions, irrespective of the light intensity, which is explained in terms of the correlation between the amount of photons and the adsorbed electron acceptors and their location. Photocatalytic Cr(VI) reduction leads to ca. 60% reduction of Cr(VI) even under 1 sun irradiation with the medium-sized anodized $TiO_2$ tubes, but only ca. 20% with the short- and long-sized tubes. For hydrogen evolution, tubes longer than 8 ${\mu}m$ do not exhibit better performance with any light intensity.