• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2009.10a
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• pp.134-134
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• 2009

원자층 증착법을 이용하여 platinum group metal(Ru, Ir, Pt). metal nitride(TaN, TiN, AlN), 그리고 metal oxide($Al_2O_3$, $TiO_2$)을 증착하고, 미세구조와 공정 변수가 내산화성, 내부식성, 저항 및 온도저항계수에 미치는 영향을 연구하였다. proto-type의 전자저항막 제조를 통해 종래의 TaN 전자저항막에 비해 우수한 내부식성 및 내산화성을 가짐을 확인하였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.322-323
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• 2005

We deposited Zinc oxide (ZnO) thin films on Ru buffer layer in order to protect the amorphous layer between ZnO and Al interface. In X-ray diffraction (XRD) pattern, it was observed that increase of (002)-orientation by the variation of annealing treatment temperature. Also, surface roughness and specific resistance were increased by annealing treatment but full width at half maximum (FWHM) was decreased. In film bulk acoustic resonators (FBARs) fabricated from these results, we finally confirmed that the resonant frequency of 0.89 GHz without its shift was measured.

• Journal of the Korean Electrochemical Society
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• v.11 no.1
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• pp.11-15
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• 2008

The composite membrane for direct methanol fuel cell (DMFC) was developed using $H_3O^+-{\beta}"-Al_2O_3$ powder and perfluorosulfonylfluroride copolymer (Nafion) resin. The perfluorosulfonylfluroride copolymer (Nafion) resin was mixed with $H_3O^+-{\beta}"-Al_2O_3$ powder and it was made to sheet form by hot pressing. The electrodes were prepared with 60 wt% PtRu/C and 60wt% Pt/C catalysts for anode and cathode, respectively. The morphology and the chemical composition of the composite membrane have been investigated by using SEM and EDXA, respectively. The composite membrane and $H_3O^+-{\beta}"-Al_2O_3$ were analyzed by using FT-IR and XRD. The methanol permeability of the composite membranes was also measured by gas chromatography (GC). The performance of the MEA containing the composite membrane (2wt% $H_3O^+-{\beta}"-Al_2O_3$) was higher than that of normal pure Nafion membrane at high operating temperature (e.g. $110^{\circ}C$), due to the homogenous distribution of $H_3O^+-{\beta}"-Al_2O_3$, which decreased the methanol permeability through the membrane and enhanced the water contents in the composite membrane.

• Clean Technology
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• v.25 no.3
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• pp.256-262
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• 2019

Hydroxylammonium nitrate (HAN)-based liquid propellants are attracting attention as environmentally friendly propellants because they are not carcinogens and the combustion gases have little toxicity. The catalyst used to decompose the HAN-based liquid propellant in a thruster must have both low temperature activity and high heat resistance. The objective of this study is to prepare an Ru/alumina/metal foam catalyst by supporting alumina slurry on the surface of NiCrAl metal foam using a washing coating method and then to support a ruthenium precursor thereon. The decomposition activity of a HAN aqueous solution of the Ru/alumina/metal foam catalyst was evaluated. The effect of the number of repetitive coatings of alumina slurry on the physical properties of the alumina/metal foam was analyzed. As the number of alumina wash coatings increased, mesopores with a diameter of about 7 nm were well-developed, thereby increasing the surface area and pore volume. It was optimal to repeat the wash coating alumina on the metal foam 12 times to maximize the surface area and pore volume of the alumina/metal foam. Mesopores were also well developed on the surface of the Ru/alumina/metal foam catalyst. It was found that the metal form itself without the active metal and alumina can promote the decomposition reaction of the HAN aqueous solution. In the case of the Ru/alumina/metal foam-550 catalyst, the decomposition onset temperature was significantly lowered compared with that of the thermal decomposition reaction, and ${\Delta}P$ could be greatly increased in the decomposition of the HAN aqueous solution. However, when the catalyst was calcined at $1,200^{\circ}C$, the catalytic activity was lowered inevitably because the surface area and pore volume of the catalyst were drastically reduced and Ru was sintered. Further research is needed to improve the heat resistance of Ru/alumina/metal foam catalysts.

• Proceedings of the Korean Vacuum Society Conference
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• 2002.02a
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• pp.100-100
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• 2002

• Proceedings of the Korean Magnestics Society Conference
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• 2000.09a
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• pp.346-347
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• 2000

• Transactions of the Korean hydrogen and new energy society
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• v.17 no.3
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• pp.293-300
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• 2006

KIER has been developing a Ru-based preferential oxidation catalysts and a novel fuel processing system to provide hydrogen rich gas to residential PEMFCs system. The catalytic activity of Ru-based catalysts was investigated at different Ru loading amount and different support structure. The obtained result indicated that 2 wt% loaded Ru-based catalyst supported on ${\alpha}-Al_2O_3$ showed high activity in low temperature range and suppressed the methanation reaction. The developed prototype fuel processor showed thermal efficiency of 78% as a HHV basis with methane conversion of 92%. CO concentration below 10 ppm in the produced gas is achieved with separate preferential oxidation unit under the condition of $[O_2]/[CO]=2.0$. The partial load operation have been carried out to test the performance of fuel processor from 40% to 80% load, showing stable methane conversion and CO concentration below 10 ppm. The durability test for the daily start-stop and 8 h operation procedure is under investigation and shows no deterioration of its performance after 50 start-stop cycles. In addition to the system design and development.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.253-253
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• 2013

본 실험에서는 전구체(Precursor)로 TMA (Tris methyl Aluminum)를 사용한 ALD (Atomic Layer Deposition)와 PEALD (Plasma Enhanced Atomic Layer Deposition) 공정 중 발생하는 입자(particle)를 ISPM (In-Situ Particle Mornitor)로 관찰하였다. ALD과 PEALD 공정에서 Al2O3 박막을 형성하기 위해서 반응가스(Reactant)로 각 각 H2O와 O2 plasma를 사용하였다. 이러한 차이로 인해서 진공 챔버(Vacuum Chamber) 안에서의 각기 다른 매커니즘에 의해서 Al2O3의 박막이 형성된다. 또한 공정 중 발생할 수 있는 파티클(Particle) 생성 매커니즘의 차이점을 가진다. ALD의 경우 전구체와 반응가스 사이에 충분한 purge가 이루어지지 않거나 dead zone이 존재할 경우 라인과 챔버 상에 잔류한 전구체와 반응가스에 의해서 불완전한 반응물로 파티클이 생성될 수 있다. 반면 PEALD 경우는 반응가스(Reactant)로 O2 plasma를 극부(localization)적으로 형성하여 박막을 형성하므로 반응가스의 잔류의 영향은 없으나 고에너지의 플라즈마에 의해서 물리적 영향에 의한 파티클이 생성될 수 있다. 공정 중 발생하는 입자(Particle)은 수율 감소와 박막의 물성에 영향을 미칠 수 있다. 그러므로 두 공정 중 발생하는 파티클을 ISPM으로 관찰하였고, 각 공정에서 형성된 박막의 두께 균일도, 표면의 형상(morphology), 화학적 조성 및 전기적 특성을 측정하였다. 이를 통해서 ALD와 PEALD의 파티클과 박막특성을 비교하였다.

• 한국정보디스플레이학회:학술대회논문집
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• 2009.10a
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• pp.235-238
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• 2009

BaMg$Al_{10}O_{17}$ (BAM) co-doped with $Eu^{2+}$ and $Mn^{2+}$ was synthesized in a solid-state reaction and their luminescence properties were investigated as functions of the concentrations of the sensitizer and activator. BAM:$Eu^{2+}$ had a broad blue emission band at 450 nm and BAM:$Mn^{2+}$ exhibited green emission at 514 nm. The energy transfer from $Eu^{2+}$ to $Mn^{2+}$ was mainly of the resonance-type via an electric dipole-quadrupole interaction. Additionally, the addition of various fluxes such as $AlF_3$ and $BaF_2$ in the synthesis improves the moist and thermal stability. This is particularly important for the phosphor in white light emitting diodes (LEDs).

• Clean Technology
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• v.16 no.1
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• pp.19-25
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• 2010

In this work, the conversion of crystalline cellulose into polyols in the presence of hydrogen was examined over noble metal (Pt, Ru, Ir, Rh, and Pd) catalysts supported on activated carbon. For comparison, Pt/${\gamma}-Al_2O_3$ and Pt/H-mordenite were also investigated. Several techniques: $N_2$ physisorption, X-ray diffraction(XRD), inductively-coupled plasma-atomic emission spectroscopy (ICP-AES), temperature-programmed reduction with $H_2$ ($H_2$-TPR) and CO chemisorption were employed to characterize the catalysts. The cellulose conversion was not strongly dependent on the types of the catalyst used. Pt/AC showed the highest yields to polyols among activated carbon-supported noble metal catalysts, viz. Pt/AC, Ru/AC, Ir/AC, Rh/AC and Pd/AC.